A directional flow nozzle for a vacuum evaporation apparatus

Abstract

The utility model discloses a directional flow guide nozzle for vacuum evaporation equipment belongs to vacuum coating technology field, including air inlet steady plate, gradually expanded steady flow plate and buffer board, the air inlet steady plate is opened with air inlet, gradually expanded steady flow plate is installed in the below of air inlet steady plate, is provided with the positioning structure between air inlet steady plate and gradually expanded steady flow plate, is opened with the transition channel that air inlet is matched in gradually expanded steady flow plate, the top of transition channel is provided with throttle gasket, is opened with through -hole on the throttle gasket, the cross -sectional area of air inlet is equal with the cross -sectional area of transition channel and is greater than the cross -sectional area of through -hole, buffer board is installed in the below of gradually expanded steady flow plate, the directional flow guide nozzle for vacuum evaporation equipment of the utility model is through multistage cooperation design, has fundamentally effectively suppressed the unevenness of the film thickness of sputtering, the defect such as spot flaw caused because of turbulence, uneven flow velocity or pulsation, has improved the coating quality and material utilization rate significantly.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum coating technology, specifically relating to a directional flow nozzle for vacuum evaporation equipment. Background Technology

[0002] Vacuum evaporation is a mainstream technology for preparing functional thin films. The process involves heating an evaporation source in a vacuum environment, causing the solid or liquid coating material to vaporize. The gaseous particles then condense on the substrate surface, depositing a uniform thin film. To achieve this, efficient and controllable transport and guidance of the generated vapor flow is crucial to the coating efficiency and quality.

[0003] In existing technologies, vacuum evaporation processes generally face the dual challenges of low material utilization and poor film quality. This stems from two main issues: firstly, the large-angle free-flowing of vapor particles leads to the deposition of large amounts of expensive materials on non-target areas such as chamber walls and baffles, resulting in significant waste; the resulting frequent chamber cleaning also reduces equipment production efficiency. Secondly, a deeper reason lies in the structural defects of existing flow channels. These simple channels cannot precisely control the vapor flow: their poor internal flow field uniformity leads to uneven outlet airflow, directly affecting film uniformity, especially noticeable on large-area substrates, where film thickness at the edges and center is difficult to guarantee; simultaneously, their single function lacks the ability to sequentially control the airflow through "acceleration-stabilization," and improper flow rates easily lead to film defects or condensation problems. More seriously, improper channel design can induce turbulence, exacerbating the condensation, accumulation, and shedding of vapor on the chamber walls, becoming a new source of particulate contamination, which, along with freely dispersed deposits, constitutes a continuous threat to product yield.

[0004] Therefore, in order to address the above-mentioned technical problems, it is necessary to provide a directional flow nozzle for vacuum evaporation equipment.

[0005] The information disclosed in this background section is intended only to enhance the understanding of the overall background of this utility model and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content

[0006] The purpose of this invention is to provide a directional flow nozzle for vacuum evaporation equipment, which can solve the problem that simple flow channels cannot finely control the vapor flow, thus affecting product yield.

[0007] To achieve the above objectives, the technical solution provided by a specific embodiment of this utility model is as follows:

[0008] A directional flow guide nozzle for a vacuum evaporation equipment includes an inlet stabilizing plate, a gradually expanding flow stabilizing plate, and a buffer plate;

[0009] An air inlet is provided on the air intake stabilizing plate;

[0010] The gradually expanding flow stabilizer is installed below the intake stabilizer, and a positioning structure is provided between the intake stabilizer and the gradually expanding flow stabilizer.

[0011] The gradually expanding flow stabilizer plate has a transition channel that matches the air inlet, and a throttling pad is provided at the top of the transition channel. The throttling pad has a through hole.

[0012] The cross-sectional area of ​​the air inlet is equal to the cross-sectional area of ​​the transition channel and greater than the cross-sectional area of ​​the through hole;

[0013] The buffer plate is installed below the gradually expanding flow stabilizer plate, and the buffer plate is provided with a Y-shaped buffer cavity that matches the transition channel.

[0014] In one or more embodiments of this utility model, the air inlet includes multiple sets of first air inlets and multiple sets of second air inlets, and the multiple sets of first air inlets and multiple sets of second air inlets are arranged in a straight line.

[0015] The first air inlet has a rectangular cross-section, and the second air inlet has a circular cross-section. The cross-sectional area of ​​the first air inlet is larger than that of the second air inlet.

[0016] In one or more embodiments of the present invention, the transition channel includes multiple sets of first transition channels and multiple sets of second transition channels, wherein the multiple sets of first transition channels are matched with multiple sets of second air inlets, and the second transition channels are matched with multiple sets of first air inlets.

[0017] Multiple sets of the first transition channels and multiple sets of the second transition channels are all connected to the interior of the Y-shaped buffer cavity.

[0018] In one or more embodiments of the present invention, the throttling pad includes a first throttling pad and a second throttling pad. A first placement groove is provided at the top of the first transition channel, and the second throttling pad is positioned inside the first placement groove. A second placement groove is provided at the top of the second transition channel, and the first throttling pad is positioned inside the second placement groove.

[0019] In one or more embodiments of this utility model, a first through hole is provided on the first throttling pad, and the cross-sectional area of ​​the first air inlet is equal to the cross-sectional area of ​​the second transition channel and greater than the cross-sectional area of ​​the first through hole.

[0020] The second throttling pad has a second through hole, and the cross-sectional area of ​​the second air inlet is equal to the cross-sectional area of ​​the first transition channel and greater than the cross-sectional area of ​​the second through hole.

[0021] In one or more embodiments of this utility model, the positioning structure includes a positioning boss disposed at the bottom of the intake stabilizing plate and a positioning groove formed at the top of the gradually expanding flow stabilizing plate, wherein the positioning boss and the positioning groove are matched.

[0022] In one or more embodiments of this utility model, a limiting plug is provided at the bottom of the positioning boss, and a limiting slot matching the limiting plug is provided on the lower end face inside the positioning groove.

[0023] In one or more embodiments of this utility model, the height of both the first air inlet and the second air inlet is 17mm.

[0024] The height of both the first and second throttling gaskets is 1.5 mm;

[0025] The height of both the first transition channel and the second transition channel is 6.5 mm.

[0026] Compared with the prior art, the directional flow nozzle of this invention for vacuum evaporation equipment, through multi-stage synergistic design, fundamentally and effectively suppresses defects such as uneven coating thickness and dot-like flaws caused by turbulence, uneven flow velocity or pulsation, and significantly improves coating quality and material utilization. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is a structural diagram of a directional flow nozzle for a vacuum evaporation equipment according to one embodiment of the present invention;

[0029] Figure 2 This is a partial cross-sectional view of a directional flow nozzle for a vacuum evaporation equipment according to an embodiment of the present invention;

[0030] Figure 3 This is a structural diagram of a gradually expanding flow stabilizer plate for a directional flow nozzle used in a vacuum evaporation equipment according to one embodiment of the present invention.

[0031] Figure 4 This invention relates to a directional flow nozzle for a vacuum evaporation deposition equipment, as described in one embodiment of the present invention. Figure 4 Enlarged view of point A in the middle;

[0032] Figure 5This is a structural diagram of the first throttling gasket of a directional flow guide nozzle for a vacuum evaporation equipment according to an embodiment of the present invention;

[0033] Figure 6 This is a structural diagram of the second throttling gasket of a directional flow nozzle for a vacuum evaporation equipment according to one embodiment of the present invention.

[0034] Explanation of key figure labels:

[0035] 10. Intake stabilizer plate; 11. First air intake; 12. Second air intake; 13. Positioning boss; 14. Limiting block; 20. Gradually expanding flow stabilizer plate; 21. First transition channel; 211. First placement slot; 22. Second transition channel; 221. Second placement slot; 23. Limiting slot; 24. Positioning groove; 30. Buffer plate; 31. Y-shaped buffer cavity; 40. First throttling gasket; 41. First through hole; 50. Second throttling gasket; 51. Second through hole. Detailed Implementation

[0036] To enable those skilled in the art to better understand the technical solutions in this disclosure, the technical solutions in the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments in this disclosure, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this disclosure.

[0037] like Figures 1-6 As shown, a directional flow nozzle for a vacuum evaporation equipment in one embodiment of the present invention includes an inlet stabilizing plate 10, a gradually expanding flow stabilizing plate 20, and a buffer plate 30. The evaporation source is located above the inlet stabilizing plate 10, and the product is located below the buffer plate 30.

[0038] like Figure 2 As shown, the intake stabilizing plate 10 has multiple sets of first air inlets 11 and multiple sets of second air inlets 12 arranged in a straight line. The height of the first air inlets 11 and the second air inlets 12 is 17 mm, which are used to collect the vapor flow from the evaporation source. The cross-section of the first air inlet 11 is rectangular, and the cross-section of the second air inlet 12 is circular to reduce flow resistance.

[0039] The gradually expanding flow stabilizer 20 is installed below the intake stabilizing plate 10, and a positioning structure is provided between the intake stabilizing plate 10 and the gradually expanding flow stabilizer 20. The positioning structure includes a positioning boss 13 located at the bottom of the intake stabilizing plate 10 and a positioning groove 24 formed at the top of the gradually expanding flow stabilizer 20. The positioning boss 13 can be embedded into the interior of the positioning groove 24 to achieve initial positioning. A limiting block 14 is provided at the bottom of the positioning boss 13, and a limiting slot 23 matching the limiting block 14 is formed on the lower end face inside the positioning groove 24. The limiting block 14 is inserted into the interior of the limiting slot 23 to achieve a secondary positioning effect. This ensures a stable positioning between the intake stabilizing plate 10 and the gradually expanding flow stabilizer 20, preventing shaking and ensuring safe and reliable use.

[0040] like Figures 2-4 As shown, the gradually expanding flow stabilizer 20 has multiple sets of first transition channels 21 and multiple sets of second transition channels 22. Each set of first transition channels 21 corresponds to a set of second air inlets 12, and each set of second transition channels 22 corresponds to a set of first air inlets 11. The height of both the first transition channels 21 and 22 is 6.5 mm. A first placement groove 211 is formed at the top of the first transition channel 21, and a second throttling gasket 50 is positioned inside the first placement groove 211. Similarly, a second placement groove 221 is formed at the top of the second transition channel 22, and a first throttling gasket 40 is positioned inside the second placement groove 221. The height of both the first throttling gasket 40 and the second throttling gasket 50 is 1.5 mm.

[0041] Among them, such as Figure 5 and Figure 6 As shown, the first throttling gasket 40 has a first through hole 41, and the cross-sectional area of ​​the first air inlet 11 is equal to and greater than the cross-sectional area of ​​the second transition channel 22. The second throttling gasket 50 has a second through hole 51, and the cross-sectional area of ​​the second air inlet 12 is equal to and greater than the cross-sectional area of ​​the first transition channel 21. The first through hole 41 and the second through hole 51 constitute the throat with the smallest cross-sectional area in the entire flow channel. When the airflow passes through this throat, according to the Venturi effect, the flow velocity will increase sharply, forming a high-speed jet. At the same time, the intense shearing action can effectively disperse the clusters in the airflow, achieving full mixing and homogenization of the gas, which is a key step in obtaining uniform coating quality.

[0042] The buffer plate 30 is installed below the gradually expanding flow stabilizer 20, and a Y-shaped buffer cavity 31 is provided on the buffer plate 30. Multiple sets of first transition channels 21 and multiple sets of second transition channels 22 are all connected to the interior of the Y-shaped buffer cavity 31.

[0043] The first transition channel 21 and the multiple sets of second transition channels 22 are designed to gradually expand smoothly from the throat. Their function is to smoothly decelerate the high-speed airflow from the throat, convert some of the kinetic energy into pressure energy, and further smooth out the small turbulence generated by acceleration, so as to prepare the airflow to enter the Y-shaped buffer cavity 31.

[0044] In addition, the Y-shaped buffer chamber 31 is designed with a volume much larger than the upstream flow channel, and its function is like an "air container". After the airflow from the diffuser section enters this chamber, it undergoes sufficient expansion, the flow velocity is significantly reduced, and the flow pattern tends to stabilize. Finally, a flow of air with uniform velocity and stable direction is ejected downward from the nozzle outlet.

[0045] The cross-sectional area of ​​the first air inlet 11 is larger than that of the second air inlet 12. In the initial stage, the vapor flow preferentially enters the cavity through the rectangular first air inlet 11, which has a stronger flow capacity, and flows out through the main outlet. When the vapor deposition process dominated by this air source is nearing its end, the airflow can be automatically or by design switched to the circular second air inlet 12 to continue feeding material, thereby effectively extending the stable vapor deposition time and improving material utilization.

[0046] In operation, during the initial stage, the vapor flow preferentially enters the cavity through the first inlet 11, which has a stronger flow capacity. Upon passing through the first throttling gasket 40, the gas flow cross-sectional area of ​​the first through-hole 41 is much smaller than that of the inlet section. This design forces a sharp reduction in the cross-sectional area of ​​the vapor flow at this point, thereby achieving a rapid increase in velocity and thorough shear mixing based on fluid dynamics principles, achieving a core homogenization effect on the airflow. The high-speed airflow, accelerated by the first through-hole 41, does not directly enter the Y-shaped buffer cavity 31, but first enters the second transition channel 22. This design allows the airflow, which has just undergone intense acceleration, a brief period of stabilization, allowing its velocity distribution to become more balanced and the flow pattern more stable. The stabilized airflow, having completed the transition, finally enters a unique sequentially fed Y-shaped buffer cavity 31 and is ejected downwards. When the vapor deposition process dominated by this gas source nears its end, the airflow can automatically or through design switch to the second inlet 12 – second throttling gasket 50 – first transition channel 21 – Y-shaped buffer cavity 31 to continue feeding, thereby effectively extending the stable vapor deposition time and improving material utilization. The airflow expands and decelerates within the Y-shaped buffer cavity 31 due to changes in the flow area, achieving final stabilization and ensuring the uniformity and stability of the output airflow.

[0047] The directional flow nozzle for vacuum evaporation equipment of this invention, through multi-stage synergistic design, fundamentally and effectively suppresses defects such as uneven coating thickness and dot-like flaws caused by turbulence, uneven flow velocity, or pulsation, and significantly improves coating quality and material utilization.

[0048] It will be apparent to those skilled in the art that this disclosure is not limited to the details of the exemplary embodiments described above, and that this disclosure can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of this disclosure is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this disclosure. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0049] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A directional flow nozzle for a vacuum evaporation deposition equipment, characterized in that, include: An air intake stabilizing plate, wherein an air intake port is provided on the air intake stabilizing plate; A gradually expanding flow stabilizer plate is installed below the intake stabilizing plate, and a positioning structure is provided between the intake stabilizing plate and the gradually expanding flow stabilizer plate. The gradually expanding flow stabilizer plate has a transition channel that matches the air inlet, and a throttling pad is provided at the top of the transition channel. The throttling pad has a through hole. The cross-sectional area of ​​the air inlet is equal to the cross-sectional area of ​​the transition channel and greater than the cross-sectional area of ​​the through hole; A buffer plate is installed below the gradually expanding flow stabilizer plate, and the buffer plate is provided with a Y-shaped buffer cavity that matches the transition channel.

2. The directional flow nozzle for vacuum evaporation equipment according to claim 1, characterized in that, The air inlet includes multiple sets of first air inlets and multiple sets of second air inlets, all of which are arranged in a straight line. The first air inlet has a rectangular cross-section, and the second air inlet has a circular cross-section. The cross-sectional area of ​​the first air inlet is larger than that of the second air inlet.

3. The directional flow nozzle for vacuum evaporation equipment according to claim 2, characterized in that, The transition channel includes multiple sets of first transition channels and multiple sets of second transition channels. The multiple sets of first transition channels are matched with multiple sets of second air inlets, and the second transition channels are matched with multiple sets of first air inlets. Multiple sets of the first transition channels and multiple sets of the second transition channels are all connected to the interior of the Y-shaped buffer cavity.

4. The directional flow nozzle for vacuum evaporation equipment according to claim 3, characterized in that, The throttling pad includes a first throttling pad and a second throttling pad. A first placement groove is provided at the top of the first transition channel, and the second throttling pad is positioned inside the first placement groove. A second placement groove is provided at the top of the second transition channel, and the first throttling pad is positioned inside the second placement groove.

5. The directional flow nozzle for vacuum evaporation equipment according to claim 4, characterized in that, The first throttling pad has a first through hole, and the cross-sectional area of ​​the first air inlet is equal to the cross-sectional area of ​​the second transition channel and greater than the cross-sectional area of ​​the first through hole. The second throttling pad has a second through hole, and the cross-sectional area of ​​the second air inlet is equal to the cross-sectional area of ​​the first transition channel and greater than the cross-sectional area of ​​the second through hole.

6. The directional flow nozzle for vacuum evaporation equipment according to claim 1, characterized in that, The positioning structure includes a positioning boss located at the bottom of the intake stabilizing plate and a positioning groove located at the top of the gradually expanding flow stabilizing plate, wherein the positioning boss and the positioning groove are matched.

7. The directional flow nozzle for vacuum evaporation equipment according to claim 6, characterized in that, The bottom of the positioning boss is provided with a limiting block, and the lower end face inside the positioning groove is provided with a limiting slot that matches the limiting block.

8. The directional flow nozzle for vacuum evaporation equipment according to claim 4, characterized in that, The height of both the first and second air inlets is 17mm. The height of both the first and second throttling gaskets is 1.5 mm; The height of both the first transition channel and the second transition channel is 6.5 mm.

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