Graphite boat card point, graphite boat sheet and graphite boat

Abstract

The utility model provides a graphite boat clamping point, graphite boat piece and graphite boat. The graphite boat clamping point includes base and two clamping point caps, two clamping point caps symmetry sets up on the both end surfaces of base along its axial direction, wherein, the clamping point cap and base are connected through the connecting piece, the coaxial setting of clamping point cap, base and connecting piece, the end surface of base, the surface of adjacent of clamping point cap and connecting piece enclose the clamping groove, and the two side walls of clamping groove are arc, and the clamping point cap has the buffer slope, and the end surface of base has the included angle with buffer slope. The above technical scheme can effectively reduce the impact intensity of battery silicon wafer to graphite boat clamping point, reduce the proportion of dropping piece, fragment and clamping point scorching, can prolong the service life of clamping point simultaneously, and reduce the proportion of chromatic aberration degradation.

Description

Technical Field

[0001] This utility model relates to the field of solar cell technology, specifically to a graphite boat locking point, a graphite boat sheet, and a graphite boat. Background Technology

[0002] In the manufacturing process of silicon-based solar cells, thin-film deposition processes are typically used to coat silicon wafers. For example, PECVD (Plasma Enhanced Chemical Vapor Deposition) can be used to vacuum coat silicon nitride onto the silicon wafer, forming an anti-reflective layer (passivation layer) on the wafer surface. During wafer coating, the uncoated silicon wafer is inserted into the wafer carrier of the PECVD vacuum coating equipment. The wafer carrier is usually a graphite boat. The uncoated silicon wafer is inserted into the graphite boat and secured with clamps. The graphite boat carrying the silicon wafer is then placed inside the cavity of the PECVD vacuum coating equipment, and the PECVD process is used to coat the silicon wafer. After coating, the graphite boat is removed from the cavity of the vacuum coating equipment, and the coated silicon wafer is detached from the graphite boat, completing the silicon wafer coating process.

[0003] The commonly used clamping point structures in existing technologies are mainly V-shaped or U-shaped structures. However, the internal dimensions of the V-shaped structure are relatively small, which can easily scratch the silicon wafer during the insertion process. At the same time, because the clamping point has a limited bearing area, it is prone to wafer falling off or breaking. Moreover, with the increase of use, the clamping point is also prone to burning. The U-shaped groove of the U-shaped clamping point lacks a ramp buffer. During insertion, the silicon wafer will hit the groove wall with a large impact force, which not only aggravates the wear of the clamping point itself and shortens its service life, but also easily causes the silicon wafer to chip or even break at the clamping point.

[0004] Therefore, optimizing the structure of the interlocking points and avoiding the inherent defects of V-shaped and U-shaped structures to effectively prevent silicon wafer damage and premature failure of the interlocking points during the insertion process is an urgent problem to be solved. Utility Model Content

[0005] This utility model aims to solve at least one of the technical problems existing in the prior art, and provides a graphite boat jamming point, a graphite boat sheet and a graphite boat, which can effectively reduce the impact force of the battery silicon wafer on the graphite boat jamming point, reduce the proportion of wafer drop, fragmentation and jamming point burning, and at the same time extend the service life of the jamming point and reduce the proportion of color difference degradation.

[0006] Firstly, this utility model provides a graphite boat locking point, comprising:

[0007] Base;

[0008] Two locking caps are symmetrically arranged on both ends of the base along its axial direction;

[0009] The locking cap and the base are connected by a connector. The locking cap, the base and the connector are coaxially arranged. The end face of the base, the adjacent surfaces of the locking cap and the connector form a locking groove. The two side walls of the locking groove are arc-shaped. The locking cap has a buffer slope. The end face of the base and the buffer slope have an angle.

[0010] In some embodiments, the base has a cylindrical structure, and the two end faces of the base along its axial direction are arc-shaped surfaces that bulge outward from the center.

[0011] In some embodiments, the locking cap further has a first end face, the center of the first end face protruding towards the connector to form an arc-shaped surface; the first end face is connected to the end face of the base through the connector; the surface of the connector forms the bottom wall of the locking groove, and the first end face and the end face of the base respectively form the two side walls of the locking groove.

[0012] In some embodiments, the stop cap further has a second end face and a transmission surface, the first end face and the second end face are parallel, the transmission surface is perpendicular to the second end face, the first end face is connected to the second end face in sequence through the buffer slope and the transmission surface, and there is a rounded transition between the first end face, the buffer slope, the transmission surface and the second end face.

[0013] In some embodiments, the width of the locking groove along the axial direction of the base ranges from 0.15 mm to 0.35 mm.

[0014] In some embodiments, the depth of the locking groove along the radial direction of the base ranges from 0.1 mm to 0.3 mm.

[0015] In some embodiments, the angle between the end face of the base and the buffer slope ranges from 30° to 70°.

[0016] In some embodiments, the height of the base along its radial direction ranges from 5 mm to 15 mm.

[0017] In some embodiments, the width of the base along its axial direction ranges from 4 mm to 6 mm.

[0018] In some embodiments, the maximum diameter of the stop cap along its radial direction ranges from 7 mm to 10 mm.

[0019] Secondly, this utility model provides a graphite boat sheet, including a boat sheet body and graphite boat locking points as described in the first aspect embodiment above; the graphite boat locking points are disposed on the boat sheet body.

[0020] Thirdly, this utility model provides a graphite boat, comprising at least two graphite boat sheets as described in the second aspect embodiment.

[0021] This utility model has the following beneficial effects:

[0022] This utility model provides a technical solution for a graphite boat retainer, a graphite boat sheet, and a graphite boat. Two retainer caps are symmetrically arranged on both ends of the base along its axial direction. The base, retainer caps, and connectors are coaxially arranged. The end face of the base, the adjacent surfaces of the retainer caps and connectors form a retaining groove, which is used to accommodate and fix the silicon wafer. The retaining groove ensures that the silicon wafer is constrained in multiple directions, thereby effectively preventing the silicon wafer from shifting, loosening, or falling off during the movement of the graphite boat in and out of the furnace during coating processes (such as PECVD), ensuring process stability and product consistency. The retainer caps have buffer slopes, which guide and buffer the silicon wafer when it is inserted into or removed from the retaining groove. The buffer slopes guide the silicon wafer smoothly into the retaining groove, reducing direct, hard impacts and greatly reducing the risk of microcracks, chips, or edge breakage caused by impacts during operation, thus improving product yield. The base has an angle between its end face and the buffer slope, ensuring that the two meet preset requirements and thus allowing the buffer slope to better achieve its buffering effect. The two side walls of the clamping groove are arc-shaped, and the silicon wafer will automatically slide towards and be positioned in the center of the clamping groove under the guidance of the arc surface. The clamping groove provides all-round buffering for the silicon wafer, which can reduce the risk of silicon wafer bumps and scratches caused by deviation to a certain extent. Attached Figure Description

[0023] Figure 1 A schematic diagram of the structure of the graphite boat locking point provided in this embodiment of the utility model;

[0024] Figure 2 for Figure 1 A cross-sectional view along the AA direction.

[0025] Figure label:

[0026] 1. Base; 2. Locking cap; 21. First end face; 22. Buffer slope; 23. Transmission surface; 24. Second end face; 3. Connector; 4. Locking groove Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only for explaining the present utility model and are not intended to limit the present utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0028] It should be noted that although functional modules are divided in the device schematic diagram and the logical order is shown in the flowchart, in some cases, the steps shown or described may be executed in a different order than the module division in the device or the order in the flowchart. In the description of this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the number itself, while "above," "below," and "within" are understood to include the number itself. The use of "first" and "second" is only for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features or the order of the indicated technical features. Unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," "setting," and "arrangement" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; a mechanical connection or an electrical connection; a direct connection or an indirect connection through an intermediate medium; or a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0029] In view of the problems existing in related technologies, this utility model aims to provide a graphite boat jamming point, a graphite boat sheet and a graphite boat, which can effectively reduce the impact force of the battery silicon wafer on the graphite boat jamming point, reduce the proportion of wafer falling off, fragments and jamming point burning, and at the same time extend the service life of the jamming point and reduce the proportion of color difference degradation.

[0030] like Figure 1 and Figure 2As shown, the graphite boat locking mechanism provided in the first aspect embodiment of this utility model includes a base 1 and two locking caps 2, which are symmetrically arranged on the two end faces of the base 1 along its axial direction. The locking caps 2 and the base 1 are connected by a connector 3. The base 1, locking caps 2, and connector 3 are coaxially arranged. The end face of the base 1, the adjacent surfaces of the locking caps 2 and connector 3 form a locking groove 4, which is used to accommodate and fix the silicon wafer. The locking groove 4 ensures that the silicon wafer is constrained in multiple directions, thereby effectively preventing the silicon wafer from shifting, loosening, or falling off during the movement of the graphite boat in and out of the furnace during coating processes (such as PECVD), ensuring process stability and product consistency. The locking caps 2 have a buffer slope 22, which acts as a guide and buffer when the silicon wafer is inserted into or removed from the locking groove 4. The buffer slope 22 guides the silicon wafer smoothly into the clamping groove 4, reducing direct, hard impacts. Specifically, it prevents the edge of the silicon wafer from directly colliding with the sharp right-angled part of the clamping cap 2, greatly reducing the risk of microcracks, chips, or edge breakage caused by impacts during operation, thus improving product yield. An angle α exists between the end face of the base 1 and the buffer slope 22. This angle α ensures that the end face of the base 1 and the buffer slope 22 meet preset requirements, thereby enabling the buffer slope 22 to achieve a buffering effect. The two side walls of the clamping groove 4 are arc-shaped, forming a gradually narrowing guide channel. Guided by the arc surface, the silicon wafer automatically slides towards and is positioned in the center of the clamping groove 4. The clamping groove 4 provides all-around buffering for the silicon wafer, reducing the risk of impacts and scratches caused by deviations to a certain extent.

[0031] In some embodiments, to ensure the accuracy of the included angle α, the base 1, the two locking caps 2, and the connector 3 can be integrally formed, with the connection points of the base 1, the two locking caps 2, and the connector 3 having a rounded transition, which avoids stress concentration and prevents sharp edges from scratching the silicon wafer.

[0032] like Figure 1 and Figure 2 As shown, in some specific embodiments of this utility model, the base 1 has a cylindrical structure. The cylindrical surface has a smooth transition, which allows thermal and mechanical stresses to be evenly distributed across the entire base. This is beneficial for improving the mechanical strength and thermal shock resistance of the locking point, extending its service life under harsh working conditions, and reducing production downtime and maintenance caused by locking point breakage.

[0033] In some embodiments, the center of both ends of the base 1 along its axial direction bulges slightly outward, making both ends of the base 1 arc-shaped. When the edge of the silicon wafer contacts the arc-shaped surface, the force on the silicon wafer is more evenly distributed along the arc surface, avoiding stress concentration in a small area and further protecting the silicon wafer.

[0034] In some embodiments, the two end faces of the base 1 along its axial direction are connected to the body of the base 1 by a rounded transition, which avoids stress concentration and prevents sharp edges from scratching the silicon wafer.

[0035] like Figure 1 and Figure 2 As shown, in some specific embodiments of this utility model, the locking cap 2 also has a first end face 21, a second end face 24, and a transmission surface 23. The first end face 21 is connected to the end face of the base 1 via a connector 3. The first end face 21, the end face of the base 1, and the surface of the connector 3 form a locking groove 4. The locking groove 4 has an overall U-shaped structure. The surface of the connector 3 serves as the bottom wall of the locking groove 4. The first end face 21 and the end face of the base 1 are parallel, and they respectively serve as the side walls of the locking groove 4. The first end face 21 and the second end face 24 are parallel, and the transmission surface 23 is perpendicular to the second end face 24. The first end face 21 is connected to the second end face 24 sequentially via a buffer slope 22 and the transmission surface 23. The silicon wafer slides into the locking groove 4 from the transmission surface 23 via the buffer slope 22, reducing the hard impact of a straight up-and-down motion and maximizing the protection of the silicon wafer. In some embodiments, the radial height of the second end face 24 is greater than the radial height of the first end face 21, and the second end face 24 and the first end face 21 are coaxially arranged, so that the overall shape of the locking cap 2 is a frustum cone.

[0036] In some embodiments, the connection between the first end face 21, the buffer slope 22, the transmission surface 23, and the second end face 24 is rounded to avoid stress concentration and prevent sharp edges from scratching the silicon wafer.

[0037] In some embodiments, the center of the first end face 21 protrudes slightly toward the connector 3, making the first end face 21 an arc-shaped surface. When the edge of the silicon wafer contacts the arc-shaped surface, the force on the silicon wafer is more evenly distributed along the arc surface, avoiding stress concentration in a narrow area and further protecting the silicon wafer.

[0038] In some embodiments, the first end face 21 and the end face of the base 1 serve as the two sidewalls of the clamping groove 4. Since both the first end face 21 and the end face of the base 1 are arc-shaped surfaces, the opening of the clamping groove 4 is approximately trumpet-shaped. This trumpet-shaped structure, composed of two arc-shaped surfaces and with a gradually narrowing opening, makes the clamping groove 4 a gradually narrowing guide channel. The silicon wafer will automatically slide towards and be positioned in the center of the clamping groove 4 under the guidance of the arc-shaped surfaces. Moreover, the raised arc-shaped surfaces can provide a smooth, seamless transition for the silicon wafer when they contact it in any direction. Even if the silicon wafer entering the clamping groove 4 is offset, the silicon wafer will contact an arc-shaped surface, not a sharp edge. This provides all-around buffering for the silicon wafer and can reduce the risk of impact and scratches caused by deviation to a certain extent.

[0039] In some specific embodiments of this utility model, the connector 3 can also be cylindrical, and the length of the connector 3 along its axial direction is the width of the locking groove 4 along the axial direction of the base 1. The width of the locking groove 4 along the axial direction of the base 1 ranges from 0.15mm to 0.35mm. Exemplarily, it can be 0.15mm, 0.16mm, 0.17mm, 0.18mm, 0.19mm, 0.20mm…0.26mm…0.35mm. Within the specified width range, it can be adjusted according to the actual situation. In some embodiments, the width of the locking groove 4 along the axial direction of the base 1 is preferably 0.26mm.

[0040] In some specific embodiments of this utility model, the diameter of the end face of the connector 3 along its axial direction ranges from 5.42mm to 6.42mm. Exemplarily, it can be 5.41mm, 5.42mm, 5.43mm, 5.44mm…5.5mm…6.42mm. Within the specified diameter range, it can be adjusted according to actual conditions. In some embodiments, the diameter of the end face of the connector 3 along its axial direction is preferably 5.5mm.

[0041] In some specific embodiments of this utility model, the depth of the locking groove 4 along the radial direction of the base 1 ranges from 0.1mm to 0.3mm. Exemplarily, it can be 0.11mm, 0.12mm, 0.13mm, 0.14mm, 0.15mm, 0.16mm…0.19mm…0.3mm. Within the specified depth range, it can be adjusted according to actual conditions. In some embodiments, the depth of the locking groove 4 along the radial direction of the base 1 is preferably 0.19mm.

[0042] In some specific embodiments of this utility model, the included angle α between the end face of the base 1 and the buffer inclined surface 22 ranges from 30° to 70°. Exemplarily, it can be 30°, 35°, 40°, 45°, 50°, 55°, 60°, 65°, or 70°. Within the specified range of included angle α, it can be adjusted according to actual conditions. By setting a suitable range of included angle α, the impact force can be effectively decomposed and guided when the silicon wafer contacts the locking cap 2, while the contact area increases and the pressure decreases, thereby transforming the collision into sliding, ultimately achieving a buffering effect to protect the silicon wafer. In some embodiments, the included angle α between the end face of the base 1 and the buffer inclined surface 22 is preferably 65°.

[0043] In some specific embodiments of this utility model, the radial height of the base 1 ranges from 5mm to 15mm, that is, the radial diameter of the base 1 ranges from 5mm to 15mm. Exemplarily, it can be 5mm, 5.5mm, 6mm, 6.5mm, 7mm, 7.5mm, 8mm…9.5mm…15mm. Within the specified height range, it can be adjusted according to actual conditions. In some embodiments, the radial height of the base 1 is preferably 9.5mm.

[0044] In some specific embodiments of this utility model, the width of the base 1 along its axial direction ranges from 4mm to 6mm. Exemplarily, it can be 4.5mm, 5mm, 5.5mm, or 6mm. Within the specified width range, it can be adjusted according to actual conditions. In some embodiments, the width of the base 1 along its axial direction is preferably 4.5mm.

[0045] In some specific embodiments of this utility model, the maximum radial diameter of the locking cap 2 is 7mm to 10mm, that is, the diameter of the second end face 24 is 7mm to 10mm. Exemplarily, it can be 7.5mm, 8mm, 8.5mm, 9mm, 9.5mm, or 10mm. Within the specified diameter range, it can be adjusted according to actual conditions. In some embodiments, the maximum radial diameter of the locking cap 2 is preferably 7.5mm.

[0046] In some specific embodiments of this utility model, the minimum radial diameter of the locking cap 2 ranges from 5.8mm to 6.8mm, that is, the diameter of the first end face 21 ranges from 5.8mm to 6.8mm. Exemplarily, it can be 5.81mm, 5.82mm, 5.83mm, 5.84mm, 5.85mm, 5.86mm, 5.87mm, 5.88mm…6.8mm. Within the specified diameter range, it can be adjusted according to actual conditions. In some embodiments, the minimum radial diameter of the locking cap 2 is preferably 5.88mm.

[0047] In some specific embodiments of this utility model, the overall length of the graphite boat locking point along its axial direction ranges from 7.3mm to 9.3mm. Exemplarily, it can be 7.3mm, 7.4mm, 7.5mm, 7.6mm…7.8mm…9.3mm. Within the specified width range, it can be adjusted according to actual conditions. In some embodiments, the overall length of the graphite boat locking point along its axial direction is preferably 7.8mm.

[0048] This invention precisely defines the dimensions of each point on the graphite boat clamping point, which firstly ensures the precise fit and stable connection between the graphite boat clamping point and the graphite boat body; secondly, enables precise positioning and stable clamping of the silicon wafer; and thirdly, guarantees the interchangeability between clamping points, facilitating maintenance.

[0049] By adopting the graphite boat jamming structure in the above technical solution, the service life of the graphite boat jamming points is significantly improved, and the scorching rate and color difference rate of the jamming points are significantly reduced. Through relevant experiments, the service life of the graphite boat jamming points has increased from 300 cycles to 700 cycles, the scorching rate of the jamming points has decreased from 0.35% to 0.01%, and the color difference rate has decreased from 0.13% to 0.02%, demonstrating significant results.

[0050] A second aspect of this utility model provides a graphite boat sheet, including a boat sheet body and graphite boat locking points as described in the first aspect embodiment above; the graphite boat locking points are disposed on the boat sheet body. This graphite boat sheet uses the graphite boat locking points provided in the first aspect embodiment, and therefore has all the beneficial effects of any of the graphite boat locking points described in the first aspect embodiment above, which will not be repeated here.

[0051] A third aspect of this utility model provides a graphite boat, comprising at least two graphite boat sheets as described in the second aspect embodiment. Other related details of the graphite boat are not repeated here, but the graphite boat in this embodiment possesses all the beneficial effects of the graphite boat sheets in the second aspect embodiment, and will not be elaborated further here.

[0052] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of this utility model, and the utility model is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of this utility model, and these modifications and improvements are also considered to be within the protection scope of this utility model.

Claims

1. A graphite boat checkpoint, characterized in that, include: Base; Two locking caps are symmetrically arranged on both ends of the base along its axial direction; The locking cap and the base are connected by a connector. The locking cap, the base and the connector are coaxially arranged. The end face of the base, the adjacent surfaces of the locking cap and the connector form a locking groove. The two side walls of the locking groove are arc-shaped. The locking cap has a buffer slope. The end face of the base and the buffer slope have an angle.

2. The graphite boat checkpoint according to claim 1, characterized in that, The base has a cylindrical structure, and the two end faces of the base along its axial direction are arc-shaped surfaces that bulge outward from the center.

3. The graphite boat checkpoint according to claim 2, characterized in that, The locking cap also has a first end face, the center of which protrudes towards the connector to form an arc-shaped surface; the first end face is connected to the end face of the base through the connector; the surface of the connector forms the bottom wall of the locking groove, and the first end face and the end face of the base respectively form the two side walls of the locking groove.

4. The graphite boat checkpoint according to claim 3, characterized in that, The checkpoint cap also has a second end face and a transmission surface. The first end face and the second end face are parallel, and the transmission surface is perpendicular to the second end face. The first end face is connected to the second end face in sequence through the buffer slope and the transmission surface. The first end face, the buffer slope, the transmission surface and the second end face are connected by a circular arc transition.

5. The graphite boat checkpoint according to claim 1, characterized in that, The width of the locking groove along the axial direction of the base ranges from 0.15mm to 0.35mm.

6. The graphite boat checkpoint according to claim 1, characterized in that, The depth of the locking groove along the radial direction of the base is in the range of 0.1mm to 0.3mm.

7. The graphite boat checkpoint according to claim 1, characterized in that, The angle between the end face of the base and the buffer slope is in the range of 30° to 70°.

8. The graphite boat checkpoint according to claim 1, characterized in that, The height of the base along its radial direction ranges from 5mm to 15mm.

9. The graphite boat checkpoint according to claim 1, characterized in that, The width of the base along its axial direction ranges from 4mm to 6mm.

10. The graphite boat checkpoint according to claim 1, characterized in that, The maximum diameter of the checkpoint cap along its radial direction ranges from 7mm to 10mm.

11. A graphite boat sheet, characterized in that, It includes a boat body and a graphite boat locking point as described in any one of claims 1 to 10; the graphite boat locking point is disposed on the boat body.

12. A graphite boat, characterized in that, It includes at least two graphite boat sheets as described in claim 11.

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