Exhaust gas denitrification mechanism of annealing furnace

Abstract

The utility model discloses waste gas denitrification mechanism of annealing furnace, including processing jar, the hollow tube is penetrated in the middle part of processing jar, the spiral blade is fixed on the inside wall of hollow tube, three groups of catalyst layer are installed between the spiral blade, the array installation of a plurality of groups of atomizing nozzles is installed on the one side wall of hollow tube, the bottom of processing jar is fixed with the collecting vessel, and the bottom of collecting vessel is reserved with the drain pipe. Beneficial effects lie in: the utility model discloses a spiral flow guide mechanism that one group has hollow tube, atomizing nozzle and spiral blade, in the process of waste gas denitrification, the flow of waste gas under the guidance of spiral blade, thereby avoid producing dead angle and in disorderly flow, and in the flowing process, the reaction gas is sprayed with the atomizing nozzle on the hollow tube and carries out uniform mixing and reacts under the action of catalyst layer, thereby realizes the overall denitrification of waste gas, not only denitrification effect is good, and the service performance is high.

Description

Technical Field

[0001] This utility model relates to the field of annealing furnace exhaust gas treatment technology, specifically to an exhaust gas denitrification mechanism for annealing furnaces. Background Technology

[0002] Annealing furnaces are a process used in semiconductor device manufacturing that involves heating multiple semiconductor wafers to influence their electrical properties. Heat treatments are designed for different effects. They can heat wafers to activate dopants, transform thin films into wafer-substrate interfaces, create densely deposited films, alter the state of grown films, repair implanted damage, move dopants, or transfer dopants from one film to another or from a film into a wafer substrate. During the use of annealing furnaces, nitrogen-containing waste gas is generated, which requires treatment via a denitrification system.

[0003] The existing waste gas denitrification mechanism of annealing furnaces works by blowing waste gas into a treatment tank, where it reacts with the reactive gas under the action of a catalytic layer. However, this method cannot guide the waste gas flow, resulting in dead zones and chaotic flow within the treatment tank. This affects the mixing degree between the waste gas and the reactive gas, leading to poor denitrification effect and low performance of the device. Therefore, there is an urgent need for a waste gas denitrification mechanism for annealing furnaces. Utility Model Content

[0004] (a) Technical problems to be solved

[0005] The technical problem to be solved by this utility model is to provide a denitrification mechanism for the exhaust gas of an annealing furnace, in light of the current state of the technology.

[0006] (II) Technical Solution

[0007] This utility model is achieved through the following technical solution: This utility model proposes a denitrification mechanism for exhaust gas from an annealing furnace, including a treatment tank. A hollow tube runs through the center of the treatment tank. Spiral blades are fixed on the inner and outer walls of the hollow tube. Three sets of catalyst layers are arranged in an array between the spiral blades. Multiple sets of atomizing nozzles are arranged in an array on one side wall of the hollow tube. A liquid collection hopper is fixed at the bottom of the treatment tank. A drain pipe is reserved at the bottom of the liquid collection hopper. A solenoid valve is installed on the drain pipe.

[0008] Furthermore, the hollow tube is embedded inside the processing tank, and a connecting flange is provided at one end of the hollow tube.

[0009] Furthermore, the spiral blade is welded to the hollow tube, a sealing strip is provided on the outer wall of the spiral blade, and the outer wall of the spiral blade is in contact with the inner wall of the processing tank.

[0010] Furthermore, the catalyst layer is fixed between the spiral blades by screws, and the atomizing nozzle is threaded onto one side wall of the hollow tube.

[0011] Furthermore, the liquid collection hopper is formed at the bottom of the treatment tank, and the liquid collection hopper is an arc mechanism.

[0012] Furthermore, the drain pipe is formed at the bottom of the collection hopper, and the solenoid valve is threaded onto the drain pipe.

[0013] Furthermore, an air inlet pipe is provided at the bottom of one side wall of the treatment tank, and an exhaust pipe is provided at the top of one side wall of the treatment tank. Both the air inlet pipe and the exhaust pipe have a connecting flange at one end.

[0014] (III) Beneficial Effects

[0015] Compared with the prior art, this utility model has the following advantages:

[0016] This invention designs a spiral flow guiding mechanism consisting of a hollow tube, an atomizing nozzle, and spiral blades. During the denitrification process of exhaust gas, the exhaust gas flows under the guidance of the spiral blades, thus avoiding dead zones and chaotic flow. During the flow, the reacting gas is sprayed out through the atomizing nozzle on the hollow tube and mixed evenly, and reacts under the action of the catalyst layer, thereby achieving comprehensive denitrification of the exhaust gas. It not only has a good denitrification effect, but also high performance. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the exhaust gas denitrification mechanism of the annealing furnace described in this utility model;

[0018] Figure 2 This is a schematic diagram illustrating the interior of the treatment tank in the exhaust gas denitrification mechanism of the annealing furnace described in this utility model;

[0019] Figure 3 This is a rear view of the exhaust gas denitrification mechanism of the annealing furnace described in this utility model.

[0020] The annotations in the attached figures are explained as follows:

[0021] 1. Processing tank; 2. Air inlet pipe; 3. Drain pipe; 4. Solenoid valve; 5. Liquid collection hopper; 6. Exhaust pipe; 7. Hollow pipe; 8. Spiral blades; 9. Atomizing nozzle; 10. Catalyst layer. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0023] like Figures 1-3 As shown, the exhaust gas denitrification mechanism of the annealing furnace in this embodiment includes a treatment tank 1. A hollow tube 7 runs through the center of the treatment tank 1 to guide the reaction gas. Spiral blades 8 are fixed on the inner and outer walls of the hollow tube 7 to guide the exhaust gas in a directional manner and avoid dead zones. Three sets of catalyst layers 10 are arranged in an array between the spiral blades 8 to accelerate the denitrification treatment of the exhaust gas. Multiple sets of atomizing nozzles 9 are arranged in an array on one side wall of the hollow tube 7 to atomize the reaction gas and mix it evenly with the exhaust gas. A liquid collection hopper 5 is fixed at the bottom of the treatment tank 1 to collect the water produced by the reaction. A drain pipe 3 is reserved at the bottom of the liquid collection hopper 5. A solenoid valve 4 is installed on the drain pipe 3 to control the opening and closing of the drain pipe 3.

[0024] like Figures 1-3 In this embodiment, the hollow tube 7 is embedded in the treatment tank 1. A connecting flange is reserved at one end of the hollow tube 7. The spiral blade 8 is welded to the hollow tube 7. A sealing strip is provided on the outer wall of the spiral blade 8. The outer wall of the spiral blade 8 is in contact with the inner wall of the treatment tank 1. The catalyst layer 10 is fixed between the spiral blades 8 by screws. The atomizing nozzle 9 is installed on one side wall of the hollow tube 7 by threads. During use, one end of the hollow tube 7 is connected to the external gas supply mechanism. During the denitrification process of the waste gas, the waste gas flows under the guidance of the spiral blade 8, thereby avoiding dead corners and chaotic flow. During the flow, the reaction gas is sprayed out through the atomizing nozzle 9 on the hollow tube 7 and mixed evenly, and reacts under the action of the catalyst layer 10, thereby achieving comprehensive denitrification of the waste gas. It not only has a good denitrification effect, but also has high performance.

[0025] like Figures 1-3 In this embodiment, the liquid collection hopper 5 is formed at the bottom of the treatment tank 1. The liquid collection hopper 5 is an arc mechanism. The drain pipe 3 is formed at the bottom of the liquid collection hopper 5. The solenoid valve 4 is installed on the drain pipe 3 by thread. An air inlet pipe 2 is reserved at the bottom of one side wall of the treatment tank 1, and an exhaust pipe 6 is reserved at the top of one side wall of the treatment tank 1. Both the air inlet pipe 2 and the exhaust pipe 6 have a connecting flange at one end. The water generated by the reaction flows into the liquid collection hopper 5 for collection. When it is necessary to discharge it, the drain pipe 3 is opened by the solenoid valve 4 to discharge it. The waste gas enters the treatment tank 1 through the air inlet pipe 2 for denitrification. The denitrified waste gas is discharged through the exhaust pipe 6.

[0026] The specific implementation process of this embodiment is as follows: First, the air inlet pipe 2, exhaust pipe 6, hollow pipe 7, and drain pipe 3 are connected to their respective pipes to achieve the installation of the treatment tank 1. During use, the exhaust gas generated by the annealing furnace enters the treatment tank 1 through the air inlet pipe 2 for denitrification. During the denitrification process, the exhaust gas flows under the guidance of the spiral blades 8, thus avoiding dead zones and chaotic flow. During the flow, the reaction gas is sprayed out through the atomizing nozzles 9 on the hollow pipe 7 and mixed evenly, and reacts under the action of the catalyst layer 10, thereby achieving comprehensive denitrification of the exhaust gas. Not only is the denitrification effect good, but the performance is also high. The denitrified exhaust gas is discharged through the exhaust pipe 6, and the water generated by the reaction flows into the collection hopper 5 for collection. When it is necessary to discharge it, the drain pipe 3 is opened through the solenoid valve 4 to discharge it.

[0027] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A denitrification mechanism for exhaust gas from an annealing furnace, characterized in that: The device includes a processing tank (1), a hollow tube (7) passing through the center of the processing tank (1), spiral blades (8) fixed on the inner and outer walls of the hollow tube (7), three sets of catalyst layers (10) arranged in an array between the spiral blades (8), multiple sets of atomizing nozzles (9) arranged in an array on one side wall of the hollow tube (7), a liquid collecting hopper (5) fixed at the bottom of the processing tank (1), a drain pipe (3) reserved at the bottom of the liquid collecting hopper (5), and a solenoid valve (4) installed on the drain pipe (3).

2. The exhaust gas denitrification mechanism of the annealing furnace according to claim 1, characterized in that: The hollow tube (7) is embedded in the processing tank (1), and a connecting flange is reserved at one end of the hollow tube (7).

3. The exhaust gas denitrification mechanism for the annealing furnace according to claim 2, characterized in that: The spiral blade (8) is welded to the hollow tube (7), and a sealing strip is provided on the outer wall of the spiral blade (8). The outer wall of the spiral blade (8) is in contact with the inner wall of the processing tank (1).

4. The exhaust gas denitrification mechanism of the annealing furnace according to claim 3, characterized in that: The catalyst layer (10) is fixed between the spiral blades (8) by screws, and the atomizing nozzle (9) is threaded onto one side wall of the hollow tube (7).

5. The exhaust gas denitrification mechanism for the annealing furnace according to claim 1, characterized in that: The liquid collection hopper (5) is formed at the bottom of the treatment tank (1), and the liquid collection hopper (5) is an arc mechanism.

6. The exhaust gas denitrification mechanism for the annealing furnace according to claim 5, characterized in that: The drain pipe (3) is formed at the bottom of the collection hopper (5), and the solenoid valve (4) is threaded onto the drain pipe (3).

7. The exhaust gas denitrification mechanism for the annealing furnace according to claim 6, characterized in that: An air inlet pipe (2) is reserved at the bottom of one side wall of the treatment tank (1), and an exhaust pipe (6) is reserved at the top of one side wall of the treatment tank (1). A connecting flange is reserved at one end of both the air inlet pipe (2) and the exhaust pipe (6).

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