A polishing liquid stirring and dispersing device

Abstract

The utility model provides a kind of polishing liquid stirring dispersion device, including cylinder and the cylinder cover cooperation with cylinder, mechanical stirring mechanism is provided on cylinder cover, the periphery of mechanical stirring mechanism is provided with ultrasonic stirring mechanism;Ultrasonic stirring mechanism includes annular carrier, multiple ultrasonic transducers are distributed on carrier;Depth adjusting mechanism is arranged between carrier and cylinder cover, depth adjusting mechanism includes fixed part fixed on cylinder cover, movable part connected with carrier, movable part and fixed part are along vertical direction sliding fit, movable part and fixed part are fixed relative position by locking structure;The utility model relates to stirring dispersion device technical field, ultrasonic transducer is immersed into polishing liquid, energy is directly acted on liquid interior, energy utilization rate is extremely high, the strong cavitation bubble that it generates can instantaneously smash the hard agglomeration of nanometer particle;And ultrasonic transducer and the main flow field produced by mechanical stirring are coordinated, and the dispersion effect of polishing liquid is improved.

Description

Technical Field

[0001] This utility model relates to the technical field of stirring and dispersing devices, and in particular to a stirring and dispersing device for polishing liquid. Background Technology

[0002] In the chemical mechanical polishing (CMP) process, the uniformity and stability of the polishing slurry directly affect the polishing quality of the workpiece surface. This is because the abrasive particles in the polishing slurry (such as SiO2, CeO2, Al2O3, etc.) are prone to sedimentation and aggregation when left to stand, resulting in uneven concentration of polishing slurry and abrasive agglomeration, which leads to defects such as inconsistent polishing rate and scratches on the surface of components.

[0003] Currently, the industry mostly uses mechanical stirring to prepare polishing fluids and maintain their stability. However, mechanical force alone is insufficient to break up the already formed, firmly aggregated nanoscale aggregates. Therefore, ultrasonic dispersion has been introduced as an auxiliary method.

[0004] The common practice is to attach the ultrasonic transducer to the outer wall of the tank. However, this method suffers from significant energy loss as the ultrasonic energy passes through the tank wall, resulting in limited energy reaching the material and low dispersion efficiency. Furthermore, the energy distribution of external ultrasonic transducers is extremely uneven, with strong energy in areas close to the transducer and weak energy in areas further away, leading to huge differences in dispersion effects in different areas of the tank. Utility Model Content

[0005] The purpose of this invention is to provide a polishing slurry stirring and dispersing device, which improves the dispersion effect on nano-sized agglomerates.

[0006] This utility model provides a polishing liquid stirring and dispersing device, including a cylinder and a cylinder cover that cooperates with the cylinder. A mechanical stirring mechanism is provided on the cylinder cover, and an ultrasonic stirring mechanism is provided on the outer periphery of the mechanical stirring mechanism. The mechanical stirring mechanism is used to mechanically shear and stir the polishing liquid inside the cylinder; The ultrasonic stirring mechanism includes a ring-shaped carrier with multiple ultrasonic transducers distributed on it. A depth adjustment mechanism is provided between the carrier and the cylinder cover. The depth adjustment mechanism includes a fixed part fixed to the cylinder cover and a movable part connected to the carrier. The movable part and the fixed part slide together in the vertical direction, and the movable part and the fixed part are fixed in relative position by a locking structure.

[0007] Preferably, the fixed part is a square tube, and the movable part is a round tube that slides with the square tube. The bottom end of the round tube is connected to the carrier. The wire connecting the ultrasonic transducer passes through the carrier, the round tube and the square tube, and a slack is reserved in the cavity of the square tube.

[0008] Preferably, the carrier is a ring tube, and the ultrasonic transducers are uniformly distributed based on the ring tube.

[0009] Preferably, the mechanical stirring mechanism includes a drive unit, a stirring shaft driven to rotate by the drive unit, and at least one set of stirring blades disposed on the stirring shaft; An annular carrier is fitted around the outer periphery of the stirring blades.

[0010] Preferably, the cylinder has a double-layer structure with a cooling jacket, a spiral guide plate is provided inside the cooling jacket, and the outer wall of the cylinder is provided with an inlet and an outlet that communicate with the cooling jacket.

[0011] Preferably, the cylinder includes an outer shell and an inner shell coaxially disposed therein, with a cooling interlayer formed between the inner shell and the outer shell.

[0012] Preferably, the cylinder cover is connected to a feed inlet, and the bottom of the cylinder is provided with a discharge outlet.

[0013] Preferably, the cap and the cylinder are detachably connected by bolts.

[0014] The polishing slurry stirring and dispersing device provided by this utility model has the following beneficial effects: When an ultrasonic transducer is immersed in a polishing slurry, it directly applies energy to the interior of the liquid, resulting in extremely high energy utilization. The strong cavitation bubbles it generates can instantly shatter hard agglomerates of nanoparticles. Furthermore, the ultrasonic transducer works in conjunction with the main flow field generated by mechanical stirring to enhance the dispersion effect on the polishing slurry. The cooling medium circulates along the guide plate in the cooling jacket, thereby offsetting the heat generated by mechanical work and ultrasonic cavitation, controlling the temperature fluctuation of the polishing fluid within a certain range, and improving the chemical stability of the polishing fluid. Attached Figure Description

[0015] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is an assembly drawing of the ultrasonic stirring mechanism and the depth adjustment mechanism in this utility model; Figure 3 This is an assembly drawing of the mechanical stirring mechanism and the cylinder cover in this utility model; Figure 4 This is an assembly drawing of the cylinder body and cylinder cover of this utility model; Figure 5This is a schematic diagram of the outer shell, inner shell, and cooling interlayer of this utility model; Figure 6 This is a schematic diagram of the inner shell and the guide plate in this utility model.

[0017] Explanation of reference numerals in the attached figures: 1-Cylinder body, 11-Outer shell, 12-Inner shell, 13-Guide plate, 14-Liquid inlet, 15-Liquid outlet, 16-Discharge outlet, 17-Cooling jacket, 2-Cylinder cover, 21-Inlet, 3-Mechanical stirring mechanism, 31-Stirring shaft, 32-Drive unit, 33-Stirring blade, 4-Ultrasonic stirring mechanism, 41-Carrier, 42-Ultrasonic transducer, 5-Depth adjustment mechanism, 51-Fixed part, 52-Moving part, 53-Locking structure, 6-Wire, 7-Bolt. Detailed Implementation

[0018] The technical solution of this utility model will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0019] In this embodiment, as Figure 1 and Figure 2 As shown, a polishing slurry stirring and dispersing device includes a cylinder 1 and a cylinder cover 2 that cooperates with the cylinder 1. A mechanical stirring mechanism 3 is provided on the cylinder cover 2, and an ultrasonic stirring mechanism 4 is provided on the outer periphery of the mechanical stirring mechanism 3. The mechanical stirring mechanism 3 is used to mechanically shear and stir the polishing slurry in the cylinder 1. The ultrasonic stirring mechanism 4 includes an annular carrier 41, on which multiple ultrasonic transducers 42 are distributed. A depth adjustment mechanism 5 is provided between the carrier 41 and the cylinder cover 2. The depth adjustment mechanism 5 includes a fixed part 51 fixed to the cylinder cover 2 and a movable part 52 connected to the carrier 41. The movable part 52 and the fixed part 51 slide in a vertical direction, and the movable part 52 and the fixed part 51 are fixed in relative position by a locking structure 53.

[0020] Thus, through the synergistic effect of mechanical stirring and ultrasonic stirring, both macroscopic uniform mixing and the effective breaking of hard agglomerates between particles by utilizing the ultrasonic cavitation effect can be achieved, thereby improving the dispersion quality and efficiency of the polishing fluid. At the same time, the depth adjustment mechanism 5 allows the ultrasonic transducer 42 to be precisely adjusted to the optimal working depth according to the liquid level, thereby improving the high efficiency of ultrasonic energy utilization and the consistency of dispersion effect.

[0021] In some embodiments, such as Figure 2As shown, the fixed part 51 is a square tube, and the movable part 52 is a round tube that slides with the square tube. The bottom end of the round tube is connected to the carrier 41. The wire 6 connecting the ultrasonic transducer 42 passes through the carrier 41, the round tube and the square tube, and has a reserved amount in the cavity of the square tube.

[0022] Specifically, the sliding fit structure of the two sets of square tubes and round tubes effectively prevents the movable part 52 from rotating during the adjustment process; the wire 6 passes through the inside of the carrier 41, passes through the round tube and the square tube in sequence, and finally comes out from the top of the square tube to connect to the external power supply; the wire slack reserved in the cavity of the square tube ensures that the wire 6 will not be pulled, worn or damaged when the movable part 52 is adjusted up and down, thus improving the reliability and service life of the equipment.

[0023] In some embodiments, such as Figure 2 As shown, the carrier 41 is a ring tube, and the ultrasonic transducers 42 are uniformly distributed based on the ring tube. Specifically, the annular tube structure allows the ultrasonic transducer 42 to be evenly arranged around the mechanical stirring mechanism 3, thereby forming a uniform and dead-angle-free ultrasonic energy field in the stirring area, so that the polishing liquid can be fully ultrasonically dispersed in all directions. In other embodiments, the carrier 41 may also be other annular structures such as an annular support.

[0024] In some embodiments, such as Figure 3 As shown, the mechanical stirring mechanism 3 includes a drive unit 32, a stirring shaft 31 driven to rotate by the drive unit 32, and at least one set of stirring blades 33 disposed on the stirring shaft 31; an annular carrier 41 is sleeved on the outer periphery of the stirring blades 33. Specifically, the drive unit 32 typically consists of a motor and a reducer, providing stable rotational power. The stirring shaft 31 is vertically mounted on the cylinder cover 2 via bearings, and the stirring blades 33 generate strong shear force on the polishing liquid for macroscopic mixing; the annular carrier 41 is fitted around the outer periphery of the stirring blades 33, so that the ultrasonic cavitation effect occurs directly in the high-shear region of mechanical stirring; It should be noted that the specific form of the stirring blades 33 can be paddle type, turbine type, etc., and the number of sets can be adjusted according to the height of the cylinder 1.

[0025] In some embodiments, such as Figure 5 and Figure 6 As shown, the cylinder 1 has a double-layer structure with a cooling jacket 17. A spiral guide plate 13 is provided inside the cooling jacket 17. The outer wall of the cylinder 1 is provided with an inlet 14 and an outlet 15 that communicate with the cooling jacket 17. Specifically, both mechanical and ultrasonic stirring generate a large amount of heat during operation, which may cause the polishing slurry to deteriorate due to increased temperature. The cooling jacket 17 is connected to an external cooling circulation system (such as a water chiller) through the inlet 14 and outlet 15, through which a cooling medium (such as cold water) is introduced; the spiral guide plate 13 forces the cooling medium to spiral forward along the inner wall of the cylinder 1, which greatly extends the flow channel and heat exchange time, thereby achieving efficient and uniform cooling of the cylinder 1 and ensuring the thermal stability of the polishing slurry during the production process; In addition, the cylinder 1 can be equipped with a temperature sensor to allow the cooling circulation system to regulate the temperature of the cooling medium entering the cooling jacket 17.

[0026] In some embodiments, such as Figure 5 As shown, the cylinder 1 includes an outer shell 11 and an inner shell 12 coaxially disposed therein, with a cooling interlayer 17 formed between the inner shell 12 and the outer shell 11.

[0027] Specifically, this inner and outer shell structure makes the inner shell 12, which serves as the working cavity, and the outer shell 11, which serves as the cooling channel, independent of each other. This facilitates manufacturing and prevents the cooling medium from contaminating the polishing fluid. At the same time, the inner shell 12 can be made of more corrosion-resistant or easier-to-clean materials, such as stainless steel.

[0028] In some embodiments, such as Figure 5 As shown, the cylinder cover 2 is connected to the feed inlet 21, and the bottom of the cylinder body 1 is provided with the discharge outlet 16. Specifically, the feed inlet 21 is used to add polishing liquid raw materials into the cylinder 1, and the discharge outlet 16 is usually equipped with a valve to discharge the finished product after stirring and dispersion. This top-in, bottom-out method facilitates connection with other equipment to achieve continuous or batch production; In addition, both the inlet 21 and the outlet 16 can be configured with standard interfaces such as flanges as needed.

[0029] In some embodiments, such as Figure 4 As shown, the cylinder cover 2 and the cylinder body 1 are detachably connected by bolts 7; It should be noted that the use of bolts 7 to connect the cover 2 and the cylinder 1 ensures the strength and sealing of the connection, while also allowing the cover 2 to be easily opened, facilitating thorough cleaning, maintenance, and replacement of the stirring or ultrasonic mechanism inside the cylinder 1.

[0030] The working principle of this application is illustrated below with a preferred embodiment: First, after assembling the cylinder 1 and the cylinder cover 2 together, they are fixed with bolts. The liquid outlet 15 and the liquid inlet 14 are connected to the external water cooler through water pipes. The polishing liquid is introduced into the inner shell 12 through the feed inlet 21. Subsequently, the drive unit 32 is activated, which drives the stirring shaft 31 to rotate in the cylinder cover 2. At the same time, the stirring shaft 31 drives two sets of stirring blades 33 to rotate to shear and stir the polishing liquid in the inner shell 12. When the mechanical stirring mechanism 3 is working, the ultrasonic transducer 42 is activated. The strong cavitation bubbles generated by the ultrasonic transducer 42 can instantly crush the hard agglomeration of nanoparticles. According to the liquid level of the polishing fluid in the inner shell 12, adjust the depth adjustment mechanism 5, release the locking structure 53 and move the movable part 52 in the fixed part 51. The movable part 52 changes the position of the carrier 41 in the inner shell 12. Use the locking structure 53 to re-fix the fixed part 51 and the movable part 52, thereby changing the depth of the ultrasonic transducer 42 in the polishing fluid to disperse the polishing fluid at different levels. During the stirring and dispersion of the polishing slurry, an external water chiller introduces cold water into the cooling jacket 17 through the inlet 14. The cold water moves along the guide plate 13 and simultaneously exchanges heat with the inner shell 12. The water that has completed the heat exchange returns to the water chiller through the outlet 15 to circulate and cool the cylinder 1. Finally, the control valve of the outlet 16 is opened to discharge the stirred polishing slurry. It should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A polishing liquid stirring and dispersing device, comprising a cylinder (1) and a cylinder cover (2) cooperating with the cylinder (1), wherein a mechanical stirring mechanism (3) is provided on the cylinder cover (2), characterized in that, An ultrasonic stirring mechanism (4) is provided on the outer periphery of the mechanical stirring mechanism (3). The mechanical stirring mechanism (3) is used to mechanically shear and stir the polishing liquid in the cylinder (1); The ultrasonic stirring mechanism (4) includes an annular carrier (41) on which multiple ultrasonic transducers (42) are distributed. A depth adjustment mechanism (5) is provided between the carrier (41) and the cylinder cover (2). The depth adjustment mechanism (5) includes a fixed part (51) fixed on the cylinder cover (2) and a movable part (52) connected to the carrier (41). The movable part (52) and the fixed part (51) slide in a vertical direction. The movable part (52) and the fixed part (51) are fixed in relative position by a locking structure (53).

2. The polishing slurry stirring and dispersing device according to claim 1, characterized in that, The fixed part (51) is a square tube, and the movable part (52) is a round tube that slides with the square tube. The bottom end of the round tube is connected to the carrier (41). The wire (6) connecting the ultrasonic transducer (42) passes through the inside of the carrier (41), the round tube and the square tube, and a margin is reserved in the cavity of the square tube.

3. The polishing slurry stirring and dispersing device according to claim 2, characterized in that, The carrier (41) is an annular tube, and the ultrasonic transducers (42) are uniformly distributed based on the annular tube.

4. The polishing slurry stirring and dispersing device according to claim 1, characterized in that, The mechanical stirring mechanism (3) includes a drive unit (32), a stirring shaft (31) driven to rotate by the drive unit (32), and at least one set of stirring blades (33) disposed on the stirring shaft (31). The annular carrier (41) is fitted around the outer periphery of the stirring blade (33).

5. The polishing slurry stirring and dispersing device according to claim 4, characterized in that, The cylinder (1) has a double-layer structure with a cooling jacket (17). A spiral guide plate (13) is provided inside the cooling jacket (17). The outer wall of the cylinder (1) is provided with an inlet (14) and an outlet (15) that communicate with the cooling jacket (17).

6. The polishing slurry stirring and dispersing device according to claim 5, characterized in that, The cylinder (1) includes an outer shell (11) and an inner shell (12) coaxially disposed therein, and the cooling interlayer (17) is formed between the inner shell (12) and the outer shell (11).

7. The polishing slurry stirring and dispersing device according to claim 1, characterized in that, The cylinder cover (2) is connected to a feed inlet (21), and the bottom of the cylinder (1) is provided with a discharge outlet (16).

8. The polishing slurry stirring and dispersing device according to claim 1, characterized in that, The cap (2) and the cylinder (1) are detachably connected by bolts (7).

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