A three-pronged tweezers for improving wafer clamping safety

Abstract

The utility model belongs to the technical field of semiconductor manufacturing equipment, disclose a kind of three-prong tweezers of promoting wafer clamping security, structure is: clamping handle I, clamping handle II are arranged side by side, support handle is located clamping handle I and clamping handle II top;The tail end of the clamping handle I, the tail end of clamping handle II and the tail end of support handle are respectively connected on the connecting point;The head of the clamping handle I is provided with half-ring clamp I, and the head of clamping handle II is provided with half-ring clamp II;After the clamping handle I and clamping handle II pinch, the half-ring clamp I and half-ring clamp II constitute complete annular clamp, and the wafer is supported in complete annular clamp;The head of the support handle is six-tooth support frame, pinch support handle, and the six-tooth support frame is embedded in complete annular clamp and clamps wafer.The utility model can effectively improve wafer clamping stability, significantly reduce the risk of falling and shaking of wafer in clamping and turning process.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing equipment technology, and relates to a three-handled tweezers that improves the safety of wafer clamping, which is suitable for adjusting the posture of wafers during semiconductor processing. Background Technology

[0002] In semiconductor manufacturing, wafers undergo multiple processing steps, requiring frequent clamping, handling, and flipping operations. Currently, the industry commonly uses double-handled tweezers for wafer handling, which primarily secure the wafer through two gripping points. However, the double-handled design has certain limitations: First, it lacks gripping stability, especially during flipping, where the wafer is prone to slipping when its surface is parallel to gravity, leading to wafer breakage; second, the clamping pressure is concentrated and applied to the wafer surface, easily causing cracks or surface damage at the gripping points; third, it is difficult to grip wafers placed on a flat surface. When the wafer surface is pressed against a flat surface, the double-handled tweezers struggle to reach between the wafer and the surface, making gripping difficult.

[0003] Existing technologies have improved wafer clamping methods by employing vacuum pens or robotic arms. However, vacuum pens require direct contact with the wafer surface, and the rubber tips can easily contaminate the wafer surface; furthermore, wafer flipping operations are difficult. Robotic arms are complex in structure, expensive, and unsuitable for small-batch wafer operations in confined spaces; they also cannot clamp wafers placed on a flat surface. Therefore, there is an urgent need for a clamping tool that is simple in structure, stable in operation, and can effectively protect the wafer. Utility Model Content

[0004] (a) Purpose of the utility model The purpose of this invention is to provide a three-handled tweezers that improves the safety of wafer clamping, thereby solving the problems of insufficient stability, easy damage to wafers, and difficulty in clamping wafers placed on a flat surface that exist in the clamping and flipping process of two-handled tweezers.

[0005] (II) Technical Solution To address the aforementioned technical problems, this utility model provides a three-handled tweezers for improving wafer clamping safety. The tweezers include a connection point 1, a clamping handle I2, a clamping handle II3, and a supporting handle 4. The clamping handles I2 and II3 are arranged side-by-side, and the supporting handle 4 is located at the top of the clamping handles I2 and II3. The tail ends of the clamping handles I2, II3, and 4 are respectively connected to the connection point 1. A semi-annular clamp I5 is provided at the head of the clamping handle I2, and a semi-annular clamp II6 is provided at the head of the clamping handle II3. When the clamping handles I2 and II3 are clamped together, the semi-annular clamps I5 and II6 form a complete annular clamp, holding the wafer within the complete annular clamp. The head of the supporting handle 4 is a six-tooth support frame 7; when the supporting handle 4 is clamped together, the six-tooth support frame 7 is embedded within the complete annular clamp and clamps the wafer.

[0006] Furthermore, the clamping handle I2, clamping handle II3, and support handle 4 are connected to the connection point 1 in an arc shape, and the connection point is flexible.

[0007] Furthermore, the clamping handle I2 and clamping handle II3 open and close in the horizontal direction, and the support handle 4 opens and closes in the vertical direction.

[0008] Furthermore, anti-slip grooves are provided on the opposing surfaces of the clamping handle I2 and clamping handle II3.

[0009] Furthermore, both the semi-annular clamp I5 and the semi-annular clamp II6 include a clamp sidewall 8, the clamp sidewall 8 having a height of 0.5cm to 1.5cm, and the inner diameter of the clamp sidewall 8 being 1 to 3mm larger than the diameter of the clamped wafer.

[0010] Furthermore, the bottom of the clamp sidewall 8 of the semi-annular clamp I5 and semi-annular clamp II6 is provided with a clamp base 9. The inner diameter of the clamp base 9 is 3-10mm smaller than the diameter of the clamped wafer, which is used to support the clamped wafer from the bottom and prevent the wafer from falling.

[0011] Furthermore, the clamp base 9 of the semi-annular clamp I5 and semi-annular clamp II6 is provided with a wedge-shaped edge with a wedge angle of 5~15°, which is used to allow the clamped wafer to slide upward along the inclined surface of the wedge during the clamping process of the clamping handle I2 and clamping handle II3.

[0012] Furthermore, after the support handle 4 is engaged, the distance between the six-tooth support frame 7 and the bottom support of the semi-annular clamp I5 and semi-annular clamp II6 is 0.5~1mm.

[0013] Furthermore, the dimensions of the six-tooth support frame 7 are 1-3 mm smaller than the diameter of the wafer being held.

[0014] Furthermore, the six supporting teeth of the six-tooth support frame 7 are flexible arc-shaped teeth.

[0015] (III) Beneficial Effects The three-handled tweezers provided by the above technical solution, which enhance wafer clamping security, have the following beneficial effects: 1. The three tweezers provided by this utility model can effectively improve the stability of wafer clamping and significantly reduce the risk of wafers falling and shaking during clamping and flipping.

[0016] 2. The three tweezers provided by this utility model can lift the wafer from the bottom by using the wedge-shaped edge of the base, effectively avoiding the concentration of clamping pressure on the wafer surface, which may cause cracks or damage to the wafer surface.

[0017] 3. The three tweezers provided by this utility model can use the wedge-shaped edge of the base to pick up and hold wafers placed on a plane with one hand, which is convenient to operate and can effectively improve work efficiency. Attached Figure Description

[0018] Figure 1 A top view of the three tweezers provided in this utility model.

[0019] Figure 2 This is a partial schematic diagram of the semi-circular clamp I at the head of the clamping handle I.

[0020] Figure 3 This is a flowchart illustrating the wafer clamping and flipping operation.

[0021] Figure 4 A schematic diagram illustrating the principle of a semi-circular clamp base supporting a wafer. Detailed Implementation

[0022] To make the objectives, contents, and advantages of this utility model clearer, the specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples.

[0023] like Figure 1 and Figure 2As shown, the three-handled tweezers for improving wafer clamping safety in this embodiment include a connection point 1, a clamping handle I2, a clamping handle II3, and a support handle 4; the clamping handles I2 and II3 are arranged side by side, and the support handle 4 is located at the top of the clamping handles I2 and II3; the tail ends of the clamping handles I2, II3, and 4 are respectively connected to the connection point 1; the head of the clamping handle I2 is provided with a semi-annular clamp I5, and the head of the clamping handle II3 is provided with a semi-annular clamp II6; after the clamping handles I2 and II3 are pinched together, the semi-annular clamps I5 and II6 form a complete annular clamp, and the wafer is supported in the complete annular clamp; the head of the support handle 4 is a six-tooth support frame 7, and when the support handle 4 is pinched together, the six-tooth support frame 7 is embedded in the complete annular clamp and clamps the wafer.

[0024] Furthermore, the clamping handle I2, clamping handle II3, and support handle 4 are connected to the connection point 1 in an arc shape, and the connection point is flexible.

[0025] The clamping handles I2 and II3 open and close in the horizontal direction, and the support handle 4 opens and closes in the vertical direction.

[0026] Anti-slip grooves are provided on the opposite surfaces of the clamping handle I2 and clamping handle II3.

[0027] Both the semi-annular clamp I5 and the semi-annular clamp II6 include clamp sidewalls 8, the height of which is 0.5~1.5cm and the inner diameter of which is 1~3mm larger than the diameter of the clamped wafer. This is to fully accommodate the clamped wafer and prevent it from slipping laterally during the wafer flipping process.

[0028] The bottom of the clamp sidewall 8 of the semi-annular clamp I5 and semi-annular clamp II6 is provided with a clamp base 9. The inner diameter of the clamp base 9 is 3-10mm smaller than the diameter of the clamped wafer, and is used to support the clamped wafer from the bottom to prevent the wafer from falling.

[0029] The clamp base 9 of the semi-annular clamp I5 and semi-annular clamp II6 is provided with a wedge-shaped edge, preferably with a wedge angle of 5~15°, which is used to allow the clamped wafer to slide upward along the inclined surface of the wedge during the clamping process of the clamping handle I2 and clamping handle II3.

[0030] After the support handle 4 is pinched together, the distance between the six-tooth support frame 7 and the bottom support of the semi-annular clamp I5 and semi-annular clamp II6 is 0.5~1mm, to prevent the wafer from being crushed after the support handle 4 is pinched together.

[0031] The size of the six-tooth support frame 7 is 1-3 mm smaller than the diameter of the clamped wafer, and it plays a supporting role after the clamped wafer is flipped.

[0032] The six supporting teeth of the six-tooth support frame 7 are flexible arc-shaped teeth.

[0033] The three-handled tweezers of this invention achieve safe clamping and flipping of the wafer through the following method, the process of which is as follows: Figure 3 As shown: 1. Initial positioning: Place the semi-circular clamp base of the two clamping handles firmly against the plane of the wafer, with the opening of the semi-circular clamp aligned with the bottom edge of the wafer.

[0034] 2. Clamping and Fixing: With one hand, pinch the two clamping handles together, causing the semi-circular clamps at the heads of the handles to cut into the bottom of the wafer. During the pinching process, the base of the semi-circular clamps slightly lifts the wafer, holding it within the clamps. Figure 4 As shown.

[0035] 3. Top Fixation: Pinch the support handle to insert the six-tooth support bracket at the head of the support handle into the semi-circular clamp. At this point, the wafer is completely enveloped by the three tweezers, ensuring the safety of adjusting the wafer's orientation.

[0036] 4. Wafer flipping: Rotate the entire tweezers around the direction of the clamping handle. After flipping, the wafer's center of gravity shifts from the semi-circular clamp base to the six-tooth support at the head of the support handle.

[0037] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A three-handled tweezers for improving wafer clamping security, characterized in that, It includes a connection point (1), a clamping handle I (2), a clamping handle II (3), and a support handle (4); the clamping handle I (2) and the clamping handle II (3) are arranged side by side, and the support handle (4) is located at the top of the clamping handle I (2) and the clamping handle II (3); the tail ends of the clamping handle I (2), the clamping handle II (3), and the support handle (4) are respectively connected to the connection point (1); the head of the clamping handle I (2) is provided with a semi-circular clamp I (5), and the head of the clamping handle II (3) is provided with a semi-circular clamp II (6); after the clamping handle I (2) and the clamping handle II (3) are pinched together, the semi-circular clamp I (5) and the semi-circular clamp II (6) form a complete circular clamp, and the wafer is supported in the complete circular clamp; the head of the support handle (4) is a six-tooth support frame (7), and when the support handle (4) is pinched together, the six-tooth support frame (7) is embedded in the complete circular clamp and clamps the wafer.

2. The three-handled tweezers for improving wafer clamping security as described in claim 1, characterized in that, The clamping handle I (2), clamping handle II (3) and support handle (4) are connected to the connection point (1) in an arc shape, and the connection point is flexible.

3. The three-handled tweezers for improving wafer clamping security as described in claim 2, characterized in that, The clamping handle I (2) and clamping handle II (3) open and close in the horizontal direction, and the support handle (4) opens and closes in the vertical direction.

4. The three-handled tweezers for improving wafer clamping security as described in claim 3, characterized in that, Anti-slip grooves are provided on the opposite surfaces of the clamping handle I (2) and clamping handle II (3).

5. The three-handled tweezers for improving wafer clamping safety as described in claim 4, characterized in that, Both the semi-annular clamp I (5) and the semi-annular clamp II (6) include clamp sidewalls (8), the height of which is 0.5cm to 1.5cm, and the inner diameter of which is 1 to 3mm larger than the diameter of the clamped wafer.

6. The three-handled tweezers for improving wafer clamping security as described in claim 5, characterized in that, The bottom of the clamp sidewall (8) of the semi-annular clamp I (5) and the semi-annular clamp II (6) is provided with a clamp base (9). The inner diameter of the clamp base (9) is 3~10mm smaller than the diameter of the clamped wafer, and is used to support the clamped wafer from the bottom to prevent the wafer from falling.

7. The three-handled tweezers for improving wafer clamping safety as described in claim 6, characterized in that, The clamp base (9) of the semi-annular clamp I (5) and semi-annular clamp II (6) is provided with a wedge-shaped edge with a wedge angle of 5~15°, which is used to slide the clamped wafer upward along the inclined surface of the wedge during the clamping process of clamping handle I (2) and clamping handle II (3).

8. The three-handled tweezers for improving wafer clamping security as described in claim 7, characterized in that, After the support handle (4) is pinched together, the distance between the six-tooth support frame (7) and the bottom support of the semi-circular clamp I (5) and the semi-circular clamp II (6) is 0.5~1mm.

9. The three-handled tweezers for improving wafer clamping security as described in claim 8, characterized in that, The size of the six-tooth support frame (7) is 1-3 mm smaller than the diameter of the wafer being held.

10. The three-handled tweezers for improving wafer clamping security as described in claim 9, characterized in that, The six supporting teeth of the six-tooth support frame (7) are flexible arc-shaped teeth.

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