Single-piece graphite disc packaging box

Abstract

The utility model provides a single set type graphite tray packing carton belongs to semiconductor technical field, including box body, support board and lid, the cavity of upper end open is formed in the box body inside, is provided with a plurality of support protrusions in box body inboard bottom, support board is located in the cavity inside of box body, and support board bottom end is placed on a plurality of support protrusions upper end, and the area that support board upper end forms is used for placing the region of graphite tray, and the contact area area between support board and graphite tray is less than support board upper end area, the lid is connected in the box body, is suitable for sealing the upper end open of box body, and the gap is formed between lid and box body and graphite tray. The utility model provides a single set type graphite tray packing carton has reduced the contamination risk of graphite tray, provides effective anti -collision to graphite tray, and the technical effect that this packing carton can be repeatedly used after cleaning.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor technology, and more specifically, it relates to a single-set graphite disk packaging box. Background Technology

[0002] Currently, the semiconductor industry has strict requirements for product contamination control, which places high demands on the cleanliness of consumables used in the production process. Graphite, as a key consumable in the semiconductor industry (such as graphite disks used to support wafers), is affected by the cleanliness control during the growth process, and the protective effect of subsequent packaging also plays an important role in the final contamination result.

[0003] Currently, the industry routinely uses Class 100 or Class 1000 cleanroom plastic bags for vacuum packaging of graphite components used in semiconductors (especially coated graphite disks). Specifically, the coated graphite disk is directly placed into the cleanroom plastic bag, vacuumed, and then heat-sealed. However, this packaging method has the following key problems, making it difficult to meet the protection requirements of semiconductor-grade graphite disks: 1) Insufficient collision protection: The plastic bag is made of soft material. If it is subjected to external impact during transportation or use, the graphite disk inside the bag is easily collided and bumped. This may not only cause physical damage to the graphite disk, but also cause contamination due to the graphite debris generated by the damage. 2) Poor sealing reliability: To improve the high temperature resistance and wear resistance of graphite discs, their surface is usually coated with silicon carbide. The surface roughness of this coating is about 2.5nm, the size of the silicon carbide particles in the coating is several micrometers, and the Mohs hardness is usually between 9.0 and 9.5 (second only to diamond). This high hardness and slightly rough surface will stick tightly to the inner wall of the plastic bag after packaging. During transportation or handling, it is very easy to scratch the inner wall of the plastic bag, which will damage the packaging seal and cause air leakage. 3) Direct friction contamination: The high hardness of the silicon carbide coating particles comes into long-term contact and friction with the inner wall of the plastic bag. On the one hand, this causes plastic bag material fragments to fall off and adhere to the surface of the graphite disk, forming contamination. On the other hand, if there are small particles on the coating surface (such as residual silicon carbide powder from coating preparation), they will also fall off due to friction, causing secondary contamination.

[0004] In summary, existing vacuum packaging methods cannot simultaneously address the requirements for anti-collision protection, airtight sealing, and low contamination of graphite disks, which has become a key issue restricting the cleanliness control of coated graphite disks used in semiconductors. Therefore, it is necessary to design a packaging box that can reduce contamination of graphite disks while providing effective anti-collision protection. Utility Model Content

[0005] The purpose of this utility model is to provide a single-set graphite disc packaging box, which aims to solve the technical problems of existing graphite disc packaging methods that easily cause contamination of the graphite disc and cannot provide effective collision protection for the graphite disc.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is: to provide a single-set graphite disc packaging box, comprising: The box body has an open cavity at the top, and multiple support protrusions are provided on the bottom inner side of the box body; A support plate is disposed inside the cavity of the box body. The bottom end of the support plate is placed on the upper end of a plurality of support protrusions. The upper end of the support plate forms an area for placing a graphite disk. The contact area between the support plate and the graphite disk is smaller than the area of ​​the upper end surface of the support plate. A cover, connected to the box body, is adapted to cover the upper opening of the box body, and both the cover and the box body form a gap with the graphite disk.

[0007] In one possible implementation, the support plate is arranged in a zigzag shape, the graphite disk is placed horizontally on the upper end of the support plate, and its end is in contact with the upper surface of the support plate. The height of the end of the support plate is higher than the height of the end of the graphite disk.

[0008] In one possible implementation, the support plate includes a plurality of spring pieces arranged side by side at intervals. The spring pieces are in the shape of a zigzag line, with the bottom ends of the spring pieces contacting the support protrusion and the upper ends contacting the end of the graphite disk.

[0009] In one possible implementation, the spring includes a support portion and two raised portions respectively connected to both ends of the support portion. The raised portions are raised towards the cover at the end away from the support portion. The support portion and the two raised portions are combined to form a zigzag shape. The graphite disk contacts the raised portions. A gap is formed between the support portion and the graphite disk. The bottom end of the support portion contacts the support protrusion.

[0010] In one possible implementation, the length of the support portion is greater than the length of the raised portion, and the width of the end of the raised portion away from the support portion is greater than the width of the end connected to the support portion.

[0011] In one possible implementation, the height of the raised portion away from the support portion is higher than the height of the graphite disk end.

[0012] In one possible implementation, the bottom of the box is arc-shaped and has multiple legs connected to it, which are used to support the box.

[0013] In one possible implementation, the upper end of the cover is planar and the outer top is connected with multiple protrusions.

[0014] In one possible implementation, the cover is detachably connected to the box body.

[0015] In one possible implementation, both the box body and the cover body are made of PC or PP.

[0016] The beneficial effects of this utility model on a single-set graphite disc packaging box are as follows: Compared with the prior art, this utility model provides a single-set graphite disc packaging box, including a box body, a support plate, and a lid. The box body has an open cavity at the top, and multiple support protrusions are provided on the bottom side of the box body. The support plate is located inside the cavity of the box body, with its bottom end resting on the upper end of the multiple support protrusions. The upper end of the support plate forms an area for placing the graphite disc, and the contact area between the support plate and the graphite disc is smaller than the area of ​​the upper end of the support plate. The lid is connected to the box body and is suitable for sealing the open top of the box body. Both the lid and the box body are connected to the box body. A gap is formed between the graphite discs. After the graphite discs are installed inside the box, the cover is sealed. The packaging box is then placed inside a plastic bag, and the plastic bag is vacuum-sealed or gas-filled. Since the graphite discs do not contact the material packaging bag, but only the packaging box, this solves the technical problem in existing graphite disc packaging methods that easily cause contamination of the graphite discs and cannot provide effective collision protection. By placing the graphite discs inside the packaging box and using a packaging bag to package the box, the risk of graphite disc contamination is greatly reduced, and effective collision protection is provided for the graphite discs. At the same time, the packaging box can be reused after cleaning. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 A three-dimensional structural diagram of a single-set graphite disc packaging box provided for an embodiment of this utility model; Figure 2 A three-dimensional structural diagram of the box body and the internal support plate of a single-set graphite disc packaging box provided for an embodiment of this utility model. Figure 3 A three-dimensional structural diagram of the lid of a single-set graphite disc packaging box provided for an embodiment of this utility model; Figure 4 for Figure 2 A schematic diagram of the structure after the support plate has been removed. Figure 5 A three-dimensional structural diagram of a support plate for a single-set graphite disc packaging box provided for an embodiment of this utility model; Figure 6 for Figure 5 A schematic diagram of a three-dimensional structure in which a graphite disk is placed on the upper part of the support plate.

[0019] Explanation of reference numerals in the attached figures: 10. Box body; 11. Cavity; 12. Support protrusion; 13. Support leg; 14. External thread; 20. Support plate; 21. Spring piece; 211. Support part; 212. Raised part; 30. Cover; 31. Protrusion; 32. Internal thread. Detailed Implementation

[0020] To make the technical problems, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0021] The applicant has discovered that existing technologies for packaging graphite components (especially coated graphite disks) involve vacuum packaging in plastic bags. The coated graphite disk is directly placed into a clean plastic bag, vacuum-sealed, and then the bag is sealed. However, this method provides insufficient protection against impacts, and contact between silicon carbide particles from the coating and the plastic bag can damage the bag and contaminate the graphite disk. Therefore, it is necessary to improve the existing packaging method for graphite components to reduce these problems. The applicant has designed a packaging box in which the graphite component is placed, and the box is then wrapped in a plastic bag. This avoids the aforementioned problems and improves the cleanliness of the graphite disk.

[0022] Please refer to the following: Figures 1 to 2 The present invention provides a single-set graphite disc packaging box. The single-set graphite disc packaging box includes a box body 10, a support plate 20, and a lid 30. The box body 10 has an open-top cavity 11 inside, and multiple support protrusions 12 are provided on the bottom inner side of the box body 10. The support plate 20 is located inside the cavity 11 of the box body 10, with its bottom end positioned above the multiple support protrusions 12. The upper end of the support plate 20 forms an area for placing the graphite disc, and the contact area between the support plate 20 and the graphite disc is smaller than the area of ​​the upper surface of the support plate 20. The lid 30 is connected to the box body 10 and is suitable for sealing the open top of the box body 10. Gaps are formed between the lid 30 and the box 10 and the graphite disc.

[0023] This utility model provides a single-set graphite disc packaging box. Compared with the prior art, the support plate 20 is placed inside the box body 10, and the graphite disc is placed on the upper end of the support plate 20. After the graphite disc is installed inside the box body 10, the cover 30 is sealed to form a packaging box. The packaging box is placed inside a plastic packaging bag, and the plastic packaging bag is vacuum-sealed or gas-filled. Since the graphite disc does not contact the material packaging bag, but only the packaging box, it solves the technical problem in the prior art that the graphite disc packaging method is easy to cause contamination of the graphite disc and cannot provide effective anti-collision protection for the graphite disc. It greatly reduces the risk of graphite disc contamination and provides effective anti-collision protection for the graphite disc. At the same time, the packaging box can be reused after cleaning.

[0024] A monolithic design typically refers to a design that integrates multiple functions or components into a single structural unit, forming an independent, complete design that can achieve its intended function without the need for external auxiliary systems. The innovation of monolithic designs usually lies in addressing the shortcomings of existing technologies through structural integration, and its core value lies in improving reliability through structural optimization.

[0025] In this embodiment, the contact area between the support plate 20 and the graphite disk is less than one-tenth, or even smaller, of the area of ​​the upper surface of the support plate 20. Specifically, the support plate 20 is arranged in a zigzag shape, and the contact between the graphite disk and the support plate 20 can be considered a "line contact" rather than a "surface contact." That is, the contact area between the graphite disk and the support plate 20 is small, making it less likely for the graphite disk to become contaminated. By using the cover 30 to seal the box body 10, a closed environment can be formed inside the box body 10. The box body 10 and the cover 30 effectively protect the graphite disk, preventing it from directly contacting the packaging bag (clean plastic bag) outside the box and preventing contamination. The height of the graphite disk inside the box body 10 is lower than the height of the upper end of the box body 10. Therefore, after the cover 30 seals the box body 10, the cover 30 will not contact the graphite disk, and the upper surface of the graphite disk will not become contaminated. In this embodiment, by setting the support plate 20, the graphite disk will not shake or move, reducing the shaking generated during the movement of the box 10, and can stably support the graphite disk. The graphite disk is not easy to slip off or fall off the support plate 20. The support plate 20 is equivalent to limiting the graphite disk to a certain extent.

[0026] To reduce the contact area between the graphite disk and the support plate 20 or the packaging box, and to prevent contamination of the graphite disk, in some embodiments, please refer to... Figure 2 , Figures 5 to 6The support plate 20 is arranged in a zigzag shape, with the graphite disk horizontally positioned on top of it, its end contacting the upper surface of the support plate 20. The height of the end of the support plate 20 is higher than the height of the end of the graphite disk. The support plate 20 is also U-shaped, with its bottom end resting on or above multiple support protrusions 12. These protrusions provide stable support for the support plate 20, preventing sliding or misalignment between the support plate 20 and the protrusions 12, thus effectively ensuring the stability of the support for the graphite disk. The bottom edge of the graphite disk contacts the upper surface of the support plate 20, with a small contact area. The central area of ​​the support plate 20 does not contact the graphite disk. This arrangement of the support plate 20 minimizes the contact area with the graphite disk and prevents contamination of the graphite disk.

[0027] Specifically, to a certain extent, the support plate 20 can form a semi-enclosure around the lower half of the graphite disk, which can reduce the contact area with the graphite disk and prevent the graphite disk from getting dirty; and prevent the graphite disk from moving or sliding, effectively ensuring the stability of the graphite disk after it is placed.

[0028] In some embodiments, please refer to Figure 2 , Figures 5 to 6 The support plate 20 includes multiple spring pieces 21 arranged side-by-side with intervals. The spring pieces 21 are zigzag-shaped, with their bottom ends contacting the support protrusion 12 and their top ends contacting the end of the graphite disk. The number of spring pieces 21 on the support plate 20 is reasonably set according to the volume, radius, and other parameters of the graphite disk, so that at least two spring pieces 21 can support the graphite disk. In this embodiment, three spring pieces 21 are provided, all with the same shape and spaced apart from each other, each used to support different parts of the bottom of the graphite disk.

[0029] The spring piece 21 used in this embodiment is elastic, which firstly can stably support the graphite disk, and secondly can form a semi-encirclement of the graphite disk, further stabilizing the support of the graphite disk. After the bottom end of the spring piece 21 contacts the support protrusion 12, friction will be generated between them, thus preventing the support plate 20 from sliding on the support protrusion 12.

[0030] In this embodiment, the support protrusion 12 has a cylindrical structure. The bottom end of the support protrusion 12 is fixedly connected to the bottom of the box body 10, and the top end is used to contact or support the support plate 20, that is, to contact the bottom middle part of the contact spring 21.

[0031] In some embodiments, please refer to Figure 2 , Figures 5 to 6The spring piece 21 includes a support portion 211 and two protruding portions 212 respectively connected to both ends of the support portion 211. The protruding portions 212 protrude towards the cover 30 at the end away from the support portion 211. The support portion 211 and the two protruding portions 212 combine to form a zigzag shape. The graphite disk contacts the protruding portions 212, and a gap is formed between the support portion 211 and the graphite disk. The bottom end of the support portion 211 contacts the support protrusion 12. The support portion 211 is a long strip-shaped plate, and its bottom end contacts or rests on the upper end or top of the support protrusion 12, with friction between them, so that the support portion 211 will not slip off the support protrusion 12. Each end of the support portion 211 is provided with something similar to a connecting shaft, that is, one side of the connecting shaft is connected to the end of the support portion 211, and the other side is connected to one end of the protruding portion 212. In this way, the protruding portion 212 can be connected to the support portion 211 through the connecting shaft. The raised portion 212 is elastic, allowing it to swing up and down or sway, thus effectively supporting the graphite disk. The raised portions 212 located on both sides of the support portion 211 can combine to form a semi-encirclement of the graphite disk. When both the box body 10 and the support plate 20 are horizontally positioned, the graphite disk is also horizontally positioned, as shown below. Figure 6 As shown, at this point, only the upper surface of the raised portion 212 contacts the graphite disk, while the support portion 211 only supports the raised portions 212 on both sides and does not contact the graphite disk. That is, there is a gap between the support portion 211 and the graphite disk. If the bottom area of ​​the graphite disk is small, it may come into contact with the support portion 211, but this will not cause contamination of the graphite disk.

[0032] In some embodiments, please refer to Figure 2 and Figure 5 The length of the support portion 211 is greater than the length of the raised portion 212, and the width of the end of the raised portion 212 away from the support portion 211 is greater than the width of the end connected to the support portion 211. The support portion 211 is horizontally positioned so that it can be placed on top of the multiple support protrusions 12, thus stably supporting the graphite disk. Preferably, an adhesive is provided at the upper end of the support protrusion 12, and the bottom end of the support portion 211 is fixedly connected to the support protrusion 12 by the adhesive. This ensures that the support portion 211 is stably placed on top of the support protrusion 12, preventing slippage or movement that could affect the stability of the support for the graphite disk.

[0033] like Figure 6 As shown, the disc-shaped structure in the middle is a graphite disk. The height of the outer end of the raised part 212 is higher than the height of the end of the graphite disk. Thus, the multiple raised parts 212 can surround the lower half of the graphite disk, preventing the graphite disk from moving and getting dirty, and can also stably support the graphite disk.

[0034] To prevent the graphite disk from moving and becoming contaminated, in some embodiments, please refer to... Figure 6The height of the end of the raised portion 212 away from the support portion 211 is higher than the height of the end of the graphite disk. The width of the outer end of the raised portion 212 is greater than the width of its inner end. In this way, when the graphite disk contacts the outer end of the raised portion 212, the raised portion 212 can stably support the graphite disk and increase the contact area with the end of the graphite disk. Secondly, it can prevent the graphite disk from moving inside the box 10 and effectively prevent contamination.

[0035] For ease of placement of the support plate 20 and the graphite disk, please refer to the following embodiments: Figure 1 , Figure 2 and Figure 4 The bottom of the box body 10 is arc-shaped and connected to multiple support legs 13, which support the box body 10. In this embodiment, the arc-shaped bottom of the box body 10 allows a support plate 20 to be placed inside the box body 10. The zigzag shape of the support plate 20 matches the arc shape of the bottom of the box body 10, allowing the support plate 20 to be placed inside the box body 10 and ensuring that the cover 30 seals the box body 10 without contacting the graphite disk. In this embodiment, there can be three or more support legs 13, which can provide stable support for the box body 10.

[0036] In some embodiments, please refer to Figure 1 and Figure 3 The upper end of the cover 30 is flat, and multiple protrusions 31 are connected to the outer top. In this embodiment, there are four protrusions 31, which makes it easy for workers to hold and remove the cover 30 by hand. Of course, the number of protrusions 31 is not limited, and there can be three or more.

[0037] In some embodiments, please refer to Figures 1 to 4 The cover 30 and the box 10 are detachably connected, such as by threaded connection or snap-fit ​​connection. In this embodiment, an internal thread 32 is provided on the inner circumferential wall at the bottom of the cover 30, and an external thread 14 is provided on the outer circumferential wall at the top of the box 10. The cover 30 and the box 10 are connected by mutual engagement, that is, the external thread 14 and the internal thread 32 are screwed together, thus achieving a threaded connection between the box 10 and the cover 30. When it is necessary to close the cover 30, it can be closed by screwing the cover 30 onto the upper end of the box 10. By screwing the cover 30 in the opposite direction, the cover 30 can be removed, and the box 10 can be opened.

[0038] In some embodiments, please refer to Figure 1 Both the box body 10 and the lid 30 are made of PC or PP. PC is polycarbonate plastic, an engineering plastic with high transparency, impact resistance, and high temperature resistance. It is often used in electronic product casings, automotive headlight covers, and other applications where strength and safety are critical. PP is polypropylene plastic, a general-purpose plastic that is lightweight, drop-resistant, cost-effective, and can withstand temperatures up to 100°C. It is commonly used in everyday storage boxes and food packaging.

[0039] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A single-set graphite disc packaging box, characterized in that, include: The box body has an internal cavity with an open top, and multiple support protrusions are provided on the bottom inner side of the box body; A support plate is disposed inside the cavity of the box body. The bottom end of the support plate is placed on the upper end of a plurality of support protrusions. The upper end of the support plate forms an area for placing a graphite disk. The contact area between the support plate and the graphite disk is smaller than the area of ​​the upper end surface of the support plate. A cover, connected to the box body, is adapted to cover the upper opening of the box body, and both the cover and the box body form a gap with the graphite disk.

2. The single-set graphite disc packaging box as described in claim 1, characterized in that, The support plate is arranged in a zigzag shape, and the graphite disk is placed horizontally on the upper end of the support plate, with its end in contact with the upper surface of the support plate. The height of the end of the support plate is higher than the height of the end of the graphite disk.

3. A single-set graphite disc packaging box as described in claim 2, characterized in that, The support plate includes multiple spring pieces arranged side by side at intervals. The spring pieces are in the shape of a zigzag line, with the bottom ends of the multiple spring pieces contacting the support protrusion and the upper ends contacting the end of the graphite disk.

4. A single-set graphite disc packaging box as described in claim 3, characterized in that, The spring includes a support portion and two raised portions respectively connected to both ends of the support portion. The raised portions are raised towards the cover at the end away from the support portion. The support portion and the two raised portions are combined to form a zigzag shape. The graphite disk is in contact with the raised portions. A gap is formed between the support portion and the graphite disk. The bottom end of the support portion is in contact with the support protrusion.

5. A single-set graphite disc packaging box as described in claim 4, characterized in that, The length of the support portion is greater than the length of the raised portion, and the width of the end of the raised portion away from the support portion is greater than the width of the end connected to the support portion.

6. A single-set graphite disc packaging box as described in claim 4, characterized in that, The height of the raised portion at the end away from the support portion is higher than the height of the graphite disk end.

7. A single-set graphite disc packaging box as described in claim 1, characterized in that, The bottom of the box is arc-shaped and has multiple support legs connected to it, which are used to support the box.

8. A single-set graphite disc packaging box as described in claim 1, characterized in that, The upper end of the cover is flat and has multiple protrusions on the outer top.

9. A single-set graphite disc packaging box as described in claim 1, characterized in that, The cover and the box are detachably connected.

10. A single-set graphite disc packaging box as described in claim 1, characterized in that, Both the box body and the cover are made of PC or PP.

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