Annealing machine high temperature protection system

Abstract

The utility model discloses an annealing machine high temperature prevention system, including furnace pipe body, graphene heat reflection layer and heat shield, furnace pipe body is metal material, is equipped with heating element in, graphene heat reflection layer is graphene heat reflection film, is uniformly wrapped in the outer wall of furnace pipe body, heat shield is metal material, is wrapped in the outside of graphene heat reflection layer, forms multilayer protection to furnace pipe body. The utility model has the advantages of: through setting up graphene heat reflection layer outside furnace pipe body and cooperating metal heat shield and forming multilayer protection, can reduce furnace pipe surface temperature rapidly, eliminates the risk of scalding of operator, reduces the heat dissipation of furnace pipe to the surrounding environment simultaneously, makes workshop temperature reduce rapidly, is favorable to the stable operation of surrounding precision equipment, improves production efficiency and product quality, and the high thermal conductivity of graphene material can optimize furnace pipe internal temperature distribution, improves annealing effect, improves bonding wire performance, and because graphene heat reflection layer is durable, has reduced maintenance cost.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, specifically to a high-temperature protection system for an annealing machine. Background Technology

[0002] In the field of semiconductor material manufacturing, bonding wires are the core components that enable electrical connections between chips and packaged casings, and their performance directly affects the reliability and stability of semiconductor devices. The annealing process is a crucial step in bonding wire production. By precisely heating, holding, and cooling the bonding wires through heating elements within the annealing furnace tube, the crystal structure of the bonding wires can be improved, and their mechanical properties (such as ductility and strength) and electrical properties (such as conductivity) can be optimized, thereby meeting the requirements of high-precision packaging.

[0003] Currently, the design focus of existing annealing machines is primarily on improving annealing efficiency and bond wire performance, with insufficient attention paid to protecting operators from burns. The furnace tube, as the core heating component of the annealing machine, can reach surface temperatures of 200-300℃ during high-temperature operations, and existing protective measures have significant limitations:

[0004] Physical isolation methods (such as installing metal protective nets or setting up warning signs) can only serve as a passive reminder and cannot fundamentally reduce the surface temperature of the furnace tubes. There is still a risk of burns from accidental contact.

[0005] Traditional heat insulation coatings (such as ceramic fiber and silicate coatings) can block heat to a certain extent, but they are prone to powdering and cracking when exposed to high temperature for a long time. Their heat insulation performance deteriorates quickly, requiring frequent shutdowns for replacement to maintain the effect. This not only increases maintenance costs but also affects production continuity.

[0006] While some improvements (such as protective devices with slide rail guards, insulation cotton, and warning lights) form a dual protection of "mechanical barrier + early warning," they still rely on passive isolation and warning, failing to solve the core problem of excessively high furnace tube surface temperature. The heat insulation efficiency is limited, and the risk of burns still exists when operators perform close-range operations such as equipment maintenance and troubleshooting.

[0007] Therefore, existing annealing machines do not yet have a solution that can balance high-efficiency heat insulation, long-term stability and low maintenance costs in terms of furnace tube high-temperature protection. There is an urgent need for a technical solution that can reduce the surface temperature of the furnace tube from the source and eliminate the risk of burns, so as to improve production safety and ensure production efficiency. Utility Model Content

[0008] The purpose of this invention is to provide a high-temperature protection system for annealing machines to solve the problems mentioned in the background art.

[0009] To achieve the above objectives, this utility model provides the following technical solution: a high-temperature protection system for an annealing machine, comprising a furnace tube body, a graphene heat-reflective layer, and a heat insulation cover; the furnace tube body is made of metal and has heating elements inside; the graphene heat-reflective layer is a graphene heat-reflective film, uniformly wrapped around the outer wall of the furnace tube body; the heat insulation cover is made of metal and wrapped around the outside of the graphene heat-reflective layer, forming multi-layer protection for the furnace tube body.

[0010] Preferably, the thickness of the graphene heat-reflective film is 0.1-0.5 mm.

[0011] Preferably, the graphene heat reflective layer 2 is fixed to the outer wall of the furnace tube body 1 by annular clamps, the annular clamps being made of stainless steel, and the spacing between adjacent clamps being 10-20cm.

[0012] Preferably, a gap is left between the heat insulation cover and the graphene heat reflective layer to reduce the direct conduction of heat to the heat insulation cover.

[0013] Preferably, the heating element circuit inside the furnace tube body is connected independently of the graphene heat reflective layer, and the graphene heat reflective layer does not participate in circuit signal transmission.

[0014] Compared with the prior art, the beneficial effects of this utility model are as follows: The high-temperature protection system of this utility model for annealing machines, by setting a graphene heat-reflective layer on the outside of the furnace tube and forming a multi-layer protection with a metal heat insulation cover, can quickly reduce the surface temperature of the furnace tube and completely eliminate the risk of burns to operators; at the same time, it reduces the heat dissipation of the furnace tube to the surrounding environment, so that the workshop temperature drops rapidly, which is conducive to the stable operation of surrounding precision equipment, improves production efficiency and product quality, and the high thermal conductivity of graphene material can optimize the internal temperature distribution of the furnace tube, improve the annealing effect, and improve the performance of bonding wires. In addition, the high durability of the graphene heat-reflective layer reduces maintenance costs. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of this utility model.

[0016] In the diagram: 1. Furnace tube body; 2. Graphene heat reflective layer; 3. Heat insulation cover. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0018] Please see Figure 1 This utility model provides a technical solution: a high-temperature protection system for an annealing machine, comprising a furnace tube body 1, a graphene heat reflective layer 2, and a heat insulation cover 3; the furnace tube body 1 is made of metal and has a heating element inside; the graphene heat reflective layer 2 is a graphene heat reflective film that is uniformly wrapped around the outer wall of the furnace tube body 1; the heat insulation cover 3 is made of metal and is wrapped around the outside of the graphene heat reflective layer 2, forming a multi-layer protection for the furnace tube body 1.

[0019] In this embodiment, the thickness of the graphene heat-reflective film is 0.1-0.5 mm.

[0020] In this embodiment, the graphene heat reflective layer 2 is fixed to the outer wall of the furnace tube body 1 by annular clamps. The annular clamps are made of stainless steel, and the spacing between adjacent clamps is 10-20cm.

[0021] In this embodiment, a gap is left between the heat insulation cover 3 and the graphene heat reflective layer 2 to reduce the direct conduction of heat to the heat insulation cover 3.

[0022] In this embodiment, the heating element circuit inside the furnace tube body 1 is connected independently of the graphene heat reflective layer 2, and the graphene heat reflective layer 2 does not participate in circuit signal transmission.

[0023] The working principle of this utility model's high-temperature protection system for annealing machines is as follows: By setting a graphene heat-reflective layer on the outer wall of the furnace tube, its high thermal conductivity and low infrared emissivity reflect most of the heat radiated outward by the internal heating elements back into the furnace tube. At the same time, it quickly conducts the remaining heat on the surface of the furnace tube to avoid local high-temperature accumulation. In conjunction with a metal heat insulation cover wrapped around the outside of the graphene heat-reflective layer, with a gap between the two forming an air heat insulation buffer layer, it further hinders the transfer of heat to the external environment, achieving multi-layer heat isolation for the furnace tube. Meanwhile, the heating element circuit inside the furnace tube is independent of the graphene heat-reflective layer, and the latter does not participate in circuit signal transmission. This ensures stable operation of the heating function while significantly reducing the temperature of the furnace tube surface and the surrounding environment, achieving the effects of preventing burns and optimizing the workshop environment.

[0024] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A high-temperature protection system for an annealing machine, characterized in that: It includes a furnace tube body (1), a graphene heat reflective layer (2), and a heat insulation cover (3); the furnace tube body (1) is made of metal and has a heating element inside; the graphene heat reflective layer (2) is a graphene heat reflective film that is uniformly wrapped around the outer wall of the furnace tube body (1); the heat insulation cover (3) is made of metal and is wrapped around the outside of the graphene heat reflective layer (2) to form a multi-layer protection for the furnace tube body (1).

2. The high-temperature protection system for an annealing machine according to claim 1, characterized in that: The thickness of the graphene heat-reflective film is 0.1-0.5 mm.

3. The high-temperature protection system for an annealing machine according to claim 1, characterized in that: The graphene heat reflective layer (2) is fixed to the outer wall of the furnace tube body (1) by annular clamps. The annular clamps are made of stainless steel and the spacing between adjacent clamps is 10-20cm.

4. The high-temperature protection system for an annealing machine according to claim 1, characterized in that: A gap is left between the heat insulation cover (3) and the graphene heat reflective layer (2) to reduce the direct conduction of heat to the heat insulation cover (3).

5. The high-temperature protection system for an annealing machine according to claim 1, characterized in that: The heating element circuit inside the furnace tube body (1) is independent of the graphene heat reflective layer (2), and the graphene heat reflective layer (2) does not participate in the transmission of circuit signals.

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