An RPD device
Patent Information
- Application Number
- CN202522202668.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-17
- Publication Date
- 2026-11-03
- Estimated Expiration
- 2035-10-17
AI Technical Summary
During the intermittent coating process of RPD equipment, the conveyor channel is easily contaminated by dust during non-processing periods, and existing technologies are unable to effectively prevent dust from entering.
Design a dust-blocking component, including a connecting frame and a dust-blocking plate. The dust-blocking plate is movably inserted into the connecting frame through a clearance groove. During processing, the furnace opening is open, and during non-processing, the furnace opening is blocked. Combined with rollers and a drive, the dust-blocking plate can be quickly disassembled and cleaned.
It effectively prevents dust from contaminating the conveyor channel, improves production efficiency, ensures coating quality, and keeps the equipment clean by quickly removing and installing dust baffles, reducing downtime.
Smart Images
Figure CN224930636U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of coating technology, and in particular to an RPD device. Background Technology
[0002] RPD equipment, also known as reactive plasma deposition equipment, involves the workpiece being transported within a conveyor channel during operation. The plasma source bombards the target material inside the furnace, causing the target material to sublimate into particles that pass through the furnace opening and drift toward the workpiece being processed within the conveyor channel, where they are deposited to form a thin film on the surface of the workpiece.
[0003] When performing a diversified sample coating process, an intermittent process is required. During the entire intermittent process, the conveying of the workpiece to be processed is discontinuous and staged. When there is no workpiece to be processed at the position of the conveying channel directly opposite the furnace opening, the particles passing through the furnace opening will adhere to the inner wall of the conveying channel or other components. These particles are regarded as dust, and the inner wall of the conveying channel or other components will be contaminated by dust. Utility Model Content
[0004] The main purpose of this invention is to provide an RPD device that uses a dust-blocking component to prevent dust from entering the conveying channel during non-processing periods.
[0005] To achieve the above objectives, this utility model proposes an RPD device, including a conveying channel, a furnace body, and a dust-blocking assembly. The dust-blocking assembly is disposed between the conveying channel and the furnace body, and the furnace body has a furnace opening. The dust-blocking assembly includes: A connecting frame is fixedly installed at the furnace opening. A connecting port and a clearance groove are provided on the connecting frame. The connecting port is provided in the connecting frame in a direction perpendicular to the plane where the furnace opening is located, and the conveying channel is connected to the furnace body through the connecting port. The clearance groove is provided in the connecting frame in a direction parallel to the plane where the furnace opening is located. The dust baffle is movably inserted into the connecting frame along the clearance groove to cover or open the connecting port.
[0006] Optionally, the dust baffle assembly also includes a storage box, which is located outside the furnace body. The storage box is detachably connected to the connecting frame. The storage box has an internal receiving cavity that communicates with the clearance groove. The dust baffle is movably stored in the storage box.
[0007] Optionally, the dust-blocking assembly also includes rollers that are rotatably mounted on the dust-blocking plate to roll and support the dust-blocking plate.
[0008] Optionally, the inner wall of the storage box is provided with a storage roller groove. The extension direction of the storage roller groove is parallel to the extension direction of the conveying channel. The storage roller groove is adapted to the roller to limit the rolling direction of the roller. The roller is movably embedded in the storage roller groove and rolls along it.
[0009] Optionally, the inner wall of the connecting frame is provided with a connecting groove, the extending direction of the connecting groove is parallel to the extending direction of the conveying channel, the connecting groove is adapted to the roller to limit the rolling direction of the roller, and the roller is movably embedded in the connecting groove and rolls along it.
[0010] Optionally, the side wall of the connecting frame is provided with a moving channel, and the connecting groove is opened on the inner wall of the moving channel. In the direction from the furnace opening to the conveying channel, the moving channel is offset from the furnace opening.
[0011] Optionally, the dust baffle assembly also includes a driver, the driver's body being located outside the furnace and connected to a storage box, and the driver's output shaft being connected to the dust baffle.
[0012] Optionally, the dust-blocking assembly also includes a guide tube and a guide rod; the guide tube is fixedly installed in the connecting frame, one end of the guide rod is connected to the dust-blocking plate, and the other end passes through the guide tube and is movably connected to it.
[0013] Optionally, the dust baffle has a cooling channel inside, and the external cooling medium flows along the cooling channel.
[0014] Optionally, the guide rod is provided with a conveying channel that is connected to the cooling channel and is used to provide cooling medium to the cooling channel.
[0015] The beneficial effects of this utility model are as follows: During the processing period, multiple workpieces to be processed are continuously conveyed in the conveying channel. The dust baffle opens the connection port and the furnace opening, and particles in the furnace body pass through the furnace opening and the connection port and are deposited on the surface of the workpieces to be processed facing the connection port and the furnace opening. The particles are deposited on the surface of the workpieces to be processed to form the required film. During non-processing periods, the dust baffle blocks the connection port and the furnace opening, and the particles in the furnace are blocked by the baffle and cannot enter the conveying channel, thus avoiding contamination of the conveying channel. The dust baffle assembly is set between the conveying channel and the furnace body. When the dust accumulated on the surface of the dust baffle reaches a certain level, the dust baffle can be removed for cleaning. The dust baffle can be removed and installed quickly, ensuring production efficiency. Attached Figure Description
[0016] The present invention will now be described in detail with reference to specific embodiments and accompanying drawings, wherein: Figure 1 This is a schematic diagram of the overall structure of the RPD device provided in a specific implementation.
[0017] Figure 2 This is a schematic diagram showing the dust-blocking component in the RPD device provided in a specific embodiment as being in the open state.
[0018] Figure 3 for Figure 2 A magnified view of part V1 in the middle.
[0019] Figure 4This is a schematic diagram showing the dust-blocking component in the RPD device provided in a specific embodiment as being in a closed state.
[0020] Figure 5 This is an exploded view of the dust-blocking component in the RPD device provided in a specific embodiment.
[0021] Figure 6 for Figure 5 A magnified view of part V2 in the middle.
[0022] Figure 7 This is a partial structural diagram of the dust-blocking component in the RPD device provided in a specific embodiment.
[0023] Figure 8 for Figure 7 A schematic diagram of the partial structure of the V3 section.
[0024] exist Figure 1-8 The attached icon is labeled as follows: 1. Transmission channel; 2. Furnace body; 21. Furnace opening; 3. Dustproof assembly; 31. Connecting frame; 32. Dustproof plate; 33. Storage box; 34. Roller; 35. Driver; 36. Guide tube; 37. Guide rod; 38. Protective plate screw; 311. Connection port; 312. Clearance groove; 313. Connecting roller groove; 314. Moving channel; 321. Cooling channel; 331. Storage roller groove; 371. Conveying channel. Detailed Implementation
[0025] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the following specific embodiments are only used to explain this utility model and do not constitute a limitation thereof.
[0026] Please see Figures 1 to 8 In this specific embodiment, an RPD device is provided, including a conveying channel 1, a furnace body 2, and a dust-blocking component 3. The dust-blocking component 3 is disposed between the conveying channel 1 and the furnace body 2. The workpiece to be processed is conveyed in the conveying channel 1. The furnace body 2 has a furnace opening 21, from which particles float out and perform corresponding coating processing on the workpiece to be processed facing the furnace opening 21.
[0027] Please see Figure 2-4 In this specific embodiment, the dust-blocking component 3 includes a connecting frame 31 and a dust-blocking plate 32.
[0028] The connecting frame 31 is fixedly mounted on the furnace opening 21 and is fixedly connected to the furnace body 2. A connecting port 311 and a clearance groove 312 are provided on the connecting frame 31. The connecting port 311 is located perpendicular to the plane of the furnace opening 21. The plane of the furnace opening 21 is parallel to the coating plane of the workpiece to be processed. The conveying channel 1 is connected to the furnace body 2 through the connecting port 311 and the furnace opening 21. The furnace body 2 is equipped with an ion source and a target material. After the ion source bombards the target material, the target material becomes… The particles disperse and drift out from the furnace opening 21; the clearance groove 312 is opened in the connecting frame 31 in a direction parallel to the plane where the furnace opening 21 is located, that is, the extension direction of the clearance groove 312 is parallel to the plane where the furnace opening 21 is located, and the dust baffle 32 can be inserted into or slid out of the connecting port 312 of the connecting frame 31 along the extension direction of the clearance groove 312; the dust baffle 32 is movably connected to the connecting frame 31, and the dust baffle 32 is inserted into or removed from the connecting frame 31 along the clearance groove 312 to block or open the connecting port 311. The clearance groove 312 provides passage space for the dust baffle 32. When the dust baffle 32 is not inserted into the connection port 311, the connection port 311 is completely open, and the conveying channel 1 and the furnace body 2 are completely connected. Particles from the furnace body 2 can freely drift from the connection port 311 and adhere to the workpiece to be processed facing the furnace opening 21. When the dust baffle 32 is inserted into the connection frame 31 along the clearance groove 312, the dust baffle 32 blocks the connection port 311 and the furnace opening 21. The space that was originally completely connected between the conveying channel 1 and the furnace body 2 is blocked by the dust baffle 32, and particles cannot drift out from the furnace opening 21 and contaminate other parts in the conveying channel 1.
[0029] like Figure 1 As shown, the RPD equipment in this specific embodiment is a horizontal RPD. The furnace body 2, dust baffle 3 and conveying channel 1 are arranged sequentially from bottom to top. The workpiece to be processed enters the conveying channel 1 in a horizontal posture, i.e., a horizontal posture. The plane where the furnace opening 21 is located is a horizontal plane.
[0030] In some other specific embodiments, the RPD equipment is a vertical RPD, with the furnace body 2, dust baffle 3 and conveying channel 1 arranged sequentially in the horizontal direction. The workpiece to be processed enters the conveying channel 1 in a vertical posture, and the plane where the furnace opening 21 is located is a vertical plane.
[0031] The processing period refers to the time when the workpiece to be processed moves to the position of the conveyor channel 1 directly opposite the furnace opening 21. At this time, the dust baffle 32 does not block the furnace opening 21, and the particles pass through the furnace opening 21 and adhere to the surface of the workpiece to be processed directly opposite the furnace opening 21.
[0032] The non-processing period refers to the period when there are no workpieces to be processed at the position of the conveyor channel 1 directly opposite the furnace opening 21. At this time, the dust baffle 32 blocks the furnace opening 21, and particles adhere to the surface of the dust baffle 32.
[0033] In practical applications, once the dust adhering to the dust baffle 32 reaches a certain amount, it needs to be removed. At this time, it is only necessary to remove the dust baffle 32 without disassembling the conveyor channel 1, furnace body 2, or connecting frame 31. This results in high disassembly and assembly efficiency and ensures production efficiency.
[0034] Please see Figure 2-4 In this specific embodiment, the dust-blocking assembly 3 also includes a storage box 33, which is disposed outside the furnace body 2. The storage box 33 is detachably and sealed to the connecting frame 31. The storage box 33 has an internal accommodating cavity that communicates with the clearance groove 312. The storage box 33 is used to store the dust-blocking plate 32. The storage box 33 is sealed to the connecting frame 31 to maintain the vacuum level inside the furnace body 2. During processing, the dust-blocking plate 32 passes through the clearance groove 312 and enters the accommodating cavity. During non-processing periods, the dust-blocking plate 32 slides out of the accommodating cavity and enters the connection port 311 of the connecting frame 31.
[0035] After multiple processing steps, a large amount of dust may adhere to the surface of the dust baffle 32 on the side near the furnace body 2. The storage box 33 and the dust baffle 32 can be removed together. Technicians can clean, inspect, repair or replace the removed storage box 33 and dust baffle 32 separately without disassembling the specific structure of the conveying channel 1 or the furnace body 2 in the RPD equipment.
[0036] Please see Figure 5-8 In this specific embodiment, the dust-blocking assembly 3 further includes a roller 34, which is rotatably mounted on the dust-blocking plate 32 and is used to roll and support the dust-blocking plate 32. Using the roller 34 to roll and support the dust-blocking plate 32 makes the movement of the dust-blocking plate 32 smoother.
[0037] The inner wall of the storage box 33 is provided with a storage groove 331. The extension direction of the storage groove 331 is parallel to the extension direction of the conveying channel 1. The storage groove 331 is used to limit the rolling direction of the roller 34. The width of the storage groove 331 is adapted to the width of the roller 34. A part of the roller 34 extends into the storage groove 331. The two opposing inner walls of the storage groove 331 limit the roller 34 to prevent the roller 34 from deviating from the preset rolling direction. Specifically, the top and bottom walls of the accommodating cavity are provided with storage grooves 331. For the same roller 34, the bottom of the roller 34 extends into the storage groove 331 located on the bottom wall, and the top of the roller 34 extends into the storage groove 331 located on the top wall. Rollers 34 are provided on both sides of the dust baffle 32 in the direction of movement. The bottom wall of the accommodating cavity is provided with two receiving roller grooves 331, which correspond one-to-one with the rollers 34 located on both sides of the dust baffle 32. The top wall of the accommodating cavity is provided with two receiving roller grooves 331, which correspond one-to-one with the rollers 34 located on both sides of the dust baffle 32.
[0038] The inner wall of the connecting frame 31 is provided with a connecting groove 313. The extending direction of the connecting groove 313 is parallel to the extending direction of the conveying channel 1. The connecting groove 313 is used to limit the rolling direction of the roller 34. The width of the connecting groove 313 is adapted to the width of the roller 34. A part of the roller 34 extends into the connecting groove 313. The two opposing inner walls of the connecting groove 313 limit the roller 34 to prevent the roller 34 from deviating from the preset rolling direction. The storage box 33 is set on one side of the connecting frame 31, and the opening of the cavity in the storage box 33 is aligned and engaged with the opening of the relief groove 312 in the connecting frame 31. Then the dust baffle 32 can be inserted into the connecting frame 31 along the relief groove 312 or retracted into the cavity in the storage box 33 along the relief groove 312.
[0039] Please see Figure 2-8 In this specific embodiment, the side wall of the connecting frame 31 is provided with a moving channel 314, and a connecting groove 313 is formed on the inner wall of the moving channel 314. In the direction from the furnace opening 21 to the conveying channel 1, the moving channel 314 is offset from the furnace opening 21. When the roller 34 slides into the moving channel 314, the roller 34 extends into the connecting groove 313. When particles drift towards the furnace opening 21, since the roller 34 is located in the moving channel 314, the amount of particle adhesion can be reduced, and the roller 34 is prevented from jumping within the moving channel 314 due to changes in local thickness. Specifically, the top and bottom walls of the moving channel 314 are provided with connecting grooves 313. For the same roller 34, the bottom of the roller 34 extends into the connecting groove 313 located on the bottom wall, and the top of the roller 34 extends into the connecting groove 313 located on the top wall. The two opposite side walls of the connecting frame 31 are provided with moving channels 314, and the two moving channels 314 correspond one-to-one with the rollers 34 located on both sides of the dust baffle 32.
[0040] Please see Figure 2-8 In this specific embodiment, the receiving groove 331 and the connecting groove 313 are aligned and connected in the rolling direction of the roller 34.
[0041] Please see Figure 2-6 In this specific embodiment, the dust-blocking component 3 also includes a driver 35. The body of the driver 35 is located outside the furnace body 2 and connected to the storage box 33. The output shaft of the driver 35 is connected to the dust-blocking plate 32.
[0042] It should be noted that, in the specific implementation of the technical solution provided in this embodiment, a linear motor or a linear cylinder can be selected by a technician as the driver 35 to implement the technical solution. The working principle of the driver 35 belongs to the prior art. A technician can select a suitable device with corresponding driving capability from the market and apply it according to the technical solution.
[0043] Please see Figure 2-6In this specific embodiment, the dust-blocking assembly 3 also includes a guide tube 36 and a guide rod 37; the guide tube 36 is fixedly disposed on the connecting frame 31, one end of the guide rod 37 is connected to the dust-blocking plate 32, and the other end of the guide rod 37 passes through the guide tube 36 and is movably connected to it.
[0044] The guide rod 37 and guide tube 36 work together to ensure that the dust baffle 32 can move in a preset direction, preventing the dust baffle 32 from swaying or the roller 34 from jumping. Optionally, a seal is provided between the guide rod 37 and the guide tube 36 to maintain the vacuum level of the furnace body 2.
[0045] Please see Figure 2-6 In this specific embodiment, the guide rod 37 and the driver 35 are respectively disposed on both sides of the storage box 33, and the axis of the guide rod 37 is parallel to the axis of the output shaft of the driver 35, thus optimizing the positional layout of the guide rod 37 and the driver 35.
[0046] Please see Figure 2-6 In other embodiments, the guide rod 37 and the driver 35 are located on the same side of the storage box 33.
[0047] Please see Figure 2-8 In this specific embodiment, the dust baffle 32 has a cooling channel 321 inside, and the external cooling medium flows along the cooling channel 321.
[0048] When the RPD equipment is running, the sublimated particles have a high temperature. When the dust baffle 32 moves to the furnace opening 21, the particles adhere to the dust baffle 32, causing the temperature of the dust baffle 32 to rise. When the dust baffle 32 is stored in the receiving cavity of the storage box 33, the temperature of the dust baffle 32 drops. In order to avoid frequent heating and cooling and to ensure the dust baffle 32's dust-blocking effect, when the dust baffle 32 moves to the furnace opening 21, a cooling medium is introduced into the cooling channel 321 to prevent the temperature of the dust baffle 32 from becoming too high.
[0049] Please see Figure 2-8 In this specific embodiment, the guide rod 37 is provided with a conveying channel 371, which is connected to the cooling channel 321. The conveying channel 371 is used to provide a cooling medium to the cooling channel 321.
[0050] Please see Figure 2-8 In this specific embodiment, one end of the guide rod 37 is connected to the dust baffle 32, and the connection between the guide rod 37 and the dust baffle 32 is the connection point between the conveying channel 371 and the cooling channel 321. The other end of the guide rod 37 is connected to the cooling system, which supplies cooling medium to the conveying channel 371. Since the interior of the furnace body 2 needs to maintain a vacuum, and the dust baffle 32 needs to switch positions between the storage box 33 and the connecting frame 31, setting the conveying channel 371 on the guide rod 37 eliminates the need for additional conveying pipes, reducing the risk of vacuum leakage.
[0051] Specifically, there are two conveying channels 371, one of which connects to the inlet of the cooling channel 321, and the other of which connects to the outlet of the cooling channel 321.
[0052] Please see Figure 2-8 In this specific embodiment, a protective plate is provided on the side of the dust baffle 32 away from the furnace body 21, and the protective plate and the dust baffle 32 are locked together by protective plate screws 38.
[0053] The above description is only a preferred embodiment of the present utility model and does not limit the patent scope of the present utility model. All equivalent structural transformations made under the inventive concept of the present utility model using the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.
Claims
1. An RPD device, characterized in that, The system includes a conveyor channel, a furnace body, and a dust-blocking assembly. The dust-blocking assembly is disposed between the conveyor channel and the furnace body. The furnace body has a furnace opening. The dust-blocking assembly includes: A connecting frame is fixedly mounted on the furnace opening. The connecting frame has a connecting port and a clearance groove. The connecting port is located in the connecting frame in a direction perpendicular to the plane of the furnace opening, and the conveying channel communicates with the furnace body through the connecting port. The clearance groove is located in the connecting frame in a direction parallel to the plane of the furnace opening. A dust baffle is movably inserted into the connecting frame along the clearance groove to cover or open the connecting port.
2. The RPD device as described in claim 1, characterized in that, The dust-blocking assembly also includes a storage box, which is disposed outside the furnace body. The storage box is detachably connected to the connecting frame. The storage box has an internal accommodating cavity that communicates with the clearance groove. The dust-blocking plate is movably stored in the storage box.
3. The RPD device as described in claim 2, characterized in that, The dust-blocking assembly also includes rollers, which are rotatably mounted on the dust-blocking plate to roll and support the dust-blocking plate.
4. The RPD device as described in claim 3, characterized in that, The inner wall of the storage box is provided with a storage roller groove. The extension direction of the storage roller groove is parallel to the extension direction of the conveying channel. The storage roller groove is adapted to the roller to limit the rolling direction of the roller. The roller is movably embedded in the storage roller groove and rolls along it.
5. The RPD device as described in claim 3, characterized in that, The inner wall of the connecting frame is provided with a connecting groove. The extending direction of the connecting groove is parallel to the extending direction of the conveying channel. The connecting groove is adapted to the roller to limit the rolling direction of the roller. The roller is movably embedded in the connecting groove and rolls along it.
6. The RPD device as described in claim 5, characterized in that, The side wall of the connecting frame is provided with a moving channel, and the connecting groove is opened on the inner wall of the moving channel. In the direction from the furnace opening to the conveying channel, the moving channel is offset from the furnace opening.
7. The RPD device as described in claim 2, characterized in that, The dust-blocking assembly also includes a driver, the body of which is disposed outside the furnace body and connected to the storage box, and the output shaft of the driver is connected to the dust-blocking plate.
8. The RPD device according to claim 1, characterized in that, The dust-blocking assembly also includes a guide tube and a guide rod; the guide tube is fixedly installed in the connecting frame, one end of the guide rod is connected to the dust-blocking plate, and the other end passes through the guide tube and is movably connected to it.
9. The RPD device according to claim 8, characterized in that, The dust baffle has a cooling channel inside, and the external cooling medium flows along the cooling channel.
10. The RPD device according to claim 9, characterized in that, The guide rod is provided with a conveying channel, which is connected to the cooling channel and is used to provide a cooling medium to the cooling channel.