A detachable shower device of an upper cover plate of a process chamber of an atomic layer deposition apparatus

Abstract

The utility model relates to a detachable spraying device of atom layer deposition equipment process chamber upper cover plate, including dispersion mechanism, cover and at least one dispersion pipe, the bottom of dispersion mechanism is installed on the cover, is provided with at least one installation interface on the top one side of dispersion mechanism, is installed the joint in the first side of dispersion pipe, the second side of dispersion pipe is detachably sealed and is connected in installation interface through a quick -witted formula locking mechanism, and the second side of dispersion pipe is located in the dispersion mechanism and is provided with dispersion shower nozzle, the utility model discloses through the quick -witted formula locking mechanism (installation nut and positioning ring cooperation) of lateral, has realized the single person, quick dismounting of dispersion pipe assembly, when replacing or cleaning the spraying unit, only needs to unscrew a nut to draw out the dispersion pipe from the side, need not touch the upper cover or complicated internal pipeline, will maintain time greatly shorten, significantly improves equipment utilization rate.

Description

Technical Field

[0001] This utility model relates to the technical field of atomic layer deposition equipment, and in particular to a detachable spray device for the upper cover plate of the process chamber of an atomic layer deposition equipment. Background Technology

[0002] Atomic layer deposition (ALD) technology grows thin films layer by layer at the atomic level by alternately introducing different precursor gases onto the substrate surface, offering excellent uniformity, conformability, and thickness control. During this process, the reactant gases enter the chamber through a spray system, and the uniformity of their distribution directly determines the uniformity of the film thickness and quality.

[0003] Traditional spray systems are often integrated with the chamber cover or gas distribution system or use complex multi-bolt fixing, which has the following drawbacks: For example, in the Chinese patent with announcement number CN222313292U, when the spray head needs to be cleaned or replaced due to film adhesion or changes in process formula, it is often necessary to disassemble the entire top cover assembly or a large number of fasteners. The operation is cumbersome, resulting in excessively long equipment maintenance time, which seriously affects equipment utilization and production capacity.

[0004] For example, Chinese patent CN120350358A uses a complex multi-layered gas distribution assembly (such as a three-stage system consisting of a diffuser plate, a buffer layer, and a uniform distribution plate) below the spray head to passively adjust the flow field; or, as in Chinese patent CN120464988A, a spray chamber with a guide plate is designed to pre-disperse the gas before it enters the spray holes. However, these optimized structures are usually fixedly integrated with the main spray body. Once the gas distribution pattern needs to be adjusted to adapt to a new process (such as changing the distribution or aperture of the spray holes), the aforementioned maintenance difficulties still exist. In other words, the optimized design of the gas distribution does not bring convenience to maintenance.

[0005] In view of the above-mentioned shortcomings, the designer actively researched and innovated in order to create a detachable spray device for the upper cover of the process chamber of an atomic layer deposition equipment, so as to make it more industrially valuable. Utility Model Content

[0006] To solve the above-mentioned technical problems, the purpose of this utility model is to provide a detachable spray device for the upper cover plate of the process chamber of an atomic layer deposition equipment.

[0007] To achieve the above objectives, the present invention adopts the following technical solution: A detachable spray device for the upper cover of the process chamber of an atomic layer deposition equipment includes a dispersion mechanism, a cover plate, and at least one dispersion pipe; The bottom of the diffusion mechanism is mounted on the cover plate, and at least one installation interface is provided on one side of the top of the diffusion mechanism. A connector is installed on the first side of the diffusion tube, and the second side of the diffusion tube is detachably and sealed to the installation interface by a quick-connect locking mechanism. The second side of the diffusion tube is located inside the diffusion mechanism and is provided with a diffusion nozzle. The quick-connect locking mechanism includes a positioning ring and a mounting nut. The positioning ring is located on the side of the diffusion tube near the diffusion nozzle. The mounting nut is sleeved on the diffusion tube and located between the positioning ring and the diffusion nozzle. By screwing the mounting nut, its end face presses against the positioning ring, thereby locking the diffusion tube to the installation interface of the diffusion mechanism.

[0008] As a further improvement of this utility model, a sealing groove is provided in the installation interface, and a sealing ring is provided in the sealing groove; when the diffusion tube is locked, the tube wall of the diffusion tube and the sealing ring are interference-fitted to form a radial seal.

[0009] As a further improvement of this utility model, a number of spray holes are provided on the spray surface of the diffusion nozzle, and a spray plate is installed at the bottom of the cover plate, with a number of spray through holes provided on the spray plate.

[0010] As a further improvement of this utility model, the distribution density of several spray holes gradually increases from the center of the spray surface to the edge.

[0011] As a further improvement of this utility model, the diameter of the spray holes located in the edge region of the spray surface is larger than the diameter of the spray holes in the central region.

[0012] As a further improvement of this utility model, a flow equalization plate is also installed on the cover plate below the spray plate, and a number of flow equalization holes are evenly opened on the flow equalization plate.

[0013] As a further improvement of this utility model, the mounting nut is provided with a mounting through hole that matches the outer diameter of the diffusion tube, one end is provided with an external thread that matches the internal thread of the mounting interface of the diffusion mechanism, and the other end is provided with a polygonal structure that facilitates wrench operation.

[0014] As a further improvement of this utility model, a positioning pin is provided on the installation interface of the diffusion mechanism, and a positioning pin groove that cooperates with the positioning pin is provided on the diffusion tube to restrict the circumferential rotation of the diffusion tube when it is locked.

[0015] As a further improvement of this utility model, the diffusion nozzle can be detachably connected to the diffusion tube, including but not limited to threaded connection, snap-fit ​​connection and quick connector connection.

[0016] By means of the above solution, this utility model has at least the following advantages: This invention enables single-person, quick assembly and disassembly of the diffusion tube assembly through a side-mounted quick-connect locking mechanism (with the mounting nut and positioning ring engaging). When replacing or cleaning the spray unit, only one nut needs to be loosened to pull out the diffusion tube from the side, without touching the top cover or complex internal pipelines, greatly shortening maintenance time and significantly improving equipment uptime.

[0017] This invention modularizes the airflow uniformity optimization function into a detachable diffusion nozzle. By designing and equipping nozzles with different spray hole distribution patterns (sparse at the center and dense at the edges, larger edge hole diameter, etc.), it can actively compensate for the non-uniformity of airflow distribution for different process gases and different chamber geometry, thereby fundamentally optimizing film uniformity.

[0018] This invention combines the two major functions of "quick replacement" and "airflow optimization", enabling the equipment to quickly switch between different airflow distribution modes, much like changing a "filter". This greatly enhances the equipment's adaptability to diverse process formulations.

[0019] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the following are the preferred embodiments of this utility model and are described in detail with reference to the accompanying drawings. Attached Figure Description

[0020] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the structure of a detachable spray device for the upper cover of the process chamber of an atomic layer deposition equipment according to the present invention; Figure 2 yes Figure 1 A bottom view; Figure 3 yes Figure 1 A schematic diagram of the structure of the diffusion tube.

[0022] The meanings of the labels in the figures are as follows.

[0023] 1. Dispersion mechanism; 2. Cover plate; 3. Spray plate; 4. Dispersion pipe; 5. Connector; 6. Positioning ring; 7. Mounting nut; 8. Mounting interface; 9. Sealing ring; 10. Dispersion nozzle. Detailed Implementation

[0024] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0025] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0026] The first embodiment of this utility model: like Figures 1-3 As shown in this embodiment, a detachable spray device for the upper cover of the process chamber of an atomic layer deposition equipment mainly includes: 1. Core Structure and Connections The core structure of the device includes a diffusion mechanism 1, a cover plate 2, a spray plate 3, a diffusion pipe 4, a connector 5, a positioning ring 6, a mounting nut 7, a sealing ring 9, and a diffusion nozzle 10.

[0027] The dispersion mechanism 1 serves as the gas distribution center, and its bottom is fixedly mounted on the cover plate 2. At least one mounting interface 8 is machined on the top side of the dispersion mechanism 1.

[0028] The diffusion tube 4 is the gas delivery channel. A standard connector 5 is installed on its first side, located outside the equipment, for connecting to an external gas source. Its second side extends through the mounting interface 8 and into the internal cavity of the diffusion mechanism 1.

[0029] The diffusion nozzle 10 is installed at the end of the second side of the diffusion tube 4 and is located inside the diffusion mechanism 1. Its function is to disperse and spray the gas.

[0030] The spray plate 3 is installed at the bottom of the cover plate 2. The plate has an array of spray holes to allow gas to enter the process chamber below.

[0031] The quick-connect locking mechanism, which is key to achieving rapid assembly and disassembly, consists of a positioning ring 6 and a mounting nut 7. The positioning ring 6 is fixedly sleeved on the diffusion tube 4, positioned close to the diffusion nozzle 10. The mounting nut 7 is sleeved on the diffusion tube 4, located between the positioning ring 6 and the diffusion nozzle 10. By tightening the mounting nut 7, its end face presses against the positioning ring 6, thereby tightening and locking the entire diffusion tube 4 assembly onto the mounting interface 8 of the diffusion mechanism 1.

[0032] 2. Sealing and positioning design To ensure airtightness and facilitate installation, the solution in this embodiment includes the following design: An annular sealing groove is machined into the inner wall of the mounting interface 8, and a sealing ring 9 (usually an O-ring) is placed in the groove. When the diffusion tube 4 is locked in place, its tube wall and the inner ring of the sealing ring 9 form an interference fit, creating a reliable radial seal to prevent gas leakage from the interface.

[0033] To prevent the dispersion tube 4 from rotating when the mounting nut 7 is tightened, a locating pin is provided on the outside of the mounting interface 8 of the dispersion mechanism 1. Correspondingly, an axial locating pin groove is machined on the tube body of the dispersion tube 4. During installation, the locating pin is inserted into the groove to restrict the circumferential rotation of the dispersion tube 4, ensuring accurate installation orientation and preventing damage to the sealing ring.

[0034] The mounting nut 7 has a mounting through hole at its center that matches the outer diameter of the diffusion tube 4. One end of the nut is machined with an external thread that mates with the internal thread of the mounting interface 8; the other end is shaped into a hexagonal or other polygonal structure for easy tightening with a standard wrench.

[0035] 3. Gas Uniformity Optimization Design The solution in this embodiment actively optimizes the uniformity of gas distribution through a two-stage structure: First-level optimization (diffusion nozzle 10): Several fine spray holes are formed on the spray surface of the diffusion nozzle 10. Its design follows specific rules: the distribution density of the spray holes gradually increases from the geometric center of the spray surface towards the edge region; simultaneously, the diameter of the spray holes located in the edge region is larger than that of the spray holes in the central region. This non-uniform distribution of "sparse and small at the center, dense and large at the edge" is an active compensation for the physical phenomenon that diffusion attenuation easily occurs when gas flows from the center to the edge, aiming to make the gas output more uniform from the source.

[0036] Secondary optimization (flow equalization plate): To further improve uniformity, a flow equalization plate can be added to the cover plate 2 below the spray plate 3. This flow equalization plate is evenly and densely covered with a large number of smaller diameter flow equalization holes. Its function is to further disperse, mix and equalize the gas after passing through the spray plate 3, thereby achieving ultimate homogenization of the gas before it enters the main process chamber.

[0037] 4. Modular and maintainable design To achieve high flexibility and maintainability, the solution in this embodiment adopts a modular design: The connection between the diffusion nozzle 10 and the diffusion tube 4 is also designed to be detachable. Connection methods include, but are not limited to, precision threaded connections, snap-fit ​​connections, or quick-connect couplings. This allows users to independently replace diffusion nozzles 10 with different spray orifice designs to adapt to different process gases or thin-film deposition formulations without replacing the entire diffusion tube 4 assembly, significantly improving process adaptability and spare parts management economy.

[0038] 5. The collaborative working process of each component The process gas enters the dispersion tube 4 through connector 5, flows to the dispersion nozzle 10, and is then sprayed out from its designed spray holes at an optimized flow rate ratio, undergoing initial mixing within the cavity of the dispersion mechanism 1. Subsequently, the gas is gradually homogenized through the guide holes of the spray plate 3 and the flow equalization holes of the flow equalization plate, ultimately forming a uniform and stable airflow that covers the entire substrate below, completing the atomic layer deposition reaction. When maintenance or nozzle replacement is required, simply loosen the mounting nut 7 with a wrench to pull out the entire dispersion tube assembly from the side; the operation is simple and quick.

[0039] The second embodiment of this utility model: like Figures 1-3 As shown, this embodiment provides a specific spray device for a semiconductor ALD equipment (i.e., a detachable spray device for the upper cover of the process chamber of an atomic layer deposition equipment). The dispersion mechanism 1 is an alloy block with an internal cavity, which is fastened to the center of the upper surface of the stainless steel cover plate 2 by bolts. A mounting interface 8 is horizontally provided on the side of the dispersion mechanism 1. The mounting interface 8 is a precision-machined round hole with internal threads on the inner wall and an annular sealing groove in the middle.

[0040] The dispersion tube 4 is a slender, corrosion-resistant alloy tube. A standard connector 5 is welded to its outer first end for connecting to an external process gas pipeline. The inner second end passes sequentially through a mounting nut 7, a positioning ring 6, and a sealing ring 9 of the mounting interface 8. The positioning ring 6 is fixed to a specific position on the dispersion tube 4 by interference fit or welding. A detachable dispersion nozzle 10 is connected to the second end of the dispersion tube 4 via a precision thread. Specifically, the spray surface of the dispersion nozzle 10, facing the chamber, has several tiny spray holes machined on it. These holes are distributed in concentric rings. From the central first ring to the outermost ring, the number of holes in each ring increases progressively. This "sparse and small at the center, dense and large at the edges" distribution is the result of fluid dynamics simulation optimization, specifically designed to compensate for the natural attenuation of airflow at the edges.

[0041] The quick-connect locking mechanism consists of a positioning ring 6 and a mounting nut 7. The mounting nut 7 is fitted onto the diffusion tube 4 and positioned between the positioning ring 6 and the diffusion nozzle 10. The external thread at one end of the mounting nut 7 matches the internal thread of the mounting interface 8, and the other end is machined into a standard hexagonal structure. During installation, the diffusion tube assembly is inserted into the mounting interface 8, and then the hexagonal head is tightened with a wrench. The mounting nut 7 moves inward, its end face pressing against the positioning ring 6. Continued tightening generates axial tension, firmly tightening the diffusion tube 4 along with the diffusion nozzle 10, and causing the tube wall of the diffusion tube 4 to compress the sealing ring 9, forming a reliable radial static seal. To prevent the diffusion tube 4 from rotating during tightening, a positioning pin is vertically screwed into the upper outer side of the mounting interface 8. This pin is inserted into a corresponding milled flat-bottomed groove in the diffusion tube 4.

[0042] Below the cover plate 2, a spray plate 3 is fixedly installed with screws, positioned directly opposite the diffusion nozzle 10. The spray plate 3 has an array of large-diameter through holes, serving as the main channel for gas to enter the main process chamber. To further optimize airflow, a flow equalization plate is also fixedly installed below the spray plate 3 via a bracket. The flow equalization plate has numerous smaller flow equalization holes evenly distributed on it, used to disperse and mix the airflow from the spray plate 3, achieving final uniform diffusion.

[0043] The working process of this embodiment: Installation: First, place the sealing ring 9 into the sealing groove of the mounting interface 8. Then, insert the diffusion tube 4 from the outside, aligning the positioning pin 12 with the groove on the tube body. Next, manually screw in the mounting nut 7, and finally tighten it to the specified torque with a wrench. At this point, the diffusion nozzle 10 is precisely positioned in the designated location within the cavity of the diffusion mechanism 1.

[0044] Deposition process: Process gas enters the dispersion tube 4 from the external gas path via connector 5 and flows to the dispersion nozzle 10. The gas is ejected from the nozzle 10 through specially designed spray holes, and first undergoes diffusion in the upper chamber formed by the dispersion mechanism 1 and the cover plate 2. Subsequently, the gas flows downward through the through holes of the spray plate 3 and enters the gap formed by the spray plate 3 and the flow equalization plate 11 for buffering. Finally, after being finely evenly distributed by the flow equalization plate, it forms an extremely uniform gas flow that vertically covers the heated substrate below for the deposition reaction.

[0045] Nozzle Replacement / Cleaning: When a process change is required, such as switching to a different precursor with a different optimal airflow distribution pattern, or when nozzle maintenance is needed, simply loosen and remove the mounting nut 7 with a wrench to pull the entire diffusion tube 4 assembly out from the side. If only nozzle 10 needs to be replaced, it can be further unscrewed from the end of the diffusion tube 4 with a tool, replaced with a new nozzle, and then reinstalled according to the installation steps. The entire process involves keeping the main body of the equipment still and the top cover does not need to be opened, making it highly efficient and convenient.

[0046] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0047] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0048] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A detachable spray device for the upper cover of the process chamber of an atomic layer deposition equipment, comprising a dispersion mechanism (1), a cover plate (2) and at least one dispersion pipe (4). Its features are: The bottom of the diffusion mechanism (1) is mounted on the cover plate (2). At least one mounting interface (8) is provided on one side of the top of the diffusion mechanism (1). A connector (5) is installed on the first side of the diffusion tube (4). The second side of the diffusion tube (4) is detachably and sealed to the mounting interface (8) by a quick-connect locking mechanism. The second side of the diffusion tube (4) is located inside the diffusion mechanism (1) and is provided with a diffusion nozzle (10). The quick-connect locking mechanism includes a positioning ring (6) and a mounting nut (7). The positioning ring (6) is located on the side of the diffusion tube (4) near the diffusion nozzle (10). The mounting nut (7) is sleeved on the diffusion tube (4) and located between the positioning ring (6) and the diffusion nozzle (10). By screwing the mounting nut (7) to press its end face against the positioning ring (6), the diffusion tube (4) is locked onto the mounting interface (8) of the diffusion mechanism (1).

2. The detachable spray device for the upper cover plate of the process chamber of an atomic layer deposition equipment as described in claim 1, characterized in that, The installation interface (8) is provided with a sealing groove, and a sealing ring (9) is provided in the sealing groove; when the diffusion tube (4) is locked, the tube wall of the diffusion tube (4) and the sealing ring (9) are press-fitted to form a radial seal.

3. The detachable spray device for the upper cover plate of the process chamber of an atomic layer deposition equipment as described in claim 1, characterized in that, A number of spray holes are provided on the spray surface of the diffusion nozzle (10), and a spray plate (3) is installed at the bottom of the cover plate (2), with a number of spray through holes provided on the spray plate (3).

4. The detachable spray device for the upper cover plate of the process chamber of an atomic layer deposition equipment as described in claim 3, characterized in that, The distribution density of the spray holes gradually increases from the center of the spray surface to the edge.

5. The detachable spray device for the upper cover plate of the process chamber of an atomic layer deposition equipment as described in claim 3, characterized in that, The diameter of the spray holes located at the edge of the spray surface is larger than that of the spray holes in the center area.

6. The detachable spray device for the upper cover plate of the process chamber of an atomic layer deposition equipment as described in claim 3, characterized in that, A flow equalization plate is also installed on the cover plate (2) below the spray plate (3), and a number of flow equalization holes are evenly opened on the flow equalization plate.

7. The detachable spray device for the upper cover plate of the process chamber of an atomic layer deposition equipment as described in claim 1, characterized in that, The mounting nut (7) has a mounting through hole that matches the outer diameter of the diffusion tube (4), one end has an external thread that matches the internal thread of the mounting interface (8) of the diffusion mechanism (1), and the other end has a polygonal structure that is easy to operate with a wrench.

8. The detachable spray device for the upper cover plate of the process chamber of an atomic layer deposition equipment as described in claim 1, characterized in that, A positioning pin is provided on the mounting interface (8) of the diffusion mechanism (1), and a positioning pin groove that cooperates with the positioning pin is provided on the diffusion tube (4) to restrict the circumferential rotation of the diffusion tube (4) when it is locked.

9. The detachable spray device for the upper cover plate of the process chamber of an atomic layer deposition equipment as described in claim 1, characterized in that, The diffusion nozzle (10) is detachably connected to the diffusion tube (4), including but not limited to threaded connection, snap-fit ​​connection and quick connector connection.

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