LED ceiling lamp
By using a yellow LED light source and filtering out blue light in the lithography process, a warm yellow light environment is created, which solves the problems of cold light color and blue light filtering, improves light conversion efficiency and process accuracy, and is suitable for semiconductor lithography processes.
Patent Information
- Application Number
- CN202522644569.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Priority Date
- 2025-11-27
- Filing Date
- 2025-12-12
- Publication Date
- 2026-11-03
- Estimated Expiration
- 2035-12-12
AI Technical Summary
The spectral distribution of existing yellow LEDs is not concentrated enough in the lithography process, resulting in a cool light color, which affects the process accuracy and human visual perception. At the same time, the blue light component needs to be filtered out to avoid unintended exposure of the photosensitive emulsion, which leads to a reduction in light conversion efficiency.
By using a yellow LED light source and combining it with a filter unit, light with wavelengths less than 500 nm or 530 nm is filtered out, ensuring that the spectral energy peak is between 580 nm and 590 nm, forming a warm yellow light environment, reducing the influence of blue light, and improving light conversion efficiency.
It achieves high light conversion efficiency under warm yellow light environment, reduces energy waste, improves process precision and human eye comfort, and is suitable for semiconductor lithography process.
Smart Images
Figure CN224932631U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of lighting fixtures using a photolithography process, and more particularly to an LED ceiling light that provides a warm yellow hue and high light conversion efficiency. Background Technology
[0002] In semiconductor and optoelectronic manufacturing processes, certain steps have strict limitations on spectral composition, especially in photolithography, where ultraviolet light is used to expose photosensitive emulsion. If the environment and lighting fixtures contain blue or ultraviolet light, it can cause unintended exposure of the photosensitive emulsion, affecting linewidth control and exposure quality, leading to the scrapping of the entire batch of wafers. Therefore, in such photolithography processes, light sources with specific wavelength ranges must be used to suppress blue light components and ensure process stability; this is often referred to as a "photolithography system."
[0003] Traditionally, high-pressure sodium lamps or metallized lamps are commonly used as the primary light source for warm yellow lighting environments. High-pressure sodium lamps produce warm orange light primarily concentrated in the 570 nm to 600 nm wavelength range, which effectively avoids exposure of photosensitive emulsions. Metallized lamps adjust the spectral composition, resulting in more stable output light and controllable color temperature; some models can output a spectrum close to warm yellow light, thus they have long been used for lighting in cleanrooms or warm yellow areas. However, high-pressure sodium lamps and metallized lamps have high energy consumption, requiring voltage regulators and starters for stable operation; they have long start-up times, requiring several minutes to reach stable brightness; and their light output decreases significantly over time, leading to shorter lifespans and frequent maintenance. In addition, their spectra often contain short-wavelength blue-green light components, requiring filters or special glass encapsulation to filter out unwanted wavelengths, increasing manufacturing and usage costs and further reducing optical conversion efficiency.
[0004] With the maturity of solid-state lighting technology, light-emitting diodes (LEDs) have gradually become the mainstream light source. LEDs possess advantages such as high efficiency, low voltage driving, instantaneous illumination, long lifespan, and small size, thus being considered an ideal light source to replace traditional discharge lamps. In the field of lithography, to achieve specific spectral control requirements, yellow LED lighting systems have also begun to be developed. Yellow LEDs can be achieved by exciting yellow phosphors using direct-emitting or blue-emitting chips.
[0005] However, existing warm yellow LEDs still have several shortcomings. The spectral distribution of warm yellow LEDs is often not concentrated enough, with some wavelengths extending into the green light region, causing them to appear greenish after filtering. This greenish tint makes the overall light color appear cooler, differing from the ideal warm yellow light, thus affecting the subjective perception of the human eye and the color consistency of the working environment. Furthermore, in warm yellow lithography studios, the greenish light may also alter the operator's judgment of layout alignment or adhesive layer color, indirectly affecting process accuracy. Utility Model Content
[0006] The main purpose of this invention is to provide an LED ceiling light that produces warm yellow light with a reddish hue and filters out light with wavelengths below 500 nm, thereby improving light conversion efficiency and being applied to semiconductor photolithography processes.
[0007] To achieve the aforementioned objectives, this utility model provides an LED skylight, comprising: a lamp holder, a power supply unit, and a lamp module. The lamp holder is used to fix the LED skylight to the wall with screws and other fasteners, and has a power supply bracket. The power supply unit is disposed on the power supply bracket. The lamp module is disposed on the lamp holder and has: a lamp base, a lamp plate, a lamp shade, and a light filter unit.
[0008] The base of the lamp is mounted on the lamp holder; the lamp panel is mounted on the base of the lamp, and a yellow LED light source is mounted on the side away from the base of the lamp, which generates illumination light when powered on; the lampshade is made of a light-transmitting material, is mounted on the base of the lamp and covers the lamp panel, and a sealed accommodating space is formed between the lampshade and the base of the lamp; and a light filtering unit is mounted in the accommodating space and located between the yellow LED light source and the lampshade to filter blue light in the illumination light.
[0009] In a preferred embodiment of this utility model, the peak intensity of the irradiation light energy generated by the yellow LED light source is between 580 nm and 590 nm, preferably 585 nm.
[0010] In a preferred embodiment of the present invention, the filter unit filters out light with a wavelength less than 500 nm from the irradiated light.
[0011] In a preferred embodiment of the present invention, the filtering unit filters out light with a wavelength less than 530 nm from the irradiated light.
[0012] In a preferred embodiment of this utility model, the light conversion efficiency of the lamp module is 110~130 lm / W.
[0013] In a preferred embodiment of this utility model, the base shell of the lamp is provided with an annular groove, which surrounds the outer periphery of the lamp panel; and the lamp module also has a sealing ring disposed in the annular groove. By placing the sealing ring between the lamp cover and the base shell of the lamp, the gap between the two is filled, thus isolating the accommodating space from the outside and preventing air convection.
[0014] In a preferred embodiment of the present invention, the lamp base also has heat dissipation fins 211 disposed on the side of the lamp base away from the lamp plate.
[0015] In a preferred embodiment of this invention, the lamp holder also has a waterproof connector for connecting to the accommodating space. The power supply unit is electrically connected to the lamp board via the waterproof connector to supply power to the yellow LED light source while maintaining the airtightness of the accommodating space.
[0016] In a preferred embodiment of the present invention, the bottom shell of the lamp is provided with a protruding connecting rib on the side near the lamp holder, and the lamp holder is connected to the protruding connecting rib via a power supply bracket.
[0017] The advantages of this invention are that by using a yellow LED light source to reduce the wavelength of light near 500 nm in the illumination light, the light loss from filtering blue light or some green light in the illumination light by the light filter unit in the lighting module is reduced. Furthermore, because the main energy of the illumination light is distributed at the red and yellow light ends, the light conversion efficiency of the illumination light exiting the lighting module can be maintained above 60%, reducing energy waste. In addition, since the peak energy of the illumination light of this invention is between 580 nm and 590 nm, the ambient light tone formed by the light exiting the lighting module after passing through the light filter unit will be more warm yellow, making the human eye feel more comfortable under this ambient light condition. Moreover, the ambient light becomes completely free of blue light (<500 nm or <530 nm), which can be applied to the ambient light of PCB or semiconductor lithography processes. Attached Figure Description
[0018] Figure 1 This is an exploded view of an embodiment of the present utility model;
[0019] Figure 2 This is a bottom view of an embodiment of the present utility model;
[0020] Figure 3 This is an exploded bottom view of an embodiment of the present utility model;
[0021] Figure 4 This is a side view of an embodiment of the present utility model;
[0022] Figure 5 This is a spectral energy diagram of an existing white light source;
[0023] Figure 6 This is a spectral energy diagram of an embodiment of the present invention;
[0024] Figure 7A A schematic diagram of filtering using a filter unit for light with a peak energy of 570 nm;
[0025] Figure 7B This is a schematic diagram of the light filtering unit according to an embodiment of the present invention;
[0026] Figure 8The spectral energy diagram of this utility model embodiment after using a 500 nm filter unit; and
[0027] Figure 9 The spectral energy diagram is shown for an embodiment of this utility model after using a 530 nm filter unit.
[0028] Explanation of reference numerals in the attached figures
[0029] 1: Light stand
[0030] 11: Power Supply Stand
[0031] 12: Power Supply Unit
[0032] 121: Waterproof connector
[0033] 21: Base shell of lamp
[0034] 211: Heat dissipation fins
[0035] 212: Annular groove
[0036] 213: Protruding connecting rib
[0037] 22: Light board
[0038] 221: Yellow LED light source
[0039] 23: Lampshade
[0040] 24: Filter unit
[0041] 25: Sealing ring Detailed Implementation
[0042] To facilitate understanding of this utility model, it will be described in detail below with reference to the accompanying drawings and embodiments. The drawings show some, but not all, embodiments of this utility model. This utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the disclosure of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without any inventive effort are within the scope of protection of this utility model.
[0043] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.
[0044] Figure 1 This is an exploded view of an embodiment of the present utility model; Figure 2 This is a bottom view of an embodiment of the present utility model; Figure 3 This is an exploded bottom view of an embodiment of the present utility model; Figure 4 This is a side view of an embodiment of the present utility model; Figure 5 This is a spectral energy diagram of an existing white light source; Figure 6 This is a spectral energy diagram of an embodiment of the present invention; Figure 7A A schematic diagram of filtering light using filter unit 24 with a peak energy of 570 nm; Figure 7B This is a schematic diagram of the filtering using the filter unit 24 in an embodiment of the present invention; Figure 8 The spectral energy diagram after using the 500 nm filter unit 24 in this embodiment of the present invention; and, Figure 9 This is a spectral energy diagram of the present invention after using the 530 nm filter unit 24.
[0045] Please see Figures 1 to 4 This utility model provides an LED ceiling light, including: a lamp holder 1, a power supply unit 12, and a lamp module. The lamp holder 1 is used to fix the LED ceiling light to the wall with screws and other fasteners, and has a power supply bracket 11. The power supply unit 12 is disposed on the power supply bracket 11. The lamp module is disposed on the lamp holder 1 and has: a lamp base shell 21, a lamp plate 22, a lamp shade 23, and a light filter unit 24.
[0046] The base shell 21 of the lamp is mounted on the lamp holder 1; the lamp plate 22 is mounted on the base shell 21 of the lamp, and a yellow LED light source 221 is mounted on the side away from the base shell 21. The yellow LED light source 221 will generate illumination light when powered on; the lamp cover 23 is made of light-transmitting material, is mounted on the base shell 21 of the lamp and covers the lamp plate 22 to form an accommodating space; and a light filtering unit 24 is mounted in the accommodating space and is located between the yellow LED light source 221 and the lamp cover 23 to filter blue light in the illumination light.
[0047] Please see Figure 5 as well as Figure 6 In detail, while existing methods using white LED light sources with color filters can filter out blue light from white light, since blue light accounts for a large portion of the spectrum, filtering means removing more than half of the light, thus significantly reducing light conversion efficiency. This invention uses a yellow LED light source 221 to ensure that blue light constitutes only a very small portion of the illumination light spectrum, reducing the decrease in light conversion efficiency after filtering.
[0048] In a preferred embodiment of the present invention, the peak energy intensity of the irradiated light is between 580 nm and 590 nm, preferably 585 nm.
[0049] In detail, the peak energy intensity affects the overall hue of the light. If the peak in the yellow light range is biased towards red light, the overall hue will be biased towards warm yellow (dominated by red and yellow light). If the peak is biased towards blue light, the overall hue will be biased towards yellow-green even after being filtered by the filter unit 24. Furthermore, since the filter unit 24 also filters some green and yellow light, the loss after filtering is relatively high.
[0050] Please see Figure 7A as well as Figure 7B Furthermore, such as Figure 7A As shown, when the peak energy intensity of the light source is 570 nm, which is biased towards blue light, the overall spectrum distribution will be biased towards blue, resulting in a higher proportion of blue, green, and yellow light. When filter unit 24 filters the light, the filtered spectral area A is large, leading to a decrease in light conversion efficiency; conversely, as... Figure 7B As shown, when the peak energy intensity of the light source is 585 nm, which is biased towards red light, the overall distribution of the spectrum will be biased towards red, and the proportion of light in the blue, green and yellow bands will be low. The filtered spectral area A is small, which means that the reduction in light conversion efficiency after filtering is less.
[0051] In a preferred embodiment of the present invention, the filter unit 24 filters out light with a wavelength less than 500 nm from the irradiated light.
[0052] In a preferred embodiment of the present invention, the filter unit 24 filters out light with a wavelength less than 530nm from the irradiated light.
[0053] Please see Figure 8 as well as Figure 9 In detail, since the yellow LED light source 221 still contains some blue light, the filter unit 24 can prevent the residual blue light from affecting the exposure. In addition, even if the filter unit 24 is used, the light near the filter threshold value will still leak slightly due to the physical properties of the filter. By raising the light wavelength filter threshold of the filter unit 24, it can be effectively ensured that the wavelength of the leaked light after filtering is still greater than 500 nm.
[0054] Furthermore, the ambient light tone formed by the light source passing through the light filter unit 24 and exiting the lighting module becomes completely blue-free (the wavelength of the irradiated light is <500nm or <530nm), mainly used in the ambient light of PCB or semiconductor lithography processes. Since the most important part of the lithography process is the exposure and development of the photoresist, blue light and ultraviolet light will cause the photoresist to be exposed, thus causing the entire batch of wafers to be scrapped. Therefore, the ambient light involved in the lithography process in semiconductor factories cannot contain blue light or ultraviolet light.
[0055] In a preferred embodiment of this utility model, the light conversion efficiency of the lamp module is 110~130 lm / W.
[0056] Specifically, the LED ceiling light of this utility model has a power of 150W, and its light conversion efficiency after passing through the light filtering unit 24 can reach 110 lm / W ~ 130 lm / W, which means that it can achieve the light flux of a metal composite (light conversion efficiency below 50%) with less power, thereby saving electricity.
[0057] In a preferred embodiment of this utility model, the lamp base 21 is provided with an annular groove 212, which is located around the lamp plate 22; and the lamp module also has a sealing ring 25, which is disposed in the annular groove 212. By placing the sealing ring 25 between the lamp cover 23 and the lamp base 21, the gap between the two is filled, thus isolating the accommodating space from the outside and preventing air convection.
[0058] In a preferred embodiment of this utility model, the lamp holder 1 further includes a waterproof connector 121 for connecting to the accommodating space. The power supply unit 12 is electrically connected to the lamp board 22 via the waterproof connector 121 to supply power to the yellow LED light source 221 while maintaining the airtightness of the accommodating space.
[0059] In a preferred embodiment of the present invention, the lamp base 21 further has heat dissipation fins 211 disposed on the side of the lamp base 21 away from the lamp plate 22.
[0060] In a preferred embodiment of the present invention, the bottom shell 21 of the lamp is provided with a protruding connecting rib 213 on the side near the lamp holder 1, and the lamp holder 1 is connected to the protruding connecting rib 213 through a power supply bracket 11.
[0061] The embodiments described above are merely preferred embodiments of the present invention, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that those skilled in the art can make various changes and modifications without departing from the concept of the present invention, and these all fall within the protection scope of the present invention.
Claims
1. An LED ceiling light, characterized in that, include: A lamp holder, used to fix it to a wall, and has a power supply bracket; as well as The power supply unit is mounted on the power supply bracket; A lighting module, disposed on the lighting bracket, and having: The base shell of the lamp is mounted on the lamp holder; A light panel is disposed on the bottom shell of the lamp fixture, and a yellow LED light source is disposed on the side away from the bottom shell of the lamp fixture, the yellow LED light source being used to generate illumination light; The lampshade, made of a light-transmitting material, is installed on the bottom shell of the lamp and covers the lamp panel to form an accommodating space; as well as A filter unit is disposed in the accommodating space and located between the yellow LED light source and the lampshade, for filtering blue light in the illumination light.
2. The LED ceiling light according to claim 1, characterized in that, The peak energy intensity of the irradiated light is between the wavelengths of 580 nm and 590 nm.
3. The LED ceiling light according to claim 2, characterized in that, The filtering unit filters out light with a wavelength less than 500 nm from the irradiated light.
4. The LED ceiling light according to claim 2, characterized in that, The filtering unit filters out light with a wavelength less than 530 nm from the irradiated light.
5. The LED skylight according to any one of claims 3 or 4, characterized in that, The light conversion efficiency of the lamp module is 110~130 lm / W.
6. The LED ceiling light according to claim 5, characterized in that, The lamp base is provided with an annular groove, which is located around the lamp plate; and the lamp module also has a sealing ring, which is disposed in the annular groove. The sealing ring is used to fill the gap between the lampshade and the base of the lamp.
7. The LED ceiling light according to claim 6, characterized in that, The base of the lamp also has heat dissipation fins, which are located on the side away from the lamp panel.
8. The LED ceiling light according to claim 7, characterized in that, The lamp holder also has a waterproof connector that connects to the accommodating space; The power supply unit is electrically connected to the lamp board via the waterproof connector to supply power to the yellow LED light source.
9. The LED ceiling light according to claim 8, characterized in that, The bottom shell of the lamp is also provided with a raised connecting rib on the side near the lamp holder; The lamp holder is connected to the protruding connecting rib via the power supply bracket.