A wide-band collimated light path spectrometer

Abstract

The utility model belongs to the field of spectrometer analysis equipment, specifically is a kind of wide spectral range co-collimation light path spectrometer, and this spectrometer includes slit, collimating mirror, optical beam splitting component, grating component, focusing mirror component and detector component. Its structural features are: all spectral channels use only slit as optical signal input terminal in common, and use only collimating mirror to carry out beam collimation in common, form a common front-end light path unit;Optical beam splitting component is arranged in the emergent light path of the collimating mirror, for splitting into multiple paths by parallel light beam;The light beam of each split is respectively transmitted into independently arranged grating and dispersed, then converges by respective corresponding focusing mirror, and finally received by linear array detector arranged at corresponding image plane position. The utility model solves the problems of loose structure, large volume and complex assembly and adjustment of traditional multi-module parallel spectrometer by the integrated structure of common front-end light path, realizes the compactness and small volume of equipment.

Description

Technical Field

[0001] This utility model belongs to the field of spectrometer analysis equipment, specifically a broadband collimated optical path spectrometer. Background Technology

[0002] Spectrometers are crucial equipment for analyzing the composition and structure of substances. They decompose composite light into spectra using dispersive elements, which are then received by detectors. In many cutting-edge applications, such as laser-induced breakdown spectroscopy (LIBS), the characteristic spectral lines of the analyte elements cover a wide range, requiring spectrometers to have broad spectral coverage from ultraviolet to visible and even near-infrared. To cover this broad spectral range, multiple spectral channels are typically required.

[0003] Currently, the common spectrometer structure for multi-channel broadband detection involves configuring a complete optical path for each spectral channel, meaning each channel includes an independent slit, collimating mirror, dispersive element, focusing mirror, and detector. This parallel multi-path structure inevitably results in a large number of internal optical components, redundant optical path arrangement, loose overall structure, and large size. Since each channel's optical path is independent, each path needs to be individually calibrated and aligned during mechanical assembly, making the process complex, time-consuming, and difficult to guarantee the relative positional stability between the multiple optical paths. Therefore, existing broadband spectrometers face significant structural problems such as low integration, lack of compactness, and inconvenient assembly, adjustment, and maintenance.

[0004] Therefore, there is an urgent need for a broadband spectrometer with high integration, good light collection efficiency, and compact structure to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a broadband common collimation optical path spectrometer, which aims to solve the problems of loose structure, large size and complicated assembly and adjustment of existing broadband spectrometers caused by the use of multiple independent optical paths in parallel by integrating the front-end optical path.

[0006] The technical solution adopted by this utility model to achieve the above-mentioned objective is: a broadband collimated optical path spectrometer, characterized in that it includes: a slit, a collimating mirror, an optical beam splitter assembly, a grating assembly, a focusing mirror assembly, and a detector assembly;

[0007] The slit serves as the input end of the optical signal; the optical surface of the collimating mirror is positioned facing the direction of the outgoing light from the slit; and the optical beam splitter is disposed in the outgoing light path of the collimating mirror.

[0008] The grating assembly includes multiple gratings, which are respectively disposed on each outgoing light path split by the optical beam splitter assembly;

[0009] The focusing lens assembly includes multiple focusing lenses, which are respectively disposed on the dispersive light path of each grating in the grating assembly;

[0010] The detector assembly includes multiple detectors, which are respectively disposed at the image plane position of each focusing lens in the focusing lens assembly.

[0011] The number of optical devices in the grating assembly, focusing lens assembly, and detector assembly is consistent with the number of spectral channels split by the optical beam splitter assembly, and all spectral channels share the slit and the collimating mirror.

[0012] The optical beam splitter assembly includes a dichroic mirror and a reflector, which are arranged sequentially in the outgoing light path of the collimating reflector; the light beam passes through the dichroic mirror and is then incident on the reflector, where it is reflected to the last transmission spectrum.

[0013] The dichroic mirror includes: a first dichroic mirror and a second dichroic mirror;

[0014] The first dichroic mirror is located in the outgoing light path of the collimating mirror;

[0015] The second dichroic mirror is located in the transmission path of the first dichroic mirror;

[0016] The reflector is located on the transmission light path of the second dichroic mirror.

[0017] The surface of the first dichroic mirror is coated with a dielectric film that is highly reflective to the A spectral band and highly transparent to the B and C spectral bands; the surface of the second dichroic mirror is coated with a dielectric film that is highly reflective to the B spectral band and highly transparent to the C spectral band; and the surface of the reflector is coated with a dielectric film that is highly reflective to the C spectral band.

[0018] The grating assembly includes: a first grating, a second grating, and a third grating;

[0019] The first grating is disposed on the optical path of the first dichroic mirror reflecting the first spectral band light; the second grating is disposed on the optical path of the second dichroic mirror reflecting the second spectral band light; the third grating is disposed on the optical path of the mirror reflecting the third spectral band light.

[0020] The grating lines of the first, second, and third gratings are perpendicular to the central axis of the reflected light path in which they are located.

[0021] The first and second gratings both have a grating density of 2400 lines / mm, and the third grating has a grating density of 1200 lines / mm.

[0022] The focusing lens assembly includes a first focusing lens, a second focusing lens, and a third focusing lens;

[0023] The first focusing lens is disposed on the dispersive light path of the first grating;

[0024] The second focusing lens is positioned on the dispersive light path of the second grating;

[0025] The third focusing lens is positioned on the dispersive light path of the third grating.

[0026] The first focusing lens, the second focusing lens, and the third focusing lens are all aspherical reflecting mirrors, and their radii of curvature and quadratic surface coefficients are independently determined based on the aberration optimization results of their respective corresponding spectral bands.

[0027] The detector assembly includes a first linear array detector, a second linear array detector, and a third linear array detector;

[0028] The photosensitive surface of the first linear array detector is located at the image plane of the first focusing lens, the photosensitive surface of the second linear array detector is located at the image plane of the second focusing lens, and the photosensitive surface of the third linear array detector is located at the image plane of the third focusing lens.

[0029] The centers of the photosensitive surfaces of the first, second, and third linear array detectors intersect perpendicularly with the optical axes of the corresponding first, second, and third focusing mirrors, respectively.

[0030] This utility model has the following beneficial effects and advantages:

[0031] 1. This invention integrates the broadband detection function, which originally required multiple spectrometers, into a single device by sharing a collimating optical path and a spectroscopic component. This significantly reduces the number of optical elements and the system size, making it suitable for space-constrained or portable detection scenarios. Due to its high light collection efficiency and wide spectral coverage, this spectrometer is particularly suitable for transient spectral analysis scenarios such as laser-induced breakdown spectroscopy, which require a wide spectral range, high sensitivity, and fast response.

[0032] 2. This utility model uses a single optical fiber to directly import composite optical signals, avoiding the energy loss and light-receiving position compromise problems caused by the traditional "one-to-many" optical fiber splitting method. Theoretically, the light-receiving efficiency can be improved several times, which is especially suitable for weak light signal detection.

[0033] 3. This utility model, through the customized design of the dichroic mirror dielectric film, can achieve efficient spectral dispersion and detection in different spectral bands, including ultraviolet, visible and near-infrared. Users can adjust the number of spectral channels and the spectral range according to actual needs.

[0034] 4. The gratings, focusing lenses, and detectors of each spectral channel of this invention can be independently designed and optimized according to the characteristics of the corresponding spectral band, such as using different grating densities and aspherical focusing lenses, so as to maintain high resolution and low aberrations in a wide spectral range.

[0035] 5. All optical paths of this invention are based on the same collimated beam, making optical calibration relatively simple, reducing the difficulty of assembly and adjustment caused by multiple optical paths running in parallel, and also facilitating subsequent maintenance and maintaining system stability.

[0036] 6. The optical beam splitter of this invention can be configured with different numbers of dichroic mirrors as needed, thereby flexibly realizing the division of two or more spectral channels, and has good modular expansion characteristics in structure. Attached Figure Description

[0037] Figure 1 This is a schematic diagram of a broadband common collimation optical path spectrometer according to the present invention;

[0038] Figure 2 This is a 3D rendering of a broadband collimated optical path spectrometer according to the present invention.

[0039] Figure 3 This is a schematic diagram of the light collection of a broadband common collimated optical path spectrometer according to the present invention;

[0040] Figure 4 This is a schematic diagram of light collection in an existing spectrometer.

[0041] Wherein, 1 is a slit, 2 is a third linear array detector, 3 is a second linear array detector, 4 is a first linear array detector, 5 is a collimating mirror, 6 is a mirror, 7 is a second dichroic mirror, 8 is a first dichroic mirror, 9 is a third focusing mirror, 10 is a second focusing mirror, 11 is a second focusing mirror, 12 is a second grating, 13 is a first focusing mirror, and 14 is a first grating. Detailed Implementation

[0042] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments.

[0043] like Figures 1-2 The image shown is an overall schematic diagram of a broadband common collimated optical path spectrometer according to the present invention. The broadband common collimated optical path spectrometer is characterized by comprising: a slit 1, a collimating mirror 5, an optical beam splitter assembly, a grating assembly, a focusing mirror assembly, and a detector assembly.

[0044] Among them, slit 1 serves as the input end of the optical signal;

[0045] The collimating mirror 5, with its optical surface facing the direction of the outgoing light from the slit 1, is used to collimate the light beam from the slit 1 into parallel light.

[0046] An optical beam splitter assembly is set along the parallel light path emitted from the collimating mirror 5 to split the parallel light into multiple beams of outgoing light according to different spectral ranges.

[0047] A grating assembly, comprising multiple gratings respectively disposed on each outgoing light path of the optical beam splitter assembly, is used to disperse each outgoing beam;

[0048] A focusing lens assembly, which includes multiple focusing lenses respectively disposed on the dispersive light path of each grating in the grating assembly, is used to converge the dispersed light beam to form an image.

[0049] The detector assembly contains multiple detectors located at the image plane of each focusing mirror in the focusing mirror assembly, used to detect the converged spectral signal.

[0050] The number of optical devices in the grating assembly, focusing lens assembly, and detector assembly is consistent with the number of spectral channels split by the optical beam splitter assembly, and all spectral channels share slit 1 and collimating mirror 5.

[0051] The necessary components of the broadband collimated optical path spectrometer of this embodiment are further described below.

[0052] (a) Optical beam splitter assembly

[0053] The optical beam splitter assembly includes a dichroic mirror and a reflector 6, which are arranged sequentially in the outgoing light path of the collimating reflector 5.

[0054] Dichroic mirrors are used to selectively reflect light in a set spectral band and transmit light in other spectral bands.

[0055] Mirror 6 is used to reflect the light in the last transmitted spectrum.

[0056] Dichroic mirrors include: a first dichroic mirror 8 and a second dichroic mirror 7;

[0057] The first dichroic mirror 8 is located in the outgoing light path of the collimating mirror 5 and is used to reflect the first spectral band light and transmit the second and third spectral band light.

[0058] The second dichroic mirror 7 is located in the transmission path of the first dichroic mirror 8, and is used to reflect the second spectral band light and transmit the third spectral band light;

[0059] The reflector 6 is located on the transmission path of the second dichroic mirror 7 and is used to reflect the third spectral band light.

[0060] The surface of the first dichroic mirror 8 is coated with a dielectric film that is highly reflective to the A spectrum and highly transparent to the B and C spectrums; the surface of the second dichroic mirror 7 is coated with a dielectric film that is highly reflective to the B spectrum and highly transparent to the C spectrum; and the surface of the reflecting mirror 6 is coated with a dielectric film that is highly reflective to the C spectrum.

[0061] (ii) Grating assembly

[0062] The grating assembly includes: a first grating 14, a second grating 12, and a third grating 10;

[0063] The first grating 14 is disposed on the optical path of the first dichroic mirror 8 reflecting the first spectral band light, the second grating 12 is disposed on the optical path of the second dichroic mirror 7 reflecting the second spectral band light, and the third grating 10 is disposed on the optical path of the reflector 6 reflecting the third spectral band light.

[0064] The grating density of the first grating 14 and the second grating 12 is 2400 lines / mm, and the grating density of the third grating 10 is 1200 lines / mm;

[0065] The first focusing mirror 13, the second focusing mirror 11, and the third focusing mirror 9 are all aspherical reflecting mirrors, and their radii of curvature and quadratic surface coefficients are independently determined based on the aberration optimization results of their respective corresponding spectral bands.

[0066] (iii) Focusing lens assembly

[0067] The focusing lens assembly includes a first focusing lens 13, a second focusing lens 11, and a third focusing lens 9;

[0068] The first focusing lens 13 is disposed on the dispersive light path of the first grating 14;

[0069] The second focusing lens 11 is disposed on the dispersive light path of the second grating 12;

[0070] The third focusing lens 9 is positioned on the dispersive light path of the third grating 10.

[0071] The first focusing mirror 13, the second focusing mirror 11, and the third focusing mirror 9 are all aspherical reflecting mirrors, and their radii of curvature and quadratic surface coefficients are independently determined based on the aberration optimization results of their respective corresponding spectral bands.

[0072] (iv) Detector assembly

[0073] The detector assembly includes a first linear array detector 4, a second linear array detector 3, and a third linear array detector 2;

[0074] The photosensitive surface of the first linear array detector 4 is located at the image plane of the first focusing mirror 13, the photosensitive surface of the second linear array detector 3 is located at the image plane of the second focusing mirror 11, and the photosensitive surface of the third linear array detector 2 is located at the image plane of the third focusing mirror 9.

[0075] The photosensitive surfaces of the first linear array detector 4, the second linear array detector 3, and the third linear array detector 2 intersect perpendicularly with the optical axes of the corresponding first focusing mirror 13, second focusing mirror 11, and third focusing mirror 9, respectively.

[0076] The working principle of this utility model is as follows:

[0077] like Figures 1-2As shown, this invention guides the broadband composite optical signal to be measured into the slit 1 through a single optical fiber; after being collimated by the collimating mirror 5, the composite optical signal forms a single collimated parallel beam; the collimated parallel beam is first incident on the first dichroic mirror 8, which reflects the first spectral band light and transmits the second and third spectral band light; the transmitted light continues to be incident on the second dichroic mirror 7, which reflects the second spectral band light and transmits the third spectral band light; the transmitted third spectral band light is reflected by the mirror 6, thereby forming three spatially separated parallel sub-beams;

[0078] The first spectral segment beam after beam splitting is incident on the first grating 14 for dispersion, the second spectral segment beam is incident on the second grating 12 for dispersion, and the third spectral segment beam is incident on the third grating 10 for dispersion. The dispersed first spectral segment beam is converged by the first focusing lens 13, the dispersed second spectral segment beam is converged by the second focusing lens 11, and the dispersed third spectral segment beam is converged by the third focusing lens 9, thereby forming spectral line images on their respective image planes.

[0079] The spectral line images on the image plane of the first focusing mirror 13 are acquired by the first linear array detector 4, the spectral line images on the image plane of the second focusing mirror 11 are acquired by the second linear array detector 3, and the spectral line images on the image plane of the third focusing mirror 9 are acquired by the third linear array detector 2, thereby obtaining multi-channel spectral data covering a wide spectral band.

[0080] The specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. This embodiment provides a broadband common collimated optical path spectrometer, the specific structural configuration of which embodies the structural features of this utility model.

[0081] Example:

[0082] like Figure 1 As shown, a broadband collimated optical path spectrometer of the utility model includes: a slit 1, a collimating mirror 5, a first dichroic mirror 8, a second dichroic mirror 7, a mirror 6, a third grating 10, a second grating 12, a first grating 14, a third focusing mirror 9, a second focusing mirror 11, a first focusing mirror 13, a third linear array detector 2, a second linear array detector 3, and a first linear array detector 4.

[0083] 1. Optical signal input and collimation section

[0084] At one end of the main frame, a slit mounting base is provided. The slit 1 is mechanically fixed to this mounting base, with its light transmission direction facing inward. A collimating mirror 5 is mounted on the outgoing light path of the slit 1 via a mirror frame. The optical reflecting surface of the collimating mirror 5 is precisely oriented towards the slit 1, and its position and angle are fixed, so that the diverging light beam from the slit 1 is reflected into a parallel beam. This collimating mirror 5 is the only component at the front end used for collimation.

[0085] 2. Spectral beam splitting section

[0086] In the reflected light path of the collimating mirror 5, a first dichroic mirror 8, a second dichroic mirror 7, and a plane mirror 6 are arranged and fixed in sequence. The first dichroic mirror 8 and the second dichroic mirror 7 are mounted by a mirror mount with an angle adjustment mechanism, and their beam-splitting surfaces are located in the parallel beam. The plane mirror 6 is also fixed by a mirror mount. The spatial positioning of the three mirrors ensures that the collimated beam first enters the first dichroic mirror 8, its transmitted light then enters the second dichroic mirror 7, and the transmitted light from the second dichroic mirror 7 finally enters the plane mirror 6. Thus, the incident parallel beam is spatially separated into three paths.

[0087] 3. Dispersion component

[0088] A first grating 14 is mounted on a grating turntable in the direction of the reflected light path of the first dichroic mirror 8. Similarly, a second grating 12 is mounted on a grating turntable in the direction of the reflected light path of the second dichroic mirror 7. A third grating 10 is mounted on a grating turntable in the direction of the reflected light path of the plane mirror 6. Each grating turntable provides rotational adjustment around a specific axis and is ultimately locked. The scribed facet of each grating is mounted and adjusted to be perpendicular to the central axis of its reflected light path.

[0089] 4. Focusing and Detection Section

[0090] A first focusing mirror 13 is mounted on a frame along the dispersive optical path of the first grating 14. The first focusing mirror 13 is a reflective aspherical mirror, and its optical axis is adjusted to match the central dispersive direction of the first grating 14. Similarly, a second focusing mirror 11 is mounted along the dispersive optical path of the second grating 12, and a third focusing mirror 9 is mounted along the dispersive optical path of the third grating 10. The second focusing mirror 11 and the third focusing mirror 9 are also reflective aspherical mirrors.

[0091] A first linear array detector 4 is fixed to the image plane of the reflected focusing optical path of the first focusing lens 13 via a detector mounting bracket. This bracket allows for three-dimensional fine-tuning to ensure that the center of the photosensitive surface of the first linear array detector 4 is located on the focal plane of the first focusing lens 13, and that the photosensitive surface is perpendicular to the optical axis of the first focusing lens 13. Similarly, the second linear array detector 3 is fixed to the image plane of the second focusing lens 11, and the third linear array detector 2 is fixed to the image plane of the third focusing lens 9, with the same installation and alignment method as the first linear array detector 4.

[0092] 5. Overall structural relationship

[0093] All the components mentioned above—from slit 1, collimating mirror 5, beam splitter, gratings for each channel, focusing mirrors for each channel, to detectors for each channel—are installed together within the same main frame, forming a physically compact, optically integrated single device, with defined spatial positions and optical path connections. The three sets of dispersion, focusing, and detection components are arranged spatially around a shared front-end collimating optical path (slit 1 and collimating mirror 5).

[0094] This embodiment demonstrates a three-channel structure. Based on the same construction principle, if it needs to be changed to a two-channel structure, one dichroic mirror and its corresponding subsequent components can be reduced; if it needs to be expanded to more channels, the number of dichroic mirrors can be increased accordingly and a set of subsequent components can be added. The connection and positional relationship of each newly added component is similar to that described in this embodiment.

[0095] 6. The following further explains the optical path transmission process of a broadband common collimated optical path spectrometer described in this embodiment:

[0096] Collimation process: The plasma characteristic spectrum is incident through an optical fiber at a slit. Different slits are selected according to different resolution requirements. In this embodiment, the slit size is 3mm × 0.010mm, the numerical aperture of the spectrometer is 0.03, and the spectrum is incident on the collimating mirror 5. The radius of curvature of the mirror is R = 400mm, and the diameter of the mirror is 14mm. After passing through the collimating mirror 5, the spatial beam is collimated into a parallel beam with a diameter of 12mm and exits.

[0097] Grating beam splitting process: After spatial light modulation through the cocollimation process, the parallel beam is split into three channels by the first dichroic mirror 8, the second dichroic mirror 7, and the reflector 6, and enters the third grating 10, the second grating 12, and the first grating 14 respectively.

[0098] The first dichroic mirror has 8 beam splitting reflections. The dielectric film parameters of the first dichroic mirror are high reflectivity in the A-band of the spectrum and high transmittance in the B-band and C-band of the spectrum. The A-band is incident on the first grating 14. The grating parameters are 2400 lines / mm and the aperture is 12mm×12mm. The first grating 14 splits the light according to the wavelength components.

[0099] Then, the wavelengths of each component are emitted in parallel according to the dispersion angle; the second dichroic mirror 7 splits and reflects the beam again. The dielectric film parameters of the second dichroic mirror are high reflectivity in the B band of the spectral range and high transmittance in the C band of the spectral range. The B band is incident on the second grating 12, which has parameters of 2400 lines / mm and an aperture of 12mm×12mm. The second grating 12 splits the beam according to the wavelength components, and then the wavelengths of each component are emitted in parallel according to the dispersion angle; the third channel reflector 6 reflects the unsplittered C band. The dielectric film parameters of the reflector are high reflectivity in the C band of the spectral range. The beam is incident on the third grating 10, which has parameters of 1200 lines / mm and an aperture of 12mm×12mm. After being split by the third grating 10, the beam in the C band of the spectral range is emitted in parallel.

[0100] Focusing detection process: Under the spatial modulation of the preceding process, the three spectral ranges A, B, and C disperse according to their wavelength components, and then are modulated by the focusing mirrors to achieve high-resolution detection. The light is incident on the third focusing mirror 9, the second focusing mirror 11, and the first focusing mirror 13, respectively, and modulated and focused onto the third linear array detector 2, the second linear array detector 3, and the first linear array detector 4.

[0101] In this embodiment, the design specifications of a broadband collimated optical path spectrometer are shown in Table 1:

[0102] Table 1

[0103]

[0104] In this embodiment, the design parameters of a broadband collimated optical path spectrometer are shown in Table 2:

[0105] Table 2

[0106]

[0107] like Figure 3 and Figure 4 As shown in the comparison between the prior art and this embodiment, the two solutions have significant differences in overall mechanical structure and optical path layout. These structural differences directly correspond to the technical problems described in the background art.

[0108] like Figure 4As shown, the modular assembly structure used in existing technologies is the direct cause of their "loose structure, large size, and complex assembly and adjustment" problems. This structure consists of multiple independent and complete spectrometer optical modules arranged in parallel. Each module has its own independent housing, independent slit mount, independent collimating lens assembly, and its adjustment mechanism. This multi-module parallel construction inevitably introduces a large number of repetitive structures and connection interfaces between modules, resulting in an accumulation of dimensions in the direction perpendicular to the optical axis, forming a loosely structured and large physical entity. At the same time, since the optical paths of each module are completely independent, each slit-collimation-dispersion-focusing optical path must be aligned individually and tediously during assembly and adjustment, making the assembly and adjustment process complex.

[0109] like Figure 3 As shown, the integrated structure adopted in this embodiment is designed to overcome the aforementioned structural defects. Its core lies in integrating all optical functional components into a unified, compact main frame, using a common collimation optical path as the structural basis. Specifically, the entire device has only one slit 1 and one collimating mirror 5, with all spectral channels sharing this front-end unit. This fundamental structural change physically eliminates the spatial redundancy of multiple independent collimation systems and their supporting structures. The subsequent components of each channel after beam splitting are arranged at a compact angle and fixed within the same frame, forming a highly integrated monolithic structure. This integrated structure significantly reduces the physical volume and footprint of the device, solving the problem of "loose structure and large size." Simultaneously, since all channels originate from the same reference optical path, the main assembly and adjustment work is concentrated on the shared front end, greatly simplifying the process and complexity of multi-channel parallel alignment, thus solving the problem of "complex assembly and adjustment."

[0110] In summary, based on the embodiments of this utility model, this utility model provides a broadband common collimated optical path spectrometer. It replaces the traditional loose combination of multiple modules by employing an integrated structure that uses a single slit and a single collimating mirror to form a shared front-end optical path, and integrates all dispersive, dispersive, focusing, and detection components into a unified main frame. This structure fundamentally eliminates redundant components and connection interfaces, achieving a significant reduction in device size and a compact structure. Furthermore, the unified optical path reference greatly simplifies the multi-channel assembly and alignment process, effectively solving the problems of loose structure, large size, and complex assembly and adjustment in existing broadband spectrometers.

[0111] Those skilled in the art will understand that the above description is merely a preferred embodiment of the present invention, and the various embodiments and / or features described in the claims can be combined or combined in various ways, even if such combinations or combinations are not explicitly described in this disclosure. This is not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

[0112] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the present invention. Clearly, those skilled in the art can make various alterations and modifications to the present invention without departing from its spirit and scope. Thus, if these modifications and modifications of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention also intends to include these modifications and modifications.

Claims

1. A broadband common collimated optical path spectrometer, characterized in that, include: Slit (1), collimating mirror (5), optical beam splitter assembly, grating assembly, focusing mirror assembly and detector assembly; Wherein, the slit (1) serves as the input end of the optical signal; the optical surface of the collimating mirror (5) is arranged facing the direction of the emitted light from the slit (1); the optical beam splitter is arranged in the emitted light path of the collimating mirror (5); The grating assembly includes multiple gratings, which are respectively disposed on each outgoing light path split by the optical beam splitter assembly; The focusing lens assembly includes multiple focusing lenses, which are respectively disposed on the dispersive light path of each grating in the grating assembly; The detector assembly includes multiple detectors, which are respectively disposed at the image plane position of each focusing lens in the focusing lens assembly.

2. The broadband collimated optical path spectrometer according to claim 1, characterized in that, The number of optical devices in the grating assembly, focusing lens assembly and detector assembly is consistent with the number of spectral channels split by the optical beam splitter assembly, and all spectral channels share the slit (1) and the collimating mirror (5).

3. A broadband collimated optical path spectrometer according to claim 1, characterized in that, The optical beam splitter assembly includes a dichroic mirror and a reflector (6), which are arranged sequentially in the outgoing light path of the collimating reflector (5); the beam passes through the dichroic mirror and is incident on the reflector (6), and the last transmission spectrum of light is reflected by the reflector (6).

4. A broadband collimated optical path spectrometer according to claim 3, characterized in that, The dichroic mirror includes: a first dichroic mirror (8) and a second dichroic mirror (7); The first dichroic mirror (8) is located on the outgoing light path of the collimating mirror (5); The second dichroic mirror (7) is located on the transmission path of the first dichroic mirror (8); The reflector (6) is located on the transmission light path of the second dichroic mirror (7).

5. A broadband collimated optical path spectrometer according to claim 4, characterized in that, The surface of the first dichroic mirror (8) is coated with a dielectric film that is highly reflective to the A spectrum and highly transparent to the B and C spectrums; the surface of the second dichroic mirror (7) is coated with a dielectric film that is highly reflective to the B spectrum and highly transparent to the C spectrum; and the surface of the reflector (6) is coated with a dielectric film that is highly reflective to the C spectrum.

6. A broadband collimated optical path spectrometer according to claim 1, characterized in that, The grating assembly includes: a first grating (14), a second grating (12), and a third grating (10). The first grating (14) is disposed on the optical path of the first dichroic mirror (8) reflecting the first spectral band light; the second grating (12) is disposed on the optical path of the second dichroic mirror (7) reflecting the second spectral band light; the third grating (10) is disposed on the optical path of the mirror (6) reflecting the third spectral band light. The grating lines of the first grating (14), the second grating (12) and the third grating (10) are perpendicular to the central axis of the reflected light path in which they are located.

7. A broadband collimated optical path spectrometer according to claim 6, characterized in that, The grating density of the first grating (14) and the second grating (12) is 2400 lines / mm, and the grating density of the third grating (10) is 1200 lines / mm.

8. A broadband collimated optical path spectrometer according to claim 1, characterized in that, The focusing lens assembly includes a first focusing lens (13), a second focusing lens (11), and a third focusing lens (9). The first focusing lens (13) is disposed on the dispersive light path of the first grating (14); The second focusing lens (11) is disposed on the dispersive light path of the second grating (12); The third focusing lens (9) is disposed on the dispersive light path of the third grating (10).

9. A broadband collimated optical path spectrometer according to claim 8, characterized in that, The first focusing lens (13), the second focusing lens (11) and the third focusing lens (9) are all aspherical reflecting mirrors, and their radius of curvature and quadratic surface coefficients are independently determined according to the aberration optimization results of their respective corresponding spectral bands.

10. A broadband collimated optical path spectrometer according to claim 1, characterized in that, The detector assembly includes a first linear array detector (4), a second linear array detector (3), and a third linear array detector (2). The photosensitive surface of the first linear array detector (4) is located at the image plane of the first focusing lens (13), the photosensitive surface of the second linear array detector (3) is located at the image plane of the second focusing lens (11), and the photosensitive surface of the third linear array detector (2) is located at the image plane of the third focusing lens (9). The photosensitive surfaces of the first linear array detector (4), the second linear array detector (3), and the third linear array detector (2) intersect perpendicularly with the optical axes of the corresponding first focusing mirror (13), second focusing mirror (11), and third focusing mirror (9), respectively.

Images