A pre-treatment device for gas analysis

Abstract

The utility model provides a kind of pretreatment device of gas analysis, it is related to gas analysis technical field.Aiming at the problems, such as the increase of analyzer failure rate, the decrease of measurement accuracy and the increase of maintenance cost caused by the lack of pretreatment in sample gas detection in prior art, three kinds of gas impurity removal pipelines are designed and integrated together to form a pretreatment device for gas analysis, so that the pretreatment device has compact structure design and small space occupation.The pretreatment device includes trace oxygen impurity removal pipeline, carbon dioxide impurity removal pipeline and total carbon hydrogen and acetylene impurity removal pipeline.A pressure reducing valve is provided in the three pipelines to reduce the pressure of sample gas and avoid pipeline damage.The three impurity removal pipelines remove impurities in sample gas, reduce the failure probability and maintenance cost of analytical instruments, and ensure the stability of continuous measurement of analytical instruments in production process.

Description

Technical Field

[0001] This utility model relates to the field of gas analysis technology, and in particular to a pretreatment device for gas analysis. Background Technology

[0002] In the chemical industry, online analyzers can provide timely feedback on process control, achieving the goal of being timely and accurate. The use of analyzers improves production safety, significantly improves production efficiency, and significantly enhances the quality of produced products.

[0003] The analyzer is a precision instrument with high requirements for the humidity, temperature, and pressure of the sample gas. The quality of the sample gas directly affects the accuracy of the analytical results. In polysilicon production, the untreated sample gas contains trace impurities. Directly using the analyzer to detect these impurities can lead to analyzer damage and reduced measurement accuracy. The current lack of sample gas pretreatment processes in polysilicon production results in increased analyzer failure rates, reduced accuracy, and higher maintenance costs. Utility Model Content

[0004] This invention addresses the problems in existing technologies for polycrystalline silicon sample gas detection, which lack pretreatment processes leading to increased analyzer failure rates, reduced measurement accuracy, and increased maintenance costs. It provides a pretreatment device for gas analysis.

[0005] The technical solution adopted in this utility model is:

[0006] A gas analysis pretreatment device includes: a cabinet and trace oxygen removal pipeline, carbon dioxide removal pipeline, and total hydrocarbon and acetylene removal pipeline installed in the cabinet;

[0007] The cabinet includes at least:

[0008] The main body of the cabinet has a box-shaped structure;

[0009] Three front support plates extend along the length of the main body of the cabinet and are connected to the side wall of the main body of the cabinet;

[0010] Three rear support plates are parallel to the front support plate and connected to the side wall of the main body of the cabinet;

[0011] The inlet pipes of the trace oxygen removal pipeline, the carbon dioxide removal pipeline, and the total hydrocarbon and acetylene removal pipeline are respectively installed on the three front support plates; the outlet pipes of the trace oxygen removal pipeline, the carbon dioxide removal pipeline, and the total hydrocarbon and acetylene removal pipeline are respectively installed on the three rear support plates.

[0012] Furthermore, the trace oxygen removal pipeline includes:

[0013] A pressure reducing valve, one end of which is connected to the inlet pipe;

[0014] A water washing tank is connected to the other end of the pressure reducing valve;

[0015] A drying tank is connected to the other end of the washing tank;

[0016] The dehumidifier has one end connected to the drying tank and the other end connected to the outlet pipe.

[0017] Furthermore, the two sides of the washing tank are respectively connected to a water inlet pipe and a water outlet pipe, and the ports of the water inlet pipe and the water outlet pipe are installed on the rear support plate.

[0018] Furthermore, the drying tank is filled with soda lime to remove acidic substances from the sample gas.

[0019] Furthermore, the dehumidifier is an electronic condensation dehumidifier with a dew point of less than or equal to -40°C.

[0020] Furthermore, the carbon dioxide impurity removal pipeline includes:

[0021] A pressure reducing valve, one end of which is connected to the inlet pipe;

[0022] The condenser is connected to the other end of the pressure reducing valve;

[0023] A peristaltic pump is connected to the other end of the condenser;

[0024] The first filter has one end connected to the peristaltic pump and the other end connected to the outlet pipe;

[0025] The filter element of the first filter is made of polypropylene.

[0026] Furthermore, the total hydrocarbon and acetylene impurity removal pipeline includes:

[0027] A pressure reducing valve, one end of which is connected to the inlet pipe;

[0028] The second filter is connected to the other end of the pressure reducing valve;

[0029] The third filter is connected to the other end of the second filter;

[0030] A membrane fine filter, one end of which is connected to the third filter, and the other end of which is connected to the outlet pipe;

[0031] The second filter has a ceramic filter element, the third filter has an activated carbon filter element, and the membrane filter is made of hydrophobic PTFE membrane.

[0032] Furthermore, manual valves are provided in the trace oxygen removal pipeline, the carbon dioxide removal pipeline, and the total hydrocarbon and acetylene removal pipeline.

[0033] Furthermore, the cabinet also includes:

[0034] Cabinet doors are located on the two parallel sides of the main body of the cabinet.

[0035] The beneficial effects of this utility model are:

[0036] To address the issues of increased analyzer failure rates, reduced measurement accuracy, and increased maintenance costs caused by the lack of pretreatment in existing gas analysis technologies, a pretreatment device for gas analysis was designed, integrating three types of impurity removal pipelines. This pretreatment device features a compact design and minimal space requirements. It includes trace oxygen removal pipelines, carbon dioxide removal pipelines, and total hydrocarbon and acetylene removal pipelines. These three pipelines remove impurities from the sample gas, reducing the probability of analyzer failure and maintenance costs, and ensuring the stability of continuous measurements during production. Attached Figure Description

[0037] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0038] Figure 1 This is a three-dimensional structural diagram of the pretreatment device in this utility model.

[0039] Figure 2 for Figure 1 Front view of the preprocessing unit.

[0040] Figure 3 for Figure 2 A cross-sectional view of section AA of the pretreatment unit.

[0041] Figure 4 for Figure 1 Rear view of the preprocessing unit.

[0042] Marked in the image:

[0043] 100. Cabinet body; 101. Cabinet main body; 102. Front support plate; 103. Rear support plate; 104. Cabinet door;

[0044] 200. Micro-oxygen removal pipeline; 201. Pressure reducing valve; 202. Washing tank; 203. Manual valve; 204. Drying tank; 205. Dehumidifier; 2021. Washing tank inlet pipe; 2022. Washing tank outlet pipe;

[0045] 300. Carbon dioxide purification pipeline; 301. Condenser; 302. Peristaltic pump; 303. First filter;

[0046] 400. Total hydrocarbon and acetylene removal pipeline; 401. Second filter; 402. Third filter; 403. Membrane fine filter. Detailed Implementation

[0047] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0048] The following disclosure provides many different embodiments or examples for implementing various structures of this invention. To simplify the disclosure, specific examples of components and arrangements are described below. Of course, these are merely examples and are not intended to limit the scope of this invention.

[0049] The embodiments of the utility model will now be described in detail with reference to the accompanying drawings.

[0050] This embodiment addresses the problem of increased analyzer failure rate, reduced measurement accuracy, and increased maintenance costs caused by the lack of pretreatment processes for polycrystalline silicon sample gas detection. A pretreatment device for gas analysis is designed in this embodiment.

[0051] Carbon dioxide analyzers are susceptible to moisture interference, leading to fluctuations in measurement results; the sensors in trace oxygen analyzers are easily corroded by sulfides and carbon black, and interference from other gases must be avoided; the pipelines of total hydrocarbon and acetylene analyzers easily adsorb hydrocarbons, while the sulfides and moisture in acetylene corrode the sensors. Therefore, it is necessary to remove impurities from different sample gases, resulting in the design of three different impurity removal pipelines integrated into a single device.

[0052] like Figure 1As shown, the pretreatment device uses three impurity removal pipelines to remove impurities from different test sample gases. The pretreatment device mainly includes a cabinet 100 and a trace oxygen removal pipeline 200, a carbon dioxide removal pipeline 300, and a total hydrocarbon and acetylene removal pipeline 400 installed inside the cabinet 100.

[0053] See Figure 1 The pretreatment unit's cabinet 100 has a box-shaped structure. The main body 101 of the cabinet is formed by splicing four flat panels, with open front and rear sides. Front support plate 102 and rear support plate 103 extend along the length of the cabinet 100 and connect to the left and right side walls of the main body 101. The front support plate 102 and rear support plate 103 are spaced a certain distance apart along the width of the cabinet 100. Three front support plates 102 and three rear support plates 103 are arranged along the height of the cabinet 100. The front support plates 102 and rear support plates 103 have the same width and their end faces are aligned. Two front support plates 102 and two rear support plates 103 form a structural assembly group. Each of the three structural assembly groups houses a trace oxygen removal pipeline 200, a carbon dioxide removal pipeline 300, and a total hydrocarbon and acetylene removal pipeline 400, respectively.

[0054] Cabinet doors 104 are installed on the front and rear sides of the main body 101. When the cabinet doors 104 on the front and rear sides are closed, a closed space is formed inside the cabinet 100, preventing dust from entering the cabinet 100 and contaminating the components, and keeping the inside of the cabinet 100 clean.

[0055] Figure 2 This is a front view of the gas analysis pretreatment device. A section cut along this section reveals the composition of the trace oxygen removal pipeline 200 within the pretreatment device. For example... Figure 3 As shown, the trace oxygen purification pipeline 200 mainly consists of a pressure reducing valve 201, a water washing tank 202, a drying tank 204, and a dehumidifier 205. One end of the sample gas pipeline in the trace oxygen purification pipeline 200 is installed on the front support plate 102 as the inlet, and the other end is connected to the pressure reducing valve 201. The other end of the pressure reducing valve 201 is connected to the water washing tank 202 via a pipe, with the end of the pipe inserted into the water washing tank 202. Another pipe is also installed inside the water washing tank 202, with its other end connected to the rear support plate 103. A manual valve 203 is installed on the pipe between the pressure reducing valve 201 and the water washing tank 202, and also on the pipe between the water washing tank 202 and the rear support plate 103.

[0056] Combination Figure 2 and Figure 4It can be seen that the water tank 202 has a water inlet pipe 2021 and a water outlet pipe 2022 connected to both sides of the tank body. The inlet of the water inlet pipe 2021 is installed on the rear support plate 103, and the outlet of the water outlet pipe 2022 is also installed on the rear support plate 103. A hand valve 203 is installed on the water inlet pipe 2021 and the water outlet pipe 2022, and the hand valve 203 is located inside the cabinet 100.

[0057] The other end of the washing tank 202 is connected to the drying tank 204 via a U-shaped pipe. The drying tank 204 contains soda lime to remove acidic substances from the sample gas. The other end of the drying tank 204 is connected to the front support plate 102. One end of the dehumidifier 205 is connected to the front support plate 102. The drying tank 204 and the dehumidifier 205 are connected via a U-shaped pipe. The other end of the dehumidifier 205 is mounted on the rear support plate 103 and connected to the outlet end of the pipeline. The dehumidifier 205 is an electronic condensation dehumidifier with a dew point ≤-40℃, removing moisture from the sample gas to prevent damage to the analyzer's sensor. A manual valve 203 is installed on the pipe connecting the drying tank 204 to the rear support plate 103, and a manual valve 203 is also installed on the pipe connecting the drying tank 204 to the front support plate 102. A hand valve 203 is installed on the pipe connecting the dehumidifier 205 to the front support plate 102, and a hand valve 203 is installed in the pipe connecting the dehumidifier 205 to the rear support plate 103.

[0058] When it is necessary to detect trace oxygen in the sample gas, open all the manual valves 203 in the trace oxygen removal pipeline 200, add clean water to the water washing tank 202, and connect the analyzer to the outlet end of the trace oxygen removal pipeline 200. Then, the sample gas is introduced into the pipeline from the inlet end of the removal pipeline. The pressure of the sample gas is reduced by the pressure reducing valve 201 to meet the preset pressure of the pressure reducing valve 201, thereby protecting the pipeline from damage. The sample gas enters the water washing tank 202, causing water-soluble impurities in the sample gas to dissolve in the water, achieving the purpose of preliminary impurity removal.

[0059] Subsequently, the sample gas enters the drying tank 204 from one end of the water washing tank 202. The drying tank 204 contains soda lime, which removes acidic impurities from the sample gas. Finally, the sample gas passes through a dehumidifier 205 from one end of the drying tank 204. The dehumidifier 205 removes moisture from the sample gas to prevent damage to the analyzer's sensor. The purified sample gas is then passed into a trace oxygen analyzer for measurement.

[0060] See Figure 3Below the trace oxygen removal pipeline 200 is a carbon dioxide removal pipeline 300, which mainly consists of a condenser 301, a peristaltic pump 302, and a first filter 303. The inlet end of the carbon dioxide removal pipeline 300 is located on the same side as the inlet end of the trace oxygen removal pipeline 200, and a pressure reducing valve 201 is connected to one side of the inlet pipe. The other end of the pressure reducing valve 201 is connected to the condenser 301, and the other end of the condenser 301 is mounted on the rear support plate 103. One end of the peristaltic pump 302 is connected to the rear support plate 103 via a pipeline. The ends of the condenser 301 and the peristaltic pump 302 connected to the rear support plate 103 are connected by a U-shaped pipe, which is also mounted on the rear support plate 103.

[0061] The other end of the peristaltic pump 302 is mounted on the front support plate 102, and one end of the first filter 303 is connected to the front support plate 102. The first filter 303 is made of polypropylene, which has strong chemical stability and excellent resistance to corrosive liquids. The first filter 303 is used to filter out moisture in the sample gas to prevent moisture from interfering with the measurement results. The peristaltic pump 302 and the first filter 303 are connected via a U-shaped pipe, and the other end of the first filter 303 is connected to the outlet end of the pipe, which is located on the rear support plate 103.

[0062] A manual valve 203 is installed between the pressure reducing valve 201 and the condenser 301, and also between the other end of the condenser 301 and the rear support plate 103. A manual valve 203 is installed in the pipeline connecting the peristaltic pump 302 to the front support plate 102, and also in the pipeline connecting the peristaltic pump 302 to the rear support plate 103. A manual valve 203 is installed in the pipeline connecting the first filter 303 to the front support plate 102, and also in the pipeline connecting the first filter 303 to the rear support plate 103.

[0063] When it is necessary to detect the carbon dioxide content in the sample gas, first open all the manual valves 203 in the pipeline and connect the port of the carbon dioxide analyzer to the outlet of the purification pipeline. The sample gas is introduced from the inlet of the carbon dioxide purification pipeline 300, and the pressure is regulated by the pressure reducing valve 201 to ensure that the pressure of the sample gas meets the preset pressure of the pressure reducing valve 201, so as not to damage the pipeline. The depressurized sample gas enters the condenser 301, where the condenser 301 condenses the water in the sample gas into liquid water. The peristaltic pump 302 is then started to discharge the liquid water from the pipeline. Subsequently, the sample gas enters the first filter 303 from the peristaltic pump 302, where the first filter 303 filters out the remaining water vapor in the sample gas to prevent water vapor from interfering with the measurement results. Finally, the purified sample gas is introduced into the carbon dioxide analyzer for detection.

[0064] Depend on Figure 2 and Figure 3It is known that the total hydrocarbon and acetylene removal pipeline 400 is located below the carbon dioxide removal pipeline 300. The total hydrocarbon and acetylene removal pipeline 400 mainly includes a second filter 401, a third filter 402, and a membrane fine filter 403. The inlet end of the total hydrocarbon and acetylene removal pipeline 400 is also located on the front support plate 102, and the other side of the inlet end is connected to a pressure reducing valve 201. The other end of the pressure reducing valve 201 is connected to the second filter 401. The second filter 401 is made of ceramic; ceramic filter elements can effectively remove large particulate impurities and are corrosion-resistant and have a long service life. The second filter 401 is a pre-filter used to remove calcium carbide particles carried in the sample gas.

[0065] The other end of the second filter 401 is mounted on the rear support plate 103, and one end of the third filter 402 is mounted on the rear support plate 103. The second filter 401 and the third filter 402 are connected via a U-shaped pipe. The third filter 402 is made of activated carbon and is used to remove oil and sulfides from the sample gas. The other end of the third filter 402 is connected to the front support plate 102. One end of the membrane fine filter 403 is mounted on the front support plate 102, and the third filter 402 and the membrane fine filter 403 are connected via a U-shaped pipe. The other end of the membrane fine filter 403 is mounted on the rear support plate 103 and connected to the outlet end of the pipeline. The membrane fine filter 403 is made of hydrophobic PTFE membrane with a filtration grade of 0.1 μm. The hydrophobic PTFE membrane is specifically designed for gas filtration to remove moisture from the sample gas.

[0066] A hand valve 203 is provided between the pressure reducing valve 201 and the second filter 401, and a hand valve 203 is installed in the connecting pipeline between the second filter 401 and the rear support plate 103. Hand valves 203 are provided at both ends of the third filter 402, and hand valves 203 are also provided at both ends of the membrane fine filter 403.

[0067] When sample gas needs to be tested, first open all manual valves 203 in the pipeline and connect the port of the total hydrocarbon and acetylene analyzer to the outlet end of the pipeline. Then, introduce the sample gas from the inlet end of the pipeline and allow it to pass through the pressure reducing valve 201 to regulate the pressure. The second filter 401 removes large particulate impurities from the sample gas. After primary filtration, the sample gas enters the third filter 402, where oil and sulfides are adsorbed and removed. Finally, the sample gas enters the membrane filter 403, where moisture is removed. The purified sample gas is then introduced into the total hydrocarbon and acetylene analyzer for testing.

[0068] The above embodiments are merely a more detailed description of the present utility model. For those skilled in the art, modifications or equivalent substitutions can still be made to the technical solutions in the foregoing embodiments. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model patent.

Claims

1. A pretreatment apparatus for gas analysis, characterized in that, include: Cabinet (100) and a trace oxygen removal pipeline (200), a carbon dioxide removal pipeline (300), and a total hydrocarbon and acetylene removal pipeline (400) installed in the cabinet (100). The cabinet (100) includes at least: The main body of the cabinet (101) has a box-shaped structure; Three front support plates (102) extend along the length of the cabinet body (101) and are connected to the side wall of the cabinet body (101); Three rear support plates (103) are parallel to the front support plate (102) and connected to the side wall of the cabinet body (101); The inlet pipes of the trace oxygen removal pipeline (200), the carbon dioxide removal pipeline (300), and the total hydrocarbon and acetylene removal pipeline (400) are respectively installed on the three front support plates (102); the outlet pipes of the trace oxygen removal pipeline (200), the carbon dioxide removal pipeline (300), and the total hydrocarbon and acetylene removal pipeline (400) are respectively installed on the three rear support plates (103).

2. The pretreatment apparatus according to claim 1, characterized in that, The trace oxygen removal pipeline (200) includes: Pressure reducing valve (201), one end of which is connected to the inlet pipe; A water washing tank (202) is connected to the other end of the pressure reducing valve (201); A drying tank (204) is connected to the other end of the washing tank (202); The dehumidifier (205) is connected at one end to the drying tank (204) and at the other end to the outlet pipe.

3. The pretreatment apparatus according to claim 2, characterized in that: The washing tank (202) is connected to a water inlet pipe (2021) and a water outlet pipe (2022) on both sides respectively. The ports of the water inlet pipe (2021) and the water outlet pipe (2022) are installed on the rear support plate (103).

4. The pretreatment apparatus according to claim 2, characterized in that: The drying tank (204) is filled with soda lime to remove acidic substances from the sample gas.

5. The pretreatment apparatus according to claim 2, characterized in that: The dehumidifier (205) is an electronic condensation dehumidifier with a dew point ≤ -40℃.

6. The pretreatment apparatus according to claim 1, characterized in that, The carbon dioxide impurity removal pipeline (300) includes: Pressure reducing valve (201), one end of which is connected to the inlet pipe; A condenser (301) is connected to the other end of the pressure reducing valve (201); A peristaltic pump (302) is connected to the other end of the condenser (301); The first filter (303) has one end connected to the peristaltic pump (302) and the other end connected to the outlet pipe; The filter element of the first filter (303) is made of polypropylene.

7. The pretreatment apparatus according to claim 1, characterized in that, The total hydrocarbon and acetylene impurity removal pipeline (400) includes: Pressure reducing valve (201), one end of which is connected to the inlet pipe; The second filter (401) is connected to the other end of the pressure reducing valve (201); The third filter (402) is connected to the other end of the second filter (401); A membrane fine filter (403) is connected at one end to the third filter (402) and at the other end to the outlet pipe; Among them, the filter element of the second filter (401) is ceramic, the filter element of the third filter (402) is activated carbon, and the material of the membrane fine filter (403) is hydrophobic PTFE filter membrane.

8. The pretreatment apparatus according to claim 1, characterized in that: The trace oxygen removal pipeline (200), the carbon dioxide removal pipeline (300), and the total hydrocarbon and acetylene removal pipeline (400) are all equipped with manual valves (203).

9. The pretreatment apparatus according to claim 1, characterized in that, The cabinet (100) also includes: Cabinet doors (104) are located on two parallel sides of the main body of the cabinet (101).

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