A microscope imaging device

Abstract

The utility model discloses a kind of microscopic imaging devices, including holding assembly and the optical system with illumination light path and imaging light path, imaging light path has objective lens, first beam splitter, barrel lens and imaging element successively installed on holding assembly, illumination light path has light source and illumination mirror group successively installed on holding assembly;Wherein, first beam splitter is located at the intersection of imaging light path and illumination light path, for reflecting illumination signal and transmitting the reflection signal of sample, the entrance pupil distance of barrel lens is between 120mm to 180mm, objective lens can be removed from optical system and set on holding assembly;Light source is movably set on holding assembly, and the movable direction of light source is parallel to the optical axis of illumination light path;The utility model's microscopic imaging device at least has following beneficial effect: when objective lens parameter changes, only need to adjust the axial distance between illumination mirror group and light source this one parameter, greatly simplify the assembly, debugging and maintenance process of device.

Description

Technical Field

[0001] This utility model relates to the field of microscopic detection devices, and more specifically, to a microscopic imaging device. Background Technology

[0002] In mobile phone screen manufacturing lines, edge optical inspection equipment is a crucial component in ensuring the screen's appearance quality and structural compliance. With the rapid development of display technology, mobile phone screens are constantly evolving towards larger sizes, higher screen-to-body ratios, and narrower bezels, resulting in a significant increase in the area to be inspected. This places higher demands on the coverage and accuracy of edge inspection.

[0003] Microscopic imaging inspection technology can meet the above-mentioned screen appearance quality inspection requirements. For example, the microscopic device for wafer macroscopic defect inspection disclosed in patent CN220063797U includes an imaging optical path and an illumination optical path. The illumination signal generated by the imaging optical path is connected to the imaging optical path through an illumination lens group and a beam splitter for illumination. The reflected signal formed by the object being inspected passes through the objective lens and the tube lens in sequence and is then imaged onto a color / black and white camera. However, in actual inspection, it is sometimes necessary to use objective lenses with different imaging magnifications. Changing the objective lens will affect the quality of illumination and imaging. Therefore, it is necessary to make adaptive adjustments and replacements to other optical components in the entire illumination optical path and imaging optical path, making the entire assembly, debugging and maintenance process more cumbersome and complicated. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings mentioned in the background art and to provide a microscopic imaging device.

[0005] The objective of this utility model is achieved through the following technical solution: A microscopic imaging device includes a holding assembly and an optical system having an illumination optical path and an imaging optical path. The imaging optical path has an objective lens, a first beam splitter, a tube lens, and an imaging element sequentially mounted on the holding assembly. The illumination optical path has a light source and an illumination mirror group sequentially mounted on the holding assembly. The first beam splitter is located at the intersection of the imaging optical path and the illumination optical path and is used to reflect the illumination signal to the objective lens and project the reflected signal after passing through the objective lens to the tube lens. The tube lens is used to project the reflected signal to the imaging element. The entrance pupil distance of the tube lens is between 120mm and 180mm, and the objective lens is movable out of the optical system and mounted on the holding assembly; the light source is movably mounted on the holding assembly, and the movable direction of the light source is parallel to the optical axis of the illumination path.

[0006] The microscopic imaging device of this invention has at least the following beneficial effects: In this microscopic imaging device, the tube lens is designed with an entrance pupil distance within a wide range of 120mm to 180mm, which can adaptively accommodate objectives with different imaging magnifications available on the market. The light source can be movably mounted on the holding assembly relative to the illumination lens group. The objectives mounted on the imaging optical path and the illumination optical path can be removed from the optical system to replace objectives with different imaging magnifications. After replacing the objective, there is no need to adjust the tube lens, and the illumination optical path can be adjusted simply by moving the light source to restore the best illumination effect.

[0007] In the microscopic imaging device of this invention, when the objective lens parameters change, only the axial distance between the illumination lens group and the light source needs to be adjusted. This "single degree of freedom" adjustment mechanism greatly simplifies the assembly, debugging and maintenance process of the device.

[0008] Furthermore, the microscopic imaging device also has a focusing optical path, which includes a focusing sensor disposed on the holding assembly; The imaging optical path between the objective lens and the tube lens also has a second beam splitter mounted on the holding assembly. The second beam splitter is used to reflect part of the reflected signal to the focusing optical path.

[0009] By setting the focusing optical path and focusing sensor, focusing of the optical system can be easily achieved without the need for external focusing equipment.

[0010] Furthermore, the retaining component includes an illumination module, an illumination mirror assembly fixed within the illumination module, and a light source movably mounted within the illumination module.

[0011] By integrating the light source and illumination mirror assembly into the illumination module, maintenance of the illumination optical path is facilitated.

[0012] Furthermore, the illumination lens assembly includes a condenser lens, an aperture, a reflector unit, and a shaping lens arranged sequentially on the illumination optical path; wherein, the reflector unit is used to change the path of the illumination optical path by reflection, so that the imaging optical path intersects the illumination optical path perpendicularly.

[0013] Furthermore, the retaining assembly also includes an imaging module, wherein the tube lens is detachably disposed within the imaging module, the imaging element is movably disposed within the imaging module relative to the tube lens, and the direction of movement of the imaging element is parallel to the optical axis of the illumination path.

[0014] By integrating the telescope and imaging element into the imaging module, it is easier to maintain the imaging optical path.

[0015] Furthermore, the objective lens is detachably mounted on the retaining assembly.

[0016] With the above settings, when it is necessary to change the objective lens to a different imaging magnification, simply remove the original objective lens.

[0017] Furthermore, the retaining component also includes an objective lens switching module, which is equipped with multiple objectives with different imaging magnifications, so that multiple objectives can be connected to the optical system.

[0018] With the above settings, multiple objectives with different imaging magnifications can be installed on the retaining component. When it is necessary to change to an objective with a different imaging magnification, simply switch the target objective to the optical system.

[0019] Furthermore, the objective lens switching module includes a lead screw assembly, on which a plurality of objectives are mounted on a slider, and the plurality of objectives are arranged at intervals along the axial direction of the lead screw within the lead screw assembly.

[0020] With the above settings, the rotation of the lead screw can precisely control the displacement of the objective lens, making it easy to connect the objective lens with the required imaging magnification to the optical system.

[0021] Furthermore, the first beam splitter is located on the imaging optical path between the tube lens and the second beam splitter; Alternatively, the second beam splitter is located in the imaging optical path between the tube lens and the first beam splitter.

[0022] Therefore, the positions of the first and second beam splitters on the imaging optical path can be flexibly set without restriction.

[0023] Furthermore, the imaging element includes CCD, TDI, CMOS, or an eyepiece. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the structure of the microscopic imaging device in the embodiment of this utility model; Figure 2 The optical system principle of the microscopic imaging device in the embodiments of this utility model. Figure 1 ; Figure 3 The optical system principle of the microscopic imaging device in the embodiments of this utility model. Figure 2 ; Figure 4 This is a schematic diagram of the objective lens switching module in an embodiment of the present invention. The attached diagram lists the components represented by each number as follows: 1. Holding component; 10. Illumination module; 11. Imaging module; 12. Objective lens mount; 13. Focusing module; 14. Objective lens switching module; 140. Lead screw; 141. Slider; 2. Imaging optical path; 20. Objective lens; 21. First beam splitter; 22. Tube lens; 23. Imaging element; 24. Second beam splitter; 3. Illumination optical path; 30. Light source; 31. Condenser lens; 32. Aperture stop; 33. Reflector unit; 34. Shaping lens; 4. Focusing optical path; 40. Focusing sensor. Detailed Implementation

[0025] The principles and features of this utility model are described below. The examples given are only for explaining this utility model and are not intended to limit the scope of this utility model.

[0026] This utility model provides a microscopic imaging device, which includes a holding component 1 and an optical system. The optical system includes various optical components required to realize microscopic imaging and the position and optical path relationship between the various components. The holding component 1 refers to the mounting and fixing structure that maintains the position and optical path relationship of the various optical components.

[0027] Reference Figure 1 and Figure 2 In this embodiment, the optical system of the microscopic imaging device includes at least an imaging optical path 2 and an illumination optical path 3.

[0028] Among them, reference Figure 2 The imaging optical path 2 has an objective lens 20, a first beam splitter 21, a tube lens 22 and an imaging element 23 that are sequentially mounted on the holding assembly 1, while the illumination optical path 3 has a light source 30 and an illumination lens group that are sequentially mounted on the holding assembly 1. The first beam splitter 21 is located at the intersection of the imaging optical path 2 and the illumination optical path 3.

[0029] Reference Figure 2 In the illumination optical path 3, the light source 30 generates an illumination signal. After being processed by the illumination lens group, the illumination signal is incident on the first beam splitter 21. The first beam splitter 21 reflects the illumination signal to the objective lens 20. The objective lens 20 focuses the illumination signal onto the surface of the object below to achieve an illumination effect. The illumination effect on the object can be adjusted by adjusting the distance between the light source 30 and the illumination lens group on the optical axis of the illumination optical path 3. In the imaging optical path 2, the reflected signal from the sample passes through the objective lens 20 and then through the first beam splitter 21 to reach the tube lens 22. The tube lens 22 amplifies the reflected signal and projects it onto the imaging element 23. The imaging element 23 is used to image the reflected signal.

[0030] In this embodiment, the entrance pupil distance of the tube lens 22 is designed to be between 120mm and 180mm, which can adaptively accommodate objective lenses 20 with different imaging magnifications.

[0031] The objective lens 20 is detachably mounted on the retaining assembly 1, which facilitates the installation of different objective lenses 20 into the optical system.

[0032] The light source 30 is movably mounted on the holding assembly 1, and the movable direction of the light source 30 is parallel to the optical axis of the illumination optical path 3. The illumination effect of the imaging optical path can be adjusted by adjusting the distance between the light source 30 and the illumination mirror group.

[0033] Therefore, in the microscopic imaging device of this invention, when the objective lens 20 is replaced, there is no need to adjust the working distance between the tube lens 22 and the objective lens 20. Only the light source 30 needs to be moved to adjust the illumination path 3 to restore the best illumination effect. Thus, the "single degree of freedom" adjustment mechanism of adjusting the axial distance between the illumination lens group and the light source 30 greatly simplifies the assembly, debugging and maintenance process of the microscopic imaging device.

[0034] The statement above that the objective lens 20 is removable from the optical system and is located in the holding assembly 1 should be understood as follows: the objective lens 20 is removed from the optical system and the holding assembly 1, or the objective lens 20 is simply removed from the optical system without being removed from the holding assembly 1.

[0035] In the aforementioned optical system, the imaging element 23 can be a CCD, TDI, CMOS, or an eyepiece, etc.

[0036] For example, in one embodiment, the imaging element 23 employs a high-resolution camera with a pixel size of less than 5 μm and a resolution greater than 25 M, and a target surface greater than 1 inch.

[0037] The aforementioned entrance pupil distance range of the tube lens 22 was obtained through static precision optical simulation experiments. Its wide entrance pupil distance characteristic of 120mm to 180mm is compatible with objective lenses 20 of different imaging magnifications (working distances). At this time, when the diameter of the tube lens 22 is within 40mm, the flange distance can be set between 150mm and 160mm, which also provides sufficient mechanical space for the installation and fine adjustment of the imaging element 23. In addition, when the tube lens 22 is replaced with tube lenses with other flange distances, it is only necessary to move and adjust the imaging element 23 in the parallel direction of the optical axis of the imaging optical path 2.

[0038] The above-mentioned microscopic imaging system can be connected to the focusing optical path of an external focusing device by means of the first beam splitter 21.

[0039] Or, refer to Figure 1 and Figure 2 In this embodiment, the microscopic imaging device itself integrates a focusing optical path 4, which includes a focusing sensor 40 disposed on the holding assembly 1.

[0040] Reference Figure 2 At this time, the imaging optical path 2 located between the objective lens 20 and the tube lens 22 also has a second beam splitter 24. The second beam splitter 24 is fixed by the holding assembly 1. The function of the second beam splitter 24 is to transmit part of the reflected signal to the tube lens 22 and reflect another part of the reflected signal to the focusing sensor 40 in the focusing optical path 4.

[0041] By setting up the focusing optical path 4 and the focusing sensor 40, focusing of the optical system can be easily achieved without the need for external focusing equipment.

[0042] Reference Figure 2 When the first beam splitter 21 and the second beam splitter 24 are simultaneously connected to the imaging optical path 2, the positions of the first beam splitter 21 and the second beam splitter 24 on the imaging optical path 2 can be flexibly set.

[0043] For example, refer to Figure 2 The first beam splitter 21 is located on the imaging optical path 2 between the tube lens 22 and the second beam splitter 24; or the second beam splitter 24 is located on the imaging optical path 2 between the tube lens 22 and the first beam splitter 21.

[0044] Reference Figure 1 In one embodiment, the holding component 1 includes a bracket and a focusing module 13, an illumination module 10 and an imaging module 11 mounted on the aforementioned bracket.

[0045] The focusing optical path 4 is set in the holding component 1 in the form of a module, which can be disassembled and maintained as a whole.

[0046] In one embodiment, the light source 30 and the illumination mirror group adopt a dual telecentric Kohler illumination design, which is existing technology. The specific principle is described in patent CN223499445U, and will not be repeated here.

[0047] Reference Figure 1 and Figure 2 In addition, the light source 30 and the lighting mirror assembly in the lighting optical path 3 can be installed in the lighting module 10. The lighting module 10 is detachably mounted on the bracket, which facilitates the maintenance and upgrading of the lighting module 10. The light source 30 is movably installed in the lighting module 10, while the lighting mirror assembly is relatively fixed. Several components in the lighting mirror assembly are fixed in the lighting module 10, that is, only the light source 30 needs to be moved to achieve the adjustment effect.

[0048] For example, the light source 30 can be screwed into the lighting module 10. By screwing the light source 30 in the forward and reverse directions, the distance between the light source 30 and the lighting mirror assembly can be adjusted.

[0049] Reference Figure 2 In this embodiment, the illumination lens group includes a focusing lens 31, an aperture 32, a reflecting unit 33, and a shaping lens 34 arranged sequentially on the illumination optical path 3. Those skilled in the art can add or remove light source elements in the above illumination lens group according to actual needs, which will not be elaborated here.

[0050] Since the condenser lens 31, aperture 32, reflector unit 33 and shaping lens 34 are installed in the illumination lens group, the working distance between the condenser lens 31, aperture 32, reflector unit 33 and shaping lens 34 is fixed and does not need to be adjusted; when it is necessary to adjust the illumination effect of the imaging optical path, it is only necessary to adjust the distance between the light source 30 and the illumination lens group.

[0051] Reference Figure 2 In the illumination optical path 3 of this embodiment, the reflective unit 33 is used to change the path of the illumination optical path 3 by reflection, so that the imaging optical path 2 and the illumination optical path 3 intersect perpendicularly at the first beam splitter 21, thereby enabling the first beam splitter 21 to achieve the beam splitting effect.

[0052] The reflective unit 33 can be a reflector, a total reflection lens, or a beam splitter structure. In this embodiment, a reflector is used.

[0053] Reference Figure 2 The aforementioned imaging module 11 is detachably mounted on the bracket, the tube lens 22 is detachably disposed inside the imaging module 11, and the imaging element 23 is movably disposed inside the imaging module 11 relative to the tube lens 22. The moving direction of the imaging element 23 is parallel to the optical axis of the illumination optical path 3. Therefore, the tube lens 22 with other relay parameters can be replaced as needed. After replacement, the working distance between the imaging element 23 and the replaced tube lens 22 can be adjusted accordingly.

[0054] Reference Figure 2 In one embodiment, the objective lens 20 is mounted on the support via the objective lens mounting bracket 12, and the objective lens 20 can be removed from the aforementioned optical system simply by removing it from the objective lens mounting bracket 12.

[0055] In addition, a motion axis can be installed inside the objective lens mounting bracket 12, and the objective lens 20 is mounted on the motion axis. By cooperating with the focusing module 13, the distance between the objective lens 20 and the sample can be finely adjusted to achieve the focusing function.

[0056] Reference Figure 3 and Figure 4 In another embodiment, the holding component 1 further includes an objective lens switching module 14, which is mounted on the objective lens mounting bracket 12. Multiple objective lenses 20 with different imaging magnifications are mounted on the objective lens switching module 14. Through the switching operation of the objective lens switching module 14, multiple objective lenses 20 can be connected to the optical system.

[0057] At this time, the objective lens switching module 14 can be mounted on the objective lens mounting bracket 12 via the aforementioned motion axis, or the objective lens switching module 14 can be configured with a set of the aforementioned motion axes for each group of objectives 20.

[0058] Therefore, with the above settings, when it is necessary to change the objective lens 20 to a different imaging magnification, it is only necessary to switch the target objective lens 20 into the optical system, without removing the original objective lens 20.

[0059] In one embodiment, multiple objectives 20 can be arranged in a circular array around a rotation center on the objective lens switching module 14. The objective lens connected to the optical system can be switched by simply rotating the objective lens switching module 14 around the rotation center by a certain angle. Optionally, the rotation of the objective lens switching module 14 can be precisely controlled by a servo motor.

[0060] Or, refer to Figure 4 In one embodiment, the aforementioned objective lens switching module 14 includes a lead screw pair. Multiple objectives 20 are mounted on a slider 141 within the lead screw pair, and the multiple objectives 20 are arranged at intervals along the axial direction of the lead screw 140 within the lead screw pair. The two ends of the lead screw 140 are rotatably connected to a seat on the objective lens switching module 14. The lead screw 140 is driven to rotate by a motor. The seat on the objective lens switching module 14 is provided with a guide structure that is slidably connected to the slider 141. By rotating the lead screw 140, the slider 141 can slide along the axial direction of the lead screw 140, thereby precisely controlling the synchronous displacement of several objectives 20, and thus switching the target objective lens 20 to the optical system.

[0061] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0062] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0063] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0064] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0065] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0066] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A microscopic imaging apparatus, comprising a holding assembly and an optical system having an illumination optical path and an imaging optical path, wherein the imaging optical path has an objective lens, a first beam splitter, a tube lens, and an imaging element sequentially mounted on the holding assembly, and the illumination optical path has a light source and an illumination mirror group sequentially mounted on the holding assembly; wherein, The first beam splitter is located at the intersection of the imaging optical path and the illumination optical path, and is used to reflect the illumination signal to the objective lens and project the reflected signal after passing through the objective lens to the tube lens. The tube lens is used to project the reflected signal to the imaging element. The feature is: The entrance pupil distance of the tube lens is between 120mm and 180mm, and the objective lens is detachably mounted on the holding assembly; the light source is movably mounted on the holding assembly, and the movable direction of the light source is parallel to the optical axis of the illumination path.

2. The microscopic imaging device according to claim 1, characterized in that, The microscopic imaging device also has a focusing optical path, which includes a focusing sensor disposed on the holding assembly; The imaging optical path located between the objective lens and the tube lens also includes a second beam splitter disposed on the holding assembly. The second beam splitter is used to reflect a portion of the reflected signal to the focusing optical path.

3. The microscopic imaging device according to claim 1, characterized in that, The retaining component includes an illumination module, the illumination mirror assembly is fixed within the illumination module, and the light source is movably installed within the illumination module.

4. The microscopic imaging device according to claim 3, characterized in that, The illumination lens assembly includes a condenser lens, an aperture, a reflector unit, and a shaping lens arranged sequentially on the illumination optical path; wherein, the reflector unit is used to change the path of the illumination optical path by reflection, so that the imaging optical path intersects the illumination optical path perpendicularly.

5. The microscopic imaging device according to claim 1, characterized in that, The holding assembly further includes an imaging module, wherein the tube lens is detachably disposed within the imaging module, the imaging element is movably disposed within the imaging module relative to the tube lens, and the direction of movement of the imaging element is parallel to the optical axis of the illumination optical path.

6. The microscopic imaging apparatus according to claim 1, characterized in that, The objective lens is detachably mounted on the retaining assembly.

7. The microscopic imaging apparatus according to claim 1, characterized in that, The holding assembly also includes an objective lens switching module, which is equipped with multiple objectives with different imaging magnifications, so that multiple objectives can be connected to the optical system.

8. The microscopic imaging apparatus according to claim 7, characterized in that, The objective lens switching module includes a lead screw assembly, on which a plurality of objective lenses are mounted on a slider, and the plurality of objective lenses are arranged at intervals along the axial direction of the lead screw in the lead screw assembly.

9. The microscopic imaging apparatus according to claim 2, characterized in that, The first beam splitter is located on the imaging optical path between the tube lens and the second beam splitter; Alternatively, the second beam splitter is located in the imaging optical path between the tube lens and the first beam splitter.

10. The microscopic imaging apparatus according to claim 1, characterized in that, The imaging element includes CCD, TDI, CMOS, or an eyepiece.

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