Magnetic levitation turbomolecular pump

CN309057304SActive Publication Date: 2025-01-07SUZHOU SUPERMAG INTELLIGENT TECH CO LTD
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Patent Information

Application Number
CN202430127908.3
Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Filing Date
2024-03-13
Publication Date
2025-01-07
Estimated Expiration
2039-03-13

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Abstract

1. The name of this design product: Magnetic levitation turbomolecular pump. 2. Purpose of the product of this design: used for achieving high vacuum or ultra-high vacuum in the fields of semiconductor manufacturing, pharmaceutical manufacturing, etc. 3. The design key point of this appearance design product lies in the shape. 4. The picture or photo that best illustrates the design points: three-dimensional picture.
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