Magnetic levitation turbomolecular pump
CN309093406SActive Publication Date: 2025-01-28SUZHOU SUPERMAG INTELLIGENT TECH CO LTD
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Patent Information
- Application Number
- CN202430128011.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-13
- Publication Date
- 2025-01-28
- Estimated Expiration
- 2039-03-13
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Figure 000001_ABST
Abstract
1. The name of this design product: Magnetic levitation turbomolecular pump. 2. Purpose of the product of this design: used for achieving high vacuum or ultra-high vacuum in the fields of semiconductor manufacturing, pharmaceutical manufacturing, etc. 3. The design key point of this appearance design product lies in the shape. 4. The picture or photo that best illustrates the key points of the design: 3D drawing of Design 1. 5. Other situations that require explanation: Design 1 is the basic design.
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