Electrostatic chuck
CN309112271SActive Publication Date: 2025-02-14苏州高芯众科半导体有限公司
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Patent Information
- Application Number
- CN202430269222.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-09
- Publication Date
- 2025-02-14
- Estimated Expiration
- 2039-05-09
Smart Images
Figure 000005_ABST
Abstract
1. The name of this design product: electrostatic chuck. 2. Purpose of the product of this design: Used in semiconductor manufacturing equipment, electrostatic adsorption clamping device for semiconductor processing. 3. The design key point of this appearance design product lies in the shape. 4. The picture or photo that best illustrates the design points: three-dimensional picture. 5. The design for which protection is sought includes color. 6. The right view is symmetrical with the left view, so the right view is omitted; the bottom view is symmetrical with the top view, so the bottom view is omitted.
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