Three-column electrode reaction tube
CN309308019SActive Publication Date: 2025-05-27KOKUSAI DENKI KK
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Patent Information
- Application Number
- CN201930741508.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2019-12-30
- Publication Date
- 2025-05-27
- Estimated Expiration
- 2029-12-30
Smart Images
Figure 000007_ABST
Abstract
1. Name of the Design Product: Three-column electrode reaction tube. 2. Use of the Design Product: This product is used in a substrate processing device and is a reaction tube for performing plasma processing with several substrates arranged horizontally. 3. Design Key Points of the Design Product: Lies in the shape. 4. Picture or Photograph Most Indicating the Design Key Points: Perspective view of Design 1. 5. Design 1 is designated as the basic design. 6. This design product is made of transparent material.
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