Monochromatic Laser Interference End Point Detection Device

Abstract

1. Name of the Design Product: Monochromatic Laser Interference Endpoint Detection Device. 2. Use of the Design Product: This product is used as an endpoint detection device for semiconductor etching or thin film processes. 3. Design Key Points of the Design Product: Lies in the shape. 4. Picture or Photograph Most Indicating the Design Key Points: Combined State Reference Drawing. 5. Other Circumstances Requiring Explanation - Component Description: Component 1 is the main unit of the monochromatic laser interference endpoint detection device, Component 2 is the control box of the monochromatic laser interference endpoint detection device, and Component 3 is the electric motion platform controller of the monochromatic laser interference endpoint detection device.

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