Wafer handling robot (vacuum 5-axis)

CN309536348SActive Publication Date: 2025-10-10HONG HU SUZHOU SEMICON TECH CO LTD
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Patent Information

Application Number
CN202430677055.0
Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Filing Date
2024-10-25
Publication Date
2025-10-10
Estimated Expiration
2039-10-25

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Abstract

1. Name of the design product: wafer transfer robot (vacuum 5-axis). 2. Use of the design product: the design product is used as a transfer robot for grabbing and transferring semiconductor silicon wafers. 3. Design points of the design product: in the overall shape. 4. Picture or photo best indicating the design points: perspective view.
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