Top plate of thin film deposition apparatus
CN309613411SActive Publication Date: 2025-11-18长治职业技术学院
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Patent Information
- Application Number
- CN202530376124.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2025-06-28
- Publication Date
- 2025-11-18
- Estimated Expiration
- 2040-06-28
Smart Images
Figure 000007_ABST
Abstract
1. The name of the design product: top plate of thin film deposition equipment. 2. The use of the design product: in thin film deposition equipment, the mechanical top plate plays the role of air inlet and air mixing. 3. The design points of the design product: in shape. 4. The picture or photo that best shows the design points: front view.
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