tray inner disc

Abstract

1. The name of the design product: inner tray of tray. 2. The use of the design product: used as inner tray of substrate tray in the equipment for preparing compound semiconductor material or other thin film material (such as silicon carbide epitaxy), which can be combined with the outer ring of the tray to place the substrate for epitaxial growth. 3. The design points of the design product: in shape. 4. The picture or photo that best shows the design points: design 1 perspective view. 5. Design 1 is designated as the basic design.

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