Silicon wafer chuck (single pin)

CN309970194SActive Publication Date: 2026-05-08WUXI SONGYU TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
WUXI SONGYU TECH CO LTD
Filing Date
2025-08-26
Publication Date
2026-05-08

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Abstract

1. Name of the designed product: Silicon wafer chuck (single insertion). 2. Use of the designed product: Used for sucking and inserting single wafer in ALD automation. 3. Design points of the designed product: In shape. 4. Picture or photo showing the design points: Fig. 1.
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