Composite workpiece as well as manufacturing process, device and use relating to such composite workpiece

Abstract

Composite workpiece (1) comprising a substrate body (5) and at least one first coating (7), wherein the substrate body has at least one first surface (9) and at least one second surface (11), wherein the first surface of the substrate body is convex at least in some areas and the second surface of the substrate body is concave at least in some areas, and the composite workpiece has a magnitude of Bow (17) of between 0.1 µm and 50 µm due to the curved shape of the first and second surfaces, wherein at least the first surface of the substrate body is coated at least partially with the first coating; wherein the composite workpiece further comprises a second coating and wherein at least the second surface of the substrate body is coated at least partially with the second coating, wherein the second coating comprises and / or forms at least a grid structure that can be applied to or is applied to the substrate body.

Description

[0001] The present invention relates to a composite workpiece, a method for manufacturing such a composite workpiece, augmented reality glasses comprising such a composite workpiece, and a use of such a composite workpiece. State of the art

[0002] Augmented Reality is a rapidly developing technological field serving a range of applications, including entertainment, medicine, education, construction, and transportation, to name just a few. Unlike the related field of virtual reality, augmented reality focuses on the close integration of multimedia information with sensory input from the real world, typically through the selective overlay of a digital image onto a spectacle lens.

[0003] The lenses for eyeglasses are typically manufactured from wafers that have special structures for light or image transmission. These structures are created by applying a die to the otherwise untreated wafer. However, during the die-cutting process, individual wafers can break due to the high forces acting on them. This leads to higher production costs.

[0004] In the publication DE 10 2019 211 258 A1, a layered optical composite material for use in an augmented reality device is disclosed.

[0005] In the publication DE 10 2019 211 256 A1, a layered optical composite material with a reduced content of strongly refractive layers is disclosed for use in an augmented reality device.

[0006] It is therefore an object of the present invention to provide means by which the disadvantages of the prior art can be overcome and by which, in particular, the embossing process of wafers can be made safer, more reliable and more efficient. Description of the invention

[0007] The problem is solved by the invention according to a first aspect in that a composite workpiece comprising a substrate body, such in particular a wafer, and at least one first coating, wherein the substrate body has at least one first surface and at least one second surface, wherein the first surface of the substrate body is convex at least in some areas and the second surface of the substrate body is concave at least in some areas, and the composite workpiece, in particular the substrate body, has a bow magnitude of between 0.1 µm and 50 µm due to the curved shape of the first and second surfaces, where at least the first surface of the substrate body is at least partially coated with the first coating, it is proposed. wherein the composite workpiece further comprises a second coating and wherein at least the second surface of the substrate body is coated at least partially with the second coating, wherein the second coating comprises and / or forms at least a grid structure that can be applied to or is applied to the substrate body.

[0008] The invention is thus based on the surprising finding that by providing the first coating on the convex side of the substrate body as a result of the bow, such as a wafer, the strength of the substrate body for forces acting on its concave side can be significantly increased with the first coating.

[0009] This, in turn, makes the composite workpiece significantly more resistant and able to withstand the impact of the embossing die much better during the embossing process. This drastically reduces the risk of the substrate breaking during embossing. This results in less scrap, a more efficient manufacturing process, and therefore lower overall production costs. Even higher forces can be applied without risking damage or destruction of the substrate. This also allows for the creation of structures on the substrate with greater force, leading to more reliable formation of these structures and thus a higher-quality product.

[0010] For example, the structures can be created using nano-imprint lithography (NIL). In this process, a polymer or other plastic is applied to the second surface, preferably over the entire area, via spin coating. A die is then pressed into this polymer, imprinting a lattice structure. The structure is then cured using a UV process.

[0011] Furthermore, safety is significantly increased. This is because the composite workpiece is also less susceptible to the development of unnoticed pre-damage during the embossing process, which could otherwise lead to the substrate body breaking under even relatively minor forces acting on the substrate material later on.

[0012] This makes the production of wafers, from which spectacle windows for augmented reality glasses are cut, considerably more efficient, reliable and with a higher quality result.

[0013] This finding is particularly surprising because even with initial coatings exhibiting compressive stress, beneficial effects on the resistance of the coated substrate to forces acting on the second surface are observed. Compressive stress, in turn, leads—especially in the case of glass as the substrate—to tensile stress at the substrate's interface. According to conventional understanding, tensile stress reduces the surface strength of the substrate. However, by applying the first coating to the convex side of the substrate or wafer, the strength against forces acting on the concave side is increased—contrary to previous understanding and established practices, as long as the bow remains within the described limits.

[0014] Obviously, the combination of compressive and tensile stresses in the first coating and the substrate body on the one hand, which are disadvantageous according to conventional thinking, and Bow on the other hand, leads to a composite workpiece with overall advantageous strength properties for the production of lenses for augmented reality glasses.

[0015] This means that the strength of the entire composite workpiece against forces acting on the second surface is increased in the composite workpiece according to the invention. In other words, the strength of the composite workpiece against breakage under corresponding external force is increased. According to the inventors, this can be attributed to the altered strength properties of the first surface resulting from the interaction between the first coating and the substrate body in conjunction with the Bow. In particular, the surface strength of the substrate body is relevant here.

[0016] When performing a surface strength measurement (for example using the “ring-on-ring” test), it was found that the coated first surface of the substrate body results in a composite piece that has a higher strength value in terms of surface strength on the coated side than an uncoated substrate body or than the uncoated second surface of the substrate body.

[0017] The “ring-on-ring” method is preferably carried out in accordance with the European standard EN 1288-5:2000, in particular according to part 5 thereof. Preferably, a load ring with a radius of 6 mm and a support ring with a radius of 30 mm are used.

[0018] Preferably, in the “ring-on-ring” method, the quasi-static force is increased continuously and slowly, in particular at a rate of 1 Newton per second.

[0019] The “ring-on-ring” test method therefore enables a strength measurement, namely the surface strength of, for example, the first and / or second surface of the substrate body.

[0020] A compressive stress present in the first coating therefore appears to be harmless and, on the contrary, according to the inventors' experiments, even leads to more advantageous strength values ​​overall, provided the coating is applied to the convexly shaped surface. Thus, it is the interrelation of the related quantities of compressive stress (in the first coating, where preferably the compressive stress is assumed to be homogeneous throughout the entire first coating), tensile stress (in the substrate body, especially in its first surface), and bow that surprisingly has an extremely positive effect on the strength of the composite workpiece.

[0021] This makes the composite workpiece according to the invention particularly suitable for the production of spectacle lenses used in augmented reality glasses. This is because the substrate body is more resistant to the force of the embossing die acting on one (namely the second) surface of the substrate body if the preferably opposite (namely the first) surface is coated accordingly and the composite workpiece has a bow within certain limits.

[0022] This also means that relatively thin substrate bodies can be used for augmented reality glasses, as their strength can be sufficiently increased.

[0023] The Bow is preferably measured according to SEMI 3D12-0315 2015.

[0024] In one embodiment, the first coating is applied directly or indirectly to the first surface, at least in certain areas. If it is applied directly, the first coating has direct contact with the first surface. If it is applied indirectly, the first coating does not have direct contact with the first surface. In the latter case, for example, one or more intermediate layers, particularly in a sandwich-like arrangement, can be positioned between the first surface and the first coating, at least in certain areas. Optionally, the first coating is applied directly to the first surface in certain areas and indirectly in others.

[0025] In one embodiment, the substrate body has at least one first main surface, and the first main surface has the first surface as its surface. In another embodiment, the substrate body alternatively or additionally has at least one second main surface, preferably opposite the first main surface, and the second main surface has the second surface as its surface. In yet another alternative or additional embodiment, the substrate body has at least one side surface, preferably connecting the first and second main surfaces and / or circumferentially, and the side surface has at least one third surface as its surface, wherein, in particular, the side surface of the substrate body is chamfered, preferably on both sides.

[0026] In one embodiment, the composite workpiece, in particular the substrate body, has a wafer-like shape or is formed in the form of a wafer. Preferably, the first coating follows the thickness direction of the wafer on the substrate body. Optionally, each layer has further sub-layers.

[0027] In one embodiment, the composite workpiece is an optical composite workpiece, in particular an optical, layered composite workpiece.

[0028] This makes the composite workpiece according to the invention particularly suitable as a starting material for lenses for diffractive spectacle technologies, especially augmented reality glasses.

[0029] The invention is particularly advantageous when a PVD coating is to be applied as a first coating to the substrate, when the substrate is thin, in particular thinner than 1.5 mm and / or thicker than 0.1 µm, and / or when the strength of the substrate, especially a glass substrate, is not to be negatively affected, and in particular not reduced, despite the coating. Preferably, the strength is thereby at least kept constant or, more preferably, increased.

[0030] Alternatively or additionally, it may also be provided that the first coating includes an anti-reflective coating, in particular the anti-reflective coating titanium, (a) Si3N4, ZrO2, Ta2O5, HfO2, Nb2O5, TiO2, SnO2, indium tin oxide, ZnO2, AIN, a mixed oxide comprising at least one of these, a mixed nitride comprising at least one of these, or a mixed oxide nitride comprising at least one of these, (b) ZrO2, Ta2O5, HfO2, Nb2O5, TiO2, or a mixed oxide comprising at least one of these, and / or (c) SiO2, MgF2 and a mixed oxide comprising SiO2 and another oxide, preferably SiO2, which can be applied to or is applied to the substrate body by means of a vapor deposition and / or sputtering process. is amorphous and / or has a thickness of less than or equal to 400 nm, less than or equal to 350 nm, less than or equal to 300 nm, less than or equal to 250 nm, less than or equal to 200 nm, less than or equal to 150 nm, less than or equal to 100 nm or less than or equal to 50 nm and / or of greater than or equal to 50 nm, greater than or equal to 100 nm, greater than or equal to 150 nm, greater than or equal to 200 nm, greater than or equal to 250 nm or greater than or equal to 300 nm; that only the first surface of the substrate body is coated with the first coating; and / or that the second surface of the substrate body is not coated with the first coating.

[0031] By using an anti-reflective (AR) coating for the first layer, not only can the strength of the composite material be improved, but its suitability as a base material for lenses for augmented reality glasses can also be enhanced. This is because applications in this field typically require lenses with an anti-reflective coating on one side to achieve improved, and especially reflection-free, overlay of the displayed data onto the external image.

[0032] Preferably, the first coating can be applied or applied to the first surface using a PVD process.

[0033] Surprisingly, it was discovered that PVD-based coatings (for example, evaporation, ion-assisted evaporation, and sputtering), when processed appropriately, exhibit low compressive stress (and thus generate little tensile stress in the substrate material) and increase the surface strength of the substrate material, especially of the first and / or second surface. Therefore, such coatings are preferred for the first coating.

[0034] In an exemplary first coating, the strength, and in particular the surface strength, of the coated first surface of the substrate body can be increased by a factor of at least 1.1, in particular at least 1.5, preferably at least 2, preferably at least 4. Alternatively or additionally, the strength can be increased by a factor of at most 5, preferably at most 4, preferably at most 3. Alternatively or additionally, the strength can be increased by a factor of between 1.1 and 5, in particular between 1.1 and 4, preferably between 1.2 and 3 or between 1.2 and 2.

[0035] Preferably, the factors are considered in comparison to an uncoated substrate body or the uncoated second surface of the substrate body.

[0036] This allows for an increase in the strength of the substrate body against forces acting on the second surface by the same factor.

[0037] "PVD" stands for physical vapor deposition. It is state of the art in coating optical systems and therefore does not need to be explained in further detail here.

[0038] By producing the first coating using PVD processes, preferably taking into account the process described herein, a coating with low compressive stress can advantageously be obtained. This is because these coatings can exhibit compressive stress. This compressive stress then, in turn, leads to tensile stress at the interface of the substrate body. By forming a correspondingly low bow, a composite workpiece according to the invention can thus be easily obtained.

[0039] Furthermore, PVD technologies are well suited for creating single- and multi-layer coatings with precise thicknesses. This property leads to particularly good results, especially in anti-reflective coatings.

[0040] It was surprisingly discovered that an argon content in the primary deposited material of the first coating, in addition to a relatively low compressive stress, leads to a further increase in the surface strength of the second surface. Thus, by controlling the argon content, a fine adjustment of the compressive stress in the first coating can advantageously be achieved. An argon content of up to 10 wt.%, preferably less than 5 wt.%, and preferably less than 2 wt.%, has proven to be particularly advantageous.

[0041] Applying the first coating only to the first surface, or not to the second surface, leads to very good results in increasing the strength with respect to forces acting on the second surface.

[0042] The first coating preferably exhibits such a low compressive stress that no or only minimal (further) deformation of the substrate body occurs due to the first coating. Surprisingly, it turns out that when the layer exhibits a compressive stress that leads to (further) deformation of the substrate body, and when the first coating is still on the convexly curved surface, the substrate body better withstands forces acting on the second surface, provided the bow is appropriate.

[0043] Preferably, the first coating does not create any or only a small additional bow in the composite workpiece, in particular the substrate body, i.e., the bow of the coated substrate body increases only slightly compared to the uncoated substrate body.

[0044] A preferred first coating is suitable for reducing the reflection of light incident on the coated first surface.

[0045] A preferred first coating does not impair light propagation in the substrate body.

[0046] The first coating preferably covers at least 80% of the first surface, preferably at least 90%, more preferably at least 95%, more preferably at least 99%, and preferably the entire first surface.

[0047] A preferred first coating comprises one or more coating layers. The first coating is preferably produced as a stack of coating layers, which are preferably arranged as a stack of coplanar coatings.

[0048] The thickness of the first coating is preferably determined perpendicular to the first surface.

[0049] A preferred first coating creates an area of ​​low reflection.

[0050] A preferred low-reflectivity region extends from 450 to 650 nm. The maximum reflectance in this region is preferably no more than 50% of the maximum reflectance in this region for the uncoated substrate, particularly with regard to the first coating, preferably no more than 40%, and more preferably no more than 30%.

[0051] The maximum reflection in the range of 450 to 650 nm is preferably less than 5%, preferably less than 4%, preferably less than 3%, preferably less than 2%, preferably less than 1.5%, preferably less than 1.1%.

[0052] A preferred low-reflectivity region covers a wide wavelength range. Preferably, there is a region with a width of at least 175 nm, more preferably at least 200 nm, more preferably at least 225 nm, and more preferably at least 250 nm, in which the maximum reflection minus the minimum reflection is less than 1%.

[0053] A preferred low-reflectivity region is flat. The maximum reflectance in the 450 to 650 nm range, minus the minimum reflectance in the same range, is preferably less than 1.5%, more preferably less than 1.0%, and best of all less than 0.8%.

[0054] Preferred first coatings are amorphous. Preferred first coatings consist of amorphous materials. Preferred first coatings are non-crystalline. Preferred first coatings are not in the far-field order. Preferred first coatings do not exhibit columnar growth. Preferred first coatings do not exhibit porous growth. Preferred first coatings do not exhibit textured growth. A preferred first coating has not more than 25 vol%, preferably not more than 10 vol%, and more preferably not more than 5 vol% crystalline content. In one aspect of this embodiment, the first coating contains no crystalline material. In one aspect of this embodiment, the first coating does not exhibit columnar growth. In one aspect of this embodiment, the first coating does not exhibit porous growth.In one aspect of this embodiment, the first coating contains no textured growth. The presence of columnar growth and the presence of textured growth are each preferably determined by inspection of a cross-sectional area using a scanning electron microscope. The presence of crystalline material is preferably determined by Raman spectroscopy.

[0055] Alternatively or additionally, it may also be provided that the substrate body contains glass; and / or that the substrate body has a thickness of less than or equal to 2 mm, less than or equal to 1.5 mm, less than or equal to 1 mm or less than or equal to 0.5 mm, greater than or equal to 0.05 mm, greater than or equal to 0.07 mm, greater than or equal to 0.1 mm, greater than or equal to 0.3 mm, greater than or equal to 0.5 mm or greater than or equal to 1 mm, and / or between 0.05 mm and 2 mm, between 0.07 mm and 2 mm, between 0.1 mm and 2 mm, between 0.3 mm and 2 mm, between 0.3 mm and 1.5 mm, between 0.3 mm and 1.5 mm or between 0.3 mm and 1 mm.

[0056] In the application area of ​​augmented reality glasses, the aforementioned thicknesses of the substrate body are particularly preferred in order to achieve high strength.

[0057] The substrate body can preferably consist of or comprise glass. In one embodiment, a preferred glass for the substrate body is niobium phosphate glass. In another embodiment, a preferred glass for the substrate body is lanthanum borate glass. In another embodiment, a preferred glass for the substrate body is bismuth oxide glass. In yet another embodiment, a preferred glass for the substrate body is a silicate-based glass.

[0058] A preferred glass group comprises one or more selected from the group consisting of: niobium phosphate glass types, lanthanum borate glass types, bismuth oxide glass types, silicate glass types, while silicate glass types preferably include one or more of the following: TiO2, La2O3, Bi2O3, Gd2O3, Nb2O5, Y2O3, Yb2O3, Ta2O5, WO3, GeO2, Ga2O3, ZrO2, BaO, SrO, ZnO, Cs2O and PbO.

[0059] A preferred silicate-based glass comprises at least 30 wt% SiO2, preferably at least 40 wt% SiO2, more preferably at least 50 wt% SiO2. A preferred silicate glass comprises at least 80 wt% SiO2, more preferably at least 70 wt%, more preferably at least 60 wt%. A preferred silicate glass comprises SiO2 in a range of 30 to 80 wt%, more preferably in a range of 40 to 70 wt%, more preferably in a range of 50 to 60 wt%. A preferred silicate-based glass comprises one or more of the following selected from the group consisting of TiO2, La2O3, Bi2O3, Gd2O3, Nb2O5, Y2O3, Yb2O3, Ta2O5, WO3, GeO2, Ga2O3, ZrO2, BaO, SrO, ZnO, Cs2O and PbO, preferably in a total amount of at least 20 wt.%, more preferably at least 30 wt.%, more preferably at least 40 wt.%, more preferably at least 50 wt.%.A preferred silicate-based glass comprises one or more of the following selected from the group consisting of: TiO2, La2O3, Bi2O3, Gd2O3, Nb2O5, Y2O3, Yb2O3, Ta2O5, WO3, GeO2, Ga2O3, ZrO2, BaO, SrO, ZnO, Cs2O and PbO in a total amount of up to 70 wt.%.

[0060] Alternatively or additionally, it may also be provided that the strength, in particular the surface strength, of the first coated surface of the substrate body is greater than or equal to the strength of the uncoated second surface of the substrate body. that the second surface can withstand a greater force than the first surface; and / or that the strength of the first and / or second surface of the substrate body is greater than or equal to 100 MPa, 150 MPa, 200 MPa or 250 MPa and / or less than or equal to 1000 MPa, 500 MPa, 400 MPa, 300 MPa or 200 MPa.

[0061] The strength of the substrate body, and in particular that of the second surface as well as that of the coated first surface, can be determined, for example, using the “ring-on-ring” test method described above.

[0062] Surface strengths of the first surface of greater than or equal to 100 MPa, in particular of greater than or equal to 200 MPa, 300 MPa or 400 MPa, are particularly preferred in the application area of ​​augmented reality glasses in order to be able to act with sufficient force on the second surface with the embossing die to create the structures on the second surface.

[0063] Because a force, such as that of an embossing die, acts on the second surface, it is ultimately absorbed (also) by the first surface. Therefore, the strength of the first surface (hence surface strength) is an important criterion. And this strength is advantageously designed by the invention through the interaction of the first coating, the curved substrate body, and the Bow.

[0064] Alternatively or additionally, it can also be provided that a compressive stress exists at least in certain areas of the first coating, preferably the compressive stress less than or equal to 100 MPa, less than or equal to 70 MPa, less than or equal to 50 MPa, less than or equal to 30 MPa, less than or equal to 20 MPa, or less than or equal to 10 MPa, greater than or equal to 1 MPa, greater than or equal to 10 MPa, greater than or equal to 20 MPa, greater than or equal to 30 MPa, greater than or equal to 50 MPa, greater than or equal to 70 MPa or greater than or equal to 100 MPa, and / or between 10 MPa and 50 MPa, in particular between 15 MPa and 40 MPa, preferably between 15 MPa and 30 MPa, even more preferably between 15 MPa and 25 MPa or between 20 MPa and 30 MPa.

[0065] In the application area of ​​augmented reality glasses, the aforementioned compressive stresses in the first coating are particularly preferred in order to achieve particularly preferred strength values ​​for the composite workpiece and especially the second surface.

[0066] For example, the compressive stress present in the first coating can be evaluated and / or determined by measuring the deformation of the substrate before and after coating with the first layer, e.g., using interferometric methods. The Stoney equation, for example, can be used for this purpose.

[0067] A suitable measure is, of course, the bow of the composite workpiece or the substrate body, which can be negative or positive. The additional bow after coating, compared to the bow of the uncoated substrate body, is a qualitative and / or quantitative measure of the compressive or tensile stress in the first coating. Preferably, and for the purposes of the invention, the stress can be determined using the Stoney equation. The coating is optimal when the curvature after coating is comparable to the curvature of the uncoated substrate. This is because it is normally expected that the coated surface, especially if the coating optionally exhibits compressive stress, will not become stronger. Instead, according to conventional expectations, a glass surface coated with a coating exhibiting compressive stress will have lower strength.

[0068] Alternatively or additionally, it may also be provided that the Bow greater than or equal to 0.3 µm, greater than or equal to 0.5 µm, greater than or equal to 1 µm, greater than or equal to 5 µm, greater than or equal to 15 µm, greater than or equal to 20 µm, greater than or equal to 25 µm, greater than or equal to 30 µm, greater than or equal to 35 µm, greater than or equal to 40 µm or greater than or equal to 45 µm, less than or equal to 50 µm, less than or equal to 45 µm, less than or equal to 40 µm, less than or equal to 35 µm, less than or equal to 30 µm, less than or equal to 25 µm, less than or equal to 20 µm, less than or equal to 15 µm, less than or equal to 10 µm, less than or equal to 5 µm, less than or equal to 3 µm, less than or equal to 2 µm, less than or equal to 1 µm, less than or equal to 0.7 µm or less than or equal to 0.3 µm and / or between 0.1 µm and 40 µm, between 0.1 µm and 30 µm, between 0.1 µm and 20 µm, between 0.1 µm and 10 µm, between 0.3 µm and 7 µm, between 0.3 µm and 7 µm, between 0.3 µm and 6 µm, between 0.3 µm and 5 µm or between 0.3 µm and 4 µm.

[0069] In the application area of ​​augmented reality glasses, the aforementioned values ​​of the bow are particularly preferred in order to achieve high strength.

[0070] Alternatively or additionally, it may also be provided that the following relationship applies to the Young's modulus of the substrate body material E, the Poisson's ratio of the substrate body material v, the radius of curvature of the composite workpiece, in particular of the substrate body, R, the thickness of the substrate body D, the thickness of the first coating d, and the compressive stress in the first coating S. S=E1−vD26Rd consists of a modulus of elasticity preferably having a value between 40 GPa and 160 GPa, preferably between 85 GPa and 130 GPa, and / or a Poisson's ratio having a value between 0.15 and 0.35, preferably between 0.2 and 0.3.

[0071] If the dimensions of the composite material and its components meet the aforementioned requirements, the improved strength properties of the substrate body against forces acting on the second surface can be achieved for the application of augmented reality glasses. This allows the dimensions to be selected appropriately according to this specification in order to obtain particularly advantageous products.

[0072] In preferred embodiments, for one or more of the quantities from the group consisting of the modulus of elasticity of the substrate body material E, the Poisson's ratio of the substrate body material v, the radius of curvature of the composite workpiece, in particular of the substrate body, R, the thickness of the substrate body D, the thickness of the first coating d and the stress, in particular compressive stress, in the first coating S, the respective ranges of values ​​of these quantities mentioned in the description at the relevant places can be used.

[0073] For example, if HfO2 is used instead of TiO2 under suitable process parameters, a tensile stress is preferably present and / or adjustable in the first coating. According to current understanding, a tensile stress in the first coating is linked to a compressive stress in the substrate, which in turn has a positive effect on the surface strength of the substrate, such as glass.

[0074] This relationship makes it particularly easy to determine suitable glasses for the substrate. Therefore, if a specific glass is to be used as the substrate, the relationship can be used to easily check whether the glass can be used given other parameters and / or how parameters need to be adjusted to use a preferred glass as the substrate.

[0075] Preferably, the radius of curvature of the composite workpiece, in particular of the substrate body, R, is specified with respect to the second surface of the composite workpiece.

[0076] Alternatively or additionally, the radius of curvature R can also be determined from the Bow by using the following relationship: R=0.25×X2+bow22∗bow

[0077] In other words, the radius of curvature “R” used in the “Stoney” formula can be calculated from the “bow” given the substrate diameter “X” and preferably assuming a circular arc.

[0078] Alternatively or additionally, it may also be provided that the second surface is polished; that the first surface is polished; that the first surface of the substrate body is convexly shaped, at least in the area of ​​the first coating; and / or that the second surface of the substrate body is concave, at least in the area of ​​the first coating.

[0079] When the second surface is polished, the structures can be applied to the substrate with particular reliability.

[0080] It proves particularly advantageous if the first coating is specifically applied to convex areas of the first surface in order to achieve particularly good resistance to forces acting on the second surface. For example, the first coating can also be applied only to convex areas of the first surface. Preferably, the first surface is convex throughout, and the entire first surface is coated with the first coating.

[0081] The areas of the second surface are preferably concave, where the first coating is located on the first surface opposite, in order to achieve particularly good strength. Preferably, the second surface is then concave throughout.

[0082] Alternatively or additionally, it can also be provided that at least in the first surface and / or at least in a depth region of the substrate body, preferably up to two or three times the layer thickness of the first coating, a tensile stress exists at least partially under the first surface, the tensile stress in particular corresponding in magnitude approximately to the compressive stress in the first coating and / or being between 1 MPa and 100 MPa.

[0083] Contrary to expectations that tensile stress reduces the strength of a substrate, the strength of the composite workpiece can actually be increased, particularly for forces acting on the second surface, by applying a corresponding tensile stress.

[0084] Alternatively or additionally, it can also be provided that the composite workpiece, in particular the substrate body, has a circular or oval-shaped cut surface in at least one cutting plane, in particular that the cut surface has a maximum diameter of less than or equal to 500 mm, less than or equal to 300 mm, less than or equal to 200 mm, less than or equal to 150 mm, and / or greater than or equal to 50 mm, greater than or equal to 100 mm, greater than or equal to 150 mm, greater than or equal to 200 mm or greater than or equal to 300 mm.

[0085] For example, the cutting plane lies in a plane essentially parallel to the first and / or second surface. "Essentially parallel" preferably means that the curvature of the two surfaces caused by the bow is disregarded, and warp effects are also disregarded. This is because the deviations of the first and / or second surfaces from flat or parallel surfaces caused by bow, warp, and / or other influences are significantly smaller—for example, two, three, four, or even more orders of magnitude smaller—than the substrate thickness.

[0086] Alternatively or additionally, it may also be provided that the composite workpiece further has a second coating, wherein at least the second surface of the substrate body is coated at least partially with the second coating, in particular the second coating

[0087] is UV-curable, has an optical refractive index adapted to the material of the substrate body and / or is a plastic, in particular a polymer, and / or at least one structure, preferably a lattice structure, which can be applied to or deposited on the substrate body, in particular at least partially by means of nano-imprint lithography; that only the second surface of the substrate body is coated with the second coating; and / or that the first surface of the substrate body is not coated with the second coating.

[0088] By coating the second surface with a second layer, the structure can be easily created on the composite workpiece using the punch tool. In a sense, the punch can then simply deform the second layer to create the desired structure, such as a lattice structure.

[0089] This is very efficient and makes it possible to provide a highly pre-processed composite workpiece, which, however, still allows great design freedom with regard to the ultimately desired structures.

[0090] Therefore, polymers are particularly well suited as materials for the second coating.

[0091] The stamping tool used, which exerts a force on the substrate body, particularly the second surface, can be employed, for example, within the framework of the nano-imprint lithography process described above. This allows such a method for forming the structure to be used particularly efficiently and reliably with the proposed composite workpiece.

[0092] In one embodiment, the second coating is applied directly or indirectly to the second surface, at least in certain areas. If it is applied directly, the second coating has direct contact with the second surface. If it is applied indirectly, the second coating does not have direct contact with the second surface. In the latter case, for example, one or more intermediate layers, particularly in a sandwich-like arrangement, can be positioned between the second surface and the second coating, at least in certain areas. Optionally, the second coating is applied directly to the second surface in certain areas and indirectly in others.

[0093] Applying the second coating only to the second surface, or not to the first surface, leads to very good results in increasing strength.

[0094] The problem is solved by the invention according to a second aspect by proposing a plurality of, in particular between 2 and 1,000,000, preferably 25, 50, 100, 500, 1,000 or 10,000, composite parts according to the first aspect of the invention.

[0095] This means that the advantages of the composite workpiece according to the invention can also be used for entire production lines in which a plurality of composite workpieces are used serially and / or in parallel for further processing.

[0096] Alternatively or additionally, it can also be provided that the failure probability of the composite components when a force of 100 Newtons is applied to the second surface of the individual substrate bodies is less than or equal to 1%, preferably less than or equal to 0.5% or 0.1%.

[0097] It turned out that the probability of failure is particularly small for the majority of composite components.

[0098] The failure probability is preferably determined using the Weibull distribution. This involves determining the force that may act on the second surface of the composite workpiece in a specific area until the composite workpiece is destroyed, in particular, breaks. For example, this is determined using the "ring-on-ring" test method described above. For instance, the Weibull limit might be 67% and / or the 67% breakage probability might be considered.

[0099] Preferably, the force corresponding to the 67% Weibull limit, i.e., the Weibull force, for the composite workpiece is greater than 500 Newtons, preferably greater than 600 Newtons, preferably greater than 700 Newtons. Alternatively or additionally, the Weibull force is less than 2000 Newtons, preferably less than 1500 Newtons, preferably less than 1000 Newtons, preferably less than 800 Newtons, preferably less than 700 Newtons. Alternatively or additionally, the Weibull force is between 500 Newtons and 2000 Newtons, preferably between 600 Newtons and 1500 Newtons, preferably between 600 Newtons and 1000 Newtons.

[0100] For example, if the destructive force is determined for 1,000 composite workpieces and 2 of these composite workpieces fail at a force of 100 Newtons, then the probability of failure or breakage for 100 Newtons is 2 / 1,000 x 100 percent = 2 / 10 percent = 0.2 percent = 2 per mille.

[0101] The problem is solved by the invention according to a third aspect by providing a method for producing a composite workpiece according to the first aspect of the invention, comprising the method: - Providing a substrate body, in particular made of glass and / or according to the first aspect of the invention; - Applying a coating, in particular the first coating according to the first aspect of the invention, to a surface of the substrate body, in particular the first surface according to the first aspect of the invention; - Maintaining the substrate temperature at or below 200 °C at least temporarily or continuously during the application of the coating to the surface of the substrate body. is proposed.

[0102] Controlling the substrate temperature has proven particularly advantageous due to thermal expansion. The substrate, especially if made of glass, expands further because it has a higher coefficient of thermal expansion. If the substrate becomes too hot, the bow becomes too large. By controlling the substrate temperature, a particularly robust composite component can be obtained.

[0103] A low compressive stress in the first coating has proven to be particularly advantageous.

[0104] One solution to the aforementioned problem is therefore to reduce or even minimize the resulting compressive stress of the first coating. This can be achieved through a variety of process parameters during the manufacturing process of the composite workpiece. For example, it has been recognized that the coating temperature is an effective and also very controllable parameter. The coefficient of thermal expansion (CTE) in the temperature range of 20°C–300°C for most substrate materials, especially glass, is on the order of up to 20 × 10⁻⁶. -6 / K, preferably in the 3×10 range -6 / K up to 16×10 -6 / K, preferably in the 7×10 range -6 / K up to 12×10 -6 / K.

[0105] The "coefficient of thermal expansion" or "CTE" is the mean linear coefficient of thermal expansion in a temperature range of 20°C to 300°C. It is determined according to DIN ISO 7991:1987.

[0106] If the CTE of the coating does not match the CTE of the substrate, especially glass, residual stresses will arise due to this difference when the coated substrate cools from the process temperature to ambient temperature. Therefore, the process temperature for coating should be chosen to be sufficiently high, for example, at least 130 °C, a maximum of 300 °C, and / or between 140 °C and 200 °C, to obtain a well-functioning layer with sufficient density / low porosity and low absorption, i.e., ideally, fully stoichiometric oxides.

[0107] In one embodiment, the first surface of the substrate body is reinforced by a chemical interaction at the interface with the first coating. A mixing zone can be generated by diffusion and / or kinetic energy of the deposited atoms and / or driven by chemical interactions, each of which can lead to compressive stress and / or the healing of defects due to additional chemical bonds. The penetration depth and strength of this reaction can optionally be controlled by the chemical composition of the substrate body, its chemical and / or physical surface properties (such as roughness and / or leaching zone due to polishing processes), and / or by the energy, ionization state, and / or chemical composition of the particles of the coating material of the first coating.

[0108] The procedure can be designed as follows, for example: A substrate, such as a wafer made of, for example, N-SF6 material with a diameter of, for example, 200 mm and a thickness of, for example, 700 µm, is measured with regard to its curvature, i.e., its bow. The result of the bow measurement yields a value of, for example, approximately 2 µm. The wafer is then cleaned, for example, in a water bath of deionized water at, for example, 45°C with ultrasonic assistance at, for example, 130 kHz for, for example, 250 seconds. The cleaned wafer is subsequently air-dried for, for example, 500 seconds at 60°C. The surface treated in this way is largely free of particles.

[0109] The wafer is placed in a holder of the vapor deposition unit of a Leybold APS1104 vacuum coating system, with the coating applied to the convex side of the wafer. The system is then loaded with the appropriate vapor deposition materials to produce a SiO2 and TiO2-containing layer: SiO2 and Ti3O5. After closing the chamber door, evacuation of the process chamber is initiated. Once a base pressure of, for example, 1 x 10⁻⁶ -3Once the target temperature (Pa) is reached, the coating process begins. First, the substrate heater is switched on and a substrate temperature of, for example, 150°C is selected. As soon as this temperature is reached, the deposition of the antireflective system begins. A first layer of TiO2 with a thickness of, for example, 19 nm is deposited. This is followed by a layer of SiO2 with a thickness of, for example, 35 nm, followed by a layer of TiO2 with a thickness of, for example, 25 nm, and finally a layer of SiO2 with a thickness of, for example, 109 nm. The deposition rate is 2.0 Å / s, and the ion energy of the ion source is 50 eV.

[0110] After the coating process is complete, the substrate heating is switched off and the process chamber is ventilated. After removing the coated substrate, such as the aforementioned wafer, another bow measurement is performed. This time, it yields a value of, for example, 5 µm, although the type of deflection has not changed; that is, the coating is still on a convex surface.

[0111] Optionally, the additional bow applied by the coating can now be converted into a layer stress using the Stoney formula. For example, starting from an (assumed) perfectly flat substrate, the radius of curvature caused by the coating can be determined using the wafer geometry. In this case, a compressive layer stress of approximately 32 MPa is obtained.

[0112] The process can further include a post-processing step of the substrate. For example, one or more cutting processes can be applied. Particularly preferably, the process includes one or more abrasive processes, especially selected from grinding, lapping, and polishing. This is particularly advantageous for achieving a very low total thickness variation (TTV). Furthermore, the surface roughness can be specifically adjusted.

[0113] The problem is solved by the invention according to a fourth aspect by proposing an augmented reality glasses comprising at least one composite component, or at least a cut thereof, according to the first aspect of the invention.

[0114] The problem is solved by the invention according to a fifth aspect by proposing the use of a composite workpiece, or at least a cut thereof, according to the first aspect of the invention in an augmented reality headset.

[0115] A blank can be obtained, for example, by cutting, sawing, and / or breaking the composite workpiece into several individual parts. A blank is then such an individual part. For example, a lens of augmented reality glasses can have or represent such an individual part or blank. Further options: Coating layers

[0116] The term "coating" here preferably refers to the first coating.

[0117] A coating preferably comprises one or more coating layers. The coating layers are preferably arranged in a stack, with each coating layer being parallel to the front surface.

[0118] A preferred coating layer has a chemical composition that either does not vary throughout its interior or varies gently and continuously throughout its interior, preferably not varying throughout its interior. A preferred coating layer has either a homogeneous chemical composition or a gently and continuously varying chemical composition, preferably a homogeneous chemical composition. A preferred coating layer has a chemical composition in which the maximum local weight percentage of any element is less than 1.2 times the minimum weight percentage of the element, preferably less than 1.1, more preferably less than 1.05. This preferably applies to each element.

[0119] A preferred coating layer has a refractive index that either does not vary throughout its interior or varies smoothly and continuously throughout its interior, preferably not varying throughout its interior. A preferred coating layer has either a homogeneous refractive index or a smoothly and continuously varying refractive index, preferably a homogeneous refractive index. A preferred coating layer has a maximum local refractive index that is less than 1.2 times the minimum local refractive index, preferably less than 1.1, more preferably less than 1.05.

[0120] A preferred coating layer has a constant thickness across its transverse extent. A preferred coating layer has a minimum thickness to maximum thickness ratio in the range of 1:1 to 1:1.1, more preferably in the range of 1:1 to 1:1.05, and more preferably in the range of 1:1 to 1:1.01.

[0121] In one embodiment, the coating comprises one or more coating layers of group A. The coating layers of group A have a refractive index of at least 1.7. A preferred coating layer of group A has a refractive index in the range of 1.70 to 2.60, preferably in the range of 1.80 to 2.60, more preferably in the range of 1.90 to 2.50, and more preferably in the range of 1.95 to 2.45. A preferred coating layer of group A has a refractive index of at least 1.80, more preferably at least 1.90, and more preferably at least 1.95. A preferred coating layer of group A has a refractive index up to 2.60, more preferably up to 2.50, and more preferably up to 2.45.A preferred coating layer of group A is made from a material selected from the group consisting of: Si3N4, ZrO2, Ta2O5, HfO2, Nb2O5, TiO2, SnO2, indium tin oxide, ZnO2, AIN, a mixed oxide comprising at least one of these, a mixed nitride comprising at least one of these, and a mixed oxide nitride comprising at least one of these; preferably made from a material selected from the group consisting of: ZrO2, Ta2O5, HfO2, Nb2O5, TiO2, and a mixed oxide comprising at least one of these. In one aspect of this embodiment, the coating layer is made of ZrO2 or HfO2, preferably ZrO2. In another aspect of this embodiment, the coating layer is made of ZrO2, TiO2, or Nb2O5, preferably TiO2 or Nb2O5. Preferred mixed oxides are TiO2 / SiO2. Nb2O5 / SiO2 and ZrO2 / Y2O3. A preferred mixed nitride is AlSiN. A preferred mixed oxynitride is AlSiON.

[0122] In one embodiment, the composite workpiece, in particular the coating such as the first coating, comprises two or more layers of group A, wherein at least one pair of layers of group A consists of different materials. In another embodiment, the composite workpiece, in particular the coating such as the first coating, comprises two or more layers of group A, wherein all layers of group A consist of the same material.

[0123] In one embodiment, the coating comprises one or more coating layers of group B. The coating layers of group B have a refractive index of at least 1.7. A preferred coating layer of group B has a refractive index in the range of 1.37 to 1.60, preferably from 1.37 to 1.55, more preferably from 1.38 to 1.50. A preferred coating layer of group B has a refractive index of at least 1.37, more preferably at least 1.38. A preferred coating layer of group B has a refractive index up to 1.60, more preferably up to 1.55, more preferably up to 1.50.

[0124] A preferred coating layer of group B is made from a material selected from the group consisting of: SiO₂, MgF₂, and a mixed oxide comprising SiO₂ and another oxide, preferably SiO₂. A preferred mixed oxide in this context comprises SiO₂ and Al₂O₃. A preferred mixed oxide in this context comprises SiO₂ in the range of 50 to 98 wt.%, more preferably 60 to 95 wt.%, and more preferably 70 to 93 wt.%. A preferred mixed oxide in this context comprises SiO₂ up to 98 wt.%, more preferably up to 95 wt.%, and more preferably up to 93 wt.%. A preferred mixed oxide in this context comprises at least 50 wt.% SiO₂, more preferably at least 60 wt.%, and more preferably at least 70 wt.%. In this context, a preferred mixed oxide comprises SiO2 in the range of 50 to 98 wt.%, more preferably 60 to 95 wt.%, more preferably 70 to 93 wt.% and Al2O3 in the range of 2 to 50 wt.%, more preferably 5 to 40 wt.%.-%, preferably 7 to 30 wt.%.

[0125] In one embodiment, the composite material, in particular the coating such as the first coating, comprises two or more layers of group B, wherein at least one pair of layers of group B consists of different materials. In another embodiment, the layered optical composite material comprises two or more layers of group B, wherein all layers of group B consist of the same material.

[0126] In some embodiments, the coating structure is described with respect to type A and type B regions, where type A regions have a higher refractive index and type B regions have a lower refractive index. So-called needle layers, which have a thickness of 5 nm or less, do not affect the nature of a region as type A or type B. The regions are characterized based on coating layers that have a thickness greater than 5 nm.

[0127] So-called needle layers can have a thickness of only 1 nm. A so-called needle layer could be as thin as an atomic monolayer.

[0128] The following observations should each be noted as being particularly favored: • A coating can act homogeneously on the entire surface, similar to the first surface of the substrate, and therefore it can influence the bow of the substrate. It may therefore be possible to compare the bow before and after coating, calculating the stress in the coating using the Stoney equation. • The bow after coating may differ from the uncoated substrate body, such as glass, which indicates some residual stress. • Using the “Stoney equation”, a stress of only 20-30 MPa can be derived for the pure antireflection coating. • The absolute value of the Bow can be extremely small compared to standard coatings, for example orders of magnitude of 10 or even smaller. • It may be that applying a one-sided coating causes no or almost no additional warp, which can demonstrate that the coating process minimizes stress introduction. • It may be that applying a one-sided coating only increases the bow very slightly, which can prove that the coating process minimizes the stress introduction. Young Module

[0129] Surprisingly, it was found that a substrate body with high strength can be obtained by increasing the Young's modulus. Preferably, the substrate body, in particular glass, of the invention has a Young's modulus in the range of 40 GPa to 160 GPa, for example, 70 GPa to 150 GPa, 80 GPa to 140 GPa, 90 GPa to 100 GPa, 40 GPa to 100 GPa, 40 GPa to 110 GPa, 100 GPa to 140 GPa, 120 GPa to 160 GPa, 40 GPa to 80 GPa, or 85 GPa to 130 GPa. Dimensions and shape

[0130] Preferably, the refractive index n of the substrate body at a wavelength of 450 nm is in the range of 1.45 to 2.45, more preferably from 1.50 to 2.40, more preferably from 1.55 to 2.35, more preferably from 1.60 to 2.30, more preferably from 1.65 to 2.25, more preferably from 1.70 to 2.20, for example from 1.75 to 2.15, from 1.80 to 2.10, from 1.85 to 2.05, from 1.86 to 2.04, from 1.87 to 2.03, from 1.88 to 2.02, from 1.89 to 2.01, or from 1.90 to 2.10. The refractive index n of the substrate is particularly preferably in the range of 1.70 to 2.10 at a wavelength of 450 nm.

[0131] Preferably, the substrate body of the invention is a glass wafer. The substrate body can be a rectangular glass wafer, for example, with a length in the range of 40 mm to 1,250 mm and a width of 30 mm to 750 mm. Preferably, however, the substrate body is not rectangular, but round, in particular a round glass wafer. A round glass wafer can also be described as a disc-shaped glass wafer. Particularly preferably, the substrate body is a disc-shaped glass wafer, preferably a glass wafer with a diameter in the range of 100 mm to 500 mm, more preferably 120 mm to 450 mm, more preferably 140 mm to 400 mm, more preferably 160 mm to 350 mm, more preferably 180 mm to 325 mm, more preferably 200 mm to 300 mm. A diameter of about 200 mm or about 300 mm is particularly preferred.Preferably, the diameter of the substrate body is at least 100 mm, at least 120 mm, at least 140 mm, at least 160 mm, at least 180 mm, or at least 200 mm. Preferably, the diameter of the substrate body is at most 500 mm, more preferably at most 450 mm, more preferably at most 400 mm, more preferably at most 350 mm, more preferably at most 325 mm, and more preferably at most 300 mm.

[0132] Preferably, the substrate body is a glass wafer, in particular a planar glass wafer such as a planar waveguide. Preferably, the substrate body has two main faces. Preferably, the main faces have approximately the same area. Preferably, each main face, in particular the first and / or second surface, has an area (in particular the area of ​​the respective first and second surfaces) in the range of 1,000 to 1,000,000 mm². 2 , preferably from 3,000 to 750,000 mm 2, preferably from 5,000 to 500,000 mm 2 , for example from 10,000 to 400,000 mm 2 , from 20,000 to 300,000 mm 2 , from 30,000 to 200,000 mm 2 , from 40,000 to 150,000 mm 2 , from 50,000 to 125,000 mm2 or from 60,000 to 100,000 mm2.

[0133] Preferably, the thickness d of the substrate body is in the range of 0.10 mm to 2.0 mm, more preferably from 0.15 mm to 1.5 mm, more preferably from 0.20 mm to 1.2 mm, more preferably from 0.25 mm to 1.0 mm, more preferably from 0.30 mm to 0.70 mm, for example from 0.40 mm to 0.60 mm. Lower thicknesses are advantageous with regard to the weight of the substrate body. However, there may be disadvantages with respect to surface and geometric properties, which can impair light propagation based on total internal reflection, for example by increasing optical loss and / or making the optical loss dependent on the propagation angle. Therefore, the ranges specified above are preferred.

[0134] Preferably, the ratio of diameter, in particular maximum diameter, and thickness of the substrate body is in a range of 200:1 to 2,000:1, for example from 350:1 to 1,500:1 or from 500:1 to 1,000:1.

[0135] The substrate body of the invention is preferably a glass wafer, in particular a planar glass wafer such as a planar waveguide.

[0136] Preferably, the substrate body of the invention has a low warp, in particular a warp of less than 100 µm, more preferably less than 50 µm, and more preferably less than 20 µm. The warp can be greater than 1 µm, greater than 5 µm, or greater than 10 µm. Preferably, the composite workpiece, in particular the substrate body, of the invention has a low bow, in particular a bow of less than 50 µm, more preferably less than 30 µm, and more preferably less than 20 µm. The bow can be greater than 1 µm, greater than 5 µm, or greater than 10 µm. The warp and / or bow of the composite workpiece, in particular of the substrate body, can be influenced by the diameter and thickness of the substrate body as well as by coatings, such as the first coating.Preferably, the warp and / or bow of the composite workpiece, in particular of the substrate body, according to the invention, are less than 0.1% of the diameter of the substrate body, more preferably less than 0.075% of the diameter of the substrate body, more preferably less than 0.05% of the diameter of the substrate body, more preferably less than 0.025% of the diameter of the substrate body, and more preferably less than 0.01% of the diameter of the substrate body. The warp and / or bow can be greater than 0.001% of the diameter of the substrate body, greater than 0.002% of the diameter of the substrate body, or greater than 0.005% of the diameter of the substrate body. Preferably, the warp and bow are determined according to SEMI3D1203152015.

[0137] Preferably, the total thickness variation (TTV) of the substrate body is less than 2 µm, more preferably less than 1.8 µm, more preferably less than 1.6 µm, more preferably less than 1.5 µm, more preferably less than 1.4 µm, more preferably less than 1.3 µm, more preferably less than 1.2 µm, more preferably less than 1.1 µm, more preferably less than 1.0 µm, more preferably less than 0.75 µm, and more preferably less than 0.5 µm. TTV can be determined based on SEMI MF 1530GBIR. TTV can also be determined based on interferometric measurements of the substrate body's thickness profile, for example, using an interferometer, in particular an interferometer from Zygo Corporation. In some embodiments, TTV can be at least 0.1 µm or at least 0.2 µm. A very low TTV is particularly advantageous for using the substrate body in the AR region.A low TTV can be achieved, for example, through abrasive processes such as grinding, lapping, and / or polishing. Consequently, the substrate body of the invention is preferably a substrate body that has been subjected to an abrasive process. Surface roughness

[0138] Preferably, the substrate body, in particular the first and / or second surface, has a surface roughness R q in a range of 0.1 nm to 5 nm, for example from 0.15 nm to 3.5 nm, from 0.2 nm to 2 nm, from 0.25 nm to 1.5 nm, from 0.3 nm to 1.0 nm, or from 0.35 nm to 0.75 nm. The surface roughness R is preferred. q lower than 5 nm, more preferably lower than 3.5 nm, more preferably lower than 2 nm, more preferably lower than 1.5 nm, more preferably lower than 1.0 nm, more preferably lower than 0.75 nm, more preferably lower than 0.5 nm. A low surface roughness R qThis can be advantageous for achieving higher strength, especially surface strength. Surface roughness R q is preferably determined by white-light interferometry (WLI) or atomic force microscopy (AFM). AFM is most preferred. In the present disclosure, the expressions “R q “ and “RMS” are used interchangeably. Surface roughness R q is preferably determined according to DIN EN ISO 4287.

[0139] Preferably, the substrate body, in particular the first and / or second surface, has a surface roughness R a in a range of 0.1 nm to 5 nm, for example from 0.15 nm to 3.5 nm, from 0.2 nm to 2 nm, from 0.25 nm to 1.5 nm, from 0.3 nm to 1.0 nm, or from 0.35 nm to 0.75 nm. The surface roughness R is preferred. alower than 5 nm, more preferably lower than 3.5 nm, more preferably lower than 2 nm, more preferably lower than 1.5 nm, more preferably lower than 1.0 nm, more preferably lower than 0.75 nm, more preferably lower than 0.5 nm. A low surface roughness R a This can be advantageous for achieving higher strength, especially surface strength. Surface roughness R a is preferably determined according to ISO DIN EN ISO 4287. Glass compositions

[0140] The substrate body of the present invention can comprise glass or can be made of glass. The substrate body is not limited to specific glass compositions. Exemplary composition ranges are set forth below as mere examples.

[0141] The amount of SiO2 in the substrate body of the invention can preferably be in the range of 0 to 80 wt.%, for example, at most 70 wt.%, at most 60 wt.%, or at most 15 wt.%. In some embodiments, the amount of SiO2 is at least 10 wt.%, at least 20 wt.%, at least 30 wt.%, or at least 40 wt.%. In further embodiments, the amount of SiO2 is less than 20 wt.% or even less than 10 wt.%.

[0142] The amount of P₂O₅ in the substrate body of the invention is preferably in the range of 0 to 40 wt.%, for example, at most 30 wt.%, at most 5 wt.%, or at most 2 wt.%. In some embodiments, the amount of P₂O₅ can be at least 10 wt.%, at least 15 wt.%, or at least 20 wt.%. In further embodiments, the amount of P₂O₅ is at most 1 wt.%, or at most 0.5 wt.%. The substrate body of the invention can also be free of P₂O₅.

[0143] The amount of Al₂O₃ in the substrate body of the invention may preferably be in the range of 0 to 25 wt.%, for example, at most 15 wt.%, at most 10 wt.%, or at most 5 wt.%. In some embodiments, the amount of Al₂O₃ may be at least 0.1 wt.%, at least 0.5 wt.%, or at least 1 wt.%. In some embodiments, the amount of Al₂O₃ is at most 1 wt.% or at most 0.5 wt.%. The substrate body of the invention may also be free of Al₂O₃.

[0144] The amount of B₂O₃ in the substrate body of the invention may preferably be in the range of 0 to 55 wt.%, for example, at most 45 wt.%, at most 35 wt.%, or at most 25 wt.%. In some embodiments, the amount of B₂O₃ may be at least 1 wt.%, at least 2 wt.%, or at least 5 wt.%. In some embodiments, the amount of B₂O₃ is at most 20 wt.%, at most 15 wt.%, or at most 10 wt.%. The substrate body of the invention may also be free of B₂O₃.

[0145] The amount of Li₂O in the substrate body of the invention can preferably be in the range of 0 to 10 wt.%, for example, at most 5 wt.%, at most 2 wt.%, or at most 1 wt.%. In some embodiments, the amount of Li₂O can be at least 0.5 wt.%, at least 1 wt.%, or at least 2 wt.%. In further embodiments, the amount of Li₂O is at most 0.5 wt.%, at most 0.2 wt.%, or at most 0.1 wt.%. The substrate body of the invention can also be free of Li₂O.

[0146] The amount of Na₂O in the substrate body of the invention may preferably be in the range of 0 to 30 wt.%, for example, at most 25 wt.%, at most 20 wt.%, at most 10 wt.%, or at most 5 wt.%. In some embodiments, the amount of Na₂O may be at least 1 wt.%, at least 2 wt.%, or at least 5 wt.%. In some embodiments, the amount of Na₂O is at most 2 wt.%, at most 1 wt.%, or at most 0.5 wt.%. The substrate body of the invention may also be free of Na₂O.

[0147] The amount of K₂O in the substrate body of the invention may preferably be in the range of 0 to 25 wt.%, for example, at most 20 wt.%, at most 10 wt.%, or at most 5 wt.%. In some embodiments, the amount of K₂O may be at least 1 wt.%, at least 2 wt.%, or at least 5 wt.%. In some embodiments, the amount of K₂O is at most 2 wt.%, at most 1 wt.%, or at most 0.5 wt.%. The substrate body of the invention may also be free of K₂O.

[0148] The amount of MgO in the substrate body of the invention is preferably in the range of 0 to 10 wt.%, for example, at most 5 wt.%, at most 2 wt.%, or at most 1 wt.%. In some embodiments, the amount of MgO may be at least 0.5 wt.%, at least 1 wt.%, or at least 2 wt.%. In further embodiments, the amount of MgO is at most 0.5 wt.%, at most 0.2 wt.%, or at most 0.1 wt.%. The substrate body of the invention may also be free of MgO.

[0149] The amount of CaO in the substrate body of the invention may preferably be in the range of 0 to 40 wt.%, for example, at most 30 wt.%, at most 25 wt.%, or at most 15 wt.%. In some embodiments, the amount of CaO may be at least 1 wt.%, at least 5 wt.%, or at least 10 wt.%. In some embodiments, the amount of CaO is at most 10 wt.%, at most 5 wt.%, or at most 1 wt.%. The substrate body of the invention may also be free of CaO.

[0150] The amount of SrO in the substrate body of the invention can preferably be in the range of 0 to 25 wt.%, for example, at most 15 wt.%, at most 10 wt.%, or at most 5 wt.%. In some embodiments, the amount of SrO can be at least 0.5 wt.%, at least 1 wt.%, or at least 2 wt.%. In some embodiments, the amount of SrO is at most 2 wt.%, at most 1 wt.%, or at most 0.5 wt.%. The substrate body of the invention can also be free of SrO.

[0151] The amount of BaO in the substrate body of the invention may preferably be in the range of 0 to 55 wt.%, for example, at most 30 wt.%, at most 20 wt.%, or at most 10 wt.%. In some embodiments, the amount of BaO may be at least 1 wt.%, at least 5 wt.%, or at least 10 wt.%. In some embodiments, the amount of BaO is at most 5 wt.%, at most 2 wt.%, or at most 1 wt.%. The substrate body of the invention may also be free of BaO.

[0152] The amount of ZnO in the substrate body of the invention may preferably be in the range of 0 to 30 wt.%, for example, at most 20 wt.%, at most 15 wt.%, or at most 10 wt.%. In some embodiments, the amount of ZnO may be at least 1 wt.%, at least 2 wt.%, or at least 5 wt.%. In some embodiments, the amount of ZnO is at most 5 wt.%, at most 2 wt.%, or at most 1 wt.%. The substrate body of the invention may also be free of ZnO.

[0153] The amount of La₂O₃ in the substrate body of the invention may preferably be in the range of 0 to 55 wt.%, for example, at most 50 wt.%, at most 40 wt.%, or at most 20 wt.%. In some embodiments, the amount of La₂O₃ may be at least 5 wt.%, at least 10 wt.%, or at least 20 wt.%. In some embodiments, the amount of La₂O₃ is at most 10 wt.%, at most 5 wt.%, or at most 1 wt.%. The substrate body of the invention may also be free of La₂O₃.

[0154] The amount of Gd₂O₃ in the substrate body of the invention can preferably be in the range of 0 to 20 wt.%, for example, at most 15 wt.%, at most 10 wt.%, or at most 5 wt.%. In some embodiments, the amount of Gd₂O₃ can be at least 1 wt.%, at least 2 wt.%, or at least 5 wt.%. In some embodiments, the amount of Gd₂O₃ is at most 5 wt.%, at most 2 wt.%, or at most 1 wt.%. The substrate body of the invention can also be free of Gd₂O₃.

[0155] The amount of Y₂O₃ in the substrate body of the invention may preferably be in the range of 0 to 20 wt.%, for example, at most 15 wt.%, at most 10 wt.%, or at most 5 wt.%. In some embodiments, the amount of Y₂O₃ may be at least 0.1 wt.%, at least 0.2 wt.%, or at least 0.5 wt.%. In some embodiments, the amount of Y₂O₃ is at most 2 wt.%, at most 1 wt.%, or at most 0.5 wt.%. The substrate body of the invention may also be free of Y₂O₃.

[0156] The amount of ZrO2 in the substrate body of the invention may preferably be in the range of 0 to 20 wt.%, for example, at most 15 wt.%, at most 10 wt.%, or at most 5 wt.%. In some embodiments, the amount of ZrO2 may be at least 1 wt.%, at least 2 wt.%, or at least 5 wt.%. In some embodiments, the amount of ZrO2 is at most 7.5 wt.%, at most 5 wt.%, or at most 2.5 wt.%. The substrate body of the invention may also be free of ZrO2.

[0157] The amount of TiO2 in the substrate body of the invention may preferably be in the range of 0 to 35 wt.%, for example, at most 30 wt.%, at most 20 wt.%, or at most 15 wt.%. In some embodiments, the amount of TiO2 may be at least 2 wt.%, at least 5 wt.%, or at least 10 wt.%. In some embodiments, the amount of TiO2 is at most 10 wt.%, at most 7.5 wt.%, or at most 5 wt.%. The substrate body of the invention may also be free of TiO2.

[0158] The amount of Ta₂O₅ in the substrate body of the invention may preferably be in the range of 0 to 30 wt.%, for example, at most 25 wt.%, at most 17.5 wt.%, or at most 10 wt.%. In some embodiments, the amount of Ta₂O₅ may be at least 1 wt.%, at least 2 wt.%, or at least 5 wt.%. In some embodiments, the amount of Ta₂O₅ is at most 5 wt.%, at most 2 wt.%, or at most 1 wt.%. The substrate body of the invention may also be free of Ta₂O₅.

[0159] The amount of Nb₂O₅ in the substrate body of the invention may preferably be in the range of 0 to 55 wt.%, for example, at most 35 wt.%, at most 20 wt.%, or at most 15 wt.%. In some embodiments, the amount of Nb₂O₅ may be at least 2 wt.%, at least 5 wt.%, or at least 10 wt.%. In some embodiments, the amount of Nb₂O₅ is at most 10 wt.%, at most 5 wt.%, or at most 2 wt.%. The substrate body of the invention may also be free of Nb₂O₅.

[0160] The amount of WO3 in the substrate body of the invention may preferably be in the range of 0 to 10 wt.%, for example, at most 7.5 wt.%, at most 5 wt.%, or at most 2 wt.%. In some embodiments, the amount of WO3 may be at least 0.1 wt.%, at least 0.2 wt.%, or at least 0.5 wt.%. In some embodiments, the amount of WO3 is at most 1 wt.%, at most 0.5 wt.%, or at most 0.2 wt.%. The substrate body of the invention may also be free of WO3.

[0161] The amount of Bi₂O₃ in the substrate body of the invention is preferably in the range of 0 to 65 wt.%, for example, at most 50 wt.%, at most 20 wt.%, or at most 10 wt.%. In some embodiments, the amount of Bi₂O₃ may be at least 1 wt.%, at least 2 wt.%, or at least 5 wt.%. In some embodiments, the amount of Bi₂O₃ is at most 5 wt.%, at most 1 wt.%, or at most 0.1 wt.%. The substrate body of the invention is preferably free of Bi₂O₃.

[0162] The amount of F in the substrate body of the invention may preferably be in the range of 0 to 45 wt.%, for example, at most 25 wt.%, at most 10 wt.%, or at most 5 wt.%. In some embodiments, the amount of F may be at least 0.1 wt.%, at least 0.5 wt.%, or at least 1 wt.%. In some embodiments, the amount of F is at most 2 wt.%, at most 1 wt.%, or at most 0.1 wt.%. The substrate body of the invention is preferably free of F.

[0163] The amount of GeO2 in the substrate body of the invention is preferably in the range of 0 to 20 wt.%, for example, at most 15 wt.%, at most 10 wt.%, or at most 5 wt.%. In some embodiments, the amount of GeO2 may be at least 0.1 wt.%, at least 0.5 wt.%, or at least 1 wt.%. In some embodiments, the amount of GeO2 is at most 2 wt.%, at most 1 wt.%, or at most 0.1 wt.%. The substrate body of the invention is preferably free of GeO2.

[0164] The amount of PbO in the substrate body of the invention is preferably in the range of 0 to 80 wt.%, for example, at most 70 wt.%, at most 50 wt.%, or at most 20 wt.%. In some embodiments, the amount of PbO may be at least 1 wt.%, at least 2 wt.%, or at least 5 wt.%. In some embodiments, the amount of PbO is at most 5 wt.%, at most 1 wt.%, or at most 0.1 wt.%. The substrate body of the invention is preferably free of PbO, particularly with regard to its toxicity and environmental hazards.

[0165] Preferably the substrate body of the invention comprises (or consists substantially of) the following components in the specified areas (in wt.%): component Quantity (wt.%) SiO2 0-80 P2O5 0-40 Al2O3 0-25 B2O3 0-55 Li2O 0-10 Na2O 0-25 K2O 0-25 MgO 0-10 CaO 0-30 SrO 0-25 BaO 0-55 ZnO 0-30 La2O3 0-55 Gd2O3 0-20 Y2O3 0-20 ZrO2 0-20 TiO2 0-35 Ta2O5 0-30 Nb2O5 0-55 WO3 0-10 GeO2 0-20 Bi2O3 0-65 PbO 0-80 F 0-45

[0166] More preferably, the substrate body of the invention comprises (or essentially consists of) the following components in the specified areas (in wt.%): component Quantity (wt.%) SiO2 0-80 P2O5 0-30 Al2O3 0-15 B2O3 0-55 Li2O 0-10 Na2O 0-25 K2O 0-25 MgO 0-5 CaO 0-30 SrO 0-10 BaO 0-55 ZnO 0-30 La2O3 0-55 Gd2O3 0-20 Y2O3 0-20 ZrO2 0-20 TiO2 0-35 Ta2O5 0-30 Nb2O5 0-55 WO3 0-10 GeO2 essentially free of Bi2O3 essentially free of PbO 0-70 F 0-25

[0167] More preferably, the substrate body of the invention comprises (or essentially consists of) the following components in the specified areas (in wt.%): component Quantity (wt.%) SiO2 0-80 P2O5 0-5 Al2O3 0-10 B2O3 0-45 Li2O 0-10 Na2O 0-20 K2O 0-20 MgO 0-5 CaO 0-30 SrO 0-10 BaO 0-55 ZnO 0-30 La2O3 0-55 Gd2O3 0-20 Y2O3 0-20 ZrO2 0-20 TiO2 0-35 Ta2O5 0-30 Nb2O5 0-35 WO3 0-10 GeO2 essentially free of Bi2O3 essentially free of PbO essentially free of F 0-5

[0168] More preferably, the substrate body of the invention comprises (or essentially consists of) the following components in the specified areas (in wt.%): component Quantity (wt.%) SiO2 0-60 P2O5 0-2 Al2O3 0-5 B2O3 0-45 Li2O 0-10 Na2O 0-10 K2O 0-10 MgO 0-5 CaO 0-30 SrO 0-10 BaO 0-30 ZnO 0-30 La2O3 0-55 Gd2O3 0-20 Y2O3 0-20 ZrO2 0-15 TiO2 0-20 Ta2O5 0-25 Nb2O5 0-20 WO3 0-5 GeO2 essentially free of Bi2O3 essentially free of PbO essentially free of F essentially free of

[0169] More preferably, the substrate body of the invention comprises (or essentially consists of) the following components in the specified areas (in wt.%): component Quantity (wt.%) SiO2 0-15 P2O5 essentially free of Al2O3 essentially free of B2O3 0-45 Li2O essentially free of Na2O essentially free of K2O essentially free of MgO essentially free of CaO 0-15 SrO 0-5 BaO 0-10 ZnO 0-30 La2O3 0-55 Gd2O3 0-20 Y2O3 0-20 ZrO2 0-10 TiO2 0-15 Ta2O5 0-10 Nb2O5 0-15 WO3 0-5 GeO2 essentially free of Bi2O3 essentially free of PbO essentially free of F essentially free of

[0170] Rare earth metal oxides such as Yb₂O₃, CeO₂, Nd₂O₃, Lu₂O₃, or Gd₂O₃ can alternatively or additionally be present in an amount of 0 to 5 mol% to impart magnetic, photonic, or optical properties to the glass of the substrate body. Preferably, the glass of the substrate body is free of these components.

[0171] Some transition metal oxides may be included alternatively or additionally in the glass of the substrate body of the invention, such as Fe2O3, CoO, NiO, V2O5, MnO2, CuO and Cr2O3, which is a mixture of two or more of these, which act as coloring agents to produce glass with special optical or photonic functions, for example color filters or light converters. Brief description of the characters

[0172] Further features and advantages of the invention will become apparent from the following description, in which preferred embodiments of the invention are explained with reference to schematic drawings.

[0173] This shows: Fig. 1 a composite workpiece according to the first aspect of the invention in a cross-sectional view; Fig. 2 an illustration for determining the bow of the composite workpiece made of Fig. 1; Fig.3 a diagram showing the determined bows of composite workpieces of a plurality of composite workpieces according to the second aspect of the invention; and Fig. 4 a diagram with determined strength values ​​of composite workpieces according to the invention and those not according to the invention. Examples

[0174] Fig. Figure 1 shows a composite workpiece 1 according to the first aspect of the invention in a cross-sectional view.

[0175] The composite workpiece 1 rests on a flat base 3 and comprises a substrate body 5 and a first coating 7. A first surface 9 of the substrate body 1 is fully coated with the first coating 7.

[0176] The first surface 9 is convexly curved, as can be seen from the cross-sectional view of the Fig. 1 is evident. A second surface 11 of the substrate body 1 is opposite the first surface 9 and is concavely curved.

[0177] Due to the curvature of the first and second surfaces 9 and 11, the composite workpiece 1 has a bow and therefore does not make contact with the substrate 3 everywhere. The bow measures between 0.1 µm and 50 µm.

[0178] The bow is depicted in the Fig. 2 illustrated.

[0179] In this case, the composite workpiece 1 is different from the representation in the Fig. Figure 1 is shown rotated by 180° so that the convex side now points upwards.

[0180] The median surface 13 of the composite workpiece 1 exhibits a bow 17 compared to the conceptual median surface 15 of the hypothetical non-curved composite workpiece 1, which is measured according to SEMI 3D12-0315 2015.

[0181] The third layer is a three-point reference plane.

[0182] For the sake of clarity, in Fig. 2 the substrate body 5 and the first coating 7 of the composite workpiece 1 are not explicitly shown.

[0183] Fig. Figure 3 shows a diagram with the determined values ​​for the bows of 30 composite workpieces. Each composite workpiece can, for example, be a composite workpiece like composite workpiece 1 made of Fig. Be 1.

[0184] The measured bows range in size from 2 µm to 6.2 µm. The mean value of all bows in the 30 composite pieces examined is 3.9 µm, and is marked by a horizontal line in the diagram.

[0185] Fig. Figure 4 shows the determined strength values ​​for various composite components.

[0186] For each composite workpiece, the strength of a surface of the composite workpiece was determined using the ring-on-ring test method.

[0187] The dotted line represents the regression line for a first plurality of composite workpieces, derived from the individual strength measurements represented as circles. Each of these composite workpieces is a composite workpiece according to the invention. The force acted on the second, concavely curved surface, i.e., the one opposite the first surface coated with the first coating.

[0188] The solid line is the regression line for a second plurality of composite components, derived from the individual strength measurements represented as squares. Each of these composite components is a composite component according to the invention. The force acted on the first, convexly curved surface, i.e., the one coated with the first coating (and thus opposite the uncoated second surface).

[0189] The dashed line represents the regression line for a third plurality of composite components, derived from the individual strength measurements represented as triangles. Each of these composite components is a non-inventive composite component that has a curved substrate body but no first coating. The force acted on the second, concavely curved surface, i.e., the one opposite the uncoated first surface.

[0190] The breaking force in Newtons plotted on the abscissa of the diagram is a very good comparative measure for the strength of a composite workpiece, such as the composite workpiece according to the invention. The probability of failure, expressed as a percentage, can also be found on the ordinate of the diagram.

[0191] The diagram can therefore be read as indicating the probability that the composite workpiece will break for a given force. In this case, the applied force is then the breaking force.

[0192] The diagram shows that when force is applied to the second surface of a composite workpiece according to the invention (see the circles), the strength is significantly higher than when the force is applied to the first surface of the composite workpiece according to the invention (see the squares) or to the second surface of the composite workpiece not according to the invention (see the triangles). This means that the composite workpiece breaks at lower forces when the force is applied to the first surface of the composite workpiece according to the invention or to the second surface of the composite workpiece not according to the invention.

[0193] The diagram shows, for example, that for a force of approximately 180 Newtons, there is a failure probability of just under 2% for the composite workpiece according to the invention when the force acts on the second surface.

[0194] In contrast, the same force applied to the first surface of a composite workpiece according to the invention or to the second surface of a composite workpiece not according to the invention results in a failure probability of almost 50%.

[0195] This means that out of 100 composite pieces, only 2 break if the composite piece is according to the invention and a force of 180 Newtons is applied to the side opposite the coated side. When force is applied to the coated side, or when there is no coating and force is applied to the concavely curved surface, approximately half of the composite pieces break.

[0196] The features disclosed in the preceding description, in the claims and in the drawings can be essential to the invention in its various embodiments, both individually and in any combination. Reference symbol list 1 composite workpiece 3. Document 5 substrate bodies 7 coating 9 Surface 11 Surface 13 Median area 15 Median area 17 Bow

Claims

[1] Composite workpiece (1) comprising a substrate body (5) and at least one first coating (7), wherein the substrate body has at least one first surface (9) and at least one second surface (11), wherein the first surface of the substrate body is convex at least in some areas and the second surface of the substrate body is concave at least in some areas, and the composite workpiece has a magnitude of Bow (17) of between 0.1 µm and 50 µm due to the curved shape of the first and second surfaces, wherein at least the first surface of the substrate body is coated at least partially with the first coating; wherein the composite workpiece further comprises a second coating and wherein at least the second surface of the substrate body is coated at least partially with the second coating, wherein the second coating comprises and / or forms at least a grid structure that can be applied to or is applied to the substrate body. [2] Composite workpiece according to claim 1, the first coating (i) includes an anti-reflective coating, in particular the anti-reflective coating titanium, (ii) (a) Si3N4, ZrO2, Ta2O5, HfO2, Nb2O5, TiO2, SnO2, indium tin oxide, ZnO2, AIN, a mixed oxide comprising at least one of these, a mixed nitride comprising at least one of these, or a mixed oxide nitride comprising at least one of these, (b) ZrO2, Ta2O5, HfO2, Nb2O5, TiO2, or a mixed oxide comprising at least one of these, and / or (c) SiO2, MgF2 and a mixed oxide comprising SiO2, and a further oxide, preferably SiO2, (iii) can be applied to or is applied to the substrate body by means of a vapor deposition and / or sputtering process, (iv) is amorphous, and / or (v) has a thickness of less than or equal to 400 nm, less than or equal to 350 nm, less than or equal to 300 nm, less than or equal to 250 nm, less than or equal to 200 nm, less than or equal to 150 nm, less than or equal to 100 nm or less than or equal to 50 nm and / or of greater than or equal to 50 nm, greater than or equal to 100 nm, greater than or equal to 150 nm, greater than or equal to 200 nm, greater than or equal to 250 nm or greater than or equal to 300 nm; where only the first surface of the substrate body is coated with the first coating; and / or where the second surface of the substrate body is not coated with the first coating. [3] Composite component according to any of the preceding claims, wherein the substrate body is made of glass; and / or wherein the substrate body has a thickness of (i) less than or equal to 2 mm, less than or equal to 1.5 mm, less than or equal to 1 mm or less than or equal to 0.5 mm, (ii) greater than or equal to 0.05 mm, greater than or equal to 0.07 mm, greater than or equal to 0.1 mm, greater than or equal to 0.3 mm, greater than or equal to 0.5 mm or greater than or equal to 1 mm, and / or (iii) between 0.05 mm and 2 mm, between 0.07 mm and 2 mm, between 0.1 mm and 2 mm, between 0.3 mm and 2 mm, between 0.3 mm and 1.5 mm, between 0.3 mm and 1.5 mm or between 0.3 mm and 1 mm. [4] Composite component according to any of the preceding claims, (i) wherein the strength, in particular the surface strength, of the first coated surface of the substrate body is greater than or equal to the strength of the uncoated second surface of the substrate body, (ii) wherein the second surface can withstand a greater force than the first surface; and / or (iii) wherein the strength of the first and / or second surface of the substrate body is greater than or equal to 100 MPa, 150 MPa, 200 MPa or 250 MPa and / or less than or equal to 1000 MPa, 500 MPa, 400 MPa, 300 MPa or 200 MPa. [5] Composite component according to any of the preceding claims, wherein at least in some areas of the first coating there is a compressive stress, wherein preferably the compressive stress (i) less than or equal to 100 MPa, less than or equal to 70 MPa, less than or equal to 50 MPa, less than or equal to 30 MPa, less than or equal to 20 MPa, or less than or equal to 10 MPa, (ii) greater than or equal to 1 MPa, greater than or equal to 10 MPa, greater than or equal to 20 MPa, greater than or equal to 30 MPa, greater than or equal to 50 MPa, greater than or equal to 70 MPa or greater than or equal to 100 MPa, and / or (iii) between 10 MPa and 50 MPa, in particular between 15 MPa and 40 MPa, preferably between 15 MPa and 30 MPa, more preferably between 15 MPa and 25 MPa or between 20 MPa and 30 MPa. [6] Composite component according to any of the preceding claims, where the Bow (i) greater than or equal to 0.3 µm, greater than or equal to 0.5 µm, greater than or equal to 1 µm, greater than or equal to 5 µm, greater than or equal to 15 µm, greater than or equal to 20 µm, greater than or equal to 25 µm, greater than or equal to 30 µm, greater than or equal to 35 µm, greater than or equal to 40 µm or greater than or equal to 45 µm, (ii) less than or equal to 50 µm, less than or equal to 45 µm, less than or equal to 40 µm, less than or equal to 35 µm, less than or equal to 30 µm, less than or equal to 25 µm, less than or equal to 20 µm, less than or equal to 15 µm, less than or equal to 10 µm, less than or equal to 5 µm, less than or equal to 3 µm, less than or equal to 2 µm, less than or equal to 1 µm, less than or equal to 0.7 µm or less than or equal to 0.3 µm, and / or (iii) between 0.1 µm and 40 µm, between 0.1 µm and 30 µm, between 0.1 µm and 20 µm, between 0.1 µm and 10 µm, between 0.3 µm and 7 µm, between 0.3 µm and 7 µm, between 0.3 µm and 6 µm, between 0.3 µm and 5 µm or between 0.3 µm and 4 µm. [7] Composite component according to any of the preceding claims, where E is the Young's modulus of the substrate body material, v is the Poisson's ratio of the substrate body material, R is the radius of curvature of the composite workpiece, in particular of the substrate body, D is the thickness of the substrate body, d is the thickness of the first coating, and S is the compressive stress in the first coating. S=E1−vD26Rd consists of a modulus of elasticity preferably having a value between 40 GPa and 160 GPa, preferably between 85 GPa and 130 GPa, and / or a Poisson's ratio having a value between 0.15 and 0.35, preferably between 0.2 and 0.

3. [8] Composite component according to any of the preceding claims, the second surface is polished; where the first surface is polished; wherein the first surface of the substrate body is convexly shaped at least in the area of ​​the first coating; and / or wherein the second surface of the substrate body is concave, at least in the area of ​​the first coating. [9] Composite workpiece according to one of the preceding claims, wherein at least in the first surface and / or at least in a depth region of the substrate body, preferably up to two or three times the layer thickness of the first coating, there is at least a partial tensile stress under the first surface, the tensile stress being in particular approximately equal in magnitude to the compressive stress in the first coating and / or being between 1 MPa and 100 MPa. [10] Composite workpiece according to one of the preceding claims, wherein the composite workpiece, in particular the substrate body, has a circular or oval-shaped cut surface in at least one cut plane, in particular the cut surface has a maximum diameter of (i) less than or equal to 500 mm, less than or equal to 300 mm, less than or equal to 200 mm, less than or equal to 150 mm, and / or (ii) greater than or equal to 50 mm, greater than or equal to 100 mm, greater than or equal to 150 mm, greater than or equal to 200 mm or greater than or equal to 300 mm. [11] Composite component according to one of the preceding claims, where (i) the second coating is UV-curable, has an optical refractive index adapted to the material of the substrate body and / or is a plastic, in particular a polymer, and / or (ii) the lattice structure can be applied to the substrate body at least partially by means of nano-imprint lithography or is applied to it; where only the second surface of the substrate body is coated with the second coating; and / or where the first surface of the substrate body is not coated with the second coating. [12] A plurality of composite components according to any one of claims 1 to 11. [13] The plurality of composite components according to claim 12, wherein the probability of failure of the composite components when a force of 100 Newtons is applied to the second surface of the individual substrate bodies is less than or equal to 1%, preferably less than or equal to 0.5% or 0.1%. [14] Method for producing a composite workpiece according to any one of claims 1 to 11, comprising the method: - Providing a substrate body; - Applying a coating to a surface of the substrate body; - Maintaining the substrate temperature at or below 200 °C at least intermittently or continuously during the application of the coating to the surface of the substrate body. [15] Augmented reality glasses comprising at least one composite component according to any one of claims 1 to 11 or at least a cut thereof. [16] Use of a composite component according to any one of claims 1 to 11 or at least a section thereof in an augmented reality glasses.

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