Coupling system for valve disc and vacuum valve

Abstract

A vacuum valve comprising a valve seat having a first sealing surface circumferential to the valve opening, a valve closure with a second sealing surface corresponding to the first sealing surface, and a coupling arrangement. The vacuum valve has a drive unit and a connecting element (20) defining a connecting axis (V), the connecting element having a first end and a second end, the second end being opposite the first end along the connecting axis (V), and the connecting element (20) being connected to the drive unit at the first end, and a connecting section (21) defining a connection width (22) for insertion into the coupling arrangement (10) in the region of the second end. The drive unit is configured such that the valve closure (4) is adjustable from an open position to a closed position and back again in a coupled state.The connecting section (21) has a fastening recess (23) extending along the connecting axis (V), has a recess (24) set back with respect to the connecting width (22) and extending orthogonally to the connecting axis (V) with a countersink opening (25) opening towards the fastening recess (23), and has a clamping element (26) arranged in the recess (24) and movably mounted at least orthogonally to the connecting axis (V), wherein the clamping element (26) projects through the countersink opening (25) into the fastening recess (23).

Description

The invention relates to a vacuum valve for moving and positioning a valve closure that can be coupled to a drive unit by a coupling element in a process atmosphere and to such a valve closure.Vacuum valves are used in particular in vacuum chamber systems in the field of IC, semiconductor, flat panel or substrate production, which must take place in a protected atmosphere as far as possible without the presence of contaminating particles.Such vacuum chamber systems comprise in particular at least one evacuable vacuum chamber provided for receiving semiconductor elements or substrates to be processed or produced, which vacuum chamber has at least one vacuum chamber opening through which the semiconductor elements or other substrates can be guided into and out of the vacuum chamber. For example, in a manufacturing facility for semiconductor wafers or liquid crystal substrates, the highly sensitive semiconductor or liquid crystal elements pass sequentially through a plurality of process vacuum chambers, in which the parts located within the process vacuum chambers are processed by means of a processing device in each case.Such process chambers frequently have further valves, such as a transfer valve, for example, the cross section of which is adapted to the substrate and robot and through which the substrate can be introduced into the vacuum chamber and optionally removed after the intended processing. In addition, for example, a further transfer valve can be provided, by means of which the processed substrate is brought out of the chamber.The guiding of the substrate, e.g. a wafer, is effected, for example, with a correspondingly designed and controlled robot arm which can be carried out through the opening of the process chamber which can be provided by the transfer valve. The process chamber is then loaded by gripping the substrate with the robot arm, bringing the substrate into the process chamber and depositing the substrate in a defined manner in the chamber. Emptying of the process chamber takes place in a corresponding manner.In general, vacuum valves for regulating a volume or mass flow and / or for substantially gas-tight closing of a flow path which leads through an opening formed in a valve housing are known from the prior art in various embodiments and, as mentioned above, are used, in particular, in vacuum chamber systems in the field of IC, semiconductor or substrate production, which must take place in a protected atmosphere as far as possible without the presence of contaminating particles. Both during the processing process within the process vacuum chambers and during the transport from chamber to chamber, the highly sensitive semiconductor elements or substrates must always be in a protected atmosphere-in particular in an air-less environment.For this purpose, peripheral valves are used on the one hand for opening and closing a gas supply or discharge and transfer valves are used on the other hand for opening and closing the transfer openings of the vacuum chambers for the introduction and removal of the parts.The vacuum valves traversed by semiconductor parts are referred to as vacuum transfer valves because of the described field of application and the associated dimensioning, as rectangular valves because of their mostly rectangular opening cross section, and as slide valves, rectangular slides or transfer slide valves because of their usual functioning.Peripheral valves are used in particular for controlling or regulating the gas flow between a vacuum chamber and a vacuum pump or a further vacuum chamber. Peripheral valves are located, for example, within a pipe system between a process vacuum chamber or a transfer chamber and a vacuum pump, the atmosphere or a further process vacuum chamber. The opening cross section of such valves, also called pump valves, is generally smaller than in the case of a vacuum transfer valve. Since peripheral valves are used depending on the field of use not only for completely opening and closing an opening, but also for controlling or regulating a flow rate by continuously adjusting the opening cross section between a completely open position and a gas-tight closed position, they are also referred to as regulating valves. One possible peripheral valve for controlling or regulating the gas flow is the pendulum valve.In a typical pendulum valve, as known, for example, from U.S. Pat. No. 6,089,537 (Olmsted), in a first step a generally round valve disk is pivoted rotationally via a generally likewise round opening from a position releasing the opening into an intermediate position covering the opening. In the case of a slide valve, as described, for example, in U.S. Pat. No. 6,416,037 (Geiser) or U.S. Pat. No. 6,056,266 (Ladenla), the valve plate, like the opening, is usually rectangular and is linearly pushed in this first step from a position releasing the opening into an intermediate position covering the opening. In this intermediate position, the valve disk of the pendulum valve or slide valve is situated in a spaced-apart opposite position to the valve seat surrounding the opening. In a second step, the distance between the valve disk and the valve seat is reduced, so that the valve disk and the valve seat are pressed uniformly against one another and the opening is closed in a substantially gas-tight manner. This second movement is preferably carried out substantially in a direction perpendicular to the valve seat. The sealing can be effected, for example, either via a sealing ring arranged on the closure side of the valve disk, which is pressed onto the valve seat surrounding the opening, or via a sealing ring on the valve seat, against which the closure side of the valve disk is pressed. As a result of the closing process which takes place in two steps, the sealing ring between the valve disk and the valve seat is scarcely subjected to shear forces which would destroy the sealing ring, since the movement of the valve disk takes place in the second step substantially linearly perpendicularly onto the valve seat.Different sealing devices are known from the prior art, for example from U.S. Pat. No. 6,629,682 B2 (Duelli). A suitable material for sealing rings and seals in vacuum valves is, for example, fluororubber, also called FKM, in particular the fluoroelastomer known under the trade name "Viton", and also perfluoro rubber, abbreviated to FFKM.The pressing of the valve disk onto the valve seat must be carried out in such a way that both the required gas tightness is ensured within the entire pressure range and damage to the sealing medium, in particular to the sealing ring in the form of an O-ring, due to excessively high compressive stress is avoided. In order to ensure this, known valves provide pressure control of the valve disk which is regulated as a function of the pressure difference prevailing between the two valve disk sides. Particularly in the case of large pressure fluctuations or the change from reduced pressure to excess pressure, or vice versa, a uniform force distribution along the entire circumference of the sealing ring is, however, not always possible. In general, it is sought to decouple the sealing ring from supporting forces which result from the pressure applied to the valve. In U.S. Pat. No. 6,629,682 (Duelli), for example, a vacuum valve with a sealing medium is proposed for this purpose, which is composed of a sealing ring and an adjacent support ring, so that the sealing ring is substantially freed from support forces.In order to achieve the required gas tightness, optionally for both positive and negative pressure, in addition or as an alternative to the second movement step, some known pendulum valves or slide valves provide a valve ring which is displaceable perpendicular to the valve disk and surrounds the opening and is pressed onto the valve disk for the gas-tight closing of the valve. Such valves with valve rings that are actively displaceable relative to the valve disk are known, for example, from DE 1 264 191 B1, DE 34 47 008 C2, U.S. Pat. No. 3,145,969 (for the purpose) and DE 77 31 993 U.It is common to the vacuum valves mentioned that a movable valve closure (valve disk) is in each case usually guided with a polymer-based sealing material by means of a drive and is provided for providing the valve effect. The closure is typically at least partially exposed to the processing process in the process volume and thus increased wear. A regular or demand-based exchange of the valve closure is accordingly required.The maintenance or replacement of such valve disks usually requires a standstill or interruption of production sequences and a more or less massive intervention in the overall system. For the replacement of a valve closure, the laborious loosening of fastening devices for the corresponding element is often required. This often leads to comparatively long downtime and requires special tools for the maintenance operation. Fastening means which ensure a fixed arrangement of the active element in the process are also often difficult to access because of the design.This situation is disadvantageous even in the event of unexpected problems in the system (for example, in the event of leakage of the valve), which necessitate a short-term and rapid intervention.It is therefore an object of the present invention to provide an improved vacuum valve or an improved valve closure for such a valve, in which the above disadvantages are reduced or avoided.In particular, it is the object of the invention to provide an improved vacuum valve which enables optimized, i.e. in particular faster, simpler and reliable, maintenance of the device.The invention is further based on the object of providing a correspondingly improved vacuum valve for optimized exchange of wear parts.The invention is further based on the object of providing a valve closure of correspondingly improved design for optimized exchange at a vacuum valve.These objects are achieved by the realization of the characterizing features of the independent claims. Features which develop the invention in an alternative or advantageous manner can be gathered from the dependent patent claims.The invention is based on the approach to provide a simpler and a simpler or reducing possibility for the maintenance of a vacuum valve that avoids or reduces the risk of particle formation in a vacuum region. According to the invention, a specific coupling with, in particular, a fastening element, preferably designed as a bolt, and a counter piece on the valve designed for clamping or locking with the bolt is to be used for this purpose. The counterpart (connecting element) is intended to be provided in particular as part of the valve, for example by the valve rod. The valve closure can then be fastened by locking the bolt to the counterpart with the bolt.The fastening element and the corresponding connecting element are designed such that the locking can be effected by bringing the fastening element together with the connecting element and subsequently simply rotating the fastening element in a defined manner, for example by 90°. For this purpose, the valve disk is already arranged in front of the connecting element (initially loosely), and the fastening element then projects through a part of the valve disk into the connecting element.The fastening element thereby replaces in particular a screw or an alternative fastening means and advantageously provides a simple fastening (locking) and loosening of a valve disk.The invention relates to a vacuum valve for regulating a volume or mass flow and / or for closing and opening a valve opening. The vacuum valve has a valve seat which has a first sealing surface encircling the valve opening, and also has a valve closure having a second sealing surface corresponding to the first sealing surface and a coupling arrangement.The vacuum valve further has a drive unit and a connecting element defining a connecting axis, having a first end and a second end, wherein the second end is opposite the first end along the connecting axis, in particular coaxially, and wherein the connecting element is connected to the drive unit at the first end.The connecting element can be, for example, a valve rod or a drive arm and can be moved by means of the drive.In particular, the vacuum valve can have a separating device for separating a process atmosphere region from an external atmosphere region, wherein the drive unit is assigned at least partially to the external atmosphere region and the connecting element is assigned at least partially to the process atmosphere region. The vacuum valve is designed in particular for use in a vacuum region, wherein a part of the valve is present and moved in the vacuum region and another part, preferably parts of the drive unit, is present outside this region. The separating device can be formed by a housing or a bellows of the drive unit (e.g. connected on the one hand to the connecting element and on the other hand to the drive unit).The separating device can be designed, for example, as a bellows or as a sliding feedthrough, which is sealed, for example, with an O-ring.The drive unit can be designed as a pneumatic drive cylinder or can have an electric motor.The connecting element has a connecting portion defining a connecting width for insertion into the coupling arrangement in the region of the second end. The valve closure can thus be connected to the connecting element by means of the coupling arrangement by means of a fastening element, as a result of which a coupling state can be provided.Accordingly, a valve rod, for example, can thus have at its free end a device (connecting section) which is formed by interaction with the fastening element for connection to the valve closure.The drive unit is designed such that the valve closure in the coupled state can be adjusted from an open position, in which the valve closure at least partially releases the valve opening, into a closed position, in which there is a sealing contact between the first sealing surface and the second sealing surface and the valve opening is thereby sealed in a gas-tight manner, and back. The sealing contact can be provided, for example, by a seal (sealing material, O-ring) which is arranged on the side of the valve seat or of the valve closure.The connecting portion has a fastening depression extending along the connecting axis. This depression is shaped recessed in particular relative to the second end of the connecting element and can have a round cross section.The connecting section further comprises a depression (depression) recessed with respect to the connecting width and extending orthogonally to the connecting axis, having a depression opening open toward the fastening depression, and a clamping element arranged in the depression and mounted movably at least orthogonally to the connecting axis. The clamping element projects (partially) through the countersunk opening into the fastening depression.In particular, the fastening depression can be cylindrical or polygonal.The connecting portion is axially delimited in particular with respect to the connecting axis, in particular the axial delimitation corresponds to the axial extent of the fastening depression.In one embodiment, the countersunk opening and the clamping element can be designed to correspond in such a way that the clamping element is partially present in the countersunk portion and partially protrudes into the fastening depression with a maximum of a certain protrusion. An inner clamping width can be defined in the fastening depression. The clamping element is designed to correspond to the countersunk opening in such a way that the clamping element cannot be pushed completely through the opening, but is partially retained in the countersunk area due to its spatial dimensioning and / or shape. The maximum protrusion into the fastening depression is present in particular when the clamping element contacts the edge of the countersunk opening and is restrained by the edge from further penetration into the fastening depression.The inner clamping width can correspond here in particular to a distance between a surface of the clamping element and a surface in the fastening depression opposite the clamping element. The opposite surface can be provided in particular by a second clamping element which is present in the depression formed as a circumferential depression or is arranged in a further depression.A clamping or locking by means of the clamping element can be provided by the interaction with the fastening element in the fastening depression. For this purpose, the fastening element is in particular configured such that, by rotating the fastening element in the fastening depression, the interaction with the clamping element can be provided or optionally prevented.According to one embodiment, a restoring element interacting with the clamping element can be arranged on the connecting portion, in particular in the depression, and can bring about a restoring force on the clamping element in the direction of the fastening depression. The restoring element can be designed in particular as an annular spring.The restoring element can be arranged circumferentially around the connecting portion, for example as a clamp, and thereby provide a retaining force on a plurality of clamping elements.The restoring element can in particular be shaped and arranged in such a way that the clamping element or a plurality of clamping elements are pressed radially in the direction of a central axis (connecting axis) and thereby provide the maximum protrusion into the fastening depression in the case of a non-coupling or without a radially oppositely directed force.In one embodiment, the clamping element can be shaped in a spherical, cylindrical or pyramidal manner, in particular as a sphere. In an embodiment as a ball, a ball diameter is selected in particular such that it is larger than the diameter of the counterbore opening.According to one embodiment, the depression and the clamping element can be designed in such a way that the depression, in particular the depression opening, limits or prevents the movability of the clamping element in a direction parallel to the connecting axis, in particular limits it in the direction of the second end. In particular, the depression provides a (vertically directed) stop for the clamping element. Due to such limited mobility of the clamping element, an axial locking of the fastening element can take place in the event of a cooperation between the clamping element and the fastening element, whereby an axially directed tensile force can be brought about by the fastening element on the valve disk.In one embodiment, the vacuum valve can have the fastening element for fastening the valve closure to the connecting element. The fastening element can define a fastening axis corresponding to its extension and can have a fastening section for cooperation with the connecting section and a holding section for cooperation with the coupling arrangement. The fastening portion can be associated with a first end and the holding portion can be associated with a second end of the fastening element.The fastening portion provides, in particular, a first fastening width that is smaller than the inner clamping width and provides a second fastening width that is larger than the inner clamping width. The first fastening width and the second fastening width are provided offset at an angle in a common plane which is oriented orthogonally to the fastening axis.By means of the second fastening width, a locking with the clamping element can be provided. The first fastening width can provide a simple, contactless insertion of the fastening section into the fastening depression of the connecting element.In one embodiment, the fastening element can be arranged in such a way that the fastening section overlaps the connecting section at least partially axially, in particular lies axially (completely) in the connecting section. The holding section can contact the coupling arrangement. In this arrangement, the fastening element can optionally provide the coupling state or not interact with the connecting element depending on its rotational position about the fastening axis.In particular, the fastening element can have two opposite contact sides in the fastening section and a distance of the contact sides can provide the second fastening width. The fastening element can furthermore be arranged and radially oriented in such a way that at least one of the contact sides interacts with the clamping element and the coupling state is thereby provided. The opposite contact sides point in diametrically opposite directions.According to one embodiment, the at least one contact side can be shaped, in particular shaped concave, in such a way that, when interacting with the clamping element, a force acting in the axial direction is generated, in particular parallel to the fastening axis and / or connecting axis, as a result of which the valve closure is held on the connecting element.In particular, the at least one contact side can have a protruding and curved contact surface, wherein the contact surface points away from the first end of the fastening element, the contact surface contacts the clamping element and a force acting in the axial direction is thereby generated.In the coupled state, the contact surface can then cooperate with the clamping element, wherein the contact surface can provide a support or receptacle for the clamping element. This support can be correspondingly concave. Such a support can be located on the clamping element opposite in particular the vertical movement limitation kept ready by the depression. In this way, a (releasable) form-fit connection between the fastening element and the connecting element can be provided.In one embodiment, the fastening element can have a shoulder in the region of the holding section and the shoulder can cooperate with the coupling arrangement in such a way that a force acting in the axial direction is hereby generated, in particular parallel to the fastening axis and / or connecting axis, whereby the valve closure is held on the connecting element.The fastening element can thus provide at its lower end a positive interaction with the connecting element and thereby bring about a pressing of the coupling arrangement onto the connecting element at the upper end by means of the shoulder. The tensile force provided by the cooperation can be transmitted to the coupling arrangement by means of the shoulder.In one embodiment, the fastening element can have a rotation limiting element (38) in the region of the holding section, wherein the rotation limiting element can cooperate with the coupling arrangement in such a way that a radial angle for the radial orientation of the fastening element providing the coupling state can be set as a result, and a rotational movement of the fastening element is correspondingly limited.Such a rotation limiter can be designed, for example, as an element projecting from the fastening element, in particular as a pin, and interact with a corresponding section or formation of the coupling arrangement.The invention accordingly also relates to a valve closure for a vacuum valve as described herein. The valve closure can be designed in particular as a valve disk. The valve closure has a second sealing surface which is formed with a first sealing surface of a valve seat of the vacuum valve surrounding the valve opening. The valve closure also has a coupling arrangement for providing a coupling state by connecting the coupling arrangement to the connecting element of the vacuum valve by means of the fastening element.In particular, the second sealing surface and the coupling arrangement can be arranged on respectively opposite sides of the valve closure.The coupling arrangement has a recess defining a central coupling axis for receiving the connecting element. The recess has a receiving region with a coupling opening for inserting and receiving the connecting element and a holding region with a fastening opening diametrically opposite the coupling opening for inserting and receiving the fastening element. The fastening opening has, on its side facing away from the recess, a recess accessible from the outside for cooperation with a rotation limiting element of the fastening element. The recess also provides a rotational limitation for the fastening element.The recess can be formed in particular as a depression with respect to the surface of an upper side of the coupling arrangement, in particular wherein the upper side is formed orthogonally to the second sealing surface and diametrically opposite to the coupling opening.The depression is present in particular in the region of the fastening opening on the outside of the coupling arrangement.In one embodiment, the recess can extend with respect to the coupling axis over a radial angle range between 75° and 105°, in particular over a range of 90°.In the case of a joined system, i.e. the fastening element is inserted as intended through the fastening opening into the recess, the rotation limiting element of the fastening element can be present in the recess. Thus, a rotation of the fastening element about the coupling axis is limited corresponding to the shape of the recess. The rotation limiting element can only be moved within the limits provided by the recess.The recess is in particular designed such that the rotation allows exact locking of the system by rotating the fastening element up to a first rotation limit and opening or unlocking of the system by rotating the fastening element up to a second rotation limit. Each of the rotational limits can be provided by a surface or wall of the recess and represent the rotational limit.In an embodiment of the recess as a depression, the rotation limiting element can be designed in particular as a pin or pointer which, in the assembled state, is present in the recess and is movable therein. The coupling arrangement has, in particular in the region of the cutout, a marking or display which identifies a state provided by the fastening element as a function of its rotational position, in particular the reaching or providing of the coupling state.In one embodiment, the recess can have a first shoulder assigned to the receiving region, wherein the first shoulder is shaped to limit an insertion depth for the connecting element, in particular as a stop. Alternatively or additionally, the recess can have a second shoulder assigned to the holding region, wherein the second shoulder is shaped to limit an insertion depth for the fastening element and to cooperate with the fastening element, in particular as a stop. In particular, the first shoulder and / or the second shoulder can separate the receiving region from the holding region.The invention accordingly also relates to a fastening element for a vacuum valve described herein for fastening a valve closure to a connecting element of the vacuum valve. The fastening element defines a fastening axis according to its (axial) extension and has an (axially limited) fastening section for cooperation with the connecting section of the connecting element and an (axially limited) holding section for cooperation with the coupling arrangement of the valve closure. The fastening portion is assigned to a first end and the holding portion is assigned to a second (axially opposite) end of the fastening element.The attachment portion provides a first attachment width and a second attachment width, the first attachment width being less than the second attachment width. The first fastening width and the second fastening width are provided offset at an angle in a common plane which is oriented orthogonally to the fastening axis.The fastening element can be designed in particular as a bolt.In one embodiment, the fastening element can have two opposite insertion sides in the region of the fastening section, which sides point in opposite directions orthogonally to the fastening axis, wherein a spacing of the insertion sides provides the first fastening width.In one embodiment, the fastening element can have two opposite contact sides in the region of the fastening section, which sides point in opposite directions orthogonally to the fastening axis, wherein a spacing of the contact sides provides the second fastening width.In particular, the alignment of at least one of the contact sides and the relative alignment of at least one of the insert sides can enclose an angle from an angle range between 75° and 105°, in particular an angle of 90°. The at least one contact side can be oriented orthogonally to the at least one insertion side.Due to the offset alignment of the contact and insertion sides, at least two different operative states can be provided with the fastening element depending on its rotational alignment during intended use, in particular the locking or coupling state and an unlocking state.According to one embodiment, the contact sides can each have concavely curved surfaces for cooperation with a clamping element of the connecting element. The shape of the contact sides enables the generation of a force coupling state relative to the connecting element with an axially directed force component.In one embodiment, the fastening element can have a shoulder in the region of the holding section, wherein the shoulder is designed to cooperate with a second shoulder assigned to a holding region of the valve closure. By means of this shoulder on the fastening element, the transmission of a tensile force generated by the fastening section (in the direction of the connecting element) to the valve closure or the coupling arrangement can be provided.In one embodiment, the fastening element can have a rotation limiting element in the region of the holding section, wherein the rotation limiting element is formed corresponding to and for cooperation with a recess of the valve closure.The rotation limiting element can be formed in particular in a radially oriented manner.In particular, the rotation limiting element can be designed as a projection protruding radially from the fastening element, in particular as a pin or bolt.The devices according to the invention are described in more detail below purely by way of example with reference to specific exemplary embodiments schematically represented in the drawings, further advantages of the invention also being discussed. In detail, the following show: FIGS. 1a-c show an embodiment of a vacuum valve according to the invention with a coupling arrangement; FIG. 2 shows an embodiment of a connecting element 20 of a vacuum valve according to the invention and a fastening element 30 according to the invention which can be connected to the connecting element 20; FIGS. 3 a- c show a detail of an embodiment of a vacuum valve according to the invention with a coupling arrangement 10 of a valve closure, a connecting element 20 and a fastening element 30 in a coupling state; and FIGS. 4 a- c show a detail of the embodiment according to FIGS. 3 a- cin a non-coupled state.FIGS. 1 ato 1 cschematically show a possible embodiment of a valve 1 according to the invention in the form of a transfer valve 1, illustrated in different closure positions.The transfer valve 1 shown is a special form of slide valve. The vacuum valve has a rectangular, plate-shaped valve closure 4 (e.g. valve disk), which has a sealing surface 6 for closing an opening 2 in a gas-tight manner. The opening 2 has a cross section corresponding to the valve closure 4 and is formed in a wall 2a. The opening 2 is surrounded by a valve seat which, for its part, likewise provides a sealing surface 3 corresponding to the sealing surface 6 of the closure element 4. The sealing surface 6 of the valve closure 4 runs around the valve closure 4 and carries a sealing material 7 (seal). In a closed position (G), the sealing surfaces 3 and 6 are pressed against one another and the sealing material 7 is pressed between the two sealing surfaces 3 and 6.The opening 2 connects a first pressure region L, which is situated to the left of the wall 2 ain the figure, to a second pressure region R to the right of the wall 2 a. The wall 2a is formed, for example, by a chamber wall of a vacuum chamber. The vacuum valve is then formed by a cooperation of the chamber wall 2a with the valve closure 4.It is understood that the valve seat together with the sealing surface 3 can alternatively be designed as a valve component structurally fixedly connected to the valve 1 and can be arranged, e.g. screwed, for example at a chamber opening.The valve closure 4 is arranged on an adjustment arm 20 (connecting element), which is rod-shaped here, for example, and extends along a geometric adjustment axis V. The adjusting arm 20 is mechanically coupled at its first end to a drive unit 9, by means of which the closure member 4 is adjustable in the first pressure region L to the left of the wall 2 aby adjusting the connecting element 20 by means of the drive unit 9 between an open position O (FIG. 2 a) via an intermediate position Z (FIG. 2 b) into a closed position G (FIG. 2 c).In the open position O, the valve closure 4 is located outside the projection region of the opening 2 and fully releases the latter, as shown in FIG. 2a.By adjusting the adjustment arm 20 in the axial direction parallel to the adjustment axis V and parallel to the wall 2 a, the valve closure 4 can be adjusted from the open position O into the intermediate position Z by means of the drive unit 9.In this intermediate position Z, the valve closure 4 covers the opening 2 and is situated at a distance from the valve seat. The sealing surfaces 3 and 6 are likewise located in corresponding opposition.By adjusting the adjustment arm 20 in the direction transverse to the adjustment axis V, i.e. e.g. perpendicular to the wall 2 aand to the valve seat and thus in the direction of the axis 5, the closure element 4 can be adjusted from the intermediate position Z into the closed position G (FIG. 2 c ).In the closed position G, the valve closure 4 closes the opening 2 in a gas-tight manner and separates the first pressure region L from the second pressure region R in a gas-tight manner.The opening and closing of the vacuum valve is thus effected by means of the drive unit 9 by an L-shaped movement of the valve closure 4 and of the adjusting arm 20.A transfer valve as shown is typically provided for sealing a process volume (vacuum chamber) and for charging and discharging the volume. Frequent changes between the open position O and the closed position G are the rule in such an application. This can lead to increased wear phenomena of the sealing surfaces 3 and 6, the seal 7 and the drive 9.According to the invention, the valve closure 4 has a coupling arrangement 10 for providing a coupling state by connecting the coupling arrangement 10 to a connecting section provided by the connecting element 20. For this purpose, the coupling arrangement 10 has a recess for receiving the connecting element, in which recess the connecting section engages in the embodiment shown. In addition, a fastening element, for example in the form of a bolt, is provided, by means of which the connection between the coupling arrangement and the connecting element can be provided.As an alternative to the embodiment shown, the coupling arrangement 10 can be integrated in the valve closure 4 with a coupling arrangement in an integrated construction. With such an embodiment, the space requirement for the valve closure 4 can be reduced.A coupling arrangement 10 of a valve closure according to the invention and a corresponding connecting element 20 of a vacuum valve according to the invention and a fastening element 30 are illustrated in detail in the following figures.FIG. 2 shows an exploded view of an embodiment of a connecting element 20 of a vacuum valve according to the invention and of a fastening element 30 according to the invention which can be connected to the connecting element 20.The connecting element 20 is designed here as a valve rod (also referred to as an adjusting arm). FIG. 2 shows a second end of the connecting element 20, an opposite first end being connected to the drive unit of the vacuum valve for controlled movement of the valve disk.The connecting element 20 has, in the region of the second end, a connecting section 21 with a fastening depression 23 formed centrally about the connecting axis V. The connecting section 21 defines a connecting width 22 here. the fastening depression 23 is accessible open from above along the connecting axis V.In addition, in the embodiment, two depressions 24 are provided, each with a depression opening 25, wherein the depressions 24 are recessed with respect to the connecting width 22 and extend orthogonally to the connecting axis V, i.e. the depths of the depressions 24 are dimensioned orthogonally to the connecting axis V.The depressions 24 are arranged opposite one another, in particular oriented at an angle of 180° relative to one another, that is to say point in two opposite directions.The connecting section 22 also has two spherical clamping elements 26. The clamping elements 26 are arranged in the depressions 24 and are mounted in such a way that they are movable orthogonally to the connecting axis V. The clamping elements 26 are shaped and correspond to the countersunk openings 25 such that each clamping element 26 partially protrudes through the respective countersunk opening 25 into the fastening depression 23, but cannot be pushed completely through the countersunk opening 25. The diameter of a clamping element is in particular larger than the diameter of the corresponding counterbore opening.The connecting section 22 further comprises a restoring element 27, here formed as an annular spring. The ring spring 27 is arranged in the depression 24 and interacts with the clamping elements 26 in such a way that a restoring force is exerted on the latter in the direction of the fastening depression 23. The clamping elements 26 are thereby pressed into the countersunk openings 25.This arrangement of counterbore 25, clamping elements 26 and annular spring 27 defines an inner clamping width in the fastening depression 23, wherein the inner clamping width corresponds here to a distance of the surfaces of the clamping elements 26 in the fastening depression 23.The fastening element 30 defines a fastening axis B in accordance with its extension. In addition, the fastening element 30 has a fastening portion 31 at a first end and a holding portion 32 at a second, opposite end. The fastening portion 31 is formed and shaped such that it can be brought into a cooperating state with the connecting portion 21.The holding section 32 is shaped such that it can interact with the valve closure of the valve and, in a coupled state, can bring about a holding force on the valve closure.The fastening portion 31 has two opposite contact sides 33. The contact sides 33 are concave in such a way that, when interacting with the clamping element 26, a force acting in the axial direction parallel to the fastening axis B can be generated, as a result of which the fastening element 30 is held on the connecting element 20.For this purpose, the contact sides 33 have contact surfaces 34 projecting from an extending body of the fastening portion 31, i.e. protruding from an extending body of the fastening portion 31 in the region of the fastening portion 31. The contact surfaces 34 or holding surfaces point away from the first, lower end of the fastening element 30 and thus provide a type of clamping stop for the clamping elements 26. The interaction of these components is evident in detail from the following figures.The fastening element 30 also has, in the region of the fastening section 21, two opposite insertion sides 35 which point in opposite directions orthogonally to the fastening axis B.The fastening element 30, in particular in its generic use with the vacuum valve, is mounted rotatably about the fastening axis B. As a result, either the insert sides 35 or the contact sides 33 can be brought into an opposing position relative to the clamping elements 26. A cooperation between fastening element 30 and connecting element 20 can only be provided when opposite contact sides 33.FIGS. 3a to 3c show a detail of an embodiment of a vacuum valve according to the invention with a coupling arrangement 10 of a valve closure, a connecting element 20 and a fastening element 30 in a coupling state.The fastening element 30 interacts here with the coupling arrangement 10 and the connecting element 20 in such a way that the coupling arrangement 10 is held on the connecting element 20 by means of the fastening element 30 and the coupling state is provided. The coupling state is generated by the simultaneous interaction of the fastening element 30 with the coupling arrangement 10 and the fastening element 30 with the connecting element 20.For cooperation of the fastening element 30 with the coupling arrangement 10, the latter has a holding region 11 with a fastening opening 12 diametrically opposite a coupling opening 15 for inserting and receiving the fastening element 30. The fastening opening 12 and the coupling opening 15 are provided by a recess of the coupling arrangement 10. The extension, shaping and / or spatial dimensioning of the recess defines a coupling axis K. The fastening element 30, here formed as a bolt, is inserted through the fastening opening 12 from above into the coupling arrangement 10.The recess further comprises a shoulder 13 assigned to the holding region 11, wherein the shoulder 13 is formed for limiting an insertion depth for the fastening element 30 and for interacting with the fastening element 30. In the embodiment shown, the shoulder 13 serves as a stop for the holding section 32 of the fastening element 30 and thereby enables a (downwardly directed) holding force to be exerted on the coupling arrangement 10.For this purpose, the fastening element 30 likewise has a shoulder 36 in the region of the holding section, wherein this shoulder 36 is designed to cooperate with the shoulder 13 assigned to the holding section 11 of the valve closure. In addition, an axial bearing 32 ais provided, which can be designed, for example, as a ball bearing or slide bearing. The axial bearing enables simple, in particular low-friction, rotation of the fastening element 30 relative to the coupling arrangement 10.In addition, the fastening element 30 has a sealing element 37, by means of which contact is established between the shoulders 13 and 36. The sealing element 37 provides a sealing effect between the components on the one hand and can bring about the holding force and / or compensate for a manufacturing tolerance on the other hand by virtue of the axial pressing thereof.For cooperation of the fastening element 30 with the connecting element 20, the connecting element 20 is inserted into the coupling arrangement 10 from below through the coupling opening 15. The coupling opening 15 is assigned to a receiving region 14 of the coupling arrangement 10. The recess also has a shoulder 16 assigned to the receiving region 14, this shoulder 16 being shaped to limit an insertion depth for the connecting element 20. The shoulder 16 forms a stop for the connecting element 20.The recess of the coupling arrangement 10 is formed in such a way that, when the fastening element 30 and the connecting element 20 are inserted into the coupling arrangement 10 as intended, the fastening section 31 at least overlaps the connecting section 21 axially, here is situated in particular axially within the connecting section 21. In addition, the holding section 32 contacts the coupling arrangement 10.The two opposite contact sides 33 of the fastening element 30 have respective contact surfaces 34 which contact the clamping elements 26 of the connecting element 20. The clamping elements 26 are designed as balls.The clamping elements 26 are in turn held radially by the restoring element 27 designed as an annular spring in such a way that in the rotational position of the fastening element 30 shown, the contact between contact surfaces 34 and clamping elements 26 remains present. The contact sides and thus the fastening element are thereby prevented from sliding away or past. The fastening element 30 is thus locked by the permanent contact, whereby a force acting in the axial direction is generated.By means of the locking and the tensile force thereby generated and acting on the fastening element 30 in the axial direction downwards, the holding force acting on the shoulder 13 (by means of the holding section 32) is correspondingly generated.In this coupling state, the coupling axis K, the attachment axis B, and the connection axis V are arranged coaxially.FIG. 3 b shows a section through the cooperating and locked arrangement of contact arrangement 10, connecting element 20 and fastening element 30 orthogonally to the coupling axis K and in the region of the connecting section 21.The rotational orientation of the fastening element 30 is evident here such that the contact sides 33 of the fastening element 30 interact with the balls 26 of the connecting element 20 and these are thereby pressed radially away from the connecting axis. The annular spring 27 prevents a further radial movement of the balls 26. Because the balls 26 are present in the depressions of the connecting element, their freedom of movement in the axial direction is additionally limited.The retaining element 27 is shaped in such a way that it does not touch an inner wall of the recess of the contact arrangement 10 even in the widened coupling state. This specific configuration makes it possible in particular to prevent particles from forming, for example, as a result of friction between the elements. The retaining element 27 thus has a width in the coupling state which is smaller than the width (inner diameter) of the recess in the receiving region 14.FIG. 3 cshows the locked arrangement of contact arrangement 10, connecting element 20 and fastening element 30 in a plan view of the holding section 32 or the coupling arrangement 10 in perspective from above.The coupling arrangement 10 has at its fastening opening a recess 17 accessible from the outside for cooperation with a rotation limiting element 38 of the fastening element 30. The recess is in particular formed as a depression with respect to the surface of an upper side of the coupling arrangement 10 and extends with respect to the coupling axis K over a radial angle range 18 of between 75° and 105°, here in particular of 90°.The rotation limiting element 38 is designed here as a pin which is present in the depression in the coupled state. The fastening element 30 can be rotated through 90° about the axis K accordingly.A corresponding rotation of the fastening element 30 relative to the orientation shown leads to a release of the locking, i.e. a cooperation of clamping elements and contact surfaces is canceled and the two elements are present contactless. This state is described with the following figures.The arrangement according to the invention offers the advantage that, for fastening a valve disk to a vacuum valve, instead of a fastening means, such as typically a screw, the fastening element according to the invention can be used and thus locking and releasing of the valve disk can be effected by a simple rotational movement.In this case, in contrast to the prior art, a specific tightening torque does not have to be set and provided for the screwing. Sources of error and corresponding damage potential that are connected therewith are thus avoided. Replacing the valve disk can thus be carried out in a further simplified manner and therefore also does not require a user specially designed for this purpose.FIGS. 4a to 4c show a detail of the vacuum valve according to the invention from FIGS. 3a to 3c with the coupling arrangement 10 of the valve closure, the connecting element 20 and the fastening element 30 in a non-coupling state. The coupling arrangement 10, the connecting element 20 and the fastening element 30 are joined together here, but accordingly are not locked.In contrast to the state according to FIGS. 3a-3c, there is no interaction here between the clamping elements 26 and the contact side or contact surfaces. In this unlocked, i.e. open, position, the insertion sides 35 are situated opposite the clamping elements 26. The fastening portion 31 of the fastening element 30 and the connecting portion 21 of the connecting element 20 are shaped in such a way that there is no contact between the connecting element 20 and the fastening element 30. With this orientation, the fastening element 30 can be easily inserted into the coupling arrangement 10 and into the fastening depression 23 without any appreciable resistance.The clamping elements 26 are accordingly subjected to a restoring force directed radially on one side in the direction of the axis K and are thus pressed at the maximum into the countersunk openings. The clamping elements 26 project correspondingly (at most) into the fastening depression 23. A distance between the surfaces of the two clamping elements 26 corresponds to an inner clamping width 28.A width of the fastening element 30 in the region of the fastening section 31 between the two boundary surfaces of the insertion sides 35 is smaller than the inner clamping width 28 and corresponds to a first fastening width 39 a. Accordingly, the width of the fastening element 30 in the region of the fastening section 31 between the two contact surfaces 34 is greater than the inner clamping width 28 and corresponds to a second fastening width 39 b.FIG. 4 cshows the unlocked arrangement of contact arrangement 10, connecting element 20 and fastening element 30 in a plan view of the holding section 32 or the coupling arrangement 10 in perspective from above.The rotation limiting element 38 is rotated through 90° about the axis K relative to the locked coupling state. In this orientation of the fastening element 30, simple insertion of this element into the connecting element 20 is provided, since in this way, contact-free insertion into the fastening depression 23 can be provided on account of the first fastening width 39 awhich is smaller relative to the inner clamping width 28.The rotation limiting member 38 in cooperation with the recess 17 provides for the easy and precise alignment of the fastener 30 for insertion or extraction of the fastener 30.It is to be understood that the coupling embodiment shown or included in the present invention may be used in other vacuum valve types accordingly. Preferably, an arrangement for replacing and / or servicing a valve closure susceptible to wear may be expedient.It is understood that the figures shown schematically represent only possible exemplary embodiments. According to the invention, the different approaches can likewise be combined with one another and with vacuum devices, in particular for substrate processing or vacuum valves of the prior art.References included in the specificationThis list of documents cited by the applicant has been produced in an automated manner and is only included for the better information of the reader. The list is not part of the German patent application or utility model application. The DPMA does not take any adhesion for any faults or omissions.Patent Literature citedU.S. Pat. No. 6,089,537

[0010] U.S. Pat. No. 6,416,037

[0010] U.S. Pat. No. 6,056,266

[0010] U.S. Pat. No. 6,629,682 B2

[0011] U.S. Pat. No. 6,629,682

[0012] DE 1 264 191 B1

[0013] DE 34 47 008 C2

[0013] U.S. Pat. No. 3,145,969

[0013] DE 77 31 993 U

[0013]

Claims

Vacuum valve (1) for regulating a volume or mass flow and / or for closing and opening a valve opening (2), having • a valve seat which has a first sealing surface (3) encircling the valve opening (2), • a valve closure (4) having a second sealing surface (6) corresponding to the first sealing surface (3) and a coupling arrangement (10), • a drive unit (9) and • a connecting element (20), which defines a connecting axis (V), having a first end and a second end, wherein the second end is opposite the first end along the connecting axis (V), and wherein the connecting element (20) is connected lithographically at the first end to the drive unit (9), and lithographically has a connecting section (21), which defines a connecting width (22), for insertion into the coupling arrangement (10) in the region of the second end, wherein the valve closure (4) can be connected to the connecting element (20) by means of the coupling arrangement (10) by means of a fastening element (30) and a coupling state can thereby be provided, and wherein the drive unit (9) is designed such that the valve closure (4) in the coupling state of • an open position (O) in which the valve closure (4) at least partially releases the valve opening (2), in • a closed position (G) in which there is a sealing contact between the first sealing surface (3) and the second sealing surface (6) and the valve opening (2) is thereby sealed in a gas-tight manner, and can be adjusted back, characterized in that the connecting portion (21) • has a fastening depression (23) extending along the connecting axis (V), • a recessed with respect to the connecting width (22), A countersunk recess (24) extending orthogonally to the connecting axis (V) and having a countersunk opening (25) open towards the fastening recess (23), and • having a clamping element (26) arranged in the countersunk recess (24) and mounted movably at least orthogonally to the connecting axis (V), wherein the clamping element (26) protrudes through the countersunk opening (25) into the fastening recess (23).Vacuum valve (1) according to claim 1, characterised in that the countersunk opening (25) and the clamping element (26) are designed in such a way that the clamping element (26) is partially present in the countersunk region (24) and partially protrudes with a maximum of a certain protrusion into the fastening depression (23) and thereby defines an inner clamping width (28) in the fastening depression (23).Vacuum valve (1) according to claim 1 or 2, characterised in that a restoring element (27) interacting with the clamping element (26) is arranged on the connecting portion (21), in particular in the depression, and brings about a restoring force on the clamping element (26) in the direction of the fastening depression (23).Vacuum valve (1) according to Claim 3, characterized in that the restoring element (27) is designed as an annular spring.Vacuum valve (1) according to one of the preceding claims, characterized in that the clamping element (26) is shaped in a spherical, cylindrical or pyramidal manner, in particular as a ball.Vacuum valve (1) according to one of the preceding claims, characterized in that the depression (24) and the clamping element (26) are designed in such a way that the depression (24), in particular the depression opening, limits the mobility of the clamping element (26) in a direction parallel to the connecting axis (V), in particular limits it in the direction of the second end, in particular forms a stop for the clamping element.Vacuum valve (1) according to one of the preceding claims, characterized in that the vacuum valve (1) has the fastening element (30) for fastening the valve closure (4) to the connecting element (20), wherein the fastening element (30) • defines a fastening axis (B) according to its extension, and • has a fastening portion (31) for interacting with the connecting portion (21) and a holding portion (32) for interacting with the coupling arrangement (10), wherein the fastening portion (31) is assigned to a first end and the holding portion (32) is assigned to a second end of the fastening element (30), wherein • the fastening portion (31) provides a first fastening width (39a) which is smaller than the inner clamping width (28) and provides a second fastening width (39b) which is larger than the inner clamping width (28), and • the first fixing width (39a) and the second fixing width (39b) are provided offset angularly in a common plane which is oriented orthogonally to the fixing axis (B).Vacuum valve (1) according to claim 7, characterised in that the fastening element (30) is arranged in such a way that • the fastening portion (31) at least partially overlaps the connecting portion (21), in particular lies axially in the connecting portion, and • the holding portion (32) contacts the coupling arrangement (10).Vacuum valve (1) according to claim 7 or 8, characterized in that • the fastening element (30) in the fastening section (31) has two opposite contact sides (33) and a distance of the contact sides (33) provides the second fastening width (39b), and • the fastening element (30) is arranged and radially oriented such that at least one of the contact sides (33) interacts with the clamping element (26) and the coupling state is provided.Vacuum valve (1) according to claim 9, characterised in that the at least one contact side (33) is shaped, in particular concave, in such a way that, when interacting with the clamping element (26), a force acting in the axial direction is generated, in particular parallel to the fastening axis (B) and / or connecting axis (V), as a result of which the valve closure (4) is held on the connecting element (20).Vacuum valve (1) according to claim 9 or 10, characterized in that the at least one contact side (33) has a protruding and curved contact surface (34), wherein • the contact surface (34) points away from the first end of the fastening element (30), • the contact surface (34) contacts the clamping element (26) and • thereby a force acting in the axial direction is generated.Vacuum valve (1) according to one of Claims 7 to 11, characterized in that • the fastening element (30) has a shoulder (36) in the region of the holding section (32), and • the shoulder (36) interacts with the coupling arrangement (10) in such a way that a force acting in the axial direction is hereby generated, in particular parallel to the fastening axis (B) and / or connection axis (V), as a result of which the valve closure (4) is held on the connection element (20).Vacuum valve (1) according to one of Claims 7 to 12, characterized in that • the fastening element (30) has a rotation limiting element (38) in the region of the holding section (32), and • the rotation limiting element (38) interacts with the coupling arrangement (10) in such a way that a radial angle for the radial orientation of the fastening element (30) providing the coupling state can be set as a result and a rotational movement of the fastening element (30) is correspondingly limited.Valve closure (4) for a vacuum valve (1) according to one of Claims 1 to 13, having • a second sealing surface (6) corresponding to a first sealing surface (3) of a valve seat of the vacuum valve surrounding the valve opening (2), and • a coupling arrangement for providing a coupling state by connecting the coupling arrangement (10) to a connecting element (20) of the vacuum valve (1) by means of a fastening element, characterized in that the coupling arrangement (10) has a recess (11) for receiving the connecting element (20), said recess defining a central coupling axis (K), having • a receiving region (14) having a coupling opening (15) for inserting and receiving the connecting element (20), and • a holding region (11) having a fastening opening (12), diametrically opposite the coupling opening (15), for inserting and receiving the fastening element (30), wherein the fastening opening (12) has, on its side facing away from the recess, a recess (17) which is accessible from the outside for cooperation with a rotation limiting element (38) of the fastening element (30), and the recess (17) provides a rotation limiting for the fastening element (30).Valve closure (4) according to claim 14, characterised in that the recess (17) is formed as a depression with respect to the surface of an upper side of the coupling arrangement (10), in particular wherein the upper side is formed orthogonally to the second sealing surface and diametrically opposite to the coupling opening.Valve closure (4) according to Claim 14 or 15, characterized in that the cutout (17) extends with respect to the coupling axis (K) over a radial angular range (18) of between 75° and 105°, in particular of 90°.Valve closure (4) according to one of Claims 14 to 16, characterized in that • the recess has a first shoulder (16) assigned to the receiving region (14), wherein the first shoulder (16) is shaped to limit an insertion depth for the connecting element (20), in particular as a stop, and / or • the recess has a second shoulder (13) assigned to the holding region (11), wherein the second shoulder (13) is shaped to limit an insertion depth for the fastening element (30) and to interact with the fastening element (30), in particular as a stop, in particular wherein the first shoulder and / or the second shoulder separates the receiving region from the holding region.Fastening element (30) for a vacuum valve (1) according to one of claims 1 to 13 for fastening a valve closure (4) to a connecting element (20) of the vacuum valve (1), wherein the fastening element (30) • defines a fastening axis (B) according to its extension and • has a fastening portion (31) for cooperation with a connecting portion (21) of the connecting element (20) and a holding portion (32) for cooperation with a coupling arrangement (10) of the valve closure (4), wherein the fastening portion (31) is associated with a first end and the holding portion (32) is associated with a second end of the fastening element (30), and wherein • the fastening portion (31) provides a first fastening width (39a) and a second fastening width (39b), wherein the first fastening width (39a) is smaller than the second fastening width (39b), and • the first fixing width (39a) and the second fixing width (39b) are provided offset angularly in a common plane which is oriented orthogonally to the fixing axis (B).Fastening element (30) according to Claim 18, characterized in that the fastening element (30) is designed as a bolt.Fastening element (30) according to Claim 18 or 19, characterized in that the fastening element (30) has, in the region of the fastening section (31), two opposite insertion sides (35) which point in opposite directions orthogonally with respect to the fastening axis (B), and a spacing of the insertion sides (35) provides the first fastening width (39a).Fastening element (30) according to one of Claims 18 to 20, characterized in that the fastening element (30) has, in the region of the fastening section (31), two opposite contact sides (33) which point in opposite directions orthogonally with respect to the fastening axis (B), and a spacing of the contact sides (33) provides the second fastening width (39b).Fastening element (30) according to Claim 20 or 21, characterized in that the alignment of at least one of the contact sides (33) and the alignment of at least one of the insert sides (35) enclose an angle from an angle range of between 75° and 105°, in particular an angle of 90°.Fastening element (30) according to one of Claims 18 to 22, characterized in that the contact sides (33) each have concavely curved surfaces for cooperation with a clamping element (26) of the connecting element (20).Fastening element (30) according to one of Claims 18 to 23, characterized in that the fastening element (30) has a shoulder (36) in the region of the retaining section (32), the shoulder (36) being designed for cooperation with a second shoulder (16) assigned to a retaining region (11) of the valve closure (4).Fastening element (30) according to one of Claims 18 to 24, characterized in that the fastening element (30) has a rotation limiting element (38) in the region of the holding section (32), the rotation limiting element (38) being designed to correspond to and to interact with a cutout (17) in the valve closure.Fastening element (30) according to Claim 25, characterized in that the rotation limiting element (38) is formed in a radially oriented manner.Fastening element (30) according to Claim 25 or 26, characterized in that the rotation limiting element (38) is designed as a projection which projects radially from the fastening element (30), in particular as a pin or bolt.

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