Device for handling a test contact

Abstract

Device (10) for handling a test contact (100) with a contact head (12) provided at its contact end (16) with a test contact receptacle (14), wherein the test contact receptacle (14) has a positioning device (18) with at least two, preferably three, positioning surfaces (20, 22, 24) for positioning contact against a test contact (100) and for positioning the test contact (100) relative to the contact end (16) of the contact head (12), characterized in that at least one positioning surface (20, 22, 24) of the positioning device (18) is designed as a base contact surface (20) and at least one further positioning surface of the positioning device (18) is designed as an edge contact surface (22), wherein a stop element (28) projecting relative to the base contact surface (20) comprises the stop edge (26) and the stop edge (26) forms the edge contact surface (22), wherein the stop element (28) has at least two legs (30, 32).

Description

[0001] The invention relates to a device for handling a test contact with a contact head provided at its contact end with a test contact receptacle, wherein the test contact receptacle has a positioning device with at least two positioning surfaces for positioning the test contact against the test contact and for positioning the test contact relative to the contact end of the contact head, wherein at least one positioning surface of the positioning device is designed as an edge contact surface and at least one further positioning surface of the positioning device is designed as a base contact surface. The invention further comprises a system with at least one test contact and an embodiment of the device.

[0002] Test contacts are known to be used for the fabrication of test contact assemblies with a large number of test contacts on a common test platform. The test contacts are arranged in a matrix corresponding to the chips arranged in a wafer array, so that defined contacting of the individual chips at the wafer level is possible via the individual test contacts.

[0003] To manufacture a test contact arrangement, the individual test contacts are arranged on a contact carrier designed as a test board according to the desired matrix arrangement of their contact arms or contact tips and soldered to contact surfaces formed on the test board. Due to the high density of the test contacts on each test board and the resulting small distance between them, particularly high demands are placed on the electrically reliable and positionally accurate alignment and contacting of the test contacts on the test board. Precise alignment and contacting of the test contacts on the test board already requires high accuracy in the mounting of the test contacts on the contact head of a device for handling the test contact. Devices for handling a test contact are known in various embodiments.For example, devices for manufacturing a test contact arrangement are known in which the test contact receptacle is pressurized to the test contact for holding and handling. To align the test contact relative to the contact head, it is known, for example, from DE 10 2008 051 853 A1, to bring an upper edge of the test contact against a stop of the contact head or the test contact receptacle. However, with known devices for handling test contacts, a different device or test contact receptacle tailored to the respective test contact is required for each design of a test contact. In other words, it is necessary to redesign and replace the test contact receptacle for each geometrically different test contact.

[0004] Based on the foregoing, one object of the present invention is to propose a device that overcomes the disadvantages of the prior art that arise in the handling of test contacts. In particular, it is an object to propose a device for the defined and reliable handling and handling of test contacts that is universally applicable, so that a large number of different test contacts can be accommodated.

[0005] To solve the problem, a device with the features of independent claim 1 is proposed. Furthermore, a system with such a device is proposed.

[0006] Advantageous embodiments of the invention are the subject of the dependent claims. The scope of the invention also includes all combinations of at least two features disclosed in the description, the claims, and / or the figures. It is understood that the descriptions of the device relate equivalently to the system according to the invention, without being specifically mentioned for the latter. In particular, it is understood that common linguistic transformations and / or the meaningful substitution of respective terms within the framework of usual linguistic practice, especially the use of synonyms supported by generally accepted linguistic literature, are included in the present disclosure without being explicitly mentioned in their respective formulations.

[0007] In a first aspect, the invention relates to a device for handling a test contact with a contact head provided at its contact end with a test contact receptacle, wherein the test contact receptacle has a positioning device with at least two, preferably three, positioning surfaces for positioning the test contact against the test contact and for positioning the test contact relative to the contact end of the contact head. The device is characterized in that at least one positioning surface of the positioning device is designed as an edge contact surface and at least one further positioning surface of the positioning device is designed as a base contact surface. The positioning device has at least one stop edge which forms the edge contact surface.By forming a physical stop edge, the movement of the test specimen is advantageously reliably blocked in at least one direction when it comes into contact with the edge contact surface formed by the stop edge, and a defined contact surface is created. Preferably, the positioning device comprises two stop edges to prevent wedging or tilting and thus incorrect positioning. Preferably, the stop edge, and therefore also the edge contact surface, is arranged below the top surface of the base contact surface, so that the device is universally applicable, since the height of the test contact to be accommodated is not limited by the positioning device.

[0008] A stop element projecting from the base mounting surface comprises the stop edge. In other words, the stop edge is formed on a stop element projecting from the base mounting surface. Within the scope of the invention, the term "projecting" means that the stop element cantilevers parallel to and / or in the direction of the normal to the base mounting surface.

[0009] To distance the stop edge and the edge contact surface from the base contact surface, the stop body has at least two legs. Preferably, the stop body has two legs. In other words, the stop body is L-shaped. It is conceivable that a first leg projects laterally from the base contact surface, and a second leg is oriented perpendicular to the base contact surface. The edge contact surface or the stop edge can be formed on the second leg, which is oriented perpendicular to the base contact surface. The legs are preferably directly connected to each other. More preferably, the first leg abuts directly against the base contact surface.

[0010] The device thus advantageously enables precise and directional positioning of the test contact relative to the contact head by positioning the test contact with its base against a base contact surface and with another edge against an edge contact surface. Within the scope of the invention, the edge contact surface is a surface distinct from the base contact surface, preferably not coinciding with it and more preferably being spaced apart from it. Even more preferably, the edge contact surface and the base contact surface are arranged at a predetermined angle to each other. For example, the edge contact surface can be oriented perpendicularly, i.e., at an angle of 90°, to the base contact surface. The design of at least three positioning surfaces advantageously allows for particularly precise reception of the test contact in the test contact receptacle.Furthermore, the base contact surface and edge contact surfaces can be arranged relative to each other such that the base contact surface is not closed off at its upper side by an edge contact surface, but rather that the edge contact surfaces are arranged laterally to the base contact surface. Within the scope of the invention, the terms "top," "bottom," "above," "below," "top," and "bottom" refer to the device for handling a test contact in its operating position. Preferably, the aforementioned terms refer to the spatial extent in the vertical direction when the device is in its operating position. Within the scope of the invention, the term "surface" preferably refers to a flat surface. The base contact surface is preferably rectangular.

[0011] To ensure correct contact with a test probe, the probe's mounting base can be brought into direct contact with the base's contact surface. The base's contact surface is designed such that the test probe makes full contact with it. The base's contact surface is preferably complementary to the mounting base. The mounting base is preferably in the form of a rectangular plate. The edge contact surface secures the test probe relative to the base's contact surface, allowing the probe to slide along it until it contacts the edge contact surface. Once the test probe is in contact with both the base and edge contact surfaces, movement of the probe is preferably prevented in at least two directions.

[0012] Within the scope of the invention, it was recognized that while the positioning device is essentially complementary to the test contact, the positioning surfaces can be arranged relative to each other in such a way that a large number of different test contacts can be accommodated by the device according to the invention. In particular, the positioning surfaces can be arranged relative to each other in such a way that the overall width, overall height and / or material thickness of the test contact to be accommodated is not restricted or limited by the positioning device.

[0013] The phrase “at least one” is understood here to mean that the device according to the invention may comprise one or more of the components or surfaces in question.

[0014] According to a preferred embodiment, the positioning device has at least one stop edge which forms the edge contact surface oriented perpendicular to the base contact surface. The stop edge is preferably designed such that the edge contact surface is oriented perpendicular to the base contact surface. This allows a test contact to be brought into contact with the base of the base contact surface and with one of its side edges against the stop edge.

[0015] The stop edge can have an edge thickness equal to or greater than the material thickness of the test contact. By designing the stop edge in this way, an edge of the test contact that is to be brought into contact with the stop edge can be supported across the entire material thickness of the test contact, thus providing extremely stable support.

[0016] According to a preferred embodiment, the positioning device has at least one stop element on both sides of the base contact surface, thereby enabling precise and stable positioning of the test contact on the positioning device. The stop elements can be arranged on both sides of the base contact surface such that the positioning device has a substantially U-shaped cross-section, at least in sections.

[0017] To increase the contact area of ​​the test contact on the positioning device, it is conceivable that the positioning device includes a contact body that projects laterally from the base contact surface. Preferably, an edge of the contact body forms an additional contact surface lying in the same plane as the base contact surface. This advantageously increases the contact area of ​​the test contact, thereby stabilizing the test contact on the positioning device. Preferably, the positioning device has two contact bodies that project laterally from the base contact surface. More preferably, the two contact bodies are arranged on both sides of the base contact surface.

[0018] In a preferred embodiment, it is conceivable that the base contact surface has a base contact surface height, the stop body has a stop body height, and the support body has a support body height, wherein the base contact surface height is greater than the stop body height and / or greater than the sum of the stop body height and the support body height. In a more intuitive way, the following preferably applies: hBA>hAK and / or hBA>hAK+hANL with h BA Base height of the installation area, h AK Stop body height h ANL Plant body height where both conditions are particularly preferred.

[0019] In a further embodiment of the invention, it is conceivable that the positioning device has a total width and the base contact surface a base contact area width, wherein the base contact area width is less than the total width. Within the scope of the invention, it was recognized that, in order to enable reliable reception of the test contact, it is necessary to coordinate the base contact area width and the total width of the positioning device. According to the invention, the test contact makes contact with the base contact surface over its entire area. In particular, to make the device universally applicable with regard to different test contacts, further elements of the positioning device, such as stop bodies or contact elements, can be formed on both sides of the base contact surface, which increase the total width of the positioning device.In particular, if stop bodies are provided on both sides of the base contact surface, it is easy to position the test contact relative to the test contact receptacle by bringing the base of the test contact against the base contact surface and at least partially sliding it between the stop bodies until an edge of the test contact comes into contact with the edge contact surface of the stop bodies. Preferably, the overall width is formed by the width of the stop bodies and / or the contact bodies and the width of the base contact surface. It is conceivable that the stop bodies and the contact bodies have the same width. The terms "base contact surface width" and "overall width" each refer to the spatial extent parallel to the lower edge of the test contact receptacle or the contact head. Preferably, the aforementioned terms refer to the spatial extent in the horizontal direction when the device is in its operating position.

[0020] In one embodiment of the invention, it is conceivable that the positioning device is formed in one piece to save connection points and / or assembly steps. Preferably, the positioning device is formed in one piece with the test contact receptacle and / or the contact head. In other words, the contact head, test contact receptacle, and positioning device can preferably be formed in one piece. However, it is also conceivable that the contact head, test contact receptacle, and positioning device are formed in multiple parts, which are further preferably detachably connected to allow for easy replacement of the positioning device.

[0021] According to a preferred embodiment, the contact head has at least one transmission channel for transmitting heat energy and / or for transmitting negative pressure, wherein the contact head is provided with the test contact receptacle at its contacting end in the region of a channel opening of the transmission channel. If the contact head has a transmission channel for transmitting heat energy, heat energy can advantageously be discreetly introduced into a desired absorption area of ​​the test contact by appropriately defining the orientation of the test contact relative to the channel opening, in order to enable a reliable and distortion-free arrangement of the test contact on a contact carrier.Provided the contact head has at least one transmission channel for transmitting negative pressure, the test contact can be held in place by the contact head using the positioning device in a simple and reliable manner by means of negative pressure after alignment with the contact head. Preferably, the contact head has at least one transmission channel for transmitting heat energy and for transmitting negative pressure. Within the scope of the invention, it was discovered that a single transmission channel can advantageously be used for both transmitting heat energy and transmitting negative pressure. The channel opening is preferably formed by an outlet funnel of the transmission channel and has an opening cross-section that is dimensioned according to the absorption cross-section of the absorption area of ​​the test contact.By appropriately designing the channel opening, it is possible with relatively little technical effort to specify a defined surface area of ​​the test contact for the absorption area of ​​the test contact.

[0022] According to an advantageous embodiment, the base contact surface of the positioning device at least partially encloses an opening cross-section of the channel mouth. This ensures that the energy input required for contacting can be transferred to the base of the test contact and / or that the base of the test contact is reliably fixed to the test contact receptacle during the fabrication of a test contact assembly. Preferably, the base contact surface of the positioning device completely encloses the opening cross-section of the channel mouth, thereby arranging the absorption area of ​​the test contact within the outlet funnel of the channel mouth. This allows a relatively large partial surface area of ​​the test contact to be easily exposed to thermal energy, and / or the complete coverage of the opening cross-section by the test contact permits the test contact to be held in place by applying a vacuum.

[0023] In a second aspect, the invention relates to a manufacturing system for producing a test contact arrangement for testing and / or manufacturing semiconductor components, comprising a device according to any embodiment of the invention and at least one test contact designed as a cantilever arm. The test contact has a mounting base that can be brought into contact with the base mounting surface and a contact arm connected to the mounting base. Preferably, a contact tip is arranged at the free end of the contact arm. In addition to manufacturing a test contact arrangement, the manufacturing system can also be used to repair a test contact arrangement. It is known to those skilled in the art that, for the purpose of repairing a test contact arrangement, a test contact can also be picked up and handled in the required orientation.

[0024] According to an advantageous embodiment of the manufacturing system, the test contact and the device for handling the test contact interact such that the mounting base of the test contact covers the channel opening of the transmission channel when the test contact is in contact with the base mounting surface. Preferably, the test contact completely seals the channel opening when it is in contact with the base mounting surface of the positioning device. This allows the test contact to be easily held in place on the positioning device by applying a vacuum through the transmission channel.

[0025] According to a preferred embodiment of the manufacturing system, the test contact has a projection arranged below the contact arm, wherein the projection can be brought into contact with the edge contact surface and / or the projection can be brought into contact with the contact body. The projection of the contact arm can be brought into contact with the stop edge of the contact body, on which the edge contact surface is formed. The test contact can be easily aligned with the positioning device by means of the stop at the stop edge. The contact area of ​​the test contact on the positioning device can be increased if the projection of the test contact is brought into contact with the contact body. Preferably, a projection is arranged on both sides of the base of the test contact. Even more preferably, the projection can be brought into contact with both the edge contact surface and the contact body.Most preferably, the test contact has two projections arranged on either side of its base, and the positioning device also has two stop bodies and two contact bodies, each arranged on either side of the base contact surface of the positioning device, wherein each projection of the test contact can be brought into contact with one of the contact bodies and one of the stop bodies of the positioning device to enable particularly precise alignment of the test contact. Because the test contact is essentially cross-shaped with a cantilever extending from its upper edge, and because the upper edge does not need to be brought into contact with a stop (since the projections of the test contact can be brought into contact with a stop edge of the positioning device), the positioning device is flexible and universally applicable, as the height of the test contact to be positioned is not limited.

[0026] It is understood that the aforementioned and subsequently explained embodiments and exemplary embodiments can be implemented not only individually, but also in any combination with one another, without departing from the scope of the present invention. It is also understood that the aforementioned and subsequently explained embodiments and exemplary embodiments relate in an equivalent or at least similar manner to the manufacturing system or device according to the invention, without the need for their separate mention.

[0027] Embodiments of the invention are shown schematically in the drawings and are explained below by way of example.

[0028] They show: Fig. 1 A schematic embodiment of a device according to the invention with a test contact mounted in isometric view; Fig. 2 the device according to the invention Fig. 1 without test contact in detailed view from the front; Fig. 3 the device according to the invention Fig. 1 in detailed view from the front; Fig. 4 the device according to the invention Fig. 1 in isometric detail view; and Fig. 5 the device according to the invention Fig. 1 in side view detail.

[0029] The Fig. Figure 1 shows a device 10 according to the invention for handling a test contact 100, whereby a manufacturing system 50 is formed. For receiving the test contact 100, the test contact receptacle 14 with the positioning device 18 is arranged at the contacting end 16 of the contact head 12. To hold the test contact 100 on the positioning device 18, the test contact 100 can be subjected to a vacuum via the transmission channel 34.

[0030] The Fig. Figure 2 shows a device 10 according to the invention for handling a test contact 100. The test contact receptacle 14 is arranged at the contact end 16 of the contact head 12 to receive the test contact 100. The test contact receptacle 14 comprises a positioning device 18, which in turn has a base contact surface 20, an edge contact surface 22, and an additional contact surface 24. A test contact 100 can be brought into contact with the positioning device 18 such that the test contact 100 is brought into contact over its entire surface with the base contact surface 20 and also with the additional contact surfaces 24 on both sides of the base contact surface 20.To prevent displacement of the test contact 100 along the vertical axis (here synonymous with the longitudinal extent of the transmission channel 34) in the embodiment shown here, the positioning device 18 has, in addition to the support bodies 36 projecting on both sides, two stop bodies 28 arranged on either side of the base contact surface 20. Each stop body forms an edge contact surface 22 against which an edge of the test contact 100 can be brought into contact. According to the illustrated embodiment, the edge contact surface 22 is oriented perpendicular to the base contact surface 20 and points downwards in the illustrated operating position. The stop body 28 forming the edge contact surface 22 is essentially L-shaped and has legs 30 and 32, with the first leg 30 projecting laterally from the base contact surface 20 and the second leg 32 extending out of the plane of the base contact surface 20.Thus, a test contact 100 can be easily positioned on the positioning device 18 by placing it on the base mounting surface 20 and sliding it until it reaches the stop body 28. To hold the test contact 100 on the positioning device 18, it can be pressurized with a vacuum via the transmission channel 34. As can be seen from a summary of the... Fig. 2 and Fig. As can be seen in Figure 3, when correctly positioned on the positioning device 18, the test contact 100 completely seals the channel opening 36 of the transmission channel 34, since the base mounting surface 20 completely encloses the opening cross-section 38 of the channel opening 36. Thus, the test contact 100 can be easily held on the positioning device 18 by means of a vacuum. Furthermore, it is evident from Fig. 2. It is evident that the height h BA The base area 20 is greater than the sum of the height h AKof the stop body 28 and the height h ANL of the support body 40. Furthermore, it can be seen that both stop body 28 and support body 40 are arranged below the top surface 42 of the base support surface 20, with support body 40 also being arranged below stop body 28. The total width b ges The positioning device 18, in the present embodiment, results from the width of the support body 40 and the width b. BA the base mounting surface 20, wherein the mounting body 40 and the stop body 28 have the same width in the present embodiment.

[0031] The Fig. 3, Fig. 4 to Fig. Figure 5 shows a device 10 according to the invention for handling a test contact 100, wherein a manufacturing system 50 is formed. The test contact 100 has a mounting base 102 and two projections 106 arranged on either side of the mounting base 102. A projecting contact arm 104 is arranged in the upper region of the mounting base 102, the upper edge of the contact arm 104 extending laterally the upper edge of the mounting base 102, which forms the upper edge 112 of the test contact. The mounting base 102 is formed in a substantially cruciform shape with the projections 106 of the test contact 100, with a contact arm 104 projecting from the upper edge 112 of the test contact. A contact tip 108, which can be used for contacting, is arranged on the contact arm 104. From a combination with Fig. 2 shows that the test contact 100 with the mounting base 102 on the base mounting surface 20 of the positioning device 18 in the Fig. 3, Fig. 4 to Fig. 5 is brought into contact with the device. Furthermore, the projections 106 on the additional contact surfaces 24 of the device body 40 are brought into contact with the device. The upper edge 108 of the projections 106 is brought into contact with the stop edge 26 of the stop body 28. For positioning the test contact 100 relative to the contact head 12 by means of the positioning device 18, it is not necessary to bring the upper edge 112 of the test contact against a stop, since the upper edges 110 of the projections 106 of the test contact 100 can be brought into contact with a stop edge 26 of the stop body 28. Therefore, the device 10 and in particular the positioning device 18 are flexible and universally applicable, since in particular the height of the test contact 100 to be positioned is not limited. In this respect, it is particularly important to note that Fig. 4 and Fig. 5, it is evident that the stop edge 26 has an edge thickness that is greater than the material thickness of the test contact 100 in order to ensure reliable support of the test contact 100 on the stop body 28. Furthermore, it is evident from a summary of the Fig. 3, Fig. 4 to Fig. 5 with Fig. 2 it is evident that the channel opening 36 of the transmission channel 34, which is inserted into the contact head 12, is closed by the test contact 100 when correctly positioned on the positioning device 18 in such a way that the test contact 100 can be held on the positioning device 18 when subjected to negative pressure via the transmission channel 34 and can subsequently be moved to the point intended for contacting the test contact 100.

Claims

[1] Device (10) for handling a test contact (100) with a contact head (12) provided at its contact end (16) with a test contact receptacle (14), wherein the test contact receptacle (14) has a positioning device (18) with at least two, preferably three, positioning surfaces (20, 22, 24) for positioning contact on a test contact (100) and for positioning the test contact (100) relative to the contact end (16) of the contact head (12), characterized by , that at least one positioning surface (20, 22, 24) of the positioning device (18) is designed as a base contact surface (20) and at least one further positioning surface of the positioning device (18) is designed as an edge contact surface (22), wherein a stop body (28) projecting from the base contact surface (20) comprises the stop edge (26) and the stop edge (26) forms the edge contact surface (22), wherein the stop body (28) has at least two legs (30, 32). [2] Device for handling a test contact according to claim 1, characterized by , that the edge contact surface (22) t is oriented perpendicular to the base contact surface (20). [3] Device for handling a test contact according to claim 2, characterized by , that the stop edge (26) has an edge thickness that is equal to or greater than the material thickness of the test contact (100). [4] Device for handling a test contact according to one of claims 1 to 3, characterized by that the positioning device (18) has at least one stop body (28) on both sides of the base mounting surface (20). [5] Device for handling a test contact according to one of claims 1 to 4, characterized by that the positioning device (18) comprises a system body (40) that cantilevers laterally relative to the base mounting surface (20). [6] Device for handling a test contact according to claim 5, characterized by, that the base area (20) has a base area height (h BA ), the stop body (28) a stop body height (h AK ) and the plant body (40) a plant body height (h ANL ) has, where the base installation area height (h BA ) greater than the stop body height (h AK ) is and / or greater than the sum of the stop body height (h AK ) and the height of the plant body (h ANL ) is. [7] Device for handling a test contact according to any one of claims 1 to 6, characterized by , that the positioning device (18) has a total width (b ges ) and the basic planting area (20) a basic planting area width (b BA ) has, where the basic planting area width (b BA ) less than the total width (b ges ) is. [8] Device for handling a test contact according to any one of claims 1 to 7, characterized by , that the positioning device (18) is formed in one piece. [9] Device for handling a test contact according to any one of claims 1 to 8, characterized by , that the contact head (12) has at least one transmission channel (34) for the transmission of heat energy and / or for the transmission of negative pressure, wherein the contact head (12) is provided with the test contact receptacle (14) at its contacting end (16) in the area of ​​a channel opening (36) of the transmission channel (34). [10] Device for handling a test contact according to claim 9, characterized by , that the base area (20) of the positioning device (14) at least partially encloses an opening cross-section (38) of the canal mouth (36). [11] Manufacturing system (50) for producing a test contact arrangement for testing semiconductor components with a device (10) according to one of the preceding claims, and with at least one test contact (100) designed in the manner of a cantilever arm, wherein the test contact (100) has a mounting base (102) that can be placed on the base mounting surface (20) and a contact arm (104) connected to the mounting base (102). [12] Manufacturing system according to claim 11, characterized by , that the mounting base (102) of the test contact (100) covers the channel opening (36) when installed on the base mounting surface (20). [13] Manufacturing system according to claim 11 or 12, characterized by , that the test contact (100) has a projection (106) arranged below the contact arm (104), wherein the projection (106) can be brought into contact with the edge contact surface (22) and / or the projection (106) can be brought into contact with the contact body (36).

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