Sensor device and method for controlling the sensor device

Abstract

A sensor device (100) is described, comprising at least one micromechanical sensor (110) configured for generating a sensor signal (200) and an evaluation unit (120) with a signal processing path (121) associated with the micromechanical sensor (110). The signal processing path (121) comprises a first signal processing section (121.1) configured for processing the digital sensor signal (200) at a first data rate, a decimator (150) downstream of the first signal processing section (121.1) configured for reducing the first data rate of the digital sensor signal (200) to a second data rate lower than the first data rate, and a second signal processing section (121.2) downstream of the decimator (150) configured for processing the digital sensor signal (200) at the second data rate.The evaluation device (120) is designed to effect a runtime adjustment of the sensor signal (200) by delaying the output of the sensor signal (200) from the decimator (150).

Description

The invention relates to a sensor device with a propagation time compensation of the sensor signal. Furthermore, the invention also relates to a method for controlling the sensor device.Micromechanical or microelectromechanical sensors (MEMS sensors) are used in various applications, including inertial sensors. Different signal transit times in the individual channels of the sensor, such as an inertial sensor, are produced by different transit times in a micromechanical sensor and / or in the analog part of the associated evaluation circuit. Compensation for propagation times was not necessary in previous applications. However, in evaluation devices which are also to be installed in control units for critical applications, such as autonomous driving, it is necessary for the differences in the transit times of individual channels to be able to be compensated for via parameter settings during the configuration of the sensor, such that the transit times are the same in all sensor channels.An obvious solution for such a delay adaptation in the individual channels could be the use of RAM memories organized as FIFO (first-in-first-out) in the digital part. The digital signals of individual channels can thus basically be individually delayed in such a way that the propagation times in all channels are the same. A disadvantage of such a solution is the high chip area consumption by the RAM memories.It is the object of the invention to provide a possibility for individually adapting the transit time of a sensor signal assigned to a sensor. This object is achieved by an object having the features of independent claim 1. Furthermore, the object is achieved by a method having the features of independent claim 8. Further advantageous embodiments are given in the dependent claims.According to one aspect of the invention, a sensor device comprising at least one micromechanical sensor is designed to generate a sensor signal, and an evaluation device having a signal processing path assigned to the micromechanical sensor is provided. In this case, the signal processing path comprises a first signal processing part configured to process the digital sensor signal at a first data rate, a decimator connected downstream of the first signal processing part configured to reduce the first data rate of the digital sensor signal to a second data rate that is lower than the first data rate, and a second signal processing part connected downstream of the decimator configured to process the digital sensor signal at the second data rate. The evaluation device is designed to bring about a delay time adaptation of the sensor signal by delaying the output of the sensor signal from the decimator. By delaying the sensor signal with the aid of the decimator, it is possible to dispense with additional hardware solutions for adjusting the propagation time of the sensor signal, such as, for example, a RAM memory organized as a FIFO (deadline-in-first-out), in the digital part of the signal processing path. This makes it possible to avoid a high chip area consumption of the evaluation circuit, which typically entails the additional RAM memories.In one embodiment, it is provided that the evaluation device further comprises a clock signal generation device configured to generate a first clock signal that determines the working times of the first signal processing part, a second clock signal that determines the working times of the second signal processing part, and a third clock signal that is temporally delayed with respect to the second clock signal. In this case, the decimator is designed to output data of the sensor signal in each case at times which are predefined by the third clock signal. The delay of the sensor signal via the control of the decimator represents an embodiment which is particularly simple and cost-effective to implement.In a further embodiment, it is provided that the clock signal generating device comprises a signal delaying device which is designed to generate the third clock signal by delaying the second clock signal by one or more clock periods of the first clock signal. Generating the third clock signal by delaying an already present second clock signal represents a particularly simple embodiment to implement.In a further embodiment, it is provided that the sensor device comprises a plurality of sensor channels each having a signal processing path for simultaneously processing a plurality of sensor signals of one or more sensors. In this case, the evaluation device is designed to compensate a propagation time difference of the sensor signals by individually delaying the output of at least one sensor signal from a decimator arranged in the signal processing path of the respective sensor signal. This makes it possible to adapt the propagation times in different signal channels to one another relatively easily.In a further embodiment, it is provided that the signal delay device is designed to adapt the delay of the second clock signal in a signal processing path as a function of a parameter individually assigned to the respective signal processing path. This makes it possible to adapt the signal transit time of a sensor signal flexibly, i.e. even during ongoing operation.In a further specific embodiment, it is provided that the micromechanical sensor is designed in the form of an inertial sensor having multiple separately processed sensor channels. Since interstitial sensors frequently have a plurality of parallel sensor channels, the internal propagation time compensation proposed here can be realized particularly efficiently. This is the case in particular when using a common signal delay device for all signal channels.In a further specific embodiment, it is provided that the micromechanical sensor is designed to generate an analog sensor signal, and the signal processing path also including an analog-to-digital converter for converting the analog sensor signal into a digital sensor signal at the first data rate.According to a further aspect, a method for controlling a sensor device is provided, wherein the sensor device comprises at least one micromechanical sensor for generating a sensor signal, an analog-to-digital converter for digitizing the sensor signal, and an evaluation device having a signal processing path assigned to the sensor. The method comprises processing the digital sensor signal with the aid of a first signal processing part of the signal processing path operating at a first data rate, reducing the first data rate of the digital sensor signal to a second data rate lower than the first data rate with the aid of a decimator, and processing the digital sensor signal with the aid of a second signal processing part of the signal processing path operating at the second data rate. In this case, the output of the sensor signal from the decimator is delayed by a time period individually assigned to the sensor signal in order to bring about a delay time adaptation of the sensor signal. The advantages already described in connection with the device apply to the method.In a further embodiment, it is provided that a first clock signal is generated which determines the operating times of the first signal processing part. Further, a second clock signal is generated which determines the operation timings of the second signal processing part. Finally, a third clock signal is also generated by delaying the second clock signal. In this case, the decimator outputs data of the sensor signal in each case at times which are determined by the third clock signal. The advantages already described in connection with the device apply to the method.In a further embodiment, it is provided that the third clock signal is generated by delaying the second clock signal by one or more clock periods of the first clock signal. The advantages already described in connection with the device apply to the method.In a further embodiment, it is provided that a plurality of sensor signals of one or more sensors are simultaneously processed in a plurality of sensor channels each having a signal processing path. In this case, a delay time difference of the sensor signals is compensated for by individually delaying the output of at least one sensor signal from a decimator arranged in the signal processing path of the respective sensor signal. The advantages already described in connection with the device apply to the method.Finally, a further embodiment provides that the delay of the second clock signal in a signal processing path is adapted depending on a parameter individually assigned to the respective signal processing path. The advantages already described in connection with the device apply to the method.The invention is described in more detail below with reference to figures. The following are shown: FIG. 1 is a block diagram schematically showing the structure of a conventional sensor device having a sensor channel, FIG. 2 schematically shows a time diagram with the signal profile in the signal processing path of the sensor device from FIG. 1, FIG. 3 is a schematic block diagram showing the structure of an improved sensor device having a sensor channel, FIG. 4 schematically shows a time diagram with the signal profile in the signal processing path of the sensor device from FIG. 3 with a delay of one clock period, FIG. 5 schematically shows a time diagram with the signal profile in the signal processing path of the sensor device from FIG. 3 with a delay of three clock periods, FIG. 6 is a schematic simplified block diagram illustrating the structure of an improved sensor device having a sensor channel, FIG. 7 is a schematic simplified block diagram illustrating the structure of an improved sensor device having one sensor and three sensor channels assigned to this sensor, FIG. 8 schematically shows a simplified block diagram for illustrating the structure of an improved sensor device having three sensors and three sensor channels individually assigned to the sensors and each having its own clock signal generating device, FIG. 9 is a schematic simplified block diagram illustrating the structure of an improved sensor device having three sensors and three sensor channels individually assigned to the sensors and having a common clock signal generating device, FIG. 10 is a diagram illustrating a signal delay device assigned to three sensor channels, FIG. 11 is a schematic time diagram showing the signal characteristic of the clock signals in a sensor device having three signal channels, the delayed clock signals of the signal channels each having an individual delay; and FIG. 12 schematically shows a flow diagram of the improved method for adjusting the propagation time of sensor signals in a sensor device.The solution presented here uses a modification of the control of the decimation filters present in the signal path for the sampling rate conversion for the individual delay of the signals. The additional area requirement of the proposed solution is very small compared to the memory-based solution by means of RAM memories.FIG. 1 schematically shows the structure of a conventional sensor device 100 for a channel. This comprises a MEMS sensor 110 for generating a sensor signal 200 and an evaluation device 120 assigned to the sensor and having a signal processing path 121 for processing the sensor signal 200. The entire arrangement shown here comprises a mechanical part 111, an analog-operating electrical part 122, and a digital-operating electrical part 123. The MEMS sensor 110 typically comprises the mechanical part 111 mechanically interacting with the environment and an electrical part 112 here separated therefrom by means of a dashed line for converting the mechanical movement into an electrical sensor signal 200.1, which is then supplied to an analog signal processing device 130. The analog signal processing device 130, which has an analog circuit part 133 and a digital circuit part 134, typically comprises various electrical circuits for processing the analog sensor signal 200.1, such as CU converters, monitors and an analog-to-digital converter. In this case, the analog sensor signal 200.1 is sampled at a predefined sampling rate and a corresponding digital sensor signal 200.2 is provided in the form of data words having one or more bits. The sampling rate is determined by a first control or clock signal en 1 in the form of an equidistant sequence of pulses (enable signals) which determine the working times of the fast signal processing. The digital sensor signal 200.2 can then be processed with the aid of a fast signal processing device 140 optionally present in the signal processing path 121, which can comprise, for example, demodulation, monitors and / or further signal processing. The digital sensor signal 200.3 provided by the fast signal processing device 140 is then present at the input of the decimator 150. As shown in FIG. 1, the first clock signal en1 determines both the operating times of the fast signal processing device 140 and the times of the input and processing of the data words of the digital sensor signal 200.3 provided to the decimator 150. All processing steps necessary for the conversion of the data rate of the sensor signal are carried out in the decimator 150. These include a reduction in the sampling rate from a first data rate to a second data rate that is lower than the first data rate, and the filtering necessary to comply with the Nyquist-Shannon sampling theory. Subsequently, the digital sensor signal 200.4, now having a lower data rate, is provided at the output of the decimator 150. The data of the digital sensor signal 200.4 are output in each case at times which are determined by the pulse sequence of the second clock signal en2. In contrast to other components of the signal processing paths 121, which each receive a clock signal en1or en2, the decimator 150 for this purpose comprises two separate control inputs 153.1 and 153.2, via which the first and the second clock signal en1and en2each receives from the clock signal generating device 180.The digital sensor signal 200.4 is then processed at the low second data rate. As shown in FIG. 1, the digital sensor signal 200.4 can be initially transferred to a register 160 for this purpose, the output signal 2005 of which is subsequently fed to a slow signal processing device 170. Register 160 and slow signal processing device 170 operate at the slow second data rate determined by second clock signal en 2. In principle, the register 160 which serves here merely to illustrate the principle can also already be implemented in the slow signal processing part. The slow signal processing device 170 typically comprises various digital circuits (e.g. gain offset adjustment, low-pass filtering, monitors, etc.) with which the sensor signal 200.5 is processed according to the respective application. After the corresponding processing, the digital sensor signal 200.6 is available in the form of channel data of the respective sensor channel at the output of the slow signal processing device 170.As can also be seen from FIG. 1, the sensor apparatus 100 further comprises a clock signal generator 180 which provides the required clock signals en 1 and en 2 to the corresponding components of the signal processing chain. For this purpose, the clock signal generating device 180, which is designed in the form of an electrical circuit, comprises a clock signal generator 181, which generates the corresponding pulse sequences.FIG. 2 shows a diagram with the time sequence of the clock signals en 1, en 2 used in the sensor device 100 from FIG. 1. In the following example, the decimator 150 forms from five data words of the fast signal processing part 121.1, which data words arrive one after the other at its signal input at the first data rate, exactly one data word for the slow signal processing part 121.2 operating at the second data rate. In FIG. 1, the five clocks 310.1 to 310.5 of the first clock signal en1 which represent the times of the entry of the respective five data words of the fast signal processing part 121.1 in the decimator 150 are combined to form a group 311. At a time determined by the pulse 320 of the second clock signal en2, the decimator 150 outputs the data item or data word representing the five combined data words at its signal output. The lower part of the diagram furthermore shows the second clock signal en2 used for driving the register 160. In this case, the pulse 330 represents the operating time at which the data word previously output from the decimator 150 is present at the output of the register 160. In the present example, this pulse 330 is consequently offset in time by a clock period t 2 of the second clock signal en 2 with respect to the pulse 320. As can be seen from FIG. 2, in the example shown here, for a data word of the digital sensor signal 200.4, 200.5, 200.6 processed at the second data rate, which data word is processed in the second signal processing part 121.2 of the signal processing path 121, a total delay T=9*t1of a total of nine clock periods t1of the fast clock signal en1thus results compared to the time at which the first of the five data words combined in the decimator 150 is input in the decimator 150. This time thus corresponds to the signal transit time of the digital sensor signal from the input of the decimator 150 to the output of the register 160.FIG. 3 schematically shows the structure of a sensor device 100 modified according to the concept described here. The sensor device 100 is designed here substantially analogously to the sensor device 100 from FIG. 1. The essential difference consists in the modification of the control of the decimator 150, which results in a desired delay of the sensor signal 200.4 output from the decimator 150. For this purpose, a third clock signal en2_d(m) is provided, which is preferably provided by a modified clock signal generating device 180. In the present example, the clock signal generator 180 additionally comprises a signal delay device 183, which delays the second clock signal en2generated by the clock signal generator 181 by a defined time duration, and delivers the delayed signal in the form of the third clock signal en2_d(m) to the second control input of the decimator 150. In this case, the clock signal generating device 183 is preferably designed to delay the second clock signal en 2 by in each case one or more entire clock periods t 1 of the first clock signal en 1. The delay can be effected in this case as a function of a parameter m individually assigned to the respective sensor channel. In principle, however, the third clock signal en2_d(m) can also be generated in a different manner.FIG. 4 shows a diagram with the time sequence of the clock signals en1, en2and en2_d(m) used in the modified sensor device 100 from FIG. 3 for the case in which the time delay T1of the third clock signal en2_d(m) used for driving the decimator 150 is exactly one clock period t1of the fast clock signal en1(i.e. T1=1*t1). As can be seen from FIG. 4, in the example shown here, for a data word of the digital sensor signal 200.4, 200.5, 200.6 processed at the second data rate, which data word is processed in the second signal processing part 121.2 of the signal processing path 121, a total delay T2=8*t1of eight clock periods t1of the fast clock signal en1thus results compared to the time at which the first of the five data words combined in the decimator 150 is input, which time point is determined by the pulse 310.1.FIG. 5 shows a diagram with the temporal sequence of the clock signals en1, en2and en2_d(m) used in the modified sensor device 100 from FIG. 3 for the case in which the delay T1of the third clock signal en2_d(m) used for driving the decimator 150 is exactly three clock periods t1of the fast clock signal en1(i.e. T1=3*t1). As can be seen from FIG. 4, in the example shown here, for a data word of the digital sensor signal 200.4, 200.5, 200.6 processed at the second data rate, which data word is processed in the second signal processing part 121.2 of the signal processing path 121, a total delay T2=6*t1of six clock periods t1of the fast clock signal en1thus results compared to the time at which the first of the five data words combined in the decimator 150 is input, which time point is determined by the pulse 310.1.As can be seen from FIGS. 4 and 5, the concept proposed here is based on the fact that the pulse sequence en2 for controlling the decimator 150 is delayed by m clock periods t1of the fast sampling rate in order to obtain a new shifted pulse sequence en2_d(m). The register 160 and the slow signal processing device 170 continue to operate with the pulse sequence en2 unchanged. For example, in the exemplary embodiment shown in FIG. 4, with a parameter m=1, a shortened signal transit time T 2 of 8*t 1 is obtained. In the exemplary embodiment shown in FIG. 5, on the other hand, a parameter m=3 is used, as a result of which the signal transit time T2 is shortened from 9*t1 to 6*t1. Thus, in the present exemplary embodiment, the following applies in general: m*t1 in real systems with very much higher decimation factors k, reductions in the propagation time from 0*t1 to (k-1)*t1 can be achieved at a step size of in each case one clock period t1. Thus, delay differences of up to (k-1)*t1in the different channels can be achieved by the selection of channel-individual parameter values m i with a resolution of t1.The implementation of the signal supply 183 which generates an adjustable shifted pulse sequence for each channel preferably employs a periodic counter which counts from 0 to (k-1) and thereafter begins again at 0. For each pulse sequence, an individual pulse of the sequence en1 is then switched through to the associated output of the third clock signal en2_d(m) if the counter reading of the periodic counter corresponds to the value m i. An example of the pulse sequences used is shown in FIG. 9.FIG. 6 also shows a further simplified block diagram of the sensor device 100 having a sensor channel comprising a MEMS sensor 110 and an evaluation circuit 120 assigned to the sensor. Evaluation circuit 120 includes a signal processing path 121 assigned to sensor 110 and having a decimator 150, and a clock signal generating device 180 having a signal delaying device 183 generating delayed third clock signal en2_d(m) for decimator 150. A sensor signal 200 processed with the aid of the signal processing path 121 and correspondingly delayed in the associated decimator 150 can subsequently be provided to a further signal processing device 190. In the present example, the signal processing device 190 is arranged outside the sensor device 100. In principle, such a signal processing device 190 can also be formed as part of the sensor apparatus 100.FIG. 7 shows a corresponding simplified block diagram for a sensor device 100 having three sensor channels 101 in 1, 1012, 1013 by way of example. The sensor device 100 comprises a single MEMS sensor 110 which provides three different signals 200 1, 2002, 2003 on a respective sensor channel 101 1, 1012, 1013 assigned to the respective signal. Each of the three sensor channels 101 1, 1012, 1013 has its own signal processing path 121 1, 1212, 1213 with a decimator 150 1, 1502, 1503. each reducing the data rate of the digital sensor signal 200 1, 1012, 1013 processed on the respective sensor channel 101 . As can also be seen from FIG. 7, the evaluation device 120 has a clock signal generation device 180 with a signal delay device 183 which provides a separate delayed clock signal en2_d(m i) for each of the three decimators 150 1, 1502, 1503.FIG. 8 schematically shows a block diagram of an exemplary signal delay device 183 of a clock signal generating device 180, which generates a total of three individually delayed clock signals en2_d(m1), en2_d(m2), en2_d(m3) for three different sensor channels 101 1, 1012, 1013. In this case, the signal delay device 183 receives the two clock signals en 1, en 2 generated by the clock signal generator 181 via the two signal inputs 184 1, 1842. As can be seen from FIG. 8, the signal delay device 183 generates a total of three individually delayed clock signals en2_d(m 1), en2_d(m 2), en2_d(m 3), on the basis of the two input signals en1, en2and three parameters m 1, m 2, m 3 individually assigned to each sensor channel 101 1, 1012, 1013 which in each case are connected via a separate signal output 185 1, 1852, 1853 to the decimator 150 1, 1502, 1503 of the respectively assigned sensor channel 101 1, 101_ner52_, 101_ner53_. As shown in FIG. 8 by way of example, the parameters m 1, m 2, m 3 can be provided to the signal delay device 183 via separate parameter inputs 186 1, 1862, 1863.In the timing diagram shown in FIG. 9, the individual delay T 1 of the three clock signals provided by the signal delay device 183 is shown by way of example. It can be seen here that in the first case the parameter m is 1= 1 and a delay T1 of exactly one clock period t1 of the first clock signal en1 is thus obtained for the delayed clock signal en2_d(m 1) compared to the non-delayed second clock signal en2. In the second case, the parameter m is 2= 3, as a result of which a delay T1 of exactly three clock periods t1 of the first clock signal en1 results for the second delayed clock signal en2_d(m 2) compared to the non-delayed second clock signal en2. In the third case, the parameter m is 3= 2, as a result of which a delay T1 of exactly two clock periods t1 of the first clock signal en1 results for the third delayed clock signal en2_d(m 3) compared to the non-delayed second clock signal en2. It can be seen here that the transit time of the digital sensor signal 200 in each sensor channel can be individually adjusted by varying the associated parameter.FIGS. 10 and 11 show, by way of example, two further possible configurations of a sensor device 100 which has a plurality of individual sensor channels. In this case, the sensor device 100 shown in FIG. 10 comprises three MEMS sensors 110 1, 1102, 1103 and an evaluation device 120 assigned to them. Each sensor 110 1, 1102, 1103 is assigned a signal processing path 121 1, 1212, 1213 each having a decimator 150 1, 1502, 1503 respectively. The evaluation circuit 120 comprises a clock signal generating device 180 having a signal delaying device 183 which serves as common signal delaying devices 183 for the decimators 150 1, 1502, 1503 of the three signal processing paths 121 1, 1212, 1213. As an alternative to the embodiments shown in FIG. 10, each signal processing path 121 1, 1212, 1213 and the decimator 150 1, 1502, 1503 contained therein may also be assigned a clock signal generating device 180 1, 1802, 1803 each having a signal delay device 183 1, 1832, 1833 respectively. Such an embodiment is shown by way of example in FIG. 11.FIG. 12 shows a simplified flow diagram of the method described here. Accordingly, in method step 410, an analog sensor signal 200 is provided by microelectromechanical sensor 110. In method step 420, analog sensor signal 200 is sampled in an analog-to-digital converter at a first sampling rate and a corresponding digital sensor signal 200 is provided. In method step 430, the digital sensor signal 200 is processed at a first data rate using a fast signal processing device. Subsequently, in method step 440, the data rate of the digital sensor signal 200 is reduced from the first data rate to a second data rate with the aid of a decimator. In method step 450, digital sensor signal 200 is delayed in decimator 150 by a time period individually assigned to the digital sensor signal. In the method step for 160, the delayed digital sensor signal 200 is provided at the output of the decimator 150. Subsequently, in method step 470, the digital sensor signal 200 is processed at the second data rate with the aid of a slow signal processing device. Finally, in method step 480, the digital sensor signal 200 is provided at the output of the slow signal processing device.In the examples described above, decimation by a factor of 4 is described by way of example without limiting generality. Likewise, just by way of example, the output signal is calculated in the decimator from five input values. In principle, these values can be adapted to the respective application as desired.Although the invention has been illustrated and described in more detail by the preferred embodiments, the invention is not limited by the disclosed examples. Rather, other variations can also be derived from this by the person skilled in the art without departing from the scope of protection of the invention.

Claims

Sensor device (100) comprising at least one micromechanical sensor (110) designed to generate a sensor signal (200) and an evaluation device (120) having a signal processing path (121) assigned to the micromechanical sensor (110), wherein the signal processing path (121) comprises: - a first signal processing part (121.1) designed to process the digital sensor signal (200) at a first data rate, - a decimator (150) connected downstream of the first signal processing part (121.1) designed to reduce the first data rate of the digital sensor signal (200) to a second data rate lower than the first data rate, and - a second signal processing part (121.2) connected downstream of the decimator (150) designed to process the digital sensor signal (200) at the second data rate, and wherein the evaluation device (120) is furthermore designed to process the digital sensor signal (200) at the second data rate, causing a delay adjustment of the sensor signal (200) by delaying the output of the sensor signal (200) from the decimator (150).Sensor device (100) according to Claim 1, wherein the evaluation device (120) furthermore comprises a clock signal generation device (180) designed to generate a first clock signal (en1) which determines the operating times of the first signal processing part (121.1), a second clock signal (en2) which determines the operating times of the second signal processing part (121.2) and a third clock signal (en2_d(m)) which is delayed in time with respect to the second clock signal (en2), wherein the decimator (150) is designed to output data of the sensor signal (200) in each case at times which are predefined by the delayed third clock signal (en2_d(m)).Sensor device (100) according to claim 2, wherein the clock signal generating means (180) comprises a signal delaying means (183) configured to generate the delayed third clock signal (em2_d(m)) by delaying the second clock signal (en2) by one or more clock periods (t1) of the first clock signal (en1).Sensor device (100) according to one of the preceding claims, wherein the sensor device (100) comprises a plurality of sensor channels (101, 102, 103) each having a signal processing path (121) for simultaneously processing a plurality of sensor signals (200) of one or more sensors (110), wherein the evaluation device (120) is configured to compensate a propagation time difference of the sensor signals (200) by individually delaying the output of at least one sensor signal (200) from a decimator (150) arranged in the signal processing path (121) of the respective sensor signal (200).Sensor device (100) according to Claim 4, wherein the signal delay device (183) is designed to adapt the delay of the second clock signal (en2) in a signal processing path (121) as a function of a parameter (m i) assigned individually to the respective signal processing path (121).Sensor device (100) according to one of the preceding claims, wherein the sensor (110) is designed in the form of an inertial sensor having a plurality of separately processed sensor channels (101 1, 1012, 1013).Sensor device (100) according to one of the preceding claims, wherein the micromechanical sensor (110) is designed to generate an analog sensor signal (200.1), and wherein the signal processing path (121) further comprises an analog-to-digital converter (134) for converting the analog sensor signal (200) into a digital sensor signal (200.2) at the first data rate.Method for controlling a sensor device (100), wherein the sensor device (100) comprises at least one micromechanical sensor (110) for generating an analog sensor signal (200), an analog-to-digital converter (134) for digitizing the analog sensor signal (200), and an evaluation device (120) having a signal processing path (121) assigned to the sensor (110), comprising the steps: - processing the digital sensor signal (200) using a first signal processing part (121.1) of the signal processing path (121), which operates at a first data rate, - reducing the first data rate of the digital sensor signal (200) to a second data rate, which is lower than the first data rate, using a decimator (150), - processing the digital sensor signal (200) using a second signal processing part (121.2) of the signal processing path (121), which operates at the second data rate, wherein the output of the sensor signal (200) from the decimator (150) is delayed by a time period individually assigned to the sensor signal (200) in order to bring about a delay time adaptation of the sensor signal (200).Method according to claim 8, wherein a first clock signal (en1) is generated which determines the operating times of the first signal processing part (121.1), wherein a second clock signal (en2) is generated which determines the operating times of the second signal processing part (121.2), wherein a delayed third clock signal (en2_d(m)) is generated by delaying the second clock signal (en2), and wherein the decimator (150) outputs data of the sensor signal (200) at respective times determined by the delayed third clock signal (en2_d(m)).The method of claim 9, wherein the delayed third clock signal (em2_d(m)) is generated by delaying the second clock signal (en2) by one or more clock periods (t1) of the first clock signal (en1).Method according to one of Claims 8 to 10, wherein a plurality of sensor signals (200) of one or more sensors (110) are simultaneously processed in a plurality of sensor channels (101 1, 1012, 1013) each having a signal processing path (121), and wherein a propagation time difference of the sensor signals (200) in the sensor channels (101 1, 1012, 1013) is compensated by individually delaying the output of at least one sensor signal (200) from a decimator (150) arranged in the signal processing path (121) of the respective sensor signal (200).Method according to one of Claims 8 to 11, wherein the delay of the second clock signal (en2) in a signal processing path (121) is adapted as a function of a parameter (m i) assigned individually to the respective signal processing path (121).

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