Angular rate sensor with a substrate and method for producing and / or operating a angular rate sensor

Abstract

A yaw rate sensor and a method for producing and / or operating a yaw rate sensor are proposed, wherein the yaw rate sensor has a main extension plane with an X direction and a Y direction running perpendicular thereto and also parallel to the main extension plane, wherein a Z direction runs perpendicular to the main extension plane, wherein the yaw rate sensor is configured such that applied yaw rates about each of these directions can be detected such that both the X direction and the Y direction and the Z direction are sensitive directions or axes.

Description

State of the art

[0001] The invention is based on a rotation rate sensor with a substrate and a double rotor according to the preamble of claim 1.

[0002] Such angular rate sensors with a substrate and a plurality of sensitive directions or axes - in particular microelectromechanical angular rate sensors (MEMS) - are generally known.

[0003] Such MEMS angular rate sensors are subject to certain disturbances in their output signals, particularly due to external influences such as changes in temperature, humidity, mechanical stress (e.g., bending of the circuit board to which the sensor is soldered), aging effects, or linear and rotational accelerations, vibration, and mechanical shocks. These influences cause changes in performance parameters, including cross-axis sensitivity (CAS). The pathways of these disturbances within the micromechanical structure and the corresponding application-specific integrated circuit (i.e., the ASIC) are partially known. However, the methods known to date are insufficient to investigate the pathways of CAS and to measure the magnitude of CAS, especially the orthogonality of the measuring axes. In particular, axis-specific excitation is not used in typical MEMS angular rate sensors.

[0004] Mode-split, open-loop MEMS angular rate sensors are well known and typically have so-called quadrature electrodes. Quadrature is the axis-individual, shifted (and undesired) movement of the detection mode in a vibrating, amplitude-modulated angular rate sensor by 90° to the Coriolis force generated. Mode-split means that the drive mode and detection modes are at separate frequencies, e.g. 1 to 5 kHz apart. Open-loop refers to a system concept in which no control loop is used to control the position of the detection micromechanics. Known variations of this consist in the detection micromechanics continuing to operate without position control (i.e. 'open-loop'), but the quadrature movement is reset via a control loop. By changing the voltage at such quadrature electrodes - but for a single axis orDirection - usually all three detection modes of the three spatial measurement axes are stimulated simultaneously. For cost and space reasons, separate quadrature electrodes for each axis are not provided for in previously known yaw rate sensors. In known systems or methods, the voltage changes at the quadrature electrodes are realized as two different, constant levels. More recently, not only such two levels are considered, but the dynamics of the jump allows system identification of additional variables (e.g. frequency split between drive and detection mode). Instead of a single jump (a voltage value) on the quadrature electrodes (only in one direction or axis), excitation by tones or noise sequences in certain frequency ranges is also possible, thus providing information about the system behavior.For closed-loop, mode-matched MEMS angular rate sensors, methods have also been developed to determine sensitivity and frequency splitting in the running detection control loop using pilot tones or the noise inherent in the control loop; however, these methods are not used to determine CAS or couplings between axes.

[0005] Furthermore, according to the current state of the art, the cross-axis sensitivity CAS must be measured or determined in a complex manner (in particular by applying or generating movement stimuli) during the production of such yaw rate sensors. Disclosure of the invention

[0006] Against this background, the object is to provide a yaw rate sensor with a substrate and a method for producing and / or operating such a yaw rate sensor, which does not have the disadvantages mentioned above.

[0007] The inventive yaw rate sensor with a substrate has the advantage over the prior art that individual stimulation of each axis is advantageously possible using quadrature electrodes. This advantageously makes it possible to identify and determine the cross-axis sensitivity (CAS), i.e., the coupling of measurement signals from one axis to another, and especially the orthogonality of the measurement axes, in a significantly improved manner compared to the prior art.

[0008] In particular, the invention advantageously allows for axis-specific excitation of the MEMS yaw rate sensor using axis-specific quadrature electrodes. This allows for the sensor-internal identification of signal cross-couplings from one axis to another (i.e., a component of the CAS) or of orthogonality. Eliminating the motion stimuli results in significant cost savings for test systems and higher throughput in production. Furthermore, the method is suitable for testing sensor functionality. It can therefore be used as an additional component in safety-critical products (airbags, ESP), for example, during sensor start-up.

[0009] In particular, it is advantageously possible according to the invention that a determination of the transverse axis sensitivity is possible by self-calibration, which can also be carried out without movement stimuli - for example during the production of the yaw rate sensor.

[0010] Advantageous embodiments and further developments of the invention can be found in the dependent claims and the description with reference to the drawings.

[0011] According to an advantageous embodiment of the invention, the yaw rate sensor comprises a double rotor comprising a first rotor and a second rotor, wherein the first and second rotors—spaced along the X-direction—are elastically connected to the substrate via a respective suspension and are further elastically connected to one another via a coupling element such that the two rotors can be excited to antiphase torsional oscillations. This makes it possible to implement a three-axis yaw rate sensor in a comparatively simple manner.

[0012] A further subject of the invention is a method for producing and / or operating a rotation rate sensor with a substrate according to the independent method claim.

[0013] The method according to the invention for producing and / or operating a yaw rate sensor is advantageous over the prior art because individual stimulation of each axis is advantageously possible. This advantageously makes it possible to determine or identify the transverse axis sensitivity in a significantly better manner than the prior art. This is possible according to the invention through the use of quadrature electrodes provided for each axis individually, whereby an axis-specific excitation of the MEMS yaw rate sensor is advantageously possible using the quadrature electrodes (by applying one or more predetermined and at least partially varying voltages or voltage waveforms to them) and allows the sensor-internal identification of signal cross-couplings from one axis to another. The method is also suitable for testing sensor functionality.

[0014] For the method for operating the yaw rate sensor with a substrate and a double rotor, the advantages and configurations described in connection with the embodiments of the yaw rate sensor according to the invention with a substrate can be applied.

[0015] According to a further advantageous embodiment of the invention, the micromechanical structure is excited in a specific manner, so that, in particular, conclusions about the transverse axis sensitivity (or the majority of (matrix) components of the transverse axis sensitivity) are possible or can be determined. For this purpose, it is particularly provided that the transverse sensitivity(ies) can be particularly well detected or measured by means of an excitation coupled into the sensor structure via the quadrature electrodes of at least one of the sensitive axes (or sensitive directions).This is possible in particular in that the first and second quadrature electrodes (of the first detection means related to the X-direction as the sensitive direction or axis) are subjected to the predetermined voltage(s) or voltage profiles, wherein the reference to the first and second quadrature electrodes (and thus the X-direction) does not imply any restriction of generality, but rather a reference to the third and fourth quadrature electrodes (related to the Y-direction) or, alternatively, to the fifth and sixth quadrature electrodes (related to the Z-direction) could have been made in the same way and can be made according to the invention. Thus, when considering the first and second quadrature electrodes, they are subjected to the predetermined voltage(s) or voltage profiles in such a way that. -- starting - at a first considered point in time - from a first voltage level at the first quadrature electrode and a second voltage level at the second quadrature electrode - in particular abruptly or with a predetermined time course - -- at a second considered time, a voltage difference, a further first voltage level, is applied to the first quadrature electrode and a further second voltage level is applied to the second quadrature electrode, and - in particular before, during or after the second time point under consideration - the system response is determined, in particular at the further quadrature and / or Coriolis electrodes.

[0016] This makes it advantageously possible according to the invention to determine the system response of such excitations under controlled conditions, and in particular in a manner that allows this to be done separately for each of the three sensitive directions or axes.

[0017] According to a further advantageous embodiment of the invention, it is provided that a differential excitation takes place in which the further first voltage level is changed by a first voltage difference compared to the first voltage level, while the second and the further second voltage level remain unchanged, or in which, conversely, the further second voltage level is changed by a second voltage difference compared to the second voltage level, while the first and the further first voltage level remain unchanged - wherein in particular the first voltage level and the second voltage level are the same.

[0018] It is thereby advantageously possible according to the invention to have several possibilities for coupling different excitations or types of excitations as well as different temporal courses thereof into the micromechanical structure of the yaw rate sensor, so that a large number of parameters of the micromechanical structure can be determined.

[0019] In particular, it is advantageously possible according to the invention that -- the first and second quadrature electrodes (21, 22) are subjected to a voltage curve (differential or common mode) in such a way that this results in a voltage jump between two constant levels, and / or that -- the first and second quadrature electrodes (21, 22) are subjected to a voltage curve such that this results in a common mode jump on the first and second quadrature electrodes (21, 22) between two constant levels, and / or that -- instead of a single sudden voltage change, several such voltage changes to different voltage levels and / or recurring jumps and / or tones and / or tone sweeps and / or noise sequences, in particular pseudo-noise sequences, occur, in particular with a frequency close to the drive frequency.

[0020] According to further advantageous embodiments of the invention, it is provided that the method is used to carry out a safety check, in particular during or at the beginning of sensor operation.

[0021] Embodiments of the present invention are illustrated in the drawings and explained in more detail in the following description. Short description of the drawings: Fig. 1 shows a schematic representation of a rotation rate sensor with a substrate and a double rotor according to the present invention. Fig. 2 shows a schematic representation of a flow diagram for illustrating the method according to the invention, wherein in particular a possibility for self-calibration of the transverse axis sensitivity of the yaw rate sensor following a measurement of the transverse axis sensitivity in production by means of movement stimuli is shown. Fig. 3 shows a schematic representation of a flow diagram for illustrating the method according to the invention, wherein in particular a possibility for self-calibration of the transverse axis sensitivity of the yaw rate sensor without measuring the transverse axis sensitivity due to movement stimuli is shown. Fig. Figure 4 shows a schematic representation of the mechanical transfer function (the right axis corresponds to the frequency; the vertical axis corresponds to the signal amplitude) of a first axis (upper representation) and a second axis (lower representation) of a yaw rate sensor. Fig. 5 shows a schematic representation of the method according to the invention as an example for excitation via the first and second quadrature electrodes (ie via the first axis or the X-direction). Embodiments of the invention:

[0022] In the various figures, identical parts are always provided with the same reference symbols and are therefore usually named or mentioned only once.

[0023] In Fig. 1 shows a yaw rate sensor according to the invention or a sensor arrangement according to the invention in a plan view, ie with a projection direction perpendicular to the main extension plane of the substrate of the yaw rate sensor (in other words, the drawing plane corresponds to the main extension plane of the substrate or a parallel plane).

[0024] By way of example, the rotation rate sensor has a double rotor structure or a double rotor that can be excited to antiphase oscillations; the double rotor comprises a first rotor 1 and a second rotor 2. The first and second rotors 1, 2 are - spaced apart along the X-direction - elastically connected to the substrate via a respective suspension (arranged centrally for each of the rotors 1, 2, but not specifically shown by reference numerals) and are further elastically connected to one another via a coupling element in such a way that the two rotors 1, 2 can be excited to antiphase torsional oscillations (by means of two curved arrows in Fig. 1) can be excited or driven. Fig. 1 A drive (not shown) is capable of causing these drive oscillations (torsional oscillations) of the rotors 1, 2, so that in a manner known per se, due to the essentially linear (drive) movements of (radially spaced) partial areas of the rotors 1, 2 and in the presence of rotation rates or rotation rate components about axes of rotation which are perpendicular to the direction of movement of these linear drive movements, Coriolis forces act on the rotors 1, 2 or the partial areas thereof, which - in the case of an open-loop system concept - lead to deflections of deflectable elements of the sensor structure (either parts of the rotors 1, 2 themselves or deflectable elements coupled to them) or at least to force effects on such deflectable elements (which force effects can be determined or determined even without deflections).are detectable, that a position control of the deflectable element is effected by means of a closed-loop control loop, so that at most a minimal actual deflection occurs).

[0025] To detect these deflections or these force effects, detection means are provided for each sensitive axis, which comprise at least two detection electrodes, which are arranged on both sides of the deflectable element under consideration in the deflection direction and thus function as double-differential detection electrodes (i.e., for the first sensitive axis - for example, the X-direction - first detection means are provided (comprising the first and second detection electrodes), for the second sensitive axis - for example, the Y-direction - second detection means are provided (comprising the third and fourth detection electrodes), and for the third sensitive axis - for example, the Z-direction - third detection means are provided (comprising the fifth and sixth detection electrodes)). Fig. 1 is shown merely schematically - as well as for each of the rotors 1, 2 - (with regard to the detection of a rotation rate component in the X direction) a first detection electrode 11 and a second detection electrode 12 as well as (with regard to the detection of a rotation rate component in the Y direction) a third detection electrode 13 and a fourth detection electrode 14. According to the present invention, the respective detection means (i.e., separately for each sensitive axis) also comprise quadrature electrodes - in the form of axis-specific quadrature electrodes - in addition to the detection electrodes, i.e.For the first sensitive axis (or X-direction), the first detection means comprise a first and a second quadrature electrode, for the second sensitive axis (or Y-direction), the second detection means comprise a third and a fourth quadrature electrode, and for the third sensitive axis (or Z-direction), the third detection means comprise a fifth and a sixth quadrature electrode (the fifth and sixth quadrature electrodes are, however, in . Fig. 1 not shown for simplicity). The same applies to the quadrature electrodes: Fig. 1 only schematically - and for each of the rotors 1, 2 - the first quadrature electrode 21 and the second detection electrode 22 (as part of the first detection means) as well as the third quadrature electrode 23 and the fourth quadrature electrode 24 are shown.

[0026] In the following, the invention is essentially illustrated using the example of excitation by means of the first and second quadrature electrodes 21, 22, although it has already been mentioned that this is merely an example and any other of the existing quadrature electrode pairs could also be used; the first detection electrode 11 is also referred to below as CN1 and the second detection electrode 12 as CP1, while the first quadrature electrode 21 is also referred to as QN1, the second quadrature electrode 22 as QP1, the third quadrature electrode 23 as QN2 and the fourth quadrature electrode 24 as QP2.

[0027] According to the invention, the excitation of the sensor structure by means of the quadrature electrodes is carried out as follows: The quadrature electrodes for one direction - e.g. QN1 and QP1 for the first direction or QN2 and QP2 for the second direction, or more generally, QN and QP for any direction - are initially at the same potential during sensor operation and thus generate mutually canceling forces. Fig. Figure 4 shows an example of the mechanical transfer function of axis 1 and axis 2 of a yaw rate sensor with simultaneous excitation of all quadrature channels. A very fine frequency sweep is applied differentially to the QN and QP electrodes for excitation. The detection modes at the respective points of the resonance frequency (the right dashed line in the upper diagram; the left dashed line in the lower diagram) couple into the other axes. This principle allows the identification of mode coupling via excitation of the quadrature electrodes. The illustrated (quadrature) coupling between the two axes also shows a correlation with the CAS.

[0028] A disadvantage of simultaneously exciting all axes (in state-of-the-art yaw rate sensors) is the superposition of the system responses of the individual axes. Evaluation with coupled quadrature electrodes is only possible for a very fine frequency sweep.

[0029] According to the invention, separate quadrature electrodes are provided for the individual axes. If a step-like voltage difference is now applied between QP1 and QN1, the detection mode oscillates (in particular at its resonant frequency) and then decays again. Alternatively, a step from an existing difference to 0V can be applied. Axes 2 and 3 are now also excited by cross-coupling (electrically and / or mechanically) (i.e. the (usually different) deflectable elements assigned to these axes or these sensitive directions are excited) or an output signal (quadrature and / or yaw rate) is measured. The cross-coupling can be determined by suitable analysis (e.g. system identification, evaluation of the amplitude or phase). This identified cross-coupling value can be used to adjust the CAS compensation of the sensor.

[0030] Furthermore, directly after the jump in axis 1, i.e. at the electrodes QN1 and QP1 (but also in the second and / or third axis - i.e. in principle in the same way at the other quadrature electrodes), for example, with suitable mathematical methods of system identification, information about further system parameters can be obtained, e.g. phase behavior, gain in relation to the yaw rate output, quality, frequency, positive feedback capability, etc., in particular also their change relative to a further measurement. This is shown schematically in Fig. 5, which will be discussed further below.

[0031] Depending on the underlying system model, the values or changes also enable the calculation of mechanical parameters such as mass, stiffness, internal pressure, etc., as well as manufacturing variations such as edge loss and layer thickness of the moving structures. The absolute values and / or changes allow the CAS to adjust the sensor's sensitivity or offset compensation, e.g., to improve its performance over temperature, humidity, mechanical stress, or lifetime. Furthermore, instead of subsequent compensation, the sensor's operating state can also be changed, e.g., to achieve a similar state to its original state.

[0032] According to the invention, the following variants and embodiments are provided in particular: -- Applying a jump to the quadrature electrodes of axis 1 between two constant levels and evaluating the amplitude and phase in all axes. In the decay behavior, particularly consider the transition of the resonance frequency from axis 1, for example, to axis 2, see Fig. 5. The axis-specific quadrature electrodes make the crossover of excitation from axis 1 to axis 2 much more visible, since the resonance mode of axis 2 is not excited (or only excited as little as possible) by the quadrature electrodes of axis 1. This makes it possible to separate unwanted common excitation from the crossover to be identified between the axes. -- Applying a step (see previous bullet point) between two constant levels and system identification from the step response; -- Applying a common mode step on the Q electrodes between two constant levels (leading to a change in the positive feedback) and evaluating amplitude and phase or system identification from the step response; -- Excitation with individual tones at specific frequencies and evaluation of the amplitude and phase in the tones with subsequent comparison between the axes; -- Excitation with a tone sweep and evaluation of the amplitude and phase in the tones with subsequent comparison between the axes; -- Excitation with a noise or a pseudo noise sequence and subsequent system identification (possibly with suitable filtering); -- Applying a jump between two constant levels and evaluating the decay behavior, followed by changing the common mode voltage and repeatedly applying a jump between two constant levels and evaluating the decay behavior. Subsequent comparison of the decay behaviors allows for the identification of a possible change in the positive feedback capability (e.g., due to a gap change). -- Applying a jump between two constant levels and a common mode jump at short intervals during the decay. This excitation type allows the decay behavior to be identified at different positive feedback levels. -- The method is especially suitable for open-loop systems, but can also be applied in a similar way to closed-loop quadrature controllers, for example, by applying a step to the reference variable. The result variables obtained with the described excitation forms are then compared with the Fig. 3, the CAS and other sensor parameters are correlated. This typically occurs at rest while the sensor is not in use. The presented method can also be used to identify signal drift and system parameters during normal sensor operation, provided the demodulation phase error is well adjusted.

[0033] Fig. Figure 2 shows a schematic flow diagram illustrating the method according to the invention; in particular, a possibility for self-calibration of the cross-axis sensitivity of the yaw rate sensor following a measurement of the cross-axis sensitivity during production using motion stimuli is illustrated. The method is started in a first method step 101. A first block 110 of method steps takes place during the production of the yaw rate sensor: In a second method step 111, the measurement of the transverse axis sensitivity (CAS) is carried out using movement stimuli, i.e., a defined movement—in particular rotation—of the yaw rate sensor to be manufactured takes place in a comparatively complex manner; here, the transverse axis sensitivity is measured and a compensation matrix is determined or created. In a third method step 112, the CAS compensation matrix is stored. In a fourth method step 113, in particular, further parameters are measured. In a fifth method step 114, the further parameters and variables derived therefrom are stored in the sensor. In a sixth method step 115, the second to fifth method steps 111-114 are repeated several times if necessary, in particular with different movement stimuli, for example with different loads such as temperature or the like.In a seventh method step 116, in particular a sensor-specific calculation rule is created and stored in the sensor. In an eighth process step 117, further production steps take place, in particular tape and reel, transport, and soldering into the final product, and possibly conditioning. As a result or consequence of this, a change in the CAS occurs in a ninth process step 118, i.e., the CAS compensation (based on the previously created CAS compensation matrix) is no longer as accurate.

[0034] A further block 130 of process steps takes place after the production of the yaw rate sensor, i.e. in the final product or in the yaw rate sensor itself: In a first sub-block 131, the self-calibration takes place: In a first method step 132 of this, an excitation - for example a voltage change as described above - takes place on one or more quadrature electrodes, for example in the X direction.

[0035] In a second method step 133, a measurement and qualitative determination of the cross-coupling to the other axes, such as the second and third axes, takes place. In a third method step 134, further parameters (particularly in all three axes) are identified from the resulting system response to the excitation of the first axis. In a fourth method step 135, the first, second, and third method steps 132, 133, and 134 are repeated with an excitation of the second and third axes, respectively.

[0036] In a fifth (optional) method step 136, additional parameters are measured. In a sixth (also optional) method step 137, the sensor memory is read out. In a seventh method step 138, a calculation rule is executed. Self-calibration 131 is completed with the seventh method step 138, and the CAS compensation matrix is adjusted in an eighth method step 139. This results in an improvement of the CAS or the CAS compensation matrix (compared to the CAS compensation matrix that existed before self-calibration) in a ninth method step.

[0037] Thus, Fig. 2 a possible flow chart for the CAS parameter in the case that CAS is measured in production and corrected in the field.

[0038] Fig. Figure 3 shows a schematic flow diagram illustrating the method according to the invention; in particular, a possibility for self-calibration of the transverse axis sensitivity of the yaw rate sensor without measuring the transverse axis sensitivity based on movement stimuli is illustrated.

[0039] The process is started in a first process step 201.

[0040] A first block 210 of process steps takes place during the production of the yaw rate sensor: In a first sub-block 211, an identification of the cross-axis sensitivity (CAS) takes place without movement stimuli, ie a self-calibration takes place: In a first method step 212 of this, an excitation - for example a voltage change as described above - takes place on one or more quadrature electrodes, for example in the X direction.

[0041] In a second method step 213, a measurement and qualitative determination of the cross-coupling to the other axes, such as the second and third axes, takes place. In a third method step 214, further parameters (particularly in all three axes) are identified from the resulting system response to the excitation of the first axis. In a fourth method step 215, the first, second, and third method steps 212, 213, and 214 are repeated with an excitation of the second and third axes, respectively.

[0042] In a fifth method step 216, the CAS compensation matrix is stored. In a sixth method step 217, in particular, a measurement of further parameters takes place. In a seventh method step 218, the further parameters and variables derived therefrom are stored in the sensor. In an eighth method step 219, the first to seventh method steps 212-218 may be repeated several times, if necessary, in particular for different measuring points with, for example, different loads such as temperature or the like. In a ninth method step 220, in particular, a sensor-specific calculation rule is created and stored in the sensor.

[0043] In a tenth process step 221, further manufacturing steps take place, in particular tape and reel, transport, and soldering into the final product, and possibly conditioning. As a result or consequence of this, a change in the CAS occurs in an eleventh process step 223, i.e., the CAS compensation (based on the previously created CAS compensation matrix) is no longer as accurate.

[0044] A further block 230 of process steps takes place after the production of the yaw rate sensor, i.e. in the final product or in the yaw rate sensor itself: In a first sub-block 231, the self-calibration takes place: In a first method step 232 of this, an excitation - for example a voltage change as described above - takes place on one or more quadrature electrodes, for example in the X direction.

[0045] In a second method step 233, a measurement and qualitative determination of the cross-coupling to the other axes, such as the second and third axes, takes place. In a third method step 234, further parameters (particularly in all three axes) are identified from the resulting system response to the excitation of the first axis. In a fourth method step 235, the first, second, and third method steps 232, 233, and 234 are repeated with an excitation of the second and third axes, respectively.

[0046] In a fifth (optional) method step 236, additional parameters are measured. In a sixth (also optional) method step 237, the sensor memory is read out. In a seventh method step 238, a calculation rule is executed. Self-calibration 231 is completed with the seventh method step 238, and the CAS compensation matrix is adjusted in an eighth method step 239. This results in an improvement of the CAS or the CAS compensation matrix (compared to the CAS compensation matrix that existed before self-calibration) in a ninth method step.

[0047] Thus, Fig. 3 the case where the method according to the invention enables the CAS to be identified cost-effectively during production without movement stimuli.

[0048] Fig. Figure 4 shows a schematic representation of the mechanical transfer function (the right axis corresponds to the frequency; the vertical axis corresponds to the signal amplitude) of a first axis (upper diagram) and a second axis (lower diagram) of a yaw rate sensor. The axes exhibit mode coupling (CAS) at the location of the respective resonance frequency: For the schematically represented first axis (upper diagram), the resonance frequency corresponds to the right-hand dashed line in the diagram, whereas for the schematically represented second axis (lower diagram), the resonance frequency corresponds to the left-hand dashed line in the diagram. The excitation is carried out in particular with a very fine frequency sweep on all quadrature electrodes (i.e., QN and QP electrodes) simultaneously.

[0049] Fig. Figure 5 shows a schematic representation of the method according to the invention as an example for excitation via the first and second quadrature electrodes 21, 22 (ie via those quadrature electrodes of the first axis or the X-direction): In process steps 132 or 212 or 232, an excitation takes place (see reference number 20 in Fig.5), which occurs on the first and second quadrature electrodes 21, 22 (cf. the schematically illustrated 'step function' over time), but not on the other quadrature electrodes 23, 24, 25, 26 (cf. the temporally constant course). Due to the couplings 27 present in the micromechanical structure of the yaw rate sensor (specifically the couplings due to the mechanics of the first axis (or X direction) 251, the couplings due to the mechanics of the second axis (or Y direction) 252 or the couplings due to the mechanics of the third axis (or Z direction) 253), different system responses arise on or at the corresponding quadrature electrodes and / or the detection electrodes (cf. reference numeral 30 and the different temporal courses (and in particular different amplitudes) of the system responses assigned to the respective axes ordirections; for example, it is schematically shown that the second axis has a lower coupling than the third axis.) The system responses are recorded and evaluated in process steps 133, 213, and 233, respectively.

[0050] According to the invention, in particular further process steps: -- an amplitude and phase evaluation and / or system identification takes place, in particular based on neural networks (reference numeral 255); this particularly concerns (reference numeral 256) the CAS coupling coefficients, various frequencies, qualities, phases, positive feedback capabilities, gains, mechanical or manufacturing parameters, and the like; -- in particular (see reference numeral 257) an algorithm for calculating a compensation rule or an adaptation of the operating state takes place; -- Furthermore, according to the invention (cf. reference numeral 258), a trim is carried out or an improvement of CAS, offset, sensitivity, noise, etc. is carried out via environmental influences and / or aging.

[0051] The invention is not limited to the embodiments described above, but can be used in a variety of applications for inertial sensor-based navigation, orientation, and stabilization of objects. A computing unit in the sensor can be used to control the operation of the inertial sensor (e.g., power-saving mode, measuring ranges), check the plausibility of sensor signals and their tolerances (e.g., for internal sensor monitoring), perform signal processing (e.g., calculation of position or orientation, data filtering), and select communication protocols. Various, even self-learning, AI-based algorithms can be used in the computing unit to evaluate and process the signals from the inertial sensors, the temperature sensors, and also from external data (e.g., GPS data, odometer data). Use is also conceivable in: Two-wheeled vehicles such as motorcycles, bicycles, and scooters (e.g.,ESP / AirBag, tilt detection, balancing); three-wheel applications (e.g. TucTuc); aviation applications (e.g. flight stabilization and control); industrial robot applications (e.g. controlling the position of excavator buckets, drilling, image stabilization, flight control, satellite antenna alignment, fine motor skills for gripper robots); home and garden applications (e.g. navigation of lawn mowers, lawn mowers, door position monitoring,...); medical applications (e.g. fall detection, motion and posture detection,...); sports and leisure activities (e.g. motion detection, posture detection, in golf clubs, tennis rackets, skis); numerous CE applications (e.g. in smartphones, tablets, wearables, hearables, drones, toys).The invention can also be used in the context of smartphones and tablets for the following applications: screen orientation, significant movements, device orientation, activity, gesture, and context recognition, image stabilization, indoor SLAM (simultaneous localization and mapping), shock and free fall detection, and motion control. In the context of wearables, hearables, AR, and VR, the invention can be used for the following applications: display information; step counting; activity, gesture, and context recognition; calorie counting; in-ear detection; sleep monitoring; elderly care; indoor navigation; position tracking; low-power sensing; real-time motion detection; head movement tracking; precise sensor data fusion.In the context of drones, games, and toys, the invention can be used for the following applications: orientation; gimbal; altitude stabilization; flight control; motion tracking, motion control, balance; activity and gesture recognition. In the context of robots, the invention can be used for the following applications: navigation; boundary detection; dynamic path planning; indoor SLAM; air quality monitoring; blockage detection. In the context of smart homes, the invention can be used for the following applications: intrusion detection, air quality monitoring, mold detection, climate control, floor level detection, and indoor navigation. The invention can also be used in an industrial context for the following applications: water level detection; asset tracking; navigation and control; motion and position tracking; energy management; predictive maintenance.Furthermore, numerous modifications, variations, designs, arrangements and embodiments are possible, all of which fall within the scope of the invention.

Claims

[1] A yaw rate sensor comprising a substrate, wherein the substrate has a main extension plane with an X-direction and a Y-direction running perpendicular thereto and also parallel to the main extension plane, wherein a Z-direction runs perpendicular to the main extension plane, wherein the yaw rate sensor is configured such that applied yaw rates about each of these directions can be detected such that both the X-direction and the Y-direction and the Z-direction are sensitive directions or axes, wherein the yaw rate sensor has at least one seismic mass, wherein the yaw rate sensor is configured such that the at least one seismic mass is drivable or is driven to a drive movement along a drive direction for the detection of a yaw rate, wherein the yaw rate sensor is further configured such thatthat the effect of a Coriolis force or a Coriolis force component on the driven at least one seismic mass can be detected by detecting a deflection of a deflectable element of the yaw rate sensor in a detection direction perpendicular to the drive direction, wherein for this purpose the yaw rate sensor has first detection means for detecting a yaw rate about the X direction, second detection means for detecting a yaw rate about the Y direction and third detection means for detecting a yaw rate about the Z direction, wherein the first detection means have at least a first and second detection electrode (11, 12) and a first and second quadrature electrode (21, 22), the second detection means have at least a third and fourth detection electrode (13, 14) and a third and fourth quadrature electrode (23, 24) and the third detection means have at least a fifth and sixth detection electrode (15,16) and a fifth and sixth quadrature electrode (25, 26), , characterized by in that, in order to determine at least the transverse axis sensitivity, the quadrature electrodes (21, 22, 23, 24, 25, 26) of the first, second and / or third detection means are subjected to one or more predetermined and at least partially varying voltages or voltage curves, and at least the transverse axis sensitivity is determined or improved by means of the system response. [2] Rotation rate sensor according to claim 1, characterized by in that the rotation rate sensor comprises a double rotor comprising a first rotor (1) and a second rotor (2), wherein the first and second rotors (1, 2) - spaced apart along the X direction - are elastically connected to the substrate via a respective suspension and are further elastically connected to one another via a coupling element in such a way that the two rotors (1, 2) can be excited to antiphase torsional oscillations. [3] A method for producing and / or operating a yaw rate sensor with a substrate, wherein the substrate has a main extension plane with an X-direction and a Y-direction running perpendicular thereto and also parallel to the main extension plane, wherein a Z-direction runs perpendicular to the main extension plane, wherein the yaw rate sensor is configured such that applied yaw rates about each of these directions can be detected such that both the X-direction and the Y-direction and the Z-direction are sensitive directions or axes, wherein the yaw rate sensor has at least one seismic mass, wherein the yaw rate sensor is configured such that the at least one seismic mass is drivable or is driven to a drive movement along a drive direction for the detection of a yaw rate, wherein the yaw rate sensor is further configured such thatthat the effect of a Coriolis force or a Coriolis force component on the driven at least one seismic mass can be detected by detecting a deflection of a deflectable element of the yaw rate sensor in a detection direction perpendicular to the drive direction, wherein for this purpose the yaw rate sensor has first detection means for detecting a yaw rate about the X direction, second detection means for detecting a yaw rate about the Y direction and third detection means for detecting a yaw rate about the Z direction, wherein the first detection means have at least a first and second detection electrode (11, 12) and a first and second quadrature electrode (21, 22), the second detection means have at least a third and fourth detection electrode (13, 14) and a third and fourth quadrature electrode (23, 24) and the third detection means have at least a fifth and sixth detection electrode (15,16) and a fifth and sixth quadrature electrode (25, 26), , characterized by in that, in order to determine at least the transverse axis sensitivity, the quadrature electrodes (21, 22, 23, 24, 25, 26) of the first, second and / or third detection means are subjected to one or more predetermined and at least partially varying voltages or voltage curves, and at least the transverse axis sensitivity is determined or improved by means of the system response. [4] Method according to claim 3, characterized by that the first and second quadrature electrodes (21, 22) are subjected to the predetermined voltage(s) or voltage profiles in such a way that -- starting - at a first considered point in time - from a first voltage level at the first quadrature electrode and a second voltage level at the second quadrature electrode - in particular abruptly or with a predetermined time course - -- at a second considered time, a voltage difference, a further first voltage level is applied to the first quadrature electrode and a further second voltage level is applied to the second quadrature electrode and - in particular before, during or after the second considered time - the system response, in particular at the further quadrature electrodes (23, 24, 25, 26) and / or detection electrodes (13, 14, 15, 16), is determined. [5] Method according to claim 3 or 4, characterized bythat a differential excitation occurs in which the further first voltage level is changed by a first voltage difference compared to the first voltage level, while the second and the further second voltage level remain unchanged, or in which, conversely, the further second voltage level is changed by a second voltage difference compared to the second voltage level, while the first and the further first voltage level remain unchanged - wherein in particular the first voltage level and the second voltage level are the same. [6] Method according to one of claims 3 to 5, characterized by , that -- the first and second quadrature electrodes (21, 22) are subjected to a voltage curve such that this results in a voltage jump between two constant levels and / or -- the first and second quadrature electrodes (21, 22) are subjected to a voltage curve such that this results in a common mode jump on the first and second quadrature electrodes (21, 22) between two constant levels, and / or -- instead of a single sudden voltage change, several such voltage changes to different voltage levels and / or recurring jumps and / or tones and / or tone sweeps and / or noise sequences, in particular pseudo-noise sequences, occur, in particular with a frequency close to the drive frequency. [7] Method according to one of claims 3 to 6, characterized by that the procedure takes place during ongoing operation or in parallel with the ongoing operation of the yaw rate sensor. [8] Method according to one of claims 3 to 7, characterized bythat the method is used to carry out a safety test, in particular during or at the beginning of sensor operation.

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