Angular rate sensor with a substrate and method for producing and / or operating a angular rate sensor

Abstract

A yaw rate sensor and a method for producing and / or operating a yaw rate sensor are proposed, wherein the yaw rate sensor has a main extension plane with an X direction and a Y direction running perpendicular thereto and also parallel to the main extension plane, wherein a Z direction runs perpendicular to the main extension plane, wherein the yaw rate sensor is configured such that applied yaw rates about each of these directions can be detected such that both the X direction and the Y direction and the Z direction are sensitive directions or axes.

Description

State of the art

[0001] The invention is based on a rotation rate sensor with a substrate and a double rotor according to the preamble of claim 1.

[0002] Such angular rate sensors with a substrate and a plurality of sensitive directions or axes - in particular microelectromechanical (MEMS) angular rate sensors - are generally known.

[0003] Such MEMS angular rate sensors are subject to certain disturbances in their output signals, particularly due to external influences such as changes in temperature, humidity, mechanical stress (e.g., bending of the circuit board to which the sensor is soldered), aging effects, linear and rotational accelerations or vibrations, or the coupling of electromagnetic interference in the environment or in the supply voltages. These influences cause changes in, for example, the offset, the sensitivity, the cross-axis sensitivity (CAS), or the signal noise. The causal pathways of these disturbances within the micromechanical structure and the corresponding application-specific integrated circuit (i.e., the ASIC) are partly known. However, the methods known to date are not sufficient to identify specific causal pathways at all, or to identify them with sufficient accuracy.In particular, axis-specific excitation is not used in typical MEMS angular rate sensors.

[0004] Mode-split, open-loop MEMS angular rate sensors are well known and typically have so-called quadrature electrodes. Quadrature is the axis-specific, undesired movement of the detection mode in a vibrating, amplitude-modulated angular rate sensor, shifted by 90° to the Coriolis force. Mode-split means that the drive mode and detection modes are at separate frequencies, e.g. 1 to 5 kHz apart. Open-loop refers to a system concept in which no control loop is used to control the position of the detection micromechanics. Known variations of this consist in the detection micromechanics continuing to operate without position control (i.e. 'open-loop'), but the quadrature movement is reset via a control loop. By changing the voltage at such quadrature electrodes - but for a single axis orDirection - usually all three detection modes of the three spatial measurement axes are stimulated simultaneously. In principle, it would be possible to implement separate quadrature electrodes for each axis. This is typically not done for reasons of cost and space. In known systems or methods, the voltage changes at the quadrature electrodes are realized as two different, constant levels. More recently, not only such two levels are considered, but the dynamics of the jump allows system identification of additional variables (e.g. frequency split between drive and detection mode). Instead of a single jump (a voltage value) on the quadrature electrodes (only in one direction or axis), excitation by tones or noise sequences in certain frequency ranges is also possible, thus providing information about the system behavior.For closed-loop, mode-matched MEMS angular rate sensors, methods have also been developed to determine sensitivity and frequency splitting in the running detection control loop using pilot tones or the noise inherent in the control loop; however, these methods are not transferable to the open-loop architecture.

[0005] Furthermore, according to the current state of the art, the cross-axis sensitivity CAS must be measured or determined in a complex manner (in particular by applying or generating movement stimuli) during the production of such yaw rate sensors. Disclosure of the invention

[0006] Against this background, the object is to provide a yaw rate sensor with a substrate and a method for producing and / or operating such a yaw rate sensor, which does not have the disadvantages mentioned above.

[0007] The inventive yaw rate sensor with a substrate has the advantage over the prior art that it advantageously enables individual stimulation of each axis. This advantageously makes it possible to identify cross-axis sensitivity (CAS), i.e., the cross-coupling of measurement signals from one axis to another, in a significantly improved manner compared to the prior art.

[0008] In particular, it is advantageously possible according to the invention to perform axis-specific excitation of the MEMS yaw rate sensor without the use of additional electrodes (such as quadrature electrodes) or even entirely without micromechanical adjustments (i.e., adjustments to the structure of the mechanics or the design of the yaw rate sensor). This allows the sensor-internal identification of signal cross-coupling from one axis to another (i.e., a component of the CAS). The method also allows the identification of additional sensor-internal variables (basic capacitance, frequency split of the drive and detection modes, phase error of demodulation). In principle, the method can even make the use of quadrature electrodes superfluous, resulting in cost and size savings and more design freedom. Furthermore, the method is suitable for testing sensor functionality.It can therefore be used as an additional component in safety-critical products (airbags, ESP), for example, during sensor start-up. In contrast to excitation via quadrature electrodes, which require the drive movement to achieve a deflection of the detection mode corresponding to the Coriolis force, the proposed method can, in principle, also be used when the sensor is stationary.

[0009] In particular, it is advantageously possible according to the invention that a determination of the transverse axis sensitivity is possible by self-calibration, which can also be carried out without movement stimuli - for example during the production of the yaw rate sensor.

[0010] Advantageous embodiments and further developments of the invention can be found in the dependent claims and the description with reference to the drawings.

[0011] According to an advantageous embodiment of the invention, the yaw rate sensor comprises a double rotor comprising a first rotor and a second rotor, wherein the first and second rotors—spaced along the X-direction—are elastically connected to the substrate via a respective suspension and are further elastically connected to one another via a coupling element such that the two rotors can be excited to antiphase torsional oscillations. This makes it possible to implement a three-axis yaw rate sensor in a comparatively simple manner.

[0012] A further subject of the invention is a method for producing and / or operating a rotation rate sensor with a substrate according to the independent method claim.

[0013] The method according to the invention for producing and / or operating a yaw rate sensor is advantageous over the prior art because it advantageously enables individual stimulation of each axis. This advantageously makes it possible to determine or identify the transverse axis sensitivity in a significantly improved manner compared to the prior art. According to the invention, this is possible in particular without the use of additional electrodes (such as quadrature electrodes) or even entirely without adaptations to the micromechanical structure, thereby advantageously enabling axis-specific excitation of the MEMS yaw rate sensor and permitting the sensor-internal identification of signal cross-couplings from one axis to another.Furthermore, the identification and determination of additional sensor-internal variables (such as the base capacitance, the frequency split of the drive and detection modes, and demodulation phase errors) becomes possible. In particular, the invention conceivably even eliminates the need for quadrature electrodes, allowing significant savings in the required area of the yaw-rate sensor. Furthermore, the method is suitable for testing sensor functionality. In contrast to excitation via quadrature electrodes, the proposed method can, in principle, also be used when the sensor is stationary.

[0014] For the method for operating the yaw rate sensor with a substrate and a double rotor, the advantages and configurations described in connection with the embodiments of the yaw rate sensor according to the invention with a substrate can be applied.

[0015] According to a further advantageous embodiment of the invention, the micromechanical structure is excited in a specific manner, so that, in particular, conclusions about the transverse axis sensitivity (or the majority of (matrix) components of the transverse axis sensitivity) are possible or can be determined. For this purpose, it is particularly provided that the transverse sensitivity(ies) can be particularly well detected or measured by means of an excitation that is coupled into the sensor structure via the detection electrodes of at least one of the sensitive axes (or sensitive directions).This is possible in particular in that the first and second detection electrodes (of the first detection means related to the X-direction as the sensitive direction or axis) are subjected to the predetermined voltage(s) or voltage profiles, wherein the reference to the first and second detection electrodes (and thus the X-direction) does not imply any restriction of generality, but rather a reference to the third and fourth detection electrodes (related to the Y-direction) or, alternatively, to the fifth and sixth detection electrodes (related to the Z-direction) could have been made in the same way and can be made according to the invention. Thus, when considering the first and second detection electrodes, these are subjected to the predetermined voltage(s) or voltage profiles in such a way that. -- starting - at a first considered point in time - from a first voltage level at the first detection electrode and a second voltage level at the second detection electrode compared to a medium voltage level applied to the deflectable element - in particular abruptly or with a predetermined time profile - -- at a second time considered, a voltage difference between a further first voltage level at the first detection electrode and a further second voltage level at the second detection electrode compared to the medium voltage level applied to the deflectable element is applied and - in particular before, during or after the second time considered - the system response, in particular at the further detection electrodes, is determined.

[0016] This makes it advantageously possible according to the invention to determine the system response of such excitations under controlled conditions, and in particular in a manner that allows this to be done separately for each of the three sensitive directions or axes.

[0017] According to further advantageous embodiments of the invention, it is provided that a differential excitation takes place in which the further first voltage level is changed by a first voltage difference compared to the first voltage level, while the second and the further second voltage level remain unchanged, or in which, conversely, the further second voltage level is changed by a second voltage difference compared to the second voltage level, while the first and the further first voltage level remain unchanged - wherein in particular the first voltage level and the second voltage level are the same.

[0018] Alternatively or cumulatively, however, it is also possible according to the invention for a rectified excitation to take place, in which the further first voltage level is changed relative to the first voltage level by the first voltage difference and the further second voltage level is changed relative to the second voltage level by the second voltage difference, wherein in particular the first and second voltage differences are equal and / or in particular the first voltage level and the second voltage level are equal.

[0019] It is thereby advantageously possible according to the invention to have a plurality of different possibilities for coupling different excitations or types of excitations as well as different temporal profiles thereof into the micromechanical structure of the yaw rate sensor, so that a plurality of parameters of the micromechanical structure can be determined.

[0020] In particular, it is advantageously possible according to the invention that -- all three directions or axes are used - simultaneously or subsequently - for stimulating and / or reading purposes, or that two directions or axes are used or operated for stimulating purposes and - simultaneously or subsequently - one direction or axis is used or operated for reading purposes, and / or that -- a differential excitation is combined with a rectified excitation, and / or that -- instead of a single sudden voltage change, several such voltage changes to different voltage levels and / or recurring jumps and / or tones and / or noise sequences, in particular pseudo-noise sequences, occur, in particular at a frequency close to the drive frequency.

[0021] According to further advantageous embodiments of the invention, it is provided that the method -- is used to carry out a safety test, in particular during or at the beginning of a sensor operation, and / or -- is realized in that - in particular at the beginning of sensor operation - a detection front end, in particular in an application-specific integrated circuit connected to or integrated with the yaw rate sensor, initially remains switched off - during the first time considered - and is then switched on, approximately offset in time with respect to the first detection electrode and subsequently with respect to the second detection electrode and subsequently with respect to a detection electrode of a different direction or axis, in order to generate a first and / or second voltage difference.

[0022] Embodiments of the present invention are illustrated in the drawings and explained in more detail in the following description. Short description of the drawings: Fig. 1 shows a schematic representation of a rotation rate sensor with a substrate and a double rotor according to the present invention. Fig. 2 shows a schematic representation of a flow diagram for illustrating the method according to the invention, wherein in particular a possibility for self-calibration of the transverse axis sensitivity of the yaw rate sensor following a measurement of the transverse axis sensitivity in production by means of movement stimuli is shown. Fig. 3 shows a schematic representation of a flow diagram for illustrating the method according to the invention, wherein in particular a possibility for self-calibration of the transverse axis sensitivity of the yaw rate sensor without measuring the transverse axis sensitivity due to movement stimuli is shown. Fig. 4 shows a schematic representation of the method according to the invention as an example for excitation via the first and second detection electrodes (ie via the first axis or the X-direction). Embodiments of the invention:

[0023] In the various figures, identical parts are always provided with the same reference symbols and are therefore usually named or mentioned only once.

[0024] In Fig. 1 shows a yaw rate sensor according to the invention or a sensor arrangement according to the invention in a plan view, i.e. with a projection direction perpendicular to the main extension plane of the substrate of the yaw rate sensor (in other words, the drawing plane corresponds to the main extension plane of the substrate or a parallel plane). By way of example, the yaw rate sensor has a double rotor structure or a double rotor that can be excited to antiphase oscillations; the double rotor comprises a first rotor 1 and a second rotor 2. The first and second rotors 1, 2 are - spaced apart along the X-direction - elastically connected to the substrate via a respective suspension (arranged centrally for each of the rotors 1, 2, but not specifically shown by reference numerals) and are further elastically connected to one another via a coupling element in such a way that the two rotors 1, 2 can be excited to antiphase torsional oscillations (by means of two curved arrows in Fig. 1) can be excited or driven. Fig. 1 not shown is capable of causing these drive vibrations (torsional vibrations) of the rotors 1, 2, so that in a manner known per se, due to the essentially linear (drive) movements of (radially spaced) partial areas of the rotors 1, 2 and in the presence of rotation rates or rotation rate components about axes of rotation which are perpendicular to the direction of movement of these linear drive movements, Coriolis forces act on the rotors 1, 2 or the partial areas thereof, which lead to deflections of deflectable elements of the sensor structure (either parts of the rotors 1, 2 themselves or of deflectable elements coupled to them).

[0025] To detect these deflections, at least two detection electrodes are provided for each sensitive axis, which are arranged on both sides of the deflectable element in the deflection direction and thus function as double-differential detection electrodes. Fig. 1 shows only schematically - and for each of the rotors 1, 2 - (with regard to a detection of a rotation rate component in the X direction) a first detection electrode 11 and a second detection electrode 12 as well as (with regard to a detection of a rotation rate component in the Y direction) a third detection electrode 13 and a fourth detection electrode 14.

[0026] The invention will be illustrated below essentially using the example of excitation by means of the first and second detection electrodes 11, 12. However, it has already been mentioned that this is merely an example and any other of the existing electrode pairs could also be used. The first detection electrode 11 will also be referred to as CN1, while the second detection electrode 12 will also be referred to as CP1.

[0027] According to the invention, in particular a differential excitation and / or a rectified excitation is proposed: With differential excitation, while the sensor is in operation, both detection electrodes of axis 1 (or the X-direction; CP1 and CN1) have the same potential with respect to the mean voltage (CM), i.e. with respect to the deflectable element of the sensor structure opposite them. The relevant yaw rate (or the yaw rate component) is measured using amplitude-modulated difference signals, which are then demodulated in the ASIC. The same applies to axes 2 and 3, i.e. the Y-direction and the Z-direction. If a step-like voltage difference is now applied between CP1 and CN1, the detection mode oscillates (particularly at its resonant frequency) and then decays again. Alternatively, a step can be applied from an existing difference to a difference of 0V. The other axes, i.e. those corresponding to these axes or the Z-direction, are now also oscillated by cross-coupling (electrically and / or mechanically).The deflectable elements (usually different ones) assigned to these sensitive directions are excited, or an output signal is measured. Through appropriate analysis (e.g., system identification, amplitude or phase evaluation), the cross-coupling can be determined. This identified cross-coupling value can be used to adjust the sensor's CAS compensation.

[0028] Furthermore, directly after the jump (or voltage change) in axis 1 (i.e. at the electrodes CN1, CP1) - but in principle also at the other detection electrodes - information about further system parameters can be obtained, e.g. with suitable mathematical methods of system identification, e.g. phase behavior, gain in relation to the yaw rate output, quality, frequency, positive feedback capability, etc., in particular also their change relative to a further measurement. This is shown schematically in Fig. 4, which will be discussed below.

[0029] Depending on the underlying system model, the values or changes also enable the calculation of mechanical parameters such as mass, stiffness, internal pressure, etc., as well as manufacturing variations such as edge loss and layer thickness of the moving structures. The absolute values and / or changes allow the CAS to adjust the sensor's sensitivity or offset compensation, e.g., to improve its performance over temperature, humidity, mechanical stress, or lifetime. Furthermore, instead of subsequent compensation, the sensor's operating state can also be changed, e.g., to achieve a similar state to its original state.

[0030] With rectified excitation, the potential of both electrodes (CP1 and CP2) is changed in unison. In this case, in an ideal sensor, no differential, i.e., antiparallel, deflection of the detection mode occurs due to direct forces, since the two forces balance each other out. However, the change in the positive feedback still leads to an excitation of the system, e.g., by changing the quadratures and raw offsets of the axis(es) due to the rise and fall of the phase values. The positive feedback capability (in Hz / V) 2 ) can be calculated from the amplitude ratio (e.g., of the offset or quadrature or another test signal or self-test) or phase ratio before and after the rectified voltage step. As with differential excitation, a similar advantage can then be achieved using appropriate methods.

[0031] According to the invention, the following variants and embodiments are provided in particular: -- all three axes can be exciting and / or reading, also exciting two axes simultaneously and reading one axis, or exciting all three axes simultaneously and reading simultaneously or subsequently; -- the differential excitation can be applied as a positive and negative voltage change of equal magnitude or as a different magnitude, ie as a mixture of a differential excitation and a rectified excitation; -- the procedure can be used to perform a safety test, e.g. during sensor start-up; -- instead of a jump (of the applied voltages), jumps on several levels, recurring jumps, tones, or (pseudo-) noise sequences can be used; especially the excitation at the drive frequency f drv is interesting because the Coriolis force is modulated and demodulated there; -- the recurring jumps, tones or (pseudo-) noise sequences can in principle also occur during operation; at frequencies that lie within the useful band of the yaw rate sensor, suitable methods can be used to filter the signals out of the output signal; -- all three axes can be stimulated simultaneously with different sequences; correlation analysis can be used to draw conclusions about the CAS; -- the differential excitation can also be used without drive movement; -- during sensor start-up, it is also possible that the detection front ends in the ASIC are first omitted and then switched on (e.g. offset CP1 then CN1, then the other axis, etc. or in common mode) to generate a step according to the differential or rectified excitation; -- the frequency response of the CAS can be characterized by frequency sweeping of tones corresponding to the differential or rectified excitation; -- the method can be used to identify nonlinear coupling values between the stimulated axis and other modes in the sensor.

[0032] Fig. Figure 2 shows a schematic flow diagram illustrating the method according to the invention; in particular, a possibility for self-calibration of the cross-axis sensitivity of the yaw rate sensor following a measurement of the cross-axis sensitivity during production using motion stimuli is illustrated.

[0033] The process is started in a first process step 101.

[0034] A first block 110 of process steps takes place during the production of the yaw rate sensor: In a second method step 111, the measurement of the transverse axis sensitivity (CAS) is carried out using movement stimuli, i.e., a defined movement—in particular rotation—of the yaw rate sensor to be manufactured takes place in a comparatively complex manner; here, the transverse axis sensitivity is measured and a compensation matrix is determined or created. In a third method step 112, the CAS compensation matrix is stored. In a fourth method step 113, in particular, further parameters are measured. In a fifth method step 114, the further parameters and variables derived therefrom are stored in the sensor. In a sixth method step 115, the second to fifth method steps 111-114 are repeated several times if necessary, in particular with different movement stimuli, for example with different loads such as temperature or the like.In a seventh method step 116, in particular a sensor-specific calculation rule is created and stored in the sensor. In an eighth process step 117, further production steps take place, in particular tape and reel, transport, and soldering into the final product, and possibly conditioning. As a result or consequence of this, a change in the CAS occurs in a ninth process step 118, i.e., the CAS compensation (based on the previously created CAS compensation matrix) is no longer as accurate.

[0035] A further block 130 of process steps takes place after the production of the yaw rate sensor, i.e. in the final product or in the yaw rate sensor itself: In a first sub-block 131, the self-calibration takes place: In a first method step 132 of this, an excitation—for example, a voltage change as described above—takes place on one or more detection electrodes, for example, in the X direction; this takes place according to the differential excitation and / or according to the rectified excitation. In a second method step 133, a measurement and qualitative determination of the cross-coupling to the other axes, such as the second and third axes, takes place. In a third method step 134, further parameters (particularly in all three axes) are identified from the resulting system response to the excitation of the first axis. In a fourth method step 135, the first, second, and third method steps 132, 133, and 134 are repeated with an excitation of the second and third axes, respectively. In a fifth (optional) method step 136, additional parameters are measured. In a sixth (also optional) method step 137, the sensor memory is read out. In a seventh method step 138, a calculation rule is executed. Self-calibration 131 is completed with the seventh method step 138, and the CAS compensation matrix is adjusted in an eighth method step 139. This results in an improvement of the CAS or the CAS compensation matrix (compared to the CAS compensation matrix that existed before self-calibration) in a ninth method step.

[0036] Thus, Fig. 2 a possible flow chart for the CAS parameter in the case that CAS is measured in production and corrected in the field.

[0037] Fig. Figure 3 shows a schematic flow diagram illustrating the method according to the invention; in particular, a possibility for self-calibration of the transverse axis sensitivity of the yaw rate sensor without measuring the transverse axis sensitivity based on movement stimuli is illustrated.

[0038] The process is started in a first process step 201.

[0039] A first block 210 of process steps takes place during the production of the yaw rate sensor: In a first sub-block 211, an identification of the cross-axis sensitivity (CAS) takes place without movement stimuli, ie a self-calibration takes place: In a first method step 212 of this, an excitation—for example, a voltage change as described above—takes place on one or more detection electrodes, for example, in the X direction; this takes place according to the differential excitation and / or according to the rectified excitation. In a second method step 213, a measurement and qualitative determination of the cross-coupling to the other axes, such as the second and third axes, takes place. In a third method step 214, further parameters (particularly in all three axes) are identified from the resulting system response to the excitation of the first axis. In a fourth method step 215, the first, second, and third method steps 212, 213, and 214 are repeated with an excitation of the second and third axes, respectively. In a fifth method step 216, the CAS compensation matrix is stored. In a sixth method step 217, in particular, a measurement of further parameters takes place. In a seventh method step 218, the further parameters and variables derived therefrom are stored in the sensor. In an eighth method step 219, the first to seventh method steps 212-218 may be repeated several times, if necessary, in particular for different measuring points with, for example, different loads such as temperature or the like. In a ninth method step 220, in particular, a sensor-specific calculation rule is created and stored in the sensor. In a tenth process step 221, further manufacturing steps take place, in particular tape and reel, transport, and soldering into the final product, and possibly conditioning. As a result or consequence of this, a change in the CAS occurs in an eleventh process step 223, i.e., the CAS compensation (based on the previously created CAS compensation matrix) is no longer as accurate.

[0040] A further block 230 of process steps takes place after the production of the yaw rate sensor, i.e. in the final product or in the yaw rate sensor itself: In a first sub-block 231, the self-calibration takes place: In a first method step 232 of this, an excitation—for example, a voltage change as described above—takes place on one or more detection electrodes, for example, in the X direction; this takes place according to the differential excitation and / or according to the rectified excitation. In a second method step 233, a measurement and qualitative determination of the cross-coupling to the other axes, such as the second and third axes, takes place. In a third method step 234, further parameters (particularly in all three axes) are identified from the resulting system response to the excitation of the first axis. In a fourth method step 235, the first, second, and third method steps 232, 233, and 234 are repeated with an excitation of the second and third axes, respectively. In a fifth (optional) method step 236, additional parameters are measured. In a sixth (also optional) method step 237, the sensor memory is read out. In a seventh method step 238, a calculation rule is executed. Self-calibration 231 is completed with the seventh method step 238, and the CAS compensation matrix is adjusted in an eighth method step 239. This results in an improvement of the CAS or the CAS compensation matrix (compared to the CAS compensation matrix that existed before self-calibration) in a ninth method step.

[0041] Thus, Fig. 3 the case where the method according to the invention enables the CAS to be identified cost-effectively during production without movement stimuli.

[0042] Fig. Figure 4 shows a schematic representation of the method according to the invention as an example for excitation via the first and second detection electrodes 11, 12 (ie via those detection electrodes of the first axis or the X-direction): In process steps 132 or 212 or 232, an excitation takes place (see reference number 20 in Fig.4), which occurs on the first and second detection electrodes 11, 12 (cf. the schematically illustrated 'step function' over time), but not on the other detection electrodes 13, 14, 15, 16 (cf. the temporally constant course). Due to the couplings 25 present in the micromechanical structure of the yaw rate sensor (in particular the couplings due to the mechanics of the first axis (or X direction) 251, the couplings due to the mechanics of the second axis (or Y direction) 252 or the couplings due to the mechanics of the third axis (or Z direction) 253), different system responses arise on or at the corresponding detection electrodes (cf. reference numeral 30 and the different temporal courses (and in particular different amplitudes) of the system responses assigned to the respective axes ordirections are assigned; for example, it is schematically shown that there is less coupling in the second axis than in the third axis). The system responses are recorded and evaluated in method steps 133, 213, and 233, respectively. According to the invention, in particular, further method steps: -- an amplitude and phase evaluation and / or system identification takes place, in particular based on neural networks (reference numeral 255); this particularly concerns (reference numeral 256) the CAS coupling coefficients, various frequencies, qualities, phases, positive feedback capabilities, gains, mechanical or manufacturing parameters, and the like; -- in particular (see reference numeral 257) an algorithm for calculating a compensation rule or an adaptation of the operating state takes place; -- Furthermore, according to the invention (cf. reference numeral 258), a trim is carried out or an improvement of CAS, offset, sensitivity, noise, etc. is carried out via environmental influences and / or aging.

[0043] The invention is not limited to the embodiments described above, but can be used in a variety of applications for inertial sensor-based navigation, orientation, and stabilization of objects. A computing unit in the sensor can be used to control the operation of the inertial sensor (e.g., power-saving mode, measuring ranges), check the plausibility of sensor signals and their tolerances (e.g., for internal sensor monitoring), perform signal processing (e.g., calculation of position or orientation, data filtering), and select communication protocols. Various, even self-learning, AI-based algorithms can be used in the computing unit to evaluate and process the signals from the inertial sensors, the temperature sensors, and also from external data (e.g., GPS data, odometer data). Use is also conceivable in: Two-wheeled vehicles such as motorcycles, bicycles, and scooters (e.g.,ESP / AirBag, tilt detection, balancing); three-wheel applications (e.g. TucTuc); aviation applications (e.g. flight stabilization and control); industrial robot applications (e.g. controlling the position of excavator buckets, drilling, image stabilization, flight control, satellite antenna alignment, fine motor skills for gripper robots); home and garden applications (e.g. navigation of lawn mowers, lawn mowers, door position monitoring,...); medical applications (e.g. fall detection, motion and posture detection,...); sports and leisure activities (e.g. motion detection, posture detection, in golf clubs, tennis rackets, skis); numerous CE applications (e.g. in smartphones, tablets, wearables, hearables, drones, toys).The invention can also be used in the context of smartphones and tablets for the following applications: screen orientation, significant movements, device orientation, activity, gesture, and context recognition, image stabilization, indoor SLAM (simultaneous localization and mapping), shock and free fall detection, and motion control. In the context of wearables, hearables, AR, and VR, the invention can be used for the following applications: display information; step counting; activity, gesture, and context recognition; calorie counting; in-ear detection; sleep monitoring; elderly care; indoor navigation; position tracking; low-power sensing; real-time motion detection; head movement tracking; precise sensor data fusion.In the context of drones, games, and toys, the invention can be used for the following applications: orientation; gimbal; altitude stabilization; flight control; motion tracking, motion control, balance; activity and gesture recognition. In the context of robots, the invention can be used for the following applications: navigation; boundary detection; dynamic path planning; indoor SLAM; air quality monitoring; blockage detection. In the context of smart homes, the invention can be used for the following applications: intrusion detection, air quality monitoring, mold detection, climate control, floor level detection, and indoor navigation. The invention can also be used in an industrial context for the following applications: water level detection; asset tracking; navigation and control; motion and position tracking; energy management; predictive maintenance.Furthermore, numerous modifications, variations, designs, arrangements and embodiments are possible, all of which fall within the scope of the invention.

Claims

[1] A yaw rate sensor comprising a substrate, wherein the substrate has a main extension plane with an X-direction and a Y-direction running perpendicular thereto and also parallel to the main extension plane, wherein a Z-direction runs perpendicular to the main extension plane, wherein the yaw rate sensor is configured such that applied yaw rates about each of these directions can be detected such that both the X-direction and the Y-direction and the Z-direction are sensitive directions or axes, wherein the yaw rate sensor has at least one seismic mass, wherein the yaw rate sensor is configured such that the at least one seismic mass is drivable or is driven to a drive movement along a drive direction for the detection of a yaw rate, wherein the yaw rate sensor is further configured such thatthat the effect of a Coriolis force or a Coriolis force component on the driven at least one seismic mass can be detected by detecting a deflection of a deflectable element of the yaw rate sensor in a detection direction perpendicular to the drive direction, wherein for this purpose the yaw rate sensor has first detection means for detecting a yaw rate about the X direction, second detection means for detecting a yaw rate about the Y direction and third detection means for detecting a yaw rate about the Z direction, wherein the first detection means have at least a first and second detection electrode (11, 12), the second detection means have at least a third and fourth detection electrode (13, 14) and the third detection means have at least a fifth and sixth detection electrode (15, 16), , characterized byin that, in order to determine at least the transverse axis sensitivity, the detection electrodes (11, 12, 13, 14, 15, 16) of the first, second and / or third detection means are subjected to one or more predetermined and at least partially varying voltages or voltage curves, and at least the transverse axis sensitivity is determined or improved by means of the system response. [2] Rotation rate sensor according to claim 1, characterized by in that the rotation rate sensor comprises a double rotor comprising a first rotor (1) and a second rotor (2), wherein the first and second rotors (1, 2) - spaced apart along the X direction - are elastically connected to the substrate via a respective suspension and are further elastically connected to one another via a coupling element in such a way that the two rotors (1, 2) can be excited to antiphase torsional oscillations. [3] A method for producing and / or operating a yaw rate sensor with a substrate, wherein the substrate has a main extension plane with an X-direction and a Y-direction running perpendicular thereto and also parallel to the main extension plane, wherein a Z-direction runs perpendicular to the main extension plane, wherein the yaw rate sensor is configured such that applied yaw rates about each of these directions can be detected such that both the X-direction and the Y-direction and the Z-direction are sensitive directions or axes, wherein the yaw rate sensor has at least one seismic mass, wherein the yaw rate sensor is configured such that the at least one seismic mass is drivable or is driven to a drive movement along a drive direction for the detection of a yaw rate, wherein the yaw rate sensor is further configured such thatthat the effect of a Coriolis force or a Coriolis force component on the driven at least one seismic mass can be detected by detecting a deflection of a deflectable element of the yaw rate sensor in a detection direction perpendicular to the drive direction, wherein for this purpose the yaw rate sensor has first detection means for detecting a yaw rate about the X direction, second detection means for detecting a yaw rate about the Y direction and third detection means for detecting a yaw rate about the Z direction, wherein the first detection means have at least a first and second detection electrode (11, 12), the second detection means have at least a third and fourth detection electrode (13, 14) and the third detection means have at least a fifth and sixth detection electrode (15, 16), , characterized byin that, in order to determine at least the transverse axis sensitivity, the detection electrodes (11, 12, 13, 14, 15, 16) of the first, second and / or third detection means are subjected to one or more predetermined and at least partially varying voltages or voltage curves, and at least the transverse axis sensitivity is determined or improved by means of the system response. [4] Method according to claim 3, characterized by that the first and second detection electrodes (11, 12) are subjected to the predetermined voltage(s) or voltage profiles in such a way that -- starting - at a first considered point in time - from a first voltage level at the first detection electrode and a second voltage level at the second detection electrode compared to a medium voltage level applied to the deflectable element - in particular abruptly or with a predetermined time profile - -- at a second considered time, a voltage difference of a further first voltage level is applied to the first detection electrode and a further second voltage level is applied to the second detection electrode compared to the medium voltage level applied to the deflectable element, and - in particular before, during or after the second time considered - the system response, in particular at the further detection electrodes (13, 14, 15, 16), is determined. [5] Method according to claim 3 or 4, characterized by , that -- a differential excitation occurs, in which the further first voltage level is changed by a first voltage difference compared to the first voltage level, while the second and the further second voltage level remain unchanged, or in which, conversely, the further second voltage level is changed by a second voltage difference compared to the second voltage level, while the first and the further first voltage level remain unchanged - in particular, the first voltage level and the second voltage level being the same - and / or -- a rectified excitation takes place, in which the further first voltage level is changed by the first voltage difference compared to the first voltage level and the further second voltage level is also changed by the second voltage difference compared to the second voltage level, wherein in particular the first and second voltage differences are equal and / or in particular the first voltage level and the second voltage level are equal. [6] Method according to one of claims 3 to 5, characterized by , that -- all three directions or axes are used - simultaneously or subsequently - for stimulating and / or reading purposes, or that two directions or axes are used or operated for stimulating purposes and - simultaneously or subsequently - one direction or axis is used or operated for reading purposes, and / or -- a differential excitation is combined with a rectified excitation, and / or -- instead of a single sudden voltage change, several such voltage changes to different voltage levels and / or recurring jumps and / or tones and / or noise sequences, in particular pseudo-noise sequences, occur, in particular at a frequency close to the drive frequency. [7] Method according to one of claims 3 to 6, characterized by that the method is carried out during operation or in parallel with the ongoing operation of the yaw rate sensor, whereby in particular the differential excitation and the corresponding evaluation can also be used or applied without drive movement. [8] Method according to one of claims 3 to 7, characterized by that the procedure -- is used to carry out a safety test, in particular during or at the beginning of a sensor operation, and / or -- is realized by - especially when the sensor operation starts - a detection front end, in particular in an application-specific integrated circuit connected to or integrated with the rotation rate sensor, initially remains switched off during the first time point under consideration and is then switched on, for example offset in time with respect to the first detection electrode and subsequently with respect to the second detection electrode and subsequently with respect to a detection electrode of a different direction or axis, in order to generate a first and / or second voltage difference.

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