Optical system; method for adjusting and operating an optical group; equipment for manufacturing and / or processing optical elements

Abstract

The invention relates to an optical system (1) comprising a first system unit (2a), a second system unit (2b), and an intermediate optical group (3), which together form a beam path for a light beam (4). The first system unit (2a) and the second system unit (2b) each have a substantially cylindrical telescopic unit (5) with a movable front sleeve element (5a) and a rear sleeve element (5b), which can be retracted and extended towards the optical group (3) by means of the front sleeve element (5a). In a retracted state, the telescopic units (5) create a space (A) between the optical group (3) and the first system unit (2a) and a space (B) between the optical group (3) and the second system unit (2b) in an axial direction along the light beam (4). In an extended state, the telescopic units (5) close the spaces (A, B) in the axial direction.The optical group (3) is movable relative to the telescope units (5), at least when the telescope units (5) are retracted, in order to adjust the optical group (3) by means of an adjustment device (6) of the optical group (3). The optical group (3) has a substantially circular or cylindrical adapter element (7) at each of its first end (3a) facing the first system unit (2a) and second end (3b) facing the second system unit (2b).

Description

[0001] The invention relates to an optical system comprising a first system unit, a second system unit and an optics group.

[0002] The invention also relates to a method for adjusting and operating an optical group.

[0003] The invention further relates to a system for the manufacture and / or processing of optical elements and / or their precursors, in particular optical elements for a lithography system.

[0004] When using optical methods, for example from the field of laser processing technology, for the manufacturing and / or processing of products or components, a light or laser beam is frequently employed, either for the actual material processing or for process control. Optics or optical assemblies are required to adjust, shape, and / or guide the light beam. This gives rise to a number of challenges that, according to the current state of the art, cannot yet be satisfactorily solved together.

[0005] One challenge lies in the unwanted contamination of the optics by auxiliary materials, especially liquids such as etching agents, lubricants, or coolants, or by material removal from the product or component being manufactured, or by other particles or dust in the environment. Even small particles can contaminate the optics, which can lead to impaired function or even damage, particularly in combination with high-energy laser radiation.

[0006] This necessitates the protection of optics from particle contamination by means of a seal or gasket. Particle contamination can be particularly critical in the manufacture of optical elements for applications with high purity requirements, such as in EUV or DUV projection exposure systems for semiconductor or microlithography.

[0007] Another challenge is that the optics, while needing to be tightly sealed, must also be adjustable to adapt the light beam path as required. This necessitates maintaining a degree of flexibility in the optics despite the desired particle protection. Furthermore, optics typically have sensitive surfaces, making direct contact and excessive force undesirable.

[0008] From DE 10 2023 208 279 A1, a method and a device for processing an optical surface on a workpiece with a fluid are known, wherein the workpiece is rotated about an axis of rotation. A radially circumferential gap on the rotating workpiece is sealed with a so-called non-contact seal comprising a rotating and a stationary sealing element to prevent fluid from penetrating and passing through the gap. For this purpose, the rotating sealing element preferably has drip skirts with drip edges, and the stationary sealing element preferably has collecting channels and / or drainage slots.

[0009] However, the contactless seal according to DE 10 2023 208 279 A1 is designed and configured only for rotating workpieces. This contactless seal does not permit any movement other than rotation, where the workpiece changes its orientation but not its position in space. Therefore, the seal of DE 10 2023 208 279 A1 is not suitable for adjustable optics, which require a certain amount of play in various spatial directions for adjustment.

[0010] Furthermore, it has been shown that the seal designed for protection against fluids according to DE 10 2023 208 279 A1 is not suitable for protection against (dry) particles and dust. However, particle protection is of particular importance for sealing optics or optical assemblies in the aforementioned context of optical material processing, since fluids are generally not used in this process.

[0011] The present invention is therefore based on the objective of creating an optical system that is improved compared to the prior art and is particularly advantageously suited for adjusting an optical group of the optical system.

[0012] According to the invention, this problem is solved by a device having the features mentioned in claim 1.

[0013] The present invention also aims to create a method for adjusting and operating an optical group that is improved compared to the prior art.

[0014] According to the invention, this problem is solved by a device having the features mentioned in claim 15.

[0015] The present invention further aims to create a system for the manufacture and / or processing of optical elements and / or their precursors that is improved compared to the prior art.

[0016] According to the invention, this problem is solved by a device having the features mentioned in claim 16.

[0017] Advantageous embodiments of the device and method according to the invention are shown, among other things, in the respective dependent claims and in the following description.

[0018] The optical system according to the invention comprises a first system unit, a second system unit, and an optics group arranged between them, which together form a beam path for a light beam, wherein the first system unit and the second system unit each have a substantially cylindrical telescopic unit with a movable front sleeve element and a rear sleeve element, which can be retracted and extended towards the optics group by means of the front sleeve element, wherein, in a retracted state, the telescopic units open a space in an axial direction along the light beam between the optics group and the first system unit and a space between the optics group and the second system unit, and, in an extended state, the telescopic units close the spaces in the axial direction.wherein the optical group is movable relative to the telescope units at least in the retracted state in order to adjust the optical group by means of an adjustment device of the optical group, wherein the optical group has a substantially circular or cylindrical adapter element at one end facing the first system unit and at one end facing the second system unit, wherein the telescope units of the system units, in particular the front sleeve elements, and the adapter elements of the optical group each have at least one annular barrier, preferably a plurality of annular barriers, which in the extended state of the telescope units interact to protect the optical group from external particles by the barriers together forming a particle protection labyrinth,wherein, in the extended state of the telescope units, a radially circumferential gap remains between the respective telescope unit and the respective adapter element, and wherein the ends of the optical group are spatially separated from the telescope units of the system units by the respective gap in the extended state of the telescope units.

[0019] The optical system according to the invention is particularly advantageously suited for adjusting and contactless sealing of an optical group within the optical system. In particular, the invention makes it possible to protect the optical group during operation against particles, dust, dirt, and the like, as well as against fluids and splashes, without endangering sensitive surfaces of the optical group through contact and / or force. At the same time, sufficient clearance in various spatial directions is maintained for adjusting the optical group. This applies to the (movement) clearance when adjusting the optical group, especially with retracted telescope units, but also to the clearance for an optical group that has been misaligned by the adjustment, particularly with extended telescope units, which is to be sealed for its intended use.

[0020] It is preferably provided that the telescopic units are at least partially retracted during the adjustment process. This ensures maximum mobility of the optical assembly for adjustment. During normal use or operation of the optical assembly, it is preferably provided that the telescopic units are at least partially extended, preferably such that the gaps or distances in the axial direction between the system units and the respective end of the optical assembly are closed, covered, or bridged. The particle protection labyrinth is then formed to seal the optical assembly.

[0021] In the context of this invention, the term "seal" refers in particular to a shield or protection against the ingress of particles or substances, especially particles, dust, dirt, fluids, and / or splashes. A seal is specifically not to be understood as an impermeable seal, i.e., for example, not a completely watertight seal. With regard to fluids, the seal can be understood in particular as a splash guard.

[0022] The extension path of the telescope units is preferably dimensioned such that the respective gap between the ends of the optical group and the respective system unit can be closed in the axial direction, even when the adjustment device assumes a predetermined extreme position. For this purpose, the extension path and the adjustment options of the optical group via the adjustment device are preferably coordinated accordingly.

[0023] The optical group, or optical assembly, may comprise multiple optical elements or components, such as mirrors, lenses, diffraction gratings, and / or filters. Typically, when used as intended, the optical group serves to adjust, shape, and / or direct light or radiation, possibly within a larger optical setup or system. For example, the optical group may be designed as a beam expander or expanding telescope, primarily to increase or decrease the cross-section of a light beam. However, it may also be a differently configured optical group designed for other purposes.

[0024] For the proper use of the optical group, it is generally necessary to adjust or align the beam path, for example, so that the light beam passes centrally through the optical group and / or, in the case of an optical group designed as a beam expander, so that the cross-section of the light beam has the desired size after passing through the optical group. During alignment, the optical group can move, not only internally but also relative to its surroundings or to the telescope components. Depending on the adjustment options of the alignment unit, the movement of the optical group can occur in various spatial directions. This may also result in a tilting of the optical group.Due to the radial gap remaining between the respective telescope unit and the respective adapter element in the extended state of the telescope units according to the invention, the adjusted optical unit can still be sealed or protected from particles etc. for its intended use.

[0025] The first system unit, the optics group and the second system unit are preferably arranged on a common axis or straight line.

[0026] It is preferably provided that a light beam can propagate through the optical group along a substantially straight beam path. The beam path of the light beam through the optical group is part of the overall beam path of the light beam through the optical system; that is, the beam path through the optical group and the respective beam paths through the system units together constitute the beam path.

[0027] The common axis of the first system unit, the optics group and the second system unit, as well as the beam path of the light beam through the optics group, preferably point in the axial direction.

[0028] The axial direction is preferably defined by a straight connection between the two system units, between which the optical group is arranged.

[0029] The cylindrical telescope units of the system units preferably have a continuous cavity with a round or circular cross-section, wherein the telescope units are preferably arranged and their cavities preferably oriented such that the beam path of the optical group continues into the telescope units. The circular or cylindrical adapter elements are preferably oriented analogously to the telescope units. In other words, the beam path is preferably radially enclosed by the telescope units and the adapter elements, in analogy to a cylinder, particularly by their lateral surfaces.

[0030] It has proven particularly advantageous if the telescopic units are infinitely extendable and retractable. The telescopic units can preferably be extendable and retractable in a telescopic manner. Optionally, further sleeve elements can be provided between the front and rear sleeve elements for this purpose. The front and, if applicable, the further sleeve elements are preferably slidable or extendable, while the rear sleeve element can optionally be relatively fixed or stationary. The front and, if applicable, the further sleeve elements can preferably be designed as sliding sleeves.

[0031] The optical group and the system units with the telescope units are arranged in such a way, and the telescope units are designed and configured in such a way that, in the retracted state of the telescope units, the respective free space to the optical unit remains in the axial direction, and that, in the extended state of the telescope units, this space is closed, covered, or bridged in the axial direction.

[0032] The ring-shaped barriers or obstacles of the telescope units and adapter elements are essentially circular or round, particularly perpendicular to the common axis of the system units and the optical group, or to the beam path within the optical group, or in cross-section. The barriers essentially follow the shape of the respective lateral surface of the telescope units or adapter elements.

[0033] The respective gap is formed, in particular, between the respective telescopic unit or the barriers of the telescopic unit and the respective adapter element or the barriers of the adapter element. The telescopic units can preferably have a larger diameter than the adapter elements and thus be located on the outside. However, a reverse arrangement is also possible.

[0034] The gap does not need to be uniform; that is, it does not need to have a uniform width and / or height. For example, the gap may be narrowed, at least in sections, by the barriers.

[0035] Due to the barriers of the telescope unit, which project into the respective gap from one side, and the barriers of the corresponding adapter element, which project into the respective gap from the other side, there is preferably no straight path through the gap, but only a winding, labyrinthine, or meandering path. Within the scope of the invention, this is also referred to as a particle labyrinth. This prevents particles and the like from passing through the gap. In other words, the particle labyrinth significantly reduces the probability of particles penetrating the optical unit from the outside.

[0036] By spatially separating the ends of the optical groups from the telescope units, it can be ensured that no force is transmitted between the respective system unit and the optical group. In the extended state of the telescope units, this is achieved in particular by the gap. Preferably, the ends of the optical group are also mechanically decoupled from the telescope units by this spatial separation.

[0037] In a simplified modification of the invention, it can also be provided that only one of the telescopic units is retractable, i.e. the other telescopic unit may be fixed and may be designed as a simple sleeve.

[0038] It should be noted that the inventive concept can also be applied to a device that comprises the first system unit, the second system unit, and their respective components analogous to the optical system according to the invention, but which does not include an optical group. Optionally, the device may nevertheless include adapter elements. Such a device can be used flexibly and advantageously for different optical groups not belonging to the device itself. Within a larger optical setup, this device can allow the optical group to be interchangeable according to current requirements.

[0039] It is advantageous if the gap is large enough to prevent force transmission and to provide enough play or space for the adjusted optical group, but also small enough to effectively avoid or prevent the ingress of particles, dust and / or fluids or fluid splashes.

[0040] It has proven to be particularly suitable if the gap between the telescopic units in the extended state and the respective adapter element, especially with regard to a centered position of the telescopic units and the adapter elements, is greater than 1 mm, preferably greater than 2.5 mm, further preferably greater than 5 mm, and / or less than 15 mm, preferably less than 10 mm, further preferably less than 7.5 mm.

[0041] In other words, the gap, particularly with regard to a centered position of the telescopic units and adapter elements, can be widely adjustable, preferably between 1 mm and 15 mm, more preferably between 2.5 mm and 10 mm, and most preferably between 5 mm and 7.5 mm.

[0042] As mentioned previously, the gap does not need to be the same width across the entire radius or circumference of the telescope units and adapter elements. Furthermore, the telescope units and adapter elements do not need to be perfectly centered, as the very purpose of the gap is to provide a certain degree of adjustment for the optical group. The values ​​given above refer to a centered position.

[0043] It may preferably be provided that one or both of the telescopic units and / or one or both of the adapter elements each have at least two, preferably at least three, more preferably at least four, particularly preferably at least five, annular barriers.

[0044] It can also be advantageous if, in total, i.e., in the sum of the barriers of the telescopic units and the adapter elements, at least two, preferably at least three, more preferably at least four, and particularly preferably at least five, annular barriers are provided.

[0045] Generally, a larger number of barriers in the particle labyrinth will achieve a better protective effect.

[0046] A design has proven particularly suitable in which the barriers of the telescopic units and the barriers of the adapter elements are alternately and axially offset from each other in the extended state of the telescopic units, so that the barriers interlock without contact.

[0047] The barriers can also be directly opposite each other.

[0048] Preferably, the gap can be labyrinthine and / or meandering in cross-section.

[0049] The respective gap is formed particularly in the extended state of the telescopic unit in question.

[0050] It may be provided that the ring-shaped barriers of the telescopic units and / or the adapter elements are designed as overhangs, skirts, noses, corners, grooves and / or channels.

[0051] Indentations and / or depressions can also act as barriers.

[0052] It may be provided that the adapter elements and the optical group can be connected or joined by force-fit, form-fit and / or material-fit connection, or that the adapter elements are manufactured as a single piece with the optical group.

[0053] If the adapter elements are connected to the rest of the optical assembly by force-fit, form-fit, and / or material-fit, they are interchangeable for flexible use. This can be achieved, for example, by means of screws. If the adapter elements are formed as a single unit with the rest of the optical assembly, they are an integral part of the optical assembly.

[0054] Preferably, the optical group can comprise a plurality of optical components, in particular mirrors, lenses and / or filters, which are at least partially adjustable and / or settable by means of the adjustment device.

[0055] It has proven to be of great advantage if the adjustment device allows adjustment of the optical group with at least two, preferably at least four, particularly preferably six, degrees of freedom and / or if the adjustment device allows tilting of the optical group.

[0056] As described above, the present invention makes it advantageously possible to combine such a complex adjustment option with good particle protection.

[0057] It may preferably be provided that at least one of the telescope units has an internal thread at a front end of the telescope unit facing the optical group for attaching adjustment elements, in particular apertures, reticles, filters and / or converter cards.

[0058] This can significantly simplify the adjustment of the optical group.

[0059] The front end of the telescope unit refers specifically to the retracted state of the telescope unit. The front end of the telescope unit can be associated with the front or rear sleeve element, depending on which of the sleeve elements is axially closer to the optical group when the telescope unit is retracted.

[0060] The internal thread can preferably be formed on an inner wall of the innermost sleeve element, with the front end of the telescopic unit being formed on the innermost sleeve element. Preferably, the rearmost sleeve element can be located further inwards and have the internal thread. However, it is also possible for the frontmost sleeve element to be located further inwards and have the internal thread.

[0061] It can be advantageous if one or both of the telescopic units can be fixed in their retracted and / or extended state by means of a fixing element, preferably a screw, more preferably a setscrew.

[0062] It can be advantageous if the first system unit and / or the second system unit each has a deflecting mirror, preferably oriented at a 45° angle to the vertical, to deflect a light beam introduced into the optical system, preferably vertically from below, onto the beam path within the optical group, preferably horizontally, and / or to deflect the light beam after passing through the optical group, preferably vertically downwards.

[0063] The preferred arrangement of the deflecting mirror described above can be applied to any optical system arranged arbitrarily in space. The entire optical system can therefore, for example, be oriented upside down, rotated by 180°, or tilted by any angle, e.g., 90°.

[0064] It can generally be provided that the light beam is introduced into the optical system at a 90° angle relative to the beam path within the optical group. In this case, the deflecting mirror is preferably aligned at a 45° angle to the direction of incidence of the light beam.

[0065] The light beam can also be introduced into the optical system from any other direction by adjusting the deflecting mirror accordingly to redirect the light beam from its direction of incidence onto the beam path within the optical group.

[0066] It may be provided that the first system unit and / or the second system unit is adjustable by means of an adjustment device.

[0067] This is particularly advantageous in addition to the adjustment device of the optical unit, for example to compensate for changes in the beam path, especially by means of the deflecting mirror.

[0068] It is particularly advantageous if the optical group is arranged on a carrier plate.

[0069] This allows for pre-assembly and, if necessary, pre-adjustment of the optical group. This can be particularly advantageous if the optical system, including the optical group, is located in a relatively difficult-to-access position within a larger optical setup or system during intended use.

[0070] Preferably, the optical group and / or the carrier plate can have a mechanical decoupling from the environment or the solid world.

[0071] It has proven advantageous if the first system unit and / or the second system unit each have a flange which is designed and configured to attach a cover and / or a camera to the respective system unit.

[0072] In other words, the flange is preferably designed and configured to accommodate the cover and / or the camera, in particular optionally either the cover or the camera.

[0073] The flange preferably has a thread.

[0074] The flange can be designed in particular as a connecting piece or link between the respective system unit and the camera or the cover.

[0075] Furthermore, an intermediate ring or adapter may be provided.

[0076] The camera can be attached to one of the system units, for example, for adjustment purposes. It may be preferable to close the respective system unit with the cover when the camera is not in use.

[0077] Optionally, the flange can also be designed to connect or accommodate measuring devices other than a camera.

[0078] It has proven particularly suitable if at least one housing of the optical group and / or the telescope units of the devices are made of black anodized, burnished, oxidized or painted metal, preferably aluminum or stainless steel. Furthermore, the surface of the black metal is preferably matte.

[0079] This can serve, among other things, to protect the laser. Furthermore, the materials used should ideally be suitable for cleanroom environments.

[0080] The invention also relates to a method for adjusting and operating an optical group of an optical system according to the invention, comprising one or more features as described above, wherein the optical system is preferably arranged in a cleanroom environment, and wherein at least the following steps are provided: - Retraction of the telescopic units of the system units; - Adjusting the optical group using the adjustment device to set the beam path of a light beam within the optical group and / or to modify the light beam along the beam path; - Extending the telescopic units and positioning the telescopic units against the respective adapter element of the optical group, so that the barriers of the telescopic units together with the barriers of the adapter elements form the particle protection labyrinth, whereby the radially circumferential gap remains between the respective telescopic unit and the respective adapter element, and wherein the ends of the optical group are spatially separated from the telescopic units of the system units by the respective gap; and - Introducing a light beam via one of the system units into the optics group in order to adjust, shape and / or direct the light beam, especially for the manufacture, processing and / or analysis of optical elements and / or their precursors.

[0081] The advantages of the method according to the invention result analogously from the advantages of the optical system according to the invention already described above.

[0082] The method according to the invention describes a preferred use of the optical system according to the invention. However, the optical system according to the invention can also be used in other ways.

[0083] The optics group refers in particular to the optics group of the optical system according to the invention.

[0084] Preferably, the steps of the procedure listed above can be carried out in the specified order. Additional steps and / or intermediate steps may be provided as needed.

[0085] The step of retracting the telescopic units should be performed while the telescopic units are still in the extended position. If the telescopic units are already retracted, this step can be omitted.

[0086] For a preferred use of the light beam for the manufacture, processing and / or analysis of optical elements and / or their precursors, reference is also made to the following description of a further subject matter of the invention.

[0087] The invention further relates to a system for the manufacture and / or processing of optical elements and / or their precursors, in particular optical elements for a lithography system, comprising an illumination device for emitting a light beam, in particular a laser beam, and at least one optical group for adjusting, shaping, and / or directing the light beam, wherein the light beam serves for the processing and / or analysis of the optical element. It is provided that the optical group is adjustable and sealed by an optical system according to the invention, comprising one or more features as described above, and / or that the optical group is adjusted and operated by a method according to the invention, comprising one or more features as described above, wherein the optical system is arranged in a cleanroom environment.

[0088] The advantages of the system according to the invention result analogously from the advantages of the optical system and the method according to the invention already described above.

[0089] The optical system and the method according to the invention can preferably be used in the context of the apparatus according to the invention. However, the possible applications of the optical system and the method according to the invention are not limited to this.

[0090] The system in question may be, in particular, a system for the optical processing of optical elements and / or their precursors, preferably using laser processing technology. The light or laser beam may be used for the actual material processing and / or for process control. The system may, for example, be configured and designed to introduce cavities into optical elements, for instance, by means of laser ablation.

[0091] However, it could also be a different type of system. The invention is analogous to a system for the production and / or processing of workpieces, in particular workpieces made of glass, metal, or polymers or plastics. The light or laser beam can, for example, be used for material processing by laser ablation or laser welding. Furthermore, the light or laser beam can be used, for example, for process control during the tempering of glass substrates, in 3D printing, and / or in additive manufacturing.

[0092] The optical element can be, in particular, a mirror or a lens. The precursors of the optical element can include, among other things, the starting material or the material used to manufacture the optical element, i.e., for example, glass. Furthermore, the precursors can include all further intermediate stages from the material to the finished optical element.

[0093] The optical element can preferably be used in a lithography system, in particular in a projection exposure system for semiconductor lithography. Reference is also made to the applicant's DE 10 2008 009 600 A1.

[0094] It is preferably possible that at least the optical system with the optics group is arranged in the cleanroom environment, and more preferably the entire system. The cleanroom environment preferably has at least cleanroom class ISO 9, more preferably ISO 8, and particularly preferably ISO 7 or better.

[0095] Features described in connection with one of the subject matter of the invention, in particular those given by the optical system, the method, or the apparatus according to the invention, can also be advantageously implemented for the other subject matter of the invention. Likewise, advantages mentioned in connection with one of the subject matter of the invention can also be understood to relate to the other subject matter of the invention.

[0096] It should also be noted that terms such as "comprehensive," "exhibiting," or "with" do not exclude other characteristics or steps. Furthermore, terms such as "a" or "that," which indicate a singular number of steps or characteristics, do not exclude a plurality of characteristics or steps—and vice versa.

[0097] It should be noted that designations such as "first" or "second" etc. are primarily used for the purpose of distinguishing between the respective device or process features and are not necessarily intended to indicate that features are mutually dependent or related to each other.

[0098] Exemplary embodiments of the invention are described in more detail below with reference to the drawing.

[0099] The figures each show preferred embodiments in which individual features of the present invention are combined with one another. Features of an embodiment can also be implemented independently of the other features of the same embodiment and can therefore be readily combined by a person skilled in the art to form further meaningful combinations and subcombinations with features of other embodiments.

[0100] In the figures, functionally identical elements are provided with the same reference symbols.

[0101] They show: Fig. 1 a basic cross-sectional view of an embodiment of the system according to the invention with extended telescopic units; Fig. 2 another view after the Fig. 1 with retracted telescopic units; Fig. 3 another view after the Fig. 2 with optional adjustment element; and Fig. 4 a schematic block diagram of an embodiment of the system according to the invention.

[0102] The figures described below represent the invention only in an exemplary and highly schematic way.

[0103] The invention relates to an optical system 1 comprising a first system unit 2a, a second system unit 2b, and an optical group 3 arranged between them, which together form a beam path for a light beam 4. The first system unit 2a and the second system unit 2b each have a substantially cylindrical telescopic unit 5 with a movable front sleeve element 5a and a rear sleeve element 5b, which can be retracted and extended towards the optical group 3 by means of the front sleeve element 5a. In a retracted state, the telescopic units 5 create a clearance A between the optical group 3 and the first system unit 2a and a clearance B between the optical group 3 and the second system unit 2b in an axial direction along the light beam 4. In an extended state, the telescopic units 5 close the clearances A and B in the axial direction.The optical group 3 is movable relative to the telescope units 5, at least in the retracted state, in order to adjust the optical group 3 by means of an adjustment device 6 of the optical group 3. The optical group 3 has a substantially circular or cylindrical adapter element 7 at one end 3a facing the first system unit 2a and at the other end 3b facing the second system unit 2b, wherein the telescope units 5 of the system units 2a, 2b, in particular the front sleeve elements 5a, and the adapter elements 7 of the optical group 3 each have at least one annular barrier 8, preferably a plurality of annular barriers 8, which interact in an extended state of the telescope units 5 to protect the optical group 3 from external particles by forming a particle protection labyrinth 9.In the extended state of the telescope units 5, a radially circumferential gap 10 remains between the respective telescope unit 5 and the respective adapter element 7, wherein the ends 3a, 3b of the optical group 3 are spatially separated from the telescope units 5 of the system units 2a, 2b by the respective gap 10 in the extended state of the telescope units 5.

[0104] The Fig. Figure 1 shows a basic cross-sectional view of an embodiment of the system 1 according to the invention with the telescopic units 5 in an extended state. Fig. 2 shows a view after the for comparison. Fig. 1 with the telescopic units 5 in a retracted state.

[0105] Light beam 4 is in the Fig. 1 and Fig. 2 not shown. For this, please refer to the section described in more detail below. Fig. The beam path shown in Figure 3 is analogous. The particle protection labyrinth 9 and the gap 10 are specifically designed in the extended state of the telescopic units 5 and are thus part of the Fig. 1. The clearances or distances A and B between the optical group 3 and the respective system unit 2a, 2b are shown in the Fig. 2 shown.

[0106] It has proven advantageous if the gap 10 between the telescopic units 5 in the extended state and the respective adapter element 7, particularly with regard to a centered position of the telescopic units 5 and the adapter elements 7, is greater than 1 mm, preferably greater than 2.5 mm, further preferably greater than 5 mm, and / or less than 15 mm, preferably less than 10 mm, further preferably less than 7.5 mm.

[0107] It can be particularly suitable if one or both of the telescopic units 5 and / or one or both of the adapter elements 7 each have at least two, preferably at least three, more preferably at least four, and particularly preferably at least five, annular barriers 8. In the exemplary embodiment according to the Fig. 1 and Fig. 2 The telescope units 5 of the first system unit 2a and the second system unit 2b, as well as the adapter elements 7 of the optics group 3, each have two barriers 8.

[0108] Preferably, the barriers 8 of the telescopic units 5 and the barriers 8 of the adapter elements 7 are alternately and axially offset from each other in the extended state of the telescopic units 5, so that the barriers 8 interlock without contact. This is in the Fig. Figure 1 represents a portion of the barriers 8. The barriers 8 can also be directly opposite each other.

[0109] It can preferably be provided that the gap 10, viewed in cross-section, is labyrinthine and / or meandering. This is also particularly advantageous in the Fig. 1, visible when the telescope units 5 are extended.

[0110] The ring-shaped barriers 8 of the telescopic units 5 and / or the adapter elements 7 can be designed, for example, as overhangs, skirts, noses, corners, grooves and / or channels.

[0111] In the exemplary embodiment, it can be provided that the adapter elements 7 and the optical group 3 can be connected by force-locking, form-locking and / or material-locking means, or that the adapter elements 7 are designed as a single piece with the optical group 3.

[0112] The optical group 3 may preferably comprise a plurality of optical components, in particular mirrors, lenses and / or filters (not shown), which are at least partially adjustable and / or settable by means of the adjustment device 6.

[0113] It is particularly advantageous if the adjustment device 6 enables adjustment of the optical group 3 with at least two, preferably with at least four, particularly preferably with six, degrees of freedom and / or the adjustment device 6 enables tilting of the optical group 3.

[0114] It has been shown that for adjustment purposes it is useful if at least one of the telescope units 5 has an internal thread 11 at a front end 5c of the telescope unit 5 facing the optical group 3 for attaching adjustment elements 12, in particular apertures, reticles, filters and / or converter cards. The front end 5c and the internal thread 11, which in the exemplary embodiment are assigned to the rear sleeve element 5b, are in the Fig. 2 is designated. An exemplary adjustment element 12 is shown in the Fig. 3 shown. The in relation to the Fig. Three aspects not described in detail are analogous to the Fig. 1 and Fig. 2.

[0115] One or both of the telescopic units can be fixed in their retracted and / or extended state by means of a fixing element 19, preferably a screw, more preferably a setscrew.

[0116] It can be advantageous if the first system unit 2a and / or the second system unit 2b each have a deflecting mirror 13, preferably oriented at a 45° angle to the vertical, in order to deflect a light beam 4, preferably introduced vertically from below, into the optical system 1 onto the beam path, preferably horizontal, within the optical group 3 and / or to deflect the light beam 4, preferably vertically downwards, after passing through the optical group 3. A corresponding beam path of the light beam 4 is shown in the Fig. 3 is indicated by an angled arrow. The first system unit 2a, the optical group 3, and the second system unit 2b can preferably be arranged on a common axis x (dashed line), which also defines the axial direction. The beam path according to the Fig. 3 can be applied analogously to the Fig. 1 and Fig. 2 can be applied.

[0117] It may preferably be provided that the first system unit 2a and / or the second system unit 2b is adjustable by means of an adjustment device 14.

[0118] In the embodiment according to the Fig. 1 to 3 the optical group 3 is advantageously arranged on a carrier plate 15.

[0119] It has proven advantageous if the first system unit 2a and / or the second system unit 2b each have a flange which is designed and configured to attach a cover and / or a camera 21 to the respective system unit 2a, 2b. This is shown in the Fig. 1 shown as an example for the second system unit 2b.

[0120] Preferably, at least one housing 20 of the optical group and / or the telescope units of the devices is made of matt black anodized metal, preferably aluminium or stainless steel.

[0121] The Fig. 1, Fig. 2 and Fig. 3 also serve to disclose a method according to the invention for adjusting and operating an optical group 3 of an optical system 1 according to the preceding description, wherein the optical system 1 is preferably arranged in a cleanroom environment, and wherein at least the following steps are provided: - Retraction of the telescopic units 5 of the system units 2a, 2b; - Adjusting the optical group 3 using the adjustment device 6 to adjust the beam path of a light beam 4 within the optical group 3 and / or to modify the light beam 4 on the beam path; - Extension of the telescope units 5 and positioning of the telescope units 5 against the respective adapter element 7 of the optical group 3, so that the barriers 8 of the telescope units 5 together with the barriers 8 of the adapter elements 7 form the particle protection labyrinth 9, wherein the radially circumferential gap 10 remains between the respective telescope unit 5 and the respective adapter element 7, and wherein the ends 3a, 3b of the optical group 3 are spatially separated from the telescope units 5 of the system units 2a, 2b by the respective gap 10; and - Introducing a light beam 4 via one of the system units 2a, 2b into the optics group 3 in order to adjust, shape and / or direct the light beam 4, in particular for the manufacture, processing and / or analysis of optical elements 16 and / or their precursors.

[0122] The optical system 1 and the optical group 3 used in the described method can preferably be an optical system 1 according to the Fig. Figures 1 to 3 and the optical group 3 shown therein are concerned. The optical system 1 according to the invention can preferably be used in combination with the method according to the invention.

[0123] The Fig. 1, Fig. 2 and Fig. 3 serve in conjunction with the Fig. 4 further, disclosure of a system 17 according to the invention for the manufacture and / or processing of optical elements 16 and / or their precursors, in particular optical elements 16 for a lithography system, comprising an illumination device 18 for emitting a light beam 4, in particular a laser beam, and comprising at least one optical group 3 for adjusting, shaping and / or directing the light beam 4, wherein the light beam 4 serves for the processing and / or analysis of the optical element 16. It is provided that the optical group 3 is adjustable and sealable by an optical system 1 according to the preceding description, which includes the optical group 3, and / or the optical group 3 is adjusted and operated by a method according to the preceding description, wherein the optical system 1 is arranged in a cleanroom environment.

[0124] The Fig. Figure 4 shows a schematic block diagram of an embodiment of the system 17 according to the invention. The optical system 1 can preferably be an optical system 1 according to the Fig. 1 to 3. The use of the optical system 1 and the method according to the invention in a system 17 according to the invention. Fig. 4 has proven to be particularly advantageous. Reference symbol list 1 Optical System 2a First system unit 2b Second system unit 3 Optics group 3a First end (of optics group 3) 3b Second end (of optics group 3) 4 light beam 5 telescopic unit 5a Front sleeve element (of the telescopic unit 5) 5b Rear sleeve element (of the telescopic unit 5) 5c Front end (of the telescopic unit 5) 6 Adjustment device 7 Adapter element 8 Barrier 9 Particle protection labyrinth 10 columns 11 internal threads 12 Adjustment element 13 deflecting mirrors 14 Adjustment device 15 Carrier plate 16 Optical element 17 Annex 18 Lighting equipment 19 Fixing element Version 20 21 camera A free space B Free space x axis

Claims

[1] Optical system (1) comprising a first system unit (2a), a second system unit (2b) and an optics group (3) arranged between them, which together form a beam path for a light beam (4), wherein the first system unit (2a) and the second system unit (2b) each have a substantially cylindrical telescopic unit (5) with a movable front sleeve element (5a) and a rear sleeve element (5b), which can be retracted and extended towards the optics group (3) by means of the front sleeve element (5a), wherein the telescopic units (5) in a retracted state open a space (A) between the optics group (3) and the first system unit (2a) and a space (B) between the optics group (3) and the second system unit (2b) in an axial direction along the light beam (4), and the telescopic units (5) in an extended state close the spaces (A, B) in the axial direction.wherein the optical group (3) is movable relative to the telescope units (5) at least in the retracted state in order to adjust the optical group (3) by means of an adjustment device (6) of the optical group (3), wherein the optical group (3) has a substantially circular or cylindrical adapter element (7) at one of its first ends (3a) facing the first system unit (2a) and at one of its second ends (3b) facing the second system unit (2b), wherein the telescope units (5) of the system units (2a, 2b), in particular the front sleeve elements (5a), and the adapter elements (7) of the optical group (3) each have at least one annular barrier (8), preferably a plurality of annular barriers (8) which interact in the extended state of the telescope units (5) to protect the optical group (3) from external particles,by the barriers (8) jointly forming a particle protection labyrinth (9), wherein in the extended state of the telescope units (5) a radially circumferential gap (10) remains between the respective telescope unit (5) and the respective adapter element (7), and wherein the ends (3a, 3b) of the optics group (3) are spatially separated from the telescope units (5) of the system units (2a, 2b) by the respective gap (10) in the extended state of the telescope units (5). [2] Optical system (1) according to claim 1, wherein the gap (10) between the telescopic units (5) in the extended state and the respective adapter element (7), in particular with respect to a centered position of the telescopic units (5) and the adapter elements (7), is larger than 1 mm, preferably larger than 2.5 mm, further preferably larger than 5 mm, and / or smaller than 15 mm, preferably smaller than 10 mm, further preferably smaller than 7.5 mm. [3] Optical system (1) according to claim 1 or 2, wherein one or both of the telescope units (5) and / or one or both of the adapter elements (7) each have at least two, preferably at least three, more preferably at least four, particularly preferably at least five, annular barriers (8). [4] Optical system (1) according to claim 1, 2 or 3, wherein the barriers (8) of the telescopic units (5) and the barriers (8) of the adapter elements (7) are alternately and axially offset opposite each other in the extended state of the telescopic units (5), so that the barriers (8) interlock without contact. [5] Optical system (1) according to any one of claims 1 to 4, wherein the slit (10) is labyrinthine and / or meandering in cross-section. [6] Optical system (1) according to any one of claims 1 to 5, wherein the annular barriers (8) of the telescope units (5) and / or the adapter elements (7) are designed as projections, skirts, noses, corners, grooves and / or channels. [7] Optical system (1) according to any one of claims 1 to 6, wherein the adapter elements (7) and the optical group (3) can be connected by force-locking, form-locking and / or material-locking or the adapter elements (7) are formed in one piece with the optical group (3). [8] Optical system (1) according to any one of claims 1 to 7, wherein the optical group (3) comprises a plurality of optical components, in particular mirrors, lenses and / or filters, which are at least partially adjustable and / or settable by means of the adjustment device (6). [9] Optical system (1) according to any one of claims 1 to 8, wherein the adjustment device (6) enables adjustment of the optical group (3) with at least two, preferably with at least four, particularly preferably with six, degrees of freedom and / or the adjustment device (6) enables tilting of the optical group (3). [10] Optical system (1) according to one of claims 1 to 9, wherein at least one of the telescope units (5) has an internal thread (11) at a front end (5c) of the telescope unit (5) facing the optical group (3) for attaching adjustment elements (12), in particular apertures, crosshairs, filters and / or converter cards. [11] Optical system (1) according to any one of claims 1 to 10, wherein the first system unit (2a) and / or the second system unit (2b) each has a deflecting mirror (13) preferably oriented at a 45° angle to the vertical, in order to deflect a light beam (4) introduced into the optical system (1) preferably perpendicularly from below onto the beam path within the optical group (3), preferably horizontal, and / or to deflect the light beam (4) after passing through the optical group (3), preferably perpendicularly downwards. [12] Optical system (1) according to any one of claims 1 to 11, wherein the first system unit (2a) and / or the second system unit (2b) is adjustable by means of an adjustment device (14). [13] Optical system (1) according to any one of claims 1 to 12, wherein the optical group (3) is arranged on a carrier plate (15). [14] Optical system (1) according to any one of claims 1 to 13, wherein the first system unit (2a) and / or the second system unit (2b) each has a flange which is configured and designed to attach a closure cover and / or a camera (21) to the respective system unit (2a, 2b). [15] Method for adjusting and operating an optical group (3) of an optical system (1) according to any one of claims 1 to 14, wherein the optical system (1) is preferably arranged in a cleanroom environment, and wherein at least the following steps are provided: - Retraction of the telescopic units (5) of the system units (2a, 2b); - Adjusting the optical group (3) using the adjustment device (6) to adjust the beam path of a light beam (4) within the optical group (3) and / or to modify the light beam (4) on the beam path; - Extending the telescope units (5) and positioning the telescope units (5) against the respective adapter element (7) of the optical group (3), so that the barriers (8) of the telescope units (5) together with the barriers (8) of the adapter elements (7) form the particle protection labyrinth (9), wherein the radially circumferential gap (10) remains between the respective telescope unit (5) and the respective adapter element (7), and wherein the ends (3a, 3b) of the optical group (3) are spatially separated from the telescope units (5) of the system units (2a, 2b) by the respective gap (10); and - Introducing a light beam (4) via one of the system units (2a, 2b) into the optics group (3) in order to adjust, shape and / or direct the light beam (4), in particular for the manufacture, processing and / or analysis of optical elements (16) and / or their precursors. [16] System (17) for the manufacture and / or processing of optical elements (16) and / or their precursors, in particular optical elements (16) for a lithography system, comprising a lighting device (18) for emitting a light beam (4), in particular a laser beam, and comprising at least one optical group (3) for adjusting, shaping and / or directing the light beam (4), wherein the light beam (4) serves for the processing and / or analysis of the optical element (16), characterized by that the optical group (3) is adjustable and sealable by an optical system (1) according to one of claims 1 to 14, which includes the optical group (3), and / or the optical group (3) is adjusted and operated by a method according to claim 15, wherein the optical system (1) is arranged in a cleanroom environment.

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