Flow rate adjustment device, flow rate adjustment system and control method for a flow rate adjustment device

Abstract

A flow rate adjustment device is provided, comprising: an ultrasonic flow measurement section 10 configured to measure the flow rate of a liquid; a flow rate adjustment section 20 configured to move a valve body along an axis in one direction closer to or away from a valve opening to adjust the flow rate of a liquid exiting the measurement flow channel; and a flow rate adjustment unit 32 configured to set a target flow rate value of a liquid.and a control unit 31 configured to control the flow rate adjustment section 20 either in a flow rate adjustment mode or in a standby mode, and the control unit 31 controls the flow rate adjustment section 20 to move the valve body to a target position which changes according to a flow rate difference between an actual flow rate value of a liquid and the set flow rate value such that the actual flow rate value equals the set flow rate value when the flow rate adjustment mode is performed, and controls the flow rate adjustment section 20 to move the valve body to a standby position in which the valve body is not in contact with the valve opening, and then maintain the standby position when the standby mode is performed.

Description

BACKGROUND 1. TECHNICAL AREA

[0001] The present invention relates to a flow rate adjustment device, a flow rate adjustment system and a control method for a flow rate adjustment device. 2. Description of the related technology

[0002] Flow rate adjusting devices comprising a flow measuring section configured to measure the flow rate of a liquid and moving a valve body in a direction closer to or away from a valve opening to adjust the flow rate of a liquid flowing through the valve opening, such that the flow rate measured by the flow measuring section is a preset flow rate, are conventionally known (for example, see Japanese patent application no. 2017-138200).

[0003] For example, the flow control device disclosed in Japanese patent application no. 2017-138200 is supplied with a fluid delivered from a pump installed upstream via pipelines, adjusts the flow rate of the supplied fluid, and delivers the fluid to downstream pipelines. The fluid discharged from the flow control device flows from an outlet located at the downstream end of the pipeline. The flow control device is integrated as part of a flow control system that includes a pump configured to draw in fluid from an inlet and discharge the fluid, and a pipeline installed both upstream and downstream of the flow control device.

[0004] When the flow control system stops the supply of a liquid from the inlet end to the outlet end, for example when the pump is stopped, an on / off valve located in the pipeline installed upstream of the flow control device is closed, and an on / off valve located in the pipeline installed downstream of the flow control device is closed.

[0005] For example, the flow control device remains in place to maintain the position of the valve body at the moment the flow control system stops. In such a case, the state in which the flow control system stops the supply of fluid from the inlet end to the outlet end is maintained even if the position of the valve body is retained, because the on / off valves located upstream and downstream of the flow control device remain closed.

[0006] However, if, for example, the position of the valve body is unsuitable at the moment the flow control system stops, and its opening is therefore excessively large, this can lead to overshoot, where the fluid flow rate is excessively high relative to the set flow rate when the flow control system resumes supplying fluid from the inlet to the outlet. Conversely, if, for example, the position of the valve body is unsuitable at the moment the flow control system stops, and the opening is therefore too small (e.g., completely closed), control delay can occur, where it takes longer for the fluid flow rate to reach the set flow rate when the flow control system resumes supplying fluid from the inlet to the outlet. BRIEF DESCRIPTION OF THE INVENTION

[0007] The present invention was developed taking these circumstances into account and is intended to provide a flow rate adjustment device, a flow rate adjustment system and a control method for a flow rate adjustment device that can prevent overshoot or control delay with respect to a set flow rate value when switching from a standby mode to a flow rate adjustment mode.

[0008] The present invention uses the following solutions to solve the problem described above. A flow rate adjustment device according to the present invention comprises: a flow measuring section configured to measure the flow rate of a liquid flowing through a measuring flow channel; a flow rate adjustment section configured to move a valve body along an axis in a direction closer to or away from a valve opening to adjust the flow rate of a liquid exiting the measuring flow channel; and a flow rate adjustment unit configured to set a target flow rate of a liquid to be adjusted by the flow rate adjustment section.and a control unit configured to control the flow rate adjustment section either in a flow rate adjustment mode or in a standby mode, wherein, when operating in flow rate adjustment mode, the control unit controls the flow rate adjustment section to move the valve body to a setpoint position which changes according to a flow rate difference between an actual flow rate of a liquid measured by the flow measurement section and the setpoint flow rate, such that the actual flow rate equals the setpoint flow rate, and when operating in standby mode, controls the flow rate adjustment section to move the valve body to a standby position and then maintain the standby position, the valve body not being in contact with the valve opening in the standby position.

[0009] According to the flow rate adjustment device of the present invention, when switching from the flow rate adjustment mode to standby mode, the control unit controls the flow rate adjustment section to move the valve body into a standby position in which the valve body is not in contact with the valve opening, and then maintains the standby position. Since the position in which the valve body is not in contact with the valve opening is the standby position, the opening is larger than in the fully closed position in which the valve body is in contact with the valve opening. Thus, the flow rate follows the set flow rate value more closely than in the case where the flow rate adjustment mode is applied by switching from the fully closed position, and this can prevent the occurrence of a control delay.Even if the valve body is too far from the valve opening when switching from flow rate adjustment mode to standby mode, resulting in an excessively large opening, the valve body is moved into the standby position and retained there. This prevents overshoot due to an excessively large valve body opening when switching from standby to flow rate adjustment mode.

[0010] The flow rate adjustment device according to the present invention can be configured such that the target position is set between a lower limit position and an upper limit position, wherein the lower limit position corresponds to a lower limit of the target flow rate value, wherein the upper limit position corresponds to an upper limit of the target flow rate value, and the flow rate adjustment unit is configured to set the lower limit and the upper limit, and the standby position is a position that is further away from the valve opening than the lower limit position.

[0011] According to the flow rate adjustment device of the present configuration, the flow rate follows the set flow rate value more closely than in the case where the flow rate adjustment mode is applied by switching from the lower limit position, since the standby position is a position further from the valve opening than the lower limit position. This prevents a control delay.

[0012] The flow rate adjustment device according to the present invention can be configured to include a standby position setting unit configured to set the standby position at a predetermined position between the lower limit position and the upper limit position.

[0013] According to the flow rate adjustment device of the present configuration, since the standby position is set by the standby position adjustment unit to a predetermined position between the lower limit position and the upper limit position, overshoot or control delay can be appropriately prevented when switching from standby mode to flow rate adjustment mode.

[0014] The flow rate adjustment device according to the present invention can be configured such that the control unit switches the standby mode to the flow rate adjustment mode in response to the reception of a first switching signal from a superior device, wherein the first switching signal serves to switch the standby mode to the flow rate adjustment mode, and switches the flow rate adjustment mode to the standby mode in response to the reception of a second switching signal from the superior device, wherein the second switching signal serves to switch the flow rate adjustment mode to the standby mode.

[0015] According to the flow rate adjustment device of the present configuration, switching between the flow rate adjustment mode and the standby mode can be carried out in a suitable manner in accordance with the first switching signal and the second switching signal received from the superior device.

[0016] The flow rate setting device of the configuration described above can be designed such that the flow rate setting unit sets the target flow rate value based on a flow rate setting signal transmitted by the superior device, wherein the flow rate setting signal is used to set the target flow rate value, and the control unit sets the standby position based on a standby position setting signal transmitted by the superior device, wherein the standby position setting signal is used to set the standby position.

[0017] According to the flow rate setting device of the present form, the setpoint flow rate value can be set based on the flow rate setting signal transmitted by the superior device, and the standby position can be set based on the standby position setting signal transmitted by the superior device.

[0018] A flow rate adjustment system according to the present invention is a flow rate adjustment system comprising: a flow rate adjustment device; and a master device configured to control the flow rate adjustment device. The flow rate adjustment device comprises: a flow measurement section configured to measure the flow rate of a liquid flowing through a measurement flow channel; a flow rate adjustment section configured to move a valve body along an axis in a direction closer to or away from a valve opening to adjust the flow rate of a liquid exiting the measurement flow channel; and a flow rate setting unit configured to set a target flow rate value of a liquid.which is to be set by the flow rate adjustment section; and a control unit configured to control the flow rate adjustment section either in a flow rate adjustment mode or in a standby mode, wherein, when operating in flow rate adjustment mode, the control unit controls the flow rate adjustment section to move the valve body to a setpoint position which changes according to a flow rate difference between an actual flow rate of a liquid measured by the flow meter and the setpoint flow rate, such that the actual flow rate equals the setpoint flow rate, and when operating in standby mode, controls the flow rate adjustment section to move the valve body to a standby position and then maintain the standby position.wherein the valve body is not in contact with the valve opening in the standby position. The superior device comprises: a mode transmission unit configured to transmit a first switching signal and a second switching signal to the flow rate adjustment device, wherein the first switching signal is used to switch the flow rate adjustment device from standby mode to flow rate adjustment mode, and the second switching signal is used to switch the flow rate adjustment device from flow rate adjustment mode to standby mode; a flow rate transmission unit configured to transmit a flow rate setup signal to the flow rate adjustment device, wherein the flow rate setup signal is used to set the target flow rate value; and a standby position transmission unit configured tothat it transmits a standby position setting signal to the flow rate adjustment device, wherein the standby position setting signal is used to set the standby position, and wherein the standby position transmission unit transmits the standby position setting signal to the flow rate adjustment device, so that the standby position varies in a predetermined standby mode according to the set flow rate value in the flow rate adjustment mode carried out after the predetermined standby mode.

[0019] According to the flow rate adjustment system of the present invention, when the flow rate adjustment device is switched to standby mode, the control unit of the flow rate adjustment device controls the flow rate adjustment section to move the valve body into a standby position in which the valve body is not in contact with the valve opening, and then maintains this standby position. Since the position in which the valve body is not in contact with the valve opening is the standby position, the opening is larger than in the fully closed position in which the valve body is in contact with the valve opening. Thus, the flow rate follows the set flow rate value more closely than in the case where the flow rate adjustment mode is applied by switching from the fully closed position, and this can prevent the occurrence of a control delay.Even if the valve body is too far from the valve opening when switching from flow rate adjustment mode to standby mode, resulting in an excessively large opening, the valve body is moved to the standby position and remains there. This prevents overshoot due to excessive opening when switching from standby to flow rate adjustment mode.

[0020] Furthermore, according to the flow rate adjustment system of the present invention, the standby position transmission unit of the higher-level device transmits the standby position setting signal to the flow rate adjustment device, so that the standby position in a predetermined standby mode varies according to the setpoint flow rate value in a flow rate adjustment mode performed after the predetermined standby mode. Since the standby position is a position corresponding to the setpoint flow rate value in the flow rate adjustment mode when a predetermined standby mode is switched to a flow rate adjustment mode, the occurrence of overshoot or control delay can be appropriately prevented.

[0021] The flow rate control system according to the present invention can be configured to include a temperature sensing unit configured to determine the temperature of a liquid flowing through the flow rate control device, and can be configured to transmit the standby position control signal to the flow rate control device such that a distance along the axis from the valve opening to the standby position is increased in accordance with an increase in the temperature of the liquid determined by the temperature sensing unit.

[0022] According to the flow rate adjustment system of the present configuration, since the distance along the axis from the valve opening to the standby position is increased according to an increase in the liquid temperature determined by the temperature sensing unit, a failure that would otherwise be caused by the expansion of the valve body or the valve opening and the valve body and the valve opening coming closer together or into contact with each other due to an increase in the liquid temperature can be appropriately prevented.

[0023] The flow rate adjustment system according to the present invention can be configured to include a pressure sensing unit configured to determine the pressure of a liquid flowing into the flow rate adjustment device, and can be configured to transmit the standby position transmission signal to the flow rate adjustment device, such that a distance along the axis from the valve opening to the standby position is reduced in accordance with an increase in the liquid pressure determined by the pressure sensing unit.

[0024] According to the flow rate adjustment system of the present configuration, since the distance along the above axis from the valve opening to the standby position is reduced in accordance with an increase in the liquid pressure determined by the pressure sensing unit, it can be prevented that the liquid flow rate becomes excessively large due to an increase in the liquid pressure.

[0025] In a control method of a flow rate adjustment device according to the present invention, the flow rate adjustment device comprises: a flow measurement section configured to measure a flow rate of a liquid flowing through a measurement flow channel, a flow rate adjustment section configured to move a valve body along an axis in a direction closer to or away from a valve opening in order to adjust a flow rate of a liquid exiting the measurement flow channel, and a flow rate setting unit configured to set a target flow rate value of a liquid to be adjusted by the flow rate adjustment section;and the control procedure comprises: a flow rate adjustment step for controlling the flow rate adjustment section to move the valve body to a setpoint position which changes according to a flow rate difference between an actual flow rate value from the flow measurement section and the setpoint flow rate value, such that the actual flow rate value equals the setpoint flow rate value; and a readiness step for controlling the flow rate adjustment section to move the valve body to a readiness position and then maintain the readiness position, with the valve body not in contact with the valve opening in the readiness position.

[0026] According to the control method of the flow rate adjustment device of the present invention, in the standby step the flow rate adjustment section is controlled such that it moves the valve body into a standby position in which the valve body is not in contact with the valve opening, and then maintains the standby position. Since the position in which the valve body is not in contact with the valve opening is the standby position, the opening is larger than in the fully closed position in which the valve body is in contact with the valve opening. Thus, the flow rate follows the set flow rate value more closely than in the case where the flow rate adjustment step is performed from the fully closed position, and this can prevent the occurrence of a control delay.Even if the valve body is too far from the valve opening when switching from the flow rate adjustment step to the standby step, resulting in an excessively large opening, the valve body is moved to the standby position and remains there. This prevents overshoot due to excessive opening when switching from the standby step to the flow rate adjustment step.

[0027] According to the present invention, it is possible to provide a flow rate adjustment device, a flow rate adjustment system and a control method for a flow rate adjustment device that can prevent overshoot or control delay relative to a target flow rate value when switching from a standby mode to a flow rate adjustment mode. BRIEF DESCRIPTION OF THE DIFFERENT VIEWS OF THE DRAWINGS Fig. Figure 1 is a partial longitudinal section view illustrating an embodiment of a flow rate adjustment device. Fig. 2 is a partial longitudinal section view, showing a Fig. The ultrasonic flow measurement section shown in Figure 1 is illustrated. Fig. Figure 3 is a partial longitudinal section illustrating a flow rate adjustment section and an outflow-side flow channel section, which are shown in Fig. 1 are shown. Fig. 4 is a longitudinal section view illustrating an inflow-side flow channel section and a pressure sensor located in Fig. 1 are shown. Fig. Figure 5 is a block diagram illustrating a configuration of a control device. Fig. Figure 6 is a schematic configuration diagram illustrating a flow rate adjustment system in which the flow rate adjustment device is installed. Fig. Figure 7 is a block diagram illustrating a configuration of a higher-level device. Fig. Figure 8 is a flowchart illustrating a process performed by the higher-level device. Fig. Figure 9 is a flowchart illustrating a process performed by the flow rate adjustment device. Fig. Figure 10 is a diagram illustrating an example of a change in the opening of a valve body. Fig. Figure 11 is a schematic configuration diagram illustrating a flow rate adjustment system according to a first modified example of the present invention. Fig. Figure 12 is a schematic configuration diagram illustrating a flow rate adjustment system according to a second modified example of the present invention. Fig. Figure 13 is a schematic configuration diagram illustrating a flow rate adjustment system according to a third modified example of the present invention. DETAILED DESCRIPTION

[0028] In the following, a flow rate adjustment device 100 according to an embodiment of the present invention is described with reference to the drawings. Fig. Figure 1 is a partial longitudinal section view illustrating an embodiment of the flow rate adjustment device 100. Fig. 2 is a partial longitudinal section view, showing a Fig. 1 illustrates the ultrasonic flow measurement section 10.

[0029] The in Fig. The flow rate control device 100 of this embodiment shown in Figure 1 comprises: an ultrasonic flow measurement section 10, which measures the flow rate of a liquid flowing in from an inlet opening 100a and circulating through a straight tubular measuring flow channel 14; a flow rate control section 20, which adjusts the flow rate of the liquid; a control device 30, which controls the flow rate control section 20; a housing section 40, which accommodates the ultrasonic flow measurement section 10, the flow rate control section 20 and the control device 30; an inlet-side flow rate channel section 50, which directs the fluid flowing in from the inlet opening 100a to an upstream side of the measuring flow channel 14; an outflow-side flow channel section 60, which directs the fluid flowing out of a downstream side of the measuring flow channel 14 to an outflow opening 100b;a pressure sensor (pressure measuring section) 70; and a shielding element 80.;

[0030] The fluid whose flow rate is adjusted by the flow rate adjustment device 100 of this embodiment is, for example, a pharmaceutical solution or pure water used for semiconductor manufacturing equipment. The temperature of the fluid is, for example, in a normal temperature range (e.g., 10 °C or higher and lower than 50 °C) or in a high-temperature range (e.g., 50 °C or higher and 80 °C or lower).

[0031] The housing section 40 of the flow rate adjustment device 100 is attached to a mounting surface S by means of mounting bolts (not shown). The flow rate adjustment device 100 is connected via a cable 101 to a higher-level device 200 (see Fig. 5) connected, is powered via cable 101 from the external device and transmits various signals to the superior device 200 and receives various signals from it.

[0032] Examples of signals received by the parent device 200 include a flow rate setup signal indicating a setpoint for a target flow rate set by the flow rate adjustment device 100. Examples of signals transmitted to the parent device 200 include a signal indicating the fluid flow rate calculated by the control device 30 based on a signal measured by the ultrasonic flow measurement section 10, and a signal indicating the fluid pressure measured by the pressure sensor 70.

[0033] The ultrasonic flow measurement section 10 measures a propagation time difference between ultrasonic waves emitted by a pair of oscillators, i.e., an upstream oscillator 11 located on the upstream side of the measuring flow channel 14, and a downstream oscillator 12 located on the downstream side of the measuring flow channel 14, to obtain the flow rate of the liquid entering from an inlet-side line (not shown) and circulating through the straight tubular measuring flow channel 14.

[0034] As in Fig. As shown in Figure 2, the ultrasonic flow measurement section 10 comprises: the upstream oscillator 11 and the downstream oscillator 12, arranged on an axis X2 parallel to the mounting surface S; an inlet channel 13 connected to the inlet-side flow channel section 50; the straight, tubular measurement flow channel 14 connected to the inlet channel 13 and extending along axis X2 (second axis); and an outlet channel 15 connected to the outlet-side flow channel section 60. Axis X2 runs parallel to an axis X1 (first axis) along which a valve body section 21, described later, moves forward or backward.

[0035] The upstream oscillator 11 and the downstream oscillator 12 are arranged at positions opposite each other along the X2 axis via the measuring flow channel 14 and can transmit and receive ultrasonic signals. The ultrasonic signal transmitted by the upstream oscillator 11 propagates through the fluid circulating in the measuring flow channel 14 and is received by the downstream oscillator 12.

[0036] Similarly, the ultrasonic signal transmitted by the downstream oscillator 12 propagates through the fluid circulating in the flow channel 14 and is received by the upstream oscillator 11. Because the fluid circulates through the flow channel 14 from upstream to downstream, the propagation time for the ultrasonic signal transmitted from the upstream oscillator 11 to the downstream oscillator 12 is shorter than the propagation time for the ultrasonic signal transmitted from the downstream oscillator 12 to the upstream oscillator 11. The ultrasonic flow sensing section 10 measures the flow rate of the fluid circulating through the flow channel 14 using the difference between these propagation times.

[0037] It should be noted that the transmission of the ultrasonic signals through the upstream oscillator 11 and the downstream oscillator 12 is controlled by the control device 30, which is connected to the upstream oscillator 11 and the downstream oscillator 12 via the in Fig. The upstream oscillator 11 and the downstream oscillator 12 are connected to the control device 30 via signal lines 16 and 17. As described later, the control device 30 calculates the difference between the propagation times from the transmission times of the ultrasonic signals sent as commands to the upstream oscillator 11 and the downstream oscillator 12, and the reception times of the ultrasonic signals received by the upstream oscillator 11 and the downstream oscillator 12 according to the transmission times. It also calculates the fluid flow rate from this difference between the propagation times.

[0038] The flow rate adjustment section 20 adjusts the flow rate of the liquid flowing from the measuring flow channel 14 on the downstream side, through the downstream flow channel section 60, to the outlet opening 100b, which is connected to a downstream line (not shown). As shown in Fig. As shown in Figure 1, the flow rate adjustment section 20 is arranged between the ultrasonic flow measurement section 10 and the control device 30 in an axis Y direction, which corresponds to an installation direction orthogonal to the installation surface S. As shown in Fig. As shown in Figure 1, the ultrasonic flow measuring section 10 is arranged in the Y-direction at a position closest to the installation surface S, and the control device 30 is arranged at a position furthest from the installation surface S. The flow rate adjustment section 20 is arranged between the ultrasonic flow measuring section 10 and the control device 30.

[0039] Fig. Figure 3 is a partial longitudinal section view illustrating the flow rate adjustment section 20 and the outflow-side flow channel section, which are shown in Fig. 1 are shown. As in Fig. As illustrated in Figure 3, the flow rate adjustment section 20 has a valve body 21 inserted into a valve hole 62 formed in the outflow-side flow channel section 60, and an electric actuator section 22 configured to move the valve body 21 in a direction closer to or away from the valve hole 62 along an axis X1 (first axis) parallel to the mounting surface S. The flow rate adjustment section 20 moves the valve body 21 along the axis X1 towards or away from the valve opening 62 to adjust the flow rate of the fluid exiting the measuring flow channel 14.

[0040] The electric drive unit 22 moves the valve body 21 along the axis X1 between a point defined by the solid line in Fig. 3 illustrated position of a closed state and a position indicated by the dashed line in Fig. Figure 3 illustrates the position of an open state forward or backward. The flow rate adjustment section 20 adjusts the amount of fluid flowing from the valve opening 62 into the valve chamber 63 by adjusting the position of the valve body 21 on the axis X1 by the electrical drive section 22.

[0041] Here, the configuration of the control device 30 is described with reference to Fig. 5 described. Fig. Figure 5 is a block diagram illustrating the configuration of the control device 30. As shown in Fig. As shown in Figure 5, the control device 30 comprises a control unit 31, a flow rate adjustment unit 32, and a standby position adjustment unit 33. The control unit 31 controls the ultrasonic flow measurement section 10, the flow rate adjustment section 20, the flow rate adjustment unit 32, and the standby position adjustment unit 33.

[0042] The control unit 31 controls the flow rate adjustment section 20 based on an actual flow rate value FRac of a liquid, measured by the ultrasonic flow measurement section 10. The control unit 31 controls the flow rate adjustment section 20 either in a flow rate adjustment mode or in a standby mode.

[0043] When operating in flow rate setting mode, the control unit 31 controls the flow rate setting section 20 so that the valve body 21 is moved to a setpoint position. This setpoint position varies according to a flow rate difference between the actual flow rate value FRac measured by the ultrasonic flow measurement section 10 and the setpoint value FRset measured by the flow rate setting unit 32, such that the actual flow rate value FRac matches the setpoint value FRset measured by the flow rate setting unit 32. When operating in standby mode, the control unit 31 controls the flow rate setting section 20 so that the valve body 21 is moved to a standby position and then remains in that position, with the valve body 21 not in contact with the valve opening 62 in the standby position.

[0044] The control section 31 can instruct the upstream oscillator 11 and the downstream oscillator 12, each contained in the ultrasonic flow measurement section 10, to transmit ultrasonic wave signals. Furthermore, the control section 31 can detect the time at which the ultrasonic signal transmitted by one of the upstream oscillator 11 and the downstream oscillator 12 is received by the other of the upstream oscillator 11 and the downstream oscillator 12.

[0045] The control section 31 calculates a first propagation time from the transmission time of the ultrasonic signal sent as a command to the downstream oscillator 12 and the reception time of the ultrasonic signal received by the upstream oscillator 11 according to the transmission time. Furthermore, the control device 30 calculates a second propagation time from the transmission time of the ultrasonic signal sent as a command to the upstream oscillator 11 and the reception time of the ultrasonic signal received by the downstream oscillator 12 according to the transmission time. The control section 31 determines the flow rate of the fluid circulating through the measuring flow channel 14 based on a predetermined flow rate formula and a propagation time difference obtained by subtracting the second propagation time from the first propagation time.

[0046] The flow rate setting unit 32 sets a target flow rate value FRset [ml / min], which is within a flow rate range from the minimum flow rate 0 [ml / min] to the maximum flow rate FRmax [ml / min] of the flow rate adjustment device 100. For example, the flow rate setting unit 32 sets the target flow rate value FRset based on a flow rate setting signal received by the control device 30 via cable 101 from the higher-level device 200.

[0047] The standby position setting unit 33 sets the standby position to a predetermined position between the closed position (lower limit), which corresponds to the minimum flow rate 0 (lower limit) of the flow rate setting value FRset adjustable by the flow rate setting unit 32, and the upper limit position, which corresponds to the maximum flow rate FRmax (upper limit) of the flow rate setting value FRset adjustable by the flow rate setting unit 32. The standby position is the position in which the valve body 21 is kept ready when the control unit 31 performs the standby mode described below.

[0048] The electrical drive part 22 of the flow rate adjustment section 20 has a stepper motor 22a which rotates about the axis X1 to move the valve body 21 along the axis X1, and a motor driver 22b which generates an excitation current used to drive the stepper motor 22a and outputs the excitation current to the stepper motor 22a.

[0049] Fig. 4 is a longitudinal section view showing the Fig. Figure 1 illustrates the inlet-side channel section 50 and the pressure sensor 70. As shown in the Fig. 1 and Fig. As shown in Figure 4, the inlet-side flow channel section 50 is an element in which an inlet-side inclined flow channel 51 is formed, inclined in a direction approaching the installation surface S from the inlet opening 100a to the upstream inlet opening 13 of the measuring flow channel 14. The inlet-side flow channel section 50 is equipped with the pressure sensor 70 to detect the pressure of the fluid circulating through the inlet-side inclined flow channel 51.

[0050] As in the Fig. 1 and Fig. As shown in Figure 3, the outflow-side flow channel section 60 is an element in which an outflow-side inclined flow channel 61 is formed, inclined in a direction extending from the flow rate adjustment section 20 to the outlet opening 100b in the direction of the installation surface S. The downstream flow channel section 60 directs the fluid via an outlet channel 65 from an opening 64 formed on an upper section of the valve body 63 to the upstream side of the downstream inclined flow channel 61. The fluid directed to the upstream side of the downstream inclined flow channel 61 is further directed along the downstream inclined flow channel 61 to the outlet opening 100b. As shown in the Fig. 2 and Fig. As shown in Figure 3, the downstream flow channel section 60 is provided with through holes through which a plurality of fastening bolts 66 protrude. The downstream flow channel section 60 is attached to the electric drive section 22 by fastening the fastening bolts 66 to the electric drive section 22.

[0051] The pressure sensor 70 measures the pressure (supply pressure) of the fluid flowing from the inlet opening 100a into the inlet-side inclined flow channel 51 on the upstream side of the measuring flow channel 14. The pressure sensor 70 is, for example, a strain gauge pressure sensor. As in Fig. As shown in Figure 4, the pressure sensor 70 is attached to the inlet-side flow channel section 50 by means of a sensor holder 71. A pressure signal indicating the pressure of the liquid measured by the pressure sensor 70 is transmitted to the control device 30 and stored in a memory section (not shown) contained within the control device 30. The pressure signal is transmitted to the higher-level device 200 via cable 101.

[0052] Next, with reference to Fig. 6 a flow rate adjustment system 1 is described in which the flow rate adjustment device 100 of the present embodiment is installed. Fig. Figure 6 is a schematic configuration diagram illustrating the flow rate adjustment system 1, in which the flow rate adjustment device 100 is installed. As shown in Fig. As illustrated in Figure 6, the flow control system 1 comprises the following: a pump 2 configured to pressurize and supply a liquid, a pipeline 3 configured to convey a liquid from an inlet end 1a to an outlet end 1b, the flow control device 100, an on / off valve 4 located in the pipeline 3 upstream of the flow control device 100, an on / off valve 5 located in the pipeline 3 downstream of the flow control device 100, and a master device 200. The master device 200 is a device that controls the flow control device 100, the pump 2, the on / off valve 4, and the on / off valve 5.

[0053] The flow control system 1 causes the pump 2 to pressurize and pump a fluid flowing into the pipeline 3 from the inlet 1a to supply the fluid to the flow control device 100, and to supply the fluid, set to the flow rate by the flow control device 100, to the outlet 1b. The on / off valve 4 switches between a state in which fluid is supplied from the inlet 1a to the flow control device 100 and a state in which no fluid is supplied from the inlet 1a to the flow control device 100. The on / off valve 5 switches between a state in which fluid is supplied from the flow control device 100 to the outlet 1b and a state in which no fluid is supplied from the flow control device 100 to the outlet 1b.

[0054] Fig. Figure 7 is a block diagram illustrating a configuration of a higher-level device 200. As shown in Fig. As illustrated in Figure 7, the parent device 200 comprises a flow rate setting control unit 210, a pump control unit 220 configured to control pump 2, and an on / off valve control unit 230 configured to control on / off valve 4 and on / off valve 5. The flow rate setting control unit 210 includes a mode switching unit 211, a flow rate switching unit 212, and a standby position switching unit 213.

[0055] The mode transmission unit 211 transmits a first switching signal, which switches the flow rate adjustment device 100 from a standby mode to a flow rate adjustment mode, and a second switching signal, which switches the flow rate adjustment device 100 from the flow rate adjustment mode to standby mode, via cable 101 to the flow rate adjustment device 100. The flow rate transmission unit 212 transmits a flow rate setup signal, which is used to set the target flow rate value FRset, via cable 101 to the flow rate adjustment device 100. The standby position transmission unit 213 transmits a standby position setup signal, which is used to set a standby position, via cable 101 to the flow rate adjustment device 100.

[0056] Next, the process carried out by the superior device 200 of the flow rate adjustment system 1 will be described with reference to Fig. 8 described. Fig. Figure 8 is a flowchart illustrating the process carried out by the superior device 200.

[0057] In step S101, the flow rate adjustment control unit 210 determines whether the flow rate adjustment device 100 should be switched from standby mode to flow rate adjustment mode, and if the determination is YES, continues with the process of step S102 or repeats the process of step S101 if the determination is NO.

[0058] In step S102, the mode transmission unit 211 transmits the first switching signal, which switches the flow rate adjustment device 100 from standby mode to flow rate adjustment mode, to the flow rate adjustment device 100.

[0059] In step S103, the flow rate transmission unit 212 transmits the flow rate setup signal, which is used to set the target flow rate value FRset, to the flow rate setting device 100.

[0060] In step S104, the on / off valve control unit 230 controls the on / off valve 4 upstream of the flow rate adjustment device 100 so that the on / off valve 4 goes into an open state.

[0061] In step S105, the on / off valve control unit 230 controls the on / off valve 5 downstream of the flow rate adjustment device 100 so that the on / off valve 5 goes into an open state.

[0062] In step S106, the pump control unit 220 starts the operation of pump 2 and controls pump 2 so that it operates at a desired speed.

[0063] In step S107, the flow rate control unit 210 determines whether the flow rate control device 100 should be switched from flow rate control mode to standby mode and, if the determination is YES, continues with the process of step S108 or, if the determination is NO, repeats the process of step S107.

[0064] In step S108, the mode transmission unit 211 transmits the second switching signal, which switches the flow rate adjustment device 100 from the flow rate adjustment mode to the standby mode, to the flow rate adjustment device 100.

[0065] In step S109, the standby position transmission unit 213 transmits the standby position setting signal, which is used to set a standby position in which the valve body 21 is put into standby mode, to the flow rate adjustment device 100 when the flow rate adjustment device 100 is operated in standby mode.

[0066] For example, it is advantageous if the standby position transmission unit 213 corrects the standby position setting signal so that the distance along axis X1 from the valve opening 62 to the standby position increases with increasing temperature of the fluid supplied to the flow rate control device 100. This is because a higher fluid temperature increases the likelihood that the valve body 21 or the valve opening 62 will expand and move closer together or come into contact with each other.

[0067] For example, it is further advantageous if the standby position transmission unit 213 corrects the standby position setting signal such that the distance along the axis X1 from the valve opening 62 to the standby position increases with increasing viscosity of a liquid supplied to the flow rate adjusting device 100. This is because higher liquid viscosity results in a lower liquid flow rate.

[0068] In step S110, the pump control unit 220 controls pump 2 to stop the operation of pump 2.

[0069] In step S111, the on / off valve control unit 230 controls the on / off valve 4 upstream of the flow rate adjustment device 100 so that the on / off valve 4 enters a closed state.

[0070] In step S112, the on / off valve control unit 230 controls the on / off valve 5 downstream of the flow rate adjustment device 100 so that the on / off valve 5 enters a closed state.

[0071] In step S113, the superior device 200 determines whether the flow rate control system 1 should be stopped and, if the determination is YES, continues with the process in step S114 or, if the determination is NO, repeats the process from step S101.

[0072] In step S114, the superior device 200 performs a stopping operation to halt each unit of the flow rate adjustment system 1, thus ending the process of the present flow diagram.

[0073] Next, the process carried out by the flow rate adjustment device 100 of the present embodiment will be described with reference to Fig. 9 described. Fig. Figure 9 is a flowchart illustrating the process performed by the flow rate control device 100. It is assumed that the flow rate control device 100 is already in operation before the start of the process described in Figure 9. Fig. The process illustrated in step 9 executes the standby mode.

[0074] In step S201, the control unit 31 determines whether the first switching signal has been received from the superior device 200, and if the determination is YES, it continues with the process in step S202, or if the determination is NO, it repeats the process of step S201.

[0075] In step S202, the control unit 31 determines whether the flow rate setup signal has been received from the higher-level device 200, and if the determination is YES, it continues with the process in step S203, or if the determination is NO, it repeats the process of step S202.

[0076] In step S203, the control unit 31 controls the flow rate adjustment section 20 so that the flow rate adjustment mode is performed. The flow rate adjustment unit 32 sets the target flow rate value FRset based on the flow rate adjustment signal transmitted by the higher-level device 200. When the flow rate adjustment mode is performed, the control unit 31 controls the flow rate adjustment section 20 so that it moves the valve body 21 to a target position that changes according to a flow rate difference between the actual flow rate value FRac of a liquid measured by the ultrasonic flow measurement section 10 and the target flow rate value FRset, such that the actual flow rate value FRac matches the target flow rate value FRset from the flow rate adjustment unit 32.

[0077] In step S204, the control unit 31 determines whether the second switching signal has been received from the superior device 200, and if the determination is YES, it continues with the process in step S205, or if the determination is NO, it repeats the process of step S204.

[0078] In step S205, the control unit 31 determines whether the standby position setting signal has been received from the superior device 200, and if the determination is YES, it proceeds to the process in step S206, or if the determination is NO, it repeats the process of step S205.

[0079] In step S206, the control unit 31 controls the flow rate adjustment section 20 to initiate standby mode. During standby mode, the control unit 31 sets a standby position according to the standby position setting signal for the standby position setting unit 33. Furthermore, the control unit 31 controls the flow rate adjustment section 20 to move the valve body 21 into a standby position in which the valve body 21 is not in contact with the valve opening 62, and then maintains this standby position.

[0080] In step S207, the control unit 31 determines whether the flow rate adjustment device 100 should be stopped and, if the determination is YES, terminates the process of the present flow diagram or, if the determination is NO, repeats step S201.

[0081] Although the control unit 31 continues the process with step S206 to perform standby mode when the standby position setup signal is received from the superior device 200 in the flowchart above, other forms can be used. For example, the process can also continue with step S206 to perform standby mode even if the standby position setup signal is not received from the superior device 200 (for example, if the standby position setup signal has not been received even after a predetermined time has elapsed).

[0082] In such a case, the superior device 200 carries out the process from step S109 in Fig. 8 (the process of transmitting the standby position setting signal) is not carried out. Furthermore, the control unit 31 of the flow rate setting device 100 is designed to set a predefined standby position for the standby position setting unit 33. In this way, the flow rate setting device 100 can set a standby position based on the standby position setting signal when the standby position setting signal is received from the higher-level device 200, and set a predefined standby position when the standby position setting signal is not received from the higher-level device 200.

[0083] Next, we will use the following as an example: Fig. 10 describes an example of a change in the opening of the valve body 21. Fig. Figure 10 is a diagram illustrating an example of a change in the opening of the valve body 21. Fig. The periods from time T0 to time T1, from time T2 to time T3, and from time T4 to time T5 are the periods during which the flow rate control device 100 operates in standby mode. Furthermore, in Fig. 10 the period from time T1 to time T2 and the period from time T3 to time T4 periods in which the flow rate adjustment device 100 performs the flow rate adjustment mode.

[0084] In Fig. 10 means an opening of the valve body 21 of 0 [%], a state in which the valve body 21 is in the position defined by the solid line. Fig. The position illustrated in Figure 3 is in contact with the valve opening 62. Furthermore, an opening of the valve body 21 of 100% means a state in which the valve body 21 is in the position shown by the dashed line in Figure 3. Fig. 3 is illustrated.

[0085] When the control unit 31 of the flow rate adjustment device 100 of the present embodiment performs the flow rate adjustment mode, the target position, which varies according to a flow rate difference between the actual flow rate value FRac and the target flow rate value FRset, is set between a lower limit position corresponding to the lower limit of the target flow rate value FRset, which can be set by the flow rate adjustment unit 32 (the position at which the opening of the valve body 21 is 0 [%]) and an upper limit position corresponding to the upper limit of the target flow rate value FRset, which can be set by the flow rate adjustment unit 32 (the position at which the opening of the valve body 21 is 100 [%]).

[0086] When the control unit 31 of the flow rate adjustment device 100 of the present embodiment performs the flow rate adjustment mode, the target position of the valve body 21 is the position that varies according to a flow rate difference between the actual flow rate value FRac and the target flow rate value FRset. In the Fig. In the illustrated example 10, the target flow rate value FRset is set in the flow rate adjustment mode performed between time T1 and time T2 such that the opening of the valve body 21 is 20 [%]. Furthermore, the target flow rate value FRset is set in the flow rate adjustment mode performed between time T3 and time T4 such that the opening of the valve body 21 is 40 [%].

[0087] When the control unit 31 of the flow rate adjustment device 100 of the present embodiment is in standby mode, the standby position in which the valve body 21 is arranged is a position set by the standby position setting unit 33, which is a position further away from the valve opening 62 than the lower limit position. In the Fig. In the 10 illustrated example, the standby position setting unit 33 performs the following: it sets the standby position in the standby mode performed between time T0 and time T1 to a position corresponding to an opening of 10 [%], it sets the standby position in the standby mode performed between time T2 and time T3 to a position corresponding to an opening of 30 [%], and it sets the standby position in the standby mode performed between time T4 and time T5 to a position corresponding to an opening of 20 [%].

[0088] As in Fig. As illustrated in Figure 10, the standby position transmission unit 213 of the superior device 200 operates as follows to establish different standby positions for the standby mode performed between time T0 and time T1, the standby mode performed between time T2 and time T3, and the standby mode performed between time T4 and time T5.

[0089] The standby position transmission unit 213 transmits the standby position setting signal to the flow rate setting device 100, so that the standby position varies in a predetermined standby mode according to the set flow rate value FRset in the flow rate setting mode carried out after the predetermined standby mode.

[0090] In the Fig. In the illustrated example 10, the standby position in standby mode from time T0 to time T1 is set to a position where the opening is 10% smaller than for the target flow rate value FRset in the subsequent flow rate setting mode from time T1 to time T2 (a position corresponding to an opening of 10%). Furthermore, in the Fig. 10 illustrated example the standby position in standby mode from time T2 to time T3 is set to a position where the opening is 30 [%] less than for the target flow rate value FRset in the subsequently carried out flow rate setting mode from time T3 to time T4 (a position that corresponds to an opening of 30 [%]).

[0091] Although the standby position setting unit defines 33 different standby positions for the standby mode performed between time T0 and time T1, the standby mode performed between time T2 and time T3, and the standby mode performed between time T4 and time T5, in the Fig. The example in Figure 10 illustrates that other forms can also be used. For example, the standby position setting unit 33 can set the standby position set in standby mode to a predefined fixed standby position (for example, a position corresponding to an opening of 10 [%]). [First modified example]

[0092] In the embodiment described above, a modified example may be provided in which the standby position at which the flow rate control device 100 puts the valve body 21 into standby mode is corrected according to the temperature of a liquid flowing through the flow rate control device 100.

[0093] Fig. Figure 11 is a schematic configuration diagram illustrating a flow rate adjustment system 1A according to the first modified example of the present invention. The diagram shown in Fig. The illustrated flow rate adjustment system 1A differs from the one in Fig. 6 illustrated flow rate control system 1 by the fact that the flow rate control system 1A includes a temperature sensing unit 6 which is configured to determine the temperature of a liquid flowing into the flow rate control device 100.

[0094] In the flow rate setting system 1A according to the first modified example of the present invention, the standby position transmission unit 213 of the superior device 200 corrects the standby position setting signal so that the distance along the axis X1 from the valve opening 62 to the standby position is increased in accordance with an increase in the liquid temperature determined by the temperature sensing unit 6, and transmits the corrected standby position setting signal to the flow rate setting device 100. [Second modified example]

[0095] In the embodiment described above, a modified example may be provided in which the standby position at which the flow rate adjustment device 100 puts the valve body 21 into standby mode is corrected according to the pressure of a liquid flowing through the flow rate adjustment device 100.

[0096] Fig. Figure 12 is a schematic configuration diagram illustrating a flow rate adjustment system 1B according to the second modified example of the present invention. The diagram shown in Figure 12 is a schematic configuration diagram illustrating a flow rate adjustment system 1B according to the second modified example of the present invention. Fig. 12 illustrated flow rate adjustment system 1B differs from the one in Fig. 6 illustrated flow rate control system 1 by the fact that the flow rate control system 1B includes a pressure sensing unit 7 which is configured to determine the pressure of a liquid flowing into the flow rate control device 100.

[0097] In the flow rate setting system 1B according to the second modified example of the present invention, the standby position transmission unit 213 of the superior device 200 corrects the standby position setting signal so that the distance along the axis X1 from the valve opening 62 to the standby position is reduced in accordance with an increase in the fluid pressure determined by the pressure sensing unit 7, and transmits the corrected standby position setting signal to the flow rate setting device 100. [Second modified example]

[0098] In the embodiment described above, a modified example may be provided in which the standby position at which the flow rate adjustment device 100 puts the valve body 21 into standby mode is corrected according to the pressure of a liquid flowing through the flow rate adjustment device 100.

[0099] Fig. Figure 13 is a schematic configuration diagram illustrating a flow rate adjustment system 1C according to the third modified example of the present invention. The diagram shown in Figure 13 is a schematic configuration diagram illustrating a flow rate adjustment system 1C according to the third modified example of the present invention. Fig. Figure 13 illustrates the flow control system 1C, which includes the flow control device 100, the flow control device 100A, and the flow control device 100B. An on / off valve 4A is arranged between the pipe 3 and the flow control device 100A, and an on / off valve 4B is arranged between the pipe 3 and the flow control device 100B. An on / off valve 5A is arranged between the flow control device 100A and an outlet end 1bA, and an on / off valve 5B is arranged between the flow control device 100B and the discharge end 1bB.

[0100] Flow control device 100A adjusts the flow rate of a liquid supplied from pipe 3 to outlet 1bA. Flow control device 100B adjusts the flow rate of a liquid supplied from pipe 3 to outlet 1bB. When pump 2 is operated at a constant speed, the pressure of the liquid supplied via the inlet / outlet valve 4A of flow control device 100 is lower the larger the openings of inlet / outlet valve 4A and inlet / outlet valve 4B are. Conversely, when pump 2 is operated at a constant speed, the pressure of the liquid supplied via inlet / outlet valve 4A of flow control device 100 is higher the smaller the openings of inlet / outlet valve 4A and inlet / outlet valve 4B are.

[0101] In the flow rate adjustment system 1C according to the third modified example of the present invention, the standby position transmission unit 213 of the superior device 200 corrects the standby position setting signal so that the distance along the axis X1 from the valve opening 62 to the standby position in the flow rate adjustment device 100 is increased in accordance with an enlargement of the openings of the on / off valve 4A and the on / off valve 4B, and transmits the corrected standby position setting signal to the flow rate adjustment device 100.In contrast, in the flow rate adjustment system 1C, the standby position transmission unit 213 of the superior device 200 corrects the standby position setting signal so that the distance along the axis X1 from the valve opening 62 to the standby position in the flow rate adjustment device 100 is reduced in accordance with a reduction of the openings of the on / off valve 4A and the on / off valve 4B, and transmits the corrected standby position setting signal to the flow rate adjustment device 100.

[0102] The effects and advantages achieved by the flow rate adjustment device 100 and the flow rate adjustment system 1 of the embodiment described above are explained below.

[0103] According to the flow rate adjustment device 100 of the present embodiment, when switching from the flow rate adjustment mode to standby mode, the control unit 31 controls the flow rate adjustment section 20 to move the valve body 21 into a standby position in which the valve body 21 is not in contact with the valve opening 62, and then maintains the standby position. Since the position in which the valve body 21 is not in contact with the valve opening 62 is the standby position, the opening is larger than in the fully closed position in which the valve body 21 is in contact with the valve opening 62. Thus, the flow rate follows the set flow rate value FRset more closely than in the case where the flow rate adjustment mode is applied by switching from the fully closed position, and this can prevent the occurrence of a control delay.Even if the valve body 21 is too far from the valve opening 62 when switching from flow rate adjustment mode to standby mode, resulting in an excessively large opening, the valve body 21 is moved into the standby position and retained there. This prevents overshoot due to an excessively large opening of the valve body 21 when switching from standby mode to flow rate adjustment mode.

[0104] According to the flow rate adjustment device 100 of the present embodiment, since the standby position is a position that is further away from the valve opening 62 than the lower limit position, the flow rate follows the set flow rate value FRset better than in the case where the flow rate adjustment mode is applied by switching from the lower limit position, and this can prevent the occurrence of a control delay.

[0105] According to the flow rate adjustment device 100 of the present embodiment, the standby position is set by the standby position adjustment unit 33 to a predetermined position between the lower limit position and the upper limit position, and thereby an overshoot or control delay when the standby mode is switched to the flow rate adjustment mode can be appropriately prevented.

[0106] According to the flow rate adjustment device 100 of the present embodiment, switching between the flow rate adjustment mode and the standby mode can be carried out in a suitable manner in accordance with the first switching signal and the second switching signal received by the superior device 200.

[0107] According to the flow rate setting device 100 of the present embodiment, the setpoint flow rate value FRset can be set based on the flow rate setting signal transmitted by the superior device 200, and the standby position can be set based on the standby position setting signal transmitted by the superior device 200.

[0108] According to the flow rate adjustment system 1 of the present embodiment, the standby position transmission unit 213 of the higher-level device 200 transmits the standby position setting signal to the flow rate adjustment device 100, so that the standby position varies in a predetermined standby mode according to the setpoint flow rate value FRset in the flow rate adjustment mode performed after a predetermined standby mode. Since the standby position is a position according to the setpoint flow rate value FRset in the flow rate adjustment mode when a predetermined standby mode is switched to a flow rate adjustment mode, the occurrence of overshoot or control delay can be appropriately prevented.

[0109] According to the flow rate adjustment system 1A of the first modified example of the present embodiment, since the distance along the axis X1 from the valve opening 62 to the standby position is increased according to an increase in the liquid temperature determined by the temperature sensing unit 6, a fault which would otherwise be caused by the expansion of the valve body 21 or the valve opening 62 and the valve body 21 and the valve opening 62 coming closer together or into contact with each other due to an increase in the liquid temperature can be appropriately prevented.

[0110] According to the flow rate adjustment system 1B of the second modified example of the present embodiment, since the distance along the above axis from the valve opening to the standby position is reduced in accordance with an increase in the liquid pressure determined by the pressure sensing unit 7, it can be prevented that the liquid flow rate becomes excessively large due to an increase in the liquid pressure. QUOTES INCLUDED IN THE DESCRIPTION

[0000] This list of documents cited by the applicant was automatically generated and is included solely for the reader's convenience. The list is not part of the German patent or utility model application. The DPMA accepts no liability for any errors or omissions. Cited patent literature

[0000] JP 2017-138200 [0002, 0003]

Claims

[1] Flow rate adjustment device (100) comprising: a flow measurement section (10) configured to measure the flow rate of a liquid flowing through a measuring flow channel (14), a flow rate adjustment section (20) configured to move a valve body (21) along an axis in a direction closer to or away from a valve opening (62) to adjust the flow rate of a liquid exiting from the measuring flow channel (14); a flow rate setting unit (32) configured to set a target flow rate value of a liquid to be set by the flow rate setting section (20); and a control unit (31) configured to control the flow rate adjustment section either in a flow rate adjustment mode or in a standby mode, wherein the control unit (31), When it performs the flow rate adjustment mode, it controls the flow rate adjustment section (20) to move the valve body (21) to a target position that changes according to a flow rate difference between an actual flow rate value (FRac) of a liquid, measured by the flow measurement section (20), and the target flow rate value (FRset), so that the actual flow rate value (FRac) matches the target flow rate value (FRset), and When the standby mode is performed, the flow rate adjustment section (20) is controlled such that the valve body (21) is moved into a standby position and then maintains the standby position, with the valve body (21) not being in contact with the valve opening (62) in the standby position. [2] Flow rate adjustment device (100) according to claim 1, wherein the setpoint position is set between a lower limit position and an upper limit position, wherein the lower limit position corresponds to a lower limit of the set flow rate value (FRset), the upper limit position corresponds to an upper limit of the set flow rate value (FRset), and wherein the flow rate adjustment unit is configured to set the lower limit and the upper limit, and wherein the standby position is a position that is further away from the valve opening (62) than the lower limit position. [3] Flow rate adjustment device (100) according to claim 2, which further comprises a standby position setting unit (33) configured to set the standby position at a predetermined position between the lower limit position and the upper limit position. [4] Flow rate adjustment device (100) according to claim 1 or 2, wherein the control unit (31) switches the standby mode to the flow rate adjustment mode in response to the reception of a first switching signal from a superior device (200), wherein the first switching signal serves to switch the standby mode to the flow rate adjustment mode, and wherein the control unit (31) switches the flow rate adjustment mode to the standby mode in response to the reception of a second switching signal from the superior device (200), wherein the second switching signal serves to switch the flow rate adjustment mode to the standby mode. [5] Flow rate adjustment device (100) according to claim 4, wherein the flow rate setting unit (32) sets the set flow rate value based on a flow rate setting signal transmitted by the higher-level device (200), wherein the flow rate setting signal is used to set the set flow rate value (FRset), and wherein the control unit (31) sets the standby position based on a standby position setting signal transmitted by the superior device (200), the standby position setting signal being used to set the standby position. [6] Flow rate control system (1) comprising: a flow rate control device (100); and a master device (200) configured to control the flow rate control device (100), the flow rate control device (100) comprising: a flow measurement section (10) configured to measure the flow rate of a liquid flowing through a measuring flow channel (14), a flow rate adjustment section (20) configured to move a valve body (21) along an axis in a direction closer to or away from a valve opening (62) to adjust the flow rate of a liquid exiting from the measuring flow channel (14); a flow rate setting unit (32) configured to set a target flow rate value (FRset) of a fluid to be set by the flow rate setting section (20); and a control unit (31) configured to control the flow rate adjustment section (20) either in a flow rate adjustment mode or in a standby mode, wherein the control unit (31) When it performs the flow rate adjustment mode, it controls the flow rate adjustment section (20) to move the valve body (21) to a setpoint position that changes according to a flow rate difference between an actual flow rate value (FRac) of a liquid measured by the flow measurement section (10) and the setpoint flow rate value (FRset), so that the actual flow rate value matches the setpoint flow rate value, and When operating in standby mode, the flow rate adjustment section (20) controls the valve body (21) so that it moves into a standby position and then maintains the standby position, with the valve body (21) not being in contact with the valve opening (62) in the standby position. wherein the superior device (200) comprises: a mode transmission unit (211) configured to transmit a first switching signal and a second switching signal to the flow rate adjustment device (100), wherein the first switching signal is used to switch the flow rate adjustment device (100) from standby mode to flow rate adjustment mode, and the second switching signal is used to switch the flow rate adjustment device (100) from flow rate adjustment mode to standby mode; a flow rate transmission unit (212) configured to transmit a flow rate setup signal to the flow rate setting device, wherein the flow rate setup signal is used to set the target flow rate value (FRset); and a standby position transmission unit (213) configured to transmit a standby position setup signal to the flow rate adjustment device (100), wherein the standby position setup signal is used to set the standby position, and wherein the standby position transmission unit (213) transmits the standby position setting signal to the flow rate adjustment device (100) so that the standby position varies in a predetermined standby mode according to the set flow rate value (FRset) in the flow rate adjustment mode which is performed after the predetermined standby mode. [7] Flow rate control system (1) according to claim 6, further comprising a temperature sensing unit configured to determine the temperature of a liquid flowing through the flow rate control device (100), wherein the standby position transmission unit (213) transmits the standby position control signal to the flow rate control device (100) such that a distance along the axis from the valve opening (62) to the standby position is increased in accordance with an increase in the temperature of the liquid determined by the temperature sensing unit (70). [8] Flow rate control system (1) according to claim 6, further comprising a pressure sensing unit (70) configured to determine the pressure of a liquid flowing into the flow rate control device (100), wherein the standby position transmission unit (213) transmits the standby position setting signal to the flow rate control device (100) such that a distance along the axis from the valve opening (62) to the standby position is reduced in accordance with an increase in the pressure of the liquid determined by the pressure sensing unit (70). [9] Control method for a flow rate adjustment device (100), wherein the flow rate adjustment device (100) comprises: a flow measurement section (10) configured to measure the flow rate of a liquid flowing through a measurement flow channel (14); a flow rate adjustment section (20) configured to move a valve body (21) along an axis in a direction closer to or away from a valve opening (62) to adjust the flow rate of a liquid exiting the measuring flow channel (14); and a flow rate setting unit (32) configured to set a target flow rate value of a liquid to be set by the flow rate setting section (20), the tax procedure includes the following: a flow rate adjustment step (S203) for controlling the flow rate adjustment section (20) to move the valve body (21) to a setpoint position that changes according to a flow rate difference between an actual flow rate value (FRac) measured by the flow measurement section (10) and the setpoint flow rate value (FRset), such that the actual flow rate value (FRac) matches the setpoint flow rate value (FRset); and a standby step (S206) to control the flow rate adjustment section (20) to move the valve body (21) into a standby position and then to maintain the standby position, with the valve body (21) not in contact with the valve opening (62) in the standby position.

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