Bending bearings for reducing quadrature in oscillating micromechanical devices

Abstract

Microelectromechanical component (100) for motion measurement, comprising: a fortified section (118); a single, central anchor (106) coupled to the attached section (118) with four sides; a first non-straight suspension element (108) coupled to the anchor (106) on one side of the anchor (106); a second non-straight suspension member (120) coupled to the anchor (106) on the same side of the anchor (106), wherein the second non-straight suspension member (120) has a shape and position that mirrors the first non-straight suspension member (108) on a plane (122) bisecting the anchor; and a test mass (104) which is planar, wherein the test mass (104) is suspended at least partially on the first non-straight suspension member (108) and the second non-straight suspension member (120) such that the test mass (104) is rotatable about the anchor (106) and displaceable in a plane which is parallel to the attached section (118), where the first and second non-straight suspension members (108, 120) are bending bearings, wherein the first non-straight suspension member (108) has a C-shape, wherein the C-shape includes an inner section (110) which is coupled to the anchor (106) and extends towards the plane (122) bisecting the anchor, a central section (114) which includes a nearby section and has a distant section, whereby the near section is coupled to the inner section (110), and the far section extends away from the anchor (106) along the plane (122) bisecting the anchor and is coupled to an outer section (112) extending away from the plane (122) bisecting the anchor.

Description

Claim of priority and related applications

[0001] The present application claims the benefit of priority from the preliminary US patent application with serial number 61 / 384,247 entitled “LOW-QUADRATURE SUSPENSION SYSTEM FOR MULTI-AXIS GYROSCOPES”, filed on September 18, 2010, and from the preliminary US patent application with serial number 61 / 384,512 entitled “IMPROVED QUADRATURE REDUCTION STRUCTURE FOR RESONATING MICROMACHINED DEVICES”, filed on September 20, 2010.

[0002] The present application is related to US patent application number 12 / 849,742 entitled “MICROMACHINED INERTIAL SENSOR DEVICES”, filed on August 3, 2010, US patent application number 12 / 849,787 entitled “MICROMACHINED DEVICES AND FABRICATING THE SAME”, filed on August 3, 2010, and US preliminary patent application number 61 / 384,240 entitled “MICROMACHINED MONOLITHIC 6-AXIS INERTIAL SENSOR”, filed on September 18, 2010. BACKGROUND

[0003] Quadrature errors are among the primary factors limiting the performance of micromechanical sensors, such as gyroscopes. Given the relative magnitudes of the drive and measurement oscillations, even an extremely small proportion of the drive motion coupling could dominate over the Coriolis response in a measurement operation.

[0004] Manufacturing tolerances can lead to suboptimal geometries in structures such as gyroscopes. These suboptimal geometries can cause drive oscillations to be partially coupled into the measurement process. Although various cross-coupling approaches exist, such as elastic, viscous, and electrostatic coupling, elastic coupling can, in certain cases, exceed a desired level due to anisoelasticity in the suspension elements.

[0005] In sensor systems, such as gyroscope systems with off-surface operating modes, anisoelasticity between the in-surface and off-surface directions is the dominant source of quadrature errors. Tilting or shearing of a sidewall during deep reactive-ion etching (DRIE) can cause deviations in the cross-section of the flexural supports from a rectangle to a parallelogram, resulting in the principal axes of elasticity of the flexural supports deviating from being parallel and orthogonal to the surface of the device. For example, single- or multi-axis micromechanical sensor structures, such as gyroscope structures, can suffer from high quadrature errors caused at least partially by DRIE shearing.

[0006] Furthermore, conventional resonators rely on simple straight bending bearings to create a flexed structure, allowing the device to deflect at resonance. This causes significant problems if etching induces shear in the bending bearing, resulting in a large, unwanted deflection that often drives a measuring mechanism.

[0007] Document US 2010 / 0 077 858 A1 discloses a microelectromechanical component for motion measurement and a method for its manufacture, comprising a fixed section, a single, central anchor with four sides coupled to the fixed section, a first non-linear suspension member coupled to the anchor on one side, and a second non-linear suspension member coupled to the anchor on the same side. The second non-linear suspension member has a shape and position that aligns with the first non-linear suspension member in a plane bisecting the anchor. A planar test mass is suspended from the first non-linear suspension member and the second non-linear suspension member such that the test mass is rotatable about the anchor and displaceable in a plane parallel to the fixed section. The first and second non-linear suspension members are configured as bending bearings.

[0008] EP 2 175 280 A1 and DE 102 38 893 A1 also disclose such a microelectromechanical component for motion measurement and a corresponding manufacturing process. DE 692 06 770 T2 also discloses such an arrangement.

[0009] US 2010 / 0 194 008 A1, US 2010 / 0 107 761 A1, DE 10 2007 035 806 A1, EP 1 626 283 A1 and DE 10 2008 002 748 A1 disclose further relevant prior art. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] In the drawings, which are not necessarily drawn to scale, similar reference numerals may describe similar components in different views. Similar reference numerals with different appended letters may represent different embodiments of similar components. The drawings generally show, by way of example but not as limitations, various embodiments discussed in this document. Fig. Figure 1 shows a sensor structure, including a suspension structure, according to an example. Fig. 2A shows a section of a suspension according to an example. Fig. 2B shows the suspension according to Fig. 8A in a bending state in which an upper section is bent upwards, in an example. Fig. 2C shows the suspension from Fig. 8A in a bending state in which an upper section is bent downwards, in an example. Fig. Figure 3 shows a twisting movement of a suspended structure around a z-axis, according to an example. Fig. Figure 4 shows a twisting movement of a suspended structure around an x-axis, according to an example. Fig. Figure 5 shows a twisting motion of a suspended structure around a y-axis, according to an example. Fig. Figure 6 shows a dual-axis gyroscope, including a low-square error suspension according to an example. Fig. Figure 7 shows a three-axis gyroscope, including a low-square error suspension according to an example. Fig. Figure 8 shows a quadrature error for an example suspension. Fig. Figure 9 shows a type of drive according to an example. Fig. Figure 10 shows a bending bearing with four bends according to an example. Fig. Figure 11 shows a bending bearing, comprising a bending bearing and a non-bending bearing, according to an example. Fig. Figure 12 shows a bending bearing comprising a bending bearing that is shorter than the bending bearing made of Fig. 11, and a non-bending bending bearing that is shorter than the non-bending bending bearing made of Fig. 11 following an example. Fig. Figure 13A shows a suspension with large cutouts according to an example. Fig. Figure 13B shows stresses related to the bending of bending bearings. Fig. Figure 14 shows a suspension, including a hairpin turn, following an example. Fig. Figure 15 shows a suspension according to Fig. 14 bent as a twist around a z-axis according to an example. Fig. 16A shows the suspension made of Fig. 14 bent as a twist around a z-axis according to an example. Fig. Figure 16B shows the suspension from Fig. 14 bent around a y-axis according to an example. Fig. 16C shows the suspension made of Fig. 14 bent around an x-axis according to an example. Fig. 16D shows the suspension from Fig. 14 bent based on a deflection along a y-axis according to an example. Fig. Figure 17 shows a method for producing a low-square error suspension according to an exemplary embodiment. DETAILED DESCRIPTION

[0011] Unwanted sidewall deflections can negatively affect the performance of bending supports, such as those supporting part or multiple parts of a microelectromechanical system (MEMS) structure, such as a component (die). For example, an in-surface drive motion can cause off-surface motion, such as when the shear axis runs along a bending support or beam length if one or more sidewalls have an angular misalignment. Similarly, if sheared flexible or yielding bending supports or beams are located on opposite sides of a drive motion, the resulting off-surface deflection can cause or contribute to quadrature error. In another example, a low-square-face suspension system aims to reduce or eliminate unwanted off-surface motion.

[0012] Fig. Figure 1 shows a sensor structure comprising a suspension structure according to an example. Several examples reveal a low-square suspension system for a sensor. In one example, the suspension structure can be used in a twisting multi-axis micromechanical gyroscope system with a test mass, such as a single test mass 104. In another example, a test mass 104 is suspended at its center by a single central anchor 106. In yet another example, one or more bending bearings connect the anchor 106 to the test mass 104, for example, to the main frame of the test mass 116. In yet another example, one or more bends allow the test mass to twist and oscillate about three mutually perpendicular axes. In yet another example, suspension bending bearings or beams allow internal or external deflections, enabling the test mass to twist and oscillate about the x, y, and z axes.

[0013] One example comprises a fixed section 118, wherein the anchor 106 is coupled to the fixed section 118. In one example, a first non-straight suspension member 108 is coupled to the anchor 106 on one side of the anchor. In another example, a second non-straight suspension member 120 is coupled to the anchor on the same side of the anchor, wherein the second non-straight suspension member has a shape and position that mirrors the first non-straight suspension member across a plane 122 bisecting the anchor, such as the xz-plane. Various examples include a test mass 104 which is planar, wherein the test mass is suspended at least partially on the first non-straight suspension member 108 and on the second non-straight suspension member 120 such that the test mass is rotatable about the anchor 106 and is displaceable in a plane that runs parallel to the fixed section, such as in the xy-plane.

[0014] In one example, a C-shaped bending bearing 108 comprises an inner section 110 coupled to the anchor 106 and extending in the direction of the plane 122 bisecting the anchor, a central section 114 having a near section and a far section, with a near section coupled to the inner section 110 and a far section extending away from the anchor 106 along the plane 122 bisecting the anchor, and coupled to an outer section 112 extending away from the plane 122 bisecting the anchor. In one example, the central section 114 is perpendicular to the inner section 110 and the outer section 112. In another example, the central section 114 is parallel to the plane 122 bisecting the anchor.

[0015] In one example, the anchor 106, the first non-straight suspension member 108, the second non-straight suspension member 120, and the test mass 104 are formed from a monolithic material. In another example, the fastened section 118 comprises a fastened monolithic material, in addition to the monolithic material of the anchor 106, the first non-straight suspension member 108, the second non-straight suspension member 120, and the test mass 104. In yet another example, the fastened section 118 comprises a fastened monolithic material that is the same as the monolithic material of the anchor 106, the first non-straight suspension member 108, the second non-straight suspension member 120, and the test mass 104.

[0016] In one example, bending bearings are arranged on each side of the central anchor, such as on opposite sides of the anchor. In another example, any extra-surface movement caused by each C-shaped bending bearing on one side is canceled out by its symmetrical counterpart. Similarly, in another example, the quadrature error introduced at each bending bearing is locally reduced or canceled out.

[0017] In one example, a central suspension structure 102 is used in a sensor, such as a six-degrees-of-freedom (DOF) sensor 100, such as a monolithic 6-DOF sensor, which includes symmetrical bending supports. In one example, the symmetrical bending supports comprise C-shaped bending supports 108. In another example, each C-shaped bending support comprises inner 110 and outer 112 bending supports with a high-stiffness connecting bending support 114 between two bending supports. In another example, the inner bending support 112 (110) is connected to the anchor 106 at one end, and the outer bending support 112 is connected to the test mass 104 at the other end. In another example, the suspension system 102 is formed by a total of eight C-shaped bending supports 108. In yet another example, two symmetrical C-shaped bending supports are arranged on each of the four sides of a central anchor structure.

[0018] In one example, a suspension system allows three gyroscope operating modes: twisting inwards around the z-axis for the drive movement; twisting outwards around the x-axis for the y-axis gyroscope measurement movement; and twisting outwards around the y-axis for the x-axis gyroscope measurement movement. In another example, it is possible to switch between the oscillation modes.

[0019] Fig. 2A shows a section of a suspension according to an example.

[0020] Fig. 2B shows the suspension from Fig. 2A in a bending state in which an upper section is bent upwards, in an example. Fig. 2C shows the suspension from Fig. 2A in a bending state where an upper section is bent downwards in one example. The examples shown illustrate the deformation profile in each direction of the suspension mechanism. In one example, the bending occurs in the same direction and in opposite directions in both directions. Fig. 2B and Fig. 2C shows the deformation cases. In one example, the two bending supports bend in opposite directions. In another example, the total off-surface deformation from one end of the bends to the other is minimized by generating opposing off-surface deformations that cancel each other out.

[0021] Fig. Figure 3 shows a twisting motion of a suspended structure about a z-axis according to an example. In this example, a suspension system 300 comprises two symmetrical C-shaped bending bearings 302, 304 on each side of a central anchor structure 306. In this example, one or both of the C-shaped bending bearings 302, 304 are formed from a high-stiffness connecting bending bearing 308, which is arranged between two bending bearings 310, 312. In this example, the extra-surface motion caused by the deflection of the bending bearings at each C-shaped bending bearing on one side is canceled by a symmetrical counterpart 310', 312' during an in-surface twisting motion, such as a motion along the plane of the figure. A quadrature error introduced at each bending bearing is accordingly reduced or canceled locally.

[0022] The example shown illustrates a twisting motion about a z-axis, that is, an axis extending into and out of the side. In one example, the inner 310 and outer 312 bending supports in each C-shaped bending support bend internally during the internal twisting motion. In another example, the high-stiffness connecting supports 308 do not experience any significant bending. When the test mass is rotated counterclockwise about the z-axis, an upper section of the test mass moves to the left, as shown. In another example, both high-stiffness connecting supports move to the left. As a result, the inner and outer bends at the right C-shaped bending support bend downwards, while those at the left C-shaped bending support bend upwards. In another example, the motion therefore results as deflections in opposite directions in the symmetrical C-shaped bending support bends.Since the bends in symmetrical C-shaped bending supports are deflected in opposite directions, the extra-surface movement due to the deflection of the bending supports is canceled out on one side of each C-shaped bending support's symmetrical counterpart. The quadrature error introduced at each bending support is therefore locally canceled out.

[0023] Fig. Figure 4 shows a twisting motion of a suspended structure about an x-axis according to an example. In this example, a suspension structure can be used in a twisting multi-axis micromechanical gyroscope system with a test mass, such as a single test mass 404. In this example, the test mass 404 is suspended at its center by a single central anchor 406. In this example, one or more flexural supports 402 connect the anchor 406 to the test mass 404. In this example, during the extra-surface twisting motion about the x-axis, the C-shaped suspension pairs 412, 412' on the y-axis sides of the anchor are primarily deflected. In this example, the inner flexural supports 410, 410' in these C-shaped suspensions bend about the x-axis, acting like a torsional hinge.

[0024] In one example, the component has a (substrate) disk shape (wafer shape), wherein a first non-straight suspension member 408 and a second non-straight suspension member 412 each have a substantially rectangular cross-section, the height of the cross-section being less than the width.

[0025] Fig. Figure 5 shows a twisting motion of a suspended structure about a y-axis according to an example. In this example, the suspension structure can be used in a twisting multi-axis micromechanical gyroscope system with a test mass, such as a single test mass 404. In this example, a test mass 404 is suspended at its center by a single central anchor 406. In this example, one or more flexural supports 402 connect the anchor 406 to the test mass 404. In this example, primarily the C-shaped suspension pairs 412, 412' on the x-axis sides of the anchor are deflected during the extra-surface twisting motion about the y-axis. The inner flexural supports in these C-shaped flexural supports 414, 414' flex about the y-axis, acting like a torsional hinge.

[0026] Fig. Figure 6 shows a dual-axis gyroscope comprising a low-square error suspension according to an example. In this example, a structure 602 can be used in various twisting multi-axis micromechanical gyroscope systems with a single test mass 604 suspended at its center by a single central anchor 606. The bends 608 connect the anchor to the test mass 604 and allow the test mass to twist and oscillate about all three axes. The example shown measures movements about the x-axis and the y-axis and allows three gyroscope operating modes: twisting within the surface about the z-axis for the drive movement; twisting outside the surface about the x-axis for the y-axis gyroscope measurement movement; and twisting outside the surface about the y-axis for the x-axis gyroscope measurement movement.In one example, one or more comb electrodes 616 are coupled to a fixed section of the device and measure a movement of the comb electrodes 618, which are coupled to the test mass 604. In another example, the comb teeth of the comb electrodes 618 are arranged along an axis that bisects an angle between the x-axis and the y-axis.

[0027] Fig. Figure 7 shows a three-axis gyroscope comprising a low-square error suspension according to an example. In one example, the structure 702 can be used in various twisting multi-axis micromechanical gyroscope systems with a single test mass 704 suspended at its center by a single central anchor 706. The bends 708 connect the anchor to the test mass 704 and allow the test mass to twist and oscillate about all three axes. In one example, a device functions like a 3-axis ("X / Y / Z") gyroscope. In one example, the suspension system 702 allows similar gyroscope operating modes to those in Fig. Device shown in 6. In one example, the device shown in Fig. The device shown in Figure 7 has further bends 720 that allow z-axis measurement operation. In one example, one or more comb electrodes 716 are coupled to a fixed section of the device and measure a movement of the comb electrodes 718, which are coupled to the test mass 704. In another example, the comb teeth of the comb electrodes 718 are arranged along an axis that bisects an angle between the x-axis and the y-axis.

[0028] Fig. Figure 8 shows the quadrature error for a sample suspension. In one example, the angle of the bending bearings has a significant effect on the quadrature. In another example, the angle can be selected for each configuration to optimize the quadrature error resulting from the shear forces of the resonator-bending bearing bends. In one example, the optimal angle for the desired implementation of the suspension system is 15 degrees. In another example, the optimal angle depends on the structural shape and is selected based on the structure of a corresponding device. In yet another example, two bending bearings for a desired structure are set to the same angular offset, but two bending bearings could easily be set to different angles.

[0029] Fig. Figure 9 shows a drive type according to an example. The inventors recognized that a shearing effect generates quadrature errors in suspension configurations that include an anchor 906 and that they could minimize the effect by generating opposing shears at the same bend 902 or at the same pair of bends 904.

[0030] Two bending bearings are separated by a frame, each deforming in opposite directions during operation. The opposing directions of deformation cause the shear to generate off-surface deformations in opposite directions, which cancel each other out at the end connection to the moving component. This is used to replace an existing mechanism comprising only a single bending bearing, where the shear causes deformation in only one direction, generating significant off-surface movement without any cancellation.

[0031] In some examples, however, the inner 910, 910' and outer 912, 912' bending bearings are rotated in such a way that a deformation causes one bending bearing to bend upwards and one bending bearing to bend downwards during drive operation. In one example, the drive mode is a rotary operation about a central armature. In another example, the drive operation causes each of the four suspension pairs 404 to deform in one direction and the other in the opposite direction.

[0032] Fig. Figure 10 shows a bending bearing with four bends according to an example. In one example, the bend 1002 can comprise more than one bend. In another example, this can allow for more targeted, controlled off-surface movement. In another example, a number of switchbacks 1004 are included. In another example, the switchbacks have a zigzag pattern extending from the anchor 1006 to the test mass 1005. In another example, the zigzag comprises switchbacks with a regular amplitude along the pattern extending from the anchor 1006 to the test mass 1005. In other embodiments, the amplitude varies. In another example, the switchbacks have a C-shape with tall 1008 and deep 1014 elements that are parallel to each other but not parallel with respect to a highly stiff section 1016.

[0033] Fig. Figure 11 shows a bending bearing comprising a bending bearing and a non-bending bearing according to an example. In an example, a bend 1102 can also be parameterized by lengthening or shortening the bending bearings 1110 and 1114 or the non-bending bearing 1112. In the example shown in Fig. In the 12 examples shown, the outer bending bearing 1110 and the non-bending bearing 1112 were shortened.

[0034] Fig. Figure 12 shows a bending bearing comprising a bending bearing that is shorter than the bending bearing made of Fig. 11, and a non-bending bending bearing that is shorter than the non-bending bending bearing made of Fig. 11 according to an example. The outer bending bearing 1210 and the non-bending bearing 1212 were compared to the components made of Fig. 11 shortened.

[0035] Fig. Figure 13A shows a suspension with large cutouts according to an example. Fig. Figure 13B shows stresses related to the bending of bending bearings. In the examples, gaps 1302 are arranged between the bending bearing 1304 and the test mass 1306.

[0036] Fig. Figure 14 shows a component 1400 comprising a suspension and a tapered bend, as shown in an example. The tapered bend 1402 extends between the C-shaped bending support 1406 and the test mass 1408. The addition of the tapered bend 1402 further reduces the quadrature error, at least insofar as it reduces the off-surface bending, at least partially, due to the DRIE etching.

[0037] In one example, the outer section 1412 of a first non-straight suspension member 1416 has a near section coupled to the mid section 1420 of the first non-straight suspension member 1416, and a far section extending away from the plane 1422 bisecting the anchor, with a fourth section 1402 of the first non-straight suspension member 1416, which is coupled to the far section of the outer section at a near section of the fourth section 1402 and extends towards the anchor 1404 to a far section of the fourth section, which is coupled to a fifth section 1424 of the first non-straight suspension member, which extends in the direction of the plane 1422 bisecting the anchor. In another example, the inner section 1410 and the outer section 1412 are straight and parallel.

[0038] Fig. Figure 15 shows the suspension made of Fig. 14. Twisting around a z-axis, according to an example. Fig. 16A shows the suspension made of Fig. 14. Twisting around a z-axis, according to an example. Fig. Figure 16B shows the suspension from Fig. 14 bent around the y-axis according to an example. Fig. 16C shows the suspension made of Fig. 14 bent around the x-axis according to an example. Fig. 16D shows the suspension from Fig. 14 bent as a deflection along a y-axis according to an example.

[0039] Fig.Figure 17 shows a method for producing a low-square-error suspension by way of example. In Figure 1702, the method includes etching a material to define an anchor. In Figure 1704, the method includes etching the material to define a first non-straight suspension member coupled to the anchor on one side of the anchor. In Figure 1706, the method includes etching the material to define a second non-straight suspension member coupled to the anchor on the same side of the anchor, the second non-straight suspension member having a shape and position that mirrors the first non-straight suspension member across a plane bisecting the anchor.In 1708, the method comprises etching the material to define a test mass which is planar, wherein the test mass is suspended at least partially from the first non-straight suspension member and the second non-straight suspension member such that the test mass is rotatable about the anchor and displaceable in a plane which is parallel to the substrate.

[0040] Optional methods are possible, including methods in which etching involves reactive ionic deep etching. In some optional methods, the first and second non-straight suspension members belong to a first group, comprising etching the material to define a second group of non-straight suspension members relative to the first group. Some optional methods include etching a third group of non-straight suspension members to couple the anchor to the test mass and etching a fourth group of non-straight suspension members to couple the anchor to the test mass, wherein the third and fourth groups have a form factor similar to the first and second groups and are bisected by a second, perpendicular plane bisecting the anchor. FURTHER REMARKS

[0041] The subject matter of this document can be described using several examples. Example 1 comprises a microelectromechanical component for motion measurement, comprising a fixed section, an anchor coupled to the fixed section, a first non-linear suspension member coupled to the anchor on one side of the anchor, a second non-linear suspension member coupled to the anchor on the same side of the anchor, wherein the second non-linear suspension member has a shape and position that mirrors the first non-linear suspension member in a plane bisecting the anchor, and a test mass that is planar, wherein the test mass is suspended at least partially from the first non-linear suspension member and the second non-linear suspension member such that the test mass is rotatable about the anchor and displaceable in a plane parallel to the fixed section.

[0042] Example 2 includes the object from Example 1, where the first non-straight suspension element has a C-shape.

[0043] Example 3 comprises the object from Example 2, wherein the C-shape includes an inner section coupled to the anchor and extending along the plane bisecting the anchor, a middle section comprising a near section and a far section with a near section coupled to the inner section and a far section extending away from the anchor along the plane bisecting the anchor and coupled to an outer section extending away from the plane bisecting the anchor.

[0044] Example 4 comprises the object from Example 3, wherein the outer section of the first non-straight suspension member has a near section coupled to the mid section of the first non-straight suspension member and a far section extending away from the plane bisecting the anchor, with a fourth section of the first non-straight suspension member coupled to the far section of the outer section at a near section of the fourth section and extending towards the anchor to a far section of the fourth section, which is coupled to a fifth section of the first non-straight suspension member extending in the direction of the plane bisecting the anchor.

[0045] Example 5 comprises the object from one of Examples 3 to 4, wherein the inner section and the outer section are straight and parallel.

[0046] Example 6 comprises the subject of Example 5, wherein the central section is perpendicular to the inner section and the outer section.

[0047] Example 7 includes the object from one of Examples 3 to 6, where the central section is parallel to the plane bisecting the anchor.

[0048] Example 8 comprises the object from one of Examples 1 to 7, wherein the anchor, the first non-straight suspension member, the second non-straight suspension member and the test mass are formed from a monolithic material.

[0049] Example 9 comprises the object from Example 8, wherein the fastened section includes a fastened monolithic material in addition to the monolithic material of the anchor, the first non-straight suspension member, the second non-straight suspension member and the test mass.

[0050] Example 10 comprises the object from any one of Examples 1 to 9, wherein the fastened section comprises a fastened monolithic material which is the same as the monolithic material of the anchor, the first non-straight suspension member, the second non-straight suspension member and the test mass.

[0051] Example 11 comprises the object from one of Examples 1-10, wherein the component has a disc shape, wherein the first non-straight suspension member and the second non-straight suspension member each have a substantially rectangular cross-section, wherein the height of the cross-section is less than the width.

[0052] Example 12 comprises a method, an etching of a material to define an anchor, an etching of the material to define a first non-straight suspension member coupled to the anchor on one side of the anchor, an etching of the material to define a second non-straight suspension member coupled to the anchor on the same side of the anchor, wherein the second non-straight suspension member has a shape and position that mirrors the first non-straight suspension member in a plane bisecting the anchor, an etching of the material to define a test mass that is planar, wherein the test mass is suspended at least partially from the first non-straight suspension member and the second non-straight suspension member such that the test mass is rotatable about the anchor and displaceable in a plane parallel to the substrate.

[0053] Example 13 includes the item from Example 12, where etching includes reactive ionic deep etching.

[0054] Example 14 comprises the object from one of Examples 12-13, wherein the first non-straight suspension member and the second non-straight suspension member belong to a first group, comprising an etching of the material to define a second group of non-straight suspension members in contrast to the first group.

[0055] Example 15 comprises the object from Example 14, comprising an etching of a third group of non-straight suspension members for coupling the anchor to the test mass and an etching of a fourth group of non-straight suspension members for coupling the anchor to the test mass, wherein the third group and the fourth group have a form factor similar to that of the first group and the second group and are bisected by a second plane bisecting the anchor, which is perpendicular to the first.

[0056] The detailed description above includes references to the accompanying drawings, which form part of the detailed description. The drawings illustrate specific embodiments in which the invention can be carried out. These embodiments are also referred to herein as "examples." All publications, patents, and patent documents referenced in this document are incorporated herein by reference in their entirety, as if they were incorporated individually by reference. In the event of inconsistent uses between this document and the documents incorporated by reference, the use in the incorporated references should be considered supplementary to that in this document; in the case of irreconcilable inconsistencies, the use in this document shall prevail.

[0057] In this document, the terms "a" or "an" are used, as is customary in patent documents, to encompass one or more than one, irrespective of any other instances or uses of "at least one" or "one or more." In this document, the term "or" is used to refer to a non-exclusive "or," such that "A or B" encompasses "A but not B," "B but not A," and "A and B," unless otherwise specified. In this document, the terms "include" / "contain" and "in which" are used as plain language equivalents of the corresponding terms "comprise" and "whereby."Furthermore, in the following claims, the terms "include" / "contain" and "comprise" are not exhaustive; that is, a system, device, article, or method comprising components beyond those listed in a claim under such a term is still considered to fall within the scope of protection of the claim. Moreover, in the following claims, the terms "first," "second," and "third," etc., are used merely as identifiers and do not intend to impose numerical requirements on their objects. The above description is for illustrative purposes only and is not intended to be limiting. In other examples, the examples described above (or one or more aspects thereof) may be used in combination. Other embodiments may be used, for example, by a person skilled in the art after reviewing the above description.

[0058] The summary allows the reader to quickly ascertain the nature of the technical disclosure. It is provided with the understanding that it is not intended to interpret or limit the scope or meaning of the claims. Furthermore, various features may be grouped in the detailed description above to streamline the disclosure. This should not be interpreted as meaning that an unclaimed disclosed feature is essential to any claim. Rather, an inventive subject matter may be present in fewer than all features of a particular disclosed embodiment. Therefore, the following claims, each claim standing alone as a separate embodiment, are hereby included in the detailed description, and it is intended that such embodiments may be combined with one another in various combinations and permutations.The scope of protection of the invention should be determined with reference to the pending claims, together with the scope of protection of equivalents to which such claims are entitled.

Claims

[1] Microelectromechanical component (100) for motion measurement, comprising: a fortified section (118); a single, central anchor (106) coupled to the attached section (118) with four sides; a first non-straight suspension element (108) coupled to the anchor (106) on one side of the anchor (106); a second non-straight suspension member (120) coupled to the anchor (106) on the same side of the anchor (106), wherein the second non-straight suspension member (120) has a shape and position that mirrors the first non-straight suspension member (108) on a plane (122) bisecting the anchor; and a test mass (104) which is planar, wherein the test mass (104) is suspended at least partially on the first non-straight suspension member (108) and the second non-straight suspension member (120) such that the test mass (104) is rotatable about the anchor (106) and displaceable in a plane which is parallel to the attached section (118), where the first and second non-straight suspension members (108, 120) are bending bearings, wherein the first non-straight suspension member (108) has a C-shape, wherein the C-shape includes an inner section (110) which is coupled to the anchor (106) and extends towards the plane (122) bisecting the anchor, a central section (114) which includes a nearby section and has a distant section, whereby the near section is coupled to the inner section (110), and the far section extends away from the anchor (106) along the plane (122) bisecting the anchor and is coupled to an outer section (112) extending away from the plane (122) bisecting the anchor. [2] Component (100) according to claim 1, wherein the outer section (1412) of the first non-straight suspension member (1416) has a near section coupled to the central section (1420) of the first non-straight suspension member (1416) and a far section extending away from the plane (1422) bisecting the anchor, with a fourth section (1402) of the first non-straight suspension member (1416) coupled to the far section of the outer section at a near section of the fourth section (1402) and extending towards the anchor (1404) to a far section of the fourth section, which is coupled to a fifth section (1424) of the first non-straight suspension member (1416) extending towards the plane (1422) bisecting the anchor. [3] Component (100) according to one of claims 1-2, wherein the inner section (1410) and the outer section (1412) are straight and parallel. [4] Component (100) according to claim 3, wherein the central section (114) is perpendicular to the inner section (110) and the outer section (112). [5] Component (100) according to claim 1, wherein the central section (112) is parallel to the plane (122) bisecting the anchor. [6] Component (100) according to claim 1, wherein the anchor (106), the first non-straight suspension member (108), the second non-straight suspension member (120) and the test mass (104) are formed from a monolithic material. [7] Component (100) according to claim 6, wherein the fastened section (118) comprises a fastened monolithic material in addition to the monolithic material of the anchor (106), the first non-straight suspension member (108), the second non-straight suspension member (120) and the test mass (104). [8] Component (100) according to one of claims 6-7, wherein the fastened section (118) comprises a fastened monolithic material which is the same as the monolithic material of the anchor (106), the first non-straight suspension member (108), the second non-straight suspension member (120) and the test mass (104). [9] Component (100) according to claim 1, wherein the component has a disc shape, wherein the first non-straight suspension member (408) and the second non-straight suspension member (412) each have a substantially rectangular cross-section, wherein the height of the cross-section is less than the width. [10] Method for manufacturing a microelectromechanical component (100) for motion measurement, comprising: Etching (1702) of a material to define a single, central anchor (106) coupled to a fixed section (118) with four sides; Etching (1704) of the material to define a first non-straight suspension member (108) coupled to the anchor (106) on one side of the anchor (106); Etching (1706) of the material to define a second non-straight suspension member (120) coupled to the anchor (106) on the same side of the anchor (106), wherein the second non-straight suspension member (120) has a shape and position that mirrors the first non-straight suspension member (108) on a plane (122) bisecting the anchor; and Etching (1708) of the material to define a test mass (104) which is planar, wherein the test mass (104) is suspended at least partially on the first non-straight suspension member (108) and the second non-straight suspension member (108) such that the test mass (102) is rotatable about the anchor (106) and displaceable in a plane parallel to the substrate, where the first and second non-straight suspension members (108, 120) are bending bearings, wherein the first non-straight suspension member (108) has a C-shape, wherein the C-shape includes an inner section (110) that is coupled to the anchor (106) and extends towards the plane (122) bisecting the anchor, a central section (114) having a near section and a far section, the near section being coupled to the inner section (110), and the far section extending away from the anchor (106) along the plane (122) bisecting the anchor and being coupled to an outer section (112) extending away from the plane (122) bisecting the anchor. [11] Method according to claim 10, wherein etching (1702, 1704, 1706, 1708) of the material comprises reactive ion deep etching. [12] Method according to one of claims 10-11, wherein the first non-straight suspension member (108) and the second non-straight suspension member (120) belong to a first group, comprising etching (1702, 1704, 1706, 1708) of the material to define a second group of non-straight suspension members in relation to the first group. [13] Method according to claim 12, comprising etching (1702, 1704, 1706, 1708) a third group of non-straight suspension members for coupling the anchor (106) to the test mass (104) and etching (1702, 1704, 1706, 1708) a fourth group of non-straight suspension members for coupling the anchor (106) to the test mass (104), wherein the third group and the fourth group have a form factor similar to the first group and the second group and are bisected by a second plane (122) bisecting the anchor, which is perpendicular to the first.

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