Component conveying device, carriage and method for coupling carriage and towing device

Abstract

A component conveying device comprises a carriage, a towing device, and a connecting device. The carriage transports a component to be used in a substrate processing machine configured to perform a predetermined substrate processing on a substrate. The towing device tows the carriage. The connecting device electrically connects the carriage and the towing device depending on the positioning and coupling between the carriage and the towing device.

Description

Technical area

[0001] The present specification discloses a technique relating to a component conveying apparatus, a carriage, and a method for coupling the carriage and a towing apparatus. State of the art

[0002] A conveyor vehicle described in Patent Literature 1 includes a first transfer device and a traveling device. The conveyor vehicle is moved to a destination station by the traveling device and delivers a component or storage compartment to the destination station through the first transfer device. The conveyor vehicle can also pick up the component or storage compartment from the destination station through the first transfer device.

[0003] A lifting mechanism described in Patent Literature 2 may include one or more couplers to establish an electrical, optical, and mechanical connection between a robot and a tool. Furthermore, the lifting mechanism causes the robot to communicate with the tool, supply power to the tool, and perform tasks such as coupling with the tool. Citation listPatent literature Patent Literature 1: WO 2021 / 144866 Patent Document 2: JP-A-2018-513817 Summary of the inventionTechnical problem

[0004] However, Patent Literature 1 does not describe a specific connection form between the first transfer device and the travel device. Patent Literature 2 also does not explicitly describe the coordination of positioning, coupling, and electrical connection between the robot and the tool.

[0005] In view of such circumstances, the present specification discloses a component conveying apparatus capable of coordinating the positioning, coupling, and electrical connection between a carriage and a towing device, a carriage, and a method for coupling the carriage and the towing device. Solution to the problem

[0006] The present description discloses a component conveying device comprising a carriage, a towing device, and a connecting device. The carriage is configured to convey a component to be used in a substrate processing machine configured to perform a predetermined substrate processing on a substrate. The towing device is configured to tow the carriage. The connecting device is configured to electrically connect the carriage and the towing device in accordance with the positioning and coupling between the carriage and the towing device.

[0007] The present description discloses a carriage comprising a delivery mechanism, a coupling mechanism, and a connecting device. The delivery mechanism is configured to perform the delivery of a component to be used in a substrate processing machine configured to perform a predetermined substrate processing on a substrate. The coupling mechanism is configured to be mechanically coupled to the towing device. The connecting device is configured to be electrically connected to the towing device and to be electrically connected to the towing device according to the positioning and coupling with the towing device.

[0008] Furthermore, the present description discloses a method for coupling a carriage configured to carry a component to be used in a substrate processing machine configured to perform a predetermined substrate processing on a substrate, and a towing device capable of towing the carriage and automatically moving along a travel path. The method for coupling the carriage and the towing device includes a first positioning step and a coupling and connecting step. The first positioning step performs a first stage of positioning with respect to the carriage.The coupling and connecting step, after the first positioning step is performed, actuates a moving mechanism, thereby performing mechanical positioning and coupling, and electrically connects the carriage and the towing device according to the positioning and coupling between the carriage and the towing device.

[0009] It should be noted that the present specification discloses a technical idea in which the "component conveying device according to claim 2" in claim 6 described in the claims originally attached to the application (hereinafter referred to as the original claims) is changed to the "component conveying device according to any one of claims 2 to 5." Furthermore, the present specification discloses a technical idea in which the "component conveying device according to claim 2" in claim 8 described in the original claims is changed to the "component conveying device according to any one of claims 2 to 7." Advantageous effects of the invention

[0010] With the component conveying device described above, it is possible to electrically connect the carriage and the towing device according to the positioning and coupling between the carriage and the towing device. The above description of the component conveying device can be similarly applied to a carriage and a method for coupling the carriage and the towing device. Brief description of the drawings Fig. 1 is a plan view showing a configuration example of a production facility. Fig. 2 is a partial perspective view showing a configuration example of a station and a car. Fig. 3 is a perspective view illustrating a state in which an accommodation compartment capable of accommodating a component is mounted on the carriage in Fig. 2 is loaded. Fig. 4 is a partially transparent perspective view showing a configuration example of a coupling mechanism. Fig. 5 is a block diagram showing an example of a control block of a component conveying device. Fig. Figure 6 is a plan view showing an example of a positioned section. Fig. Figure 7A is an enlarged view of two positioned sections on the right side of the drawing of Fig. 6. Fig. Figure 7B is a cross-sectional view of the two positioned sections on the right side of the drawing of Fig. 6. Fig. 8 is a plan view showing an example of a positioning section. Fig. 9 is a front view showing an example of the positioning section and a moving mechanism according to Fig. 8 shows. Fig. 10 is a plan view showing an example of a state before a projection portion moves toward a hole portion. Fig. 11 is a plan view showing an example of a state after inserting the protrusion portion into the hole portion. Fig. 12 is a plan view showing a second example of a positioning section. Fig. 13 is a plan view showing a second example of a positioning section. Fig. 14 is a side view showing a configuration example of a connecting device. Fig. Figure 15 is a flowchart showing an example of a coupling method. Description of the Embodiments 1. Embodiment 1-1. Configuration Example of Production Plant 1

[0011] The component conveying device 80, the carriage 60, a method for coupling the carriage 60 and the towing device 70 can be used in various production plants 1 for manufacturing substrate products. As in Fig. 1, the production plant 1 of the embodiment comprises at least one component assembler 10 (four in Fig. 1), an exchange system 30, a component moving device 40, a station group 50, a carriage 60, a towing device 70, a line control device LC0, a production management device WC0, and a conveyance management device CC0. In the following description, a transportation direction of the substrate, which is a horizontal width direction of the component mounter 10, is defined as the X direction. Furthermore, a direction perpendicular to the X direction in the horizontal plane, which is a horizontal depth direction of the component mounter 10, is defined as the Y direction. Furthermore, a vertical direction perpendicular to the X direction and the Y direction is defined as the Z direction.

[0012] At least one (or four) component mounters 10 are installed along the substrate transport direction (X direction). The component mounter 10 is included in the substrate processing machine WM0, which performs predetermined substrate processing. The component mounter 10 mounts a plurality of components on a substrate that is fed and positioned at a predetermined position, and transports out the substrate on which the components are mounted. That is, the work performed on the substrate by the component mounter 10 includes feeding, positioning, and feeding out the substrate. In addition, the substrate work performed by the component mounter 10 includes component feeding, unloading, and mounting.The substrate processing machine WM0 is not limited to the component mounter 10, but may be a device such as a printing machine that prints solder on a substrate, an inspection machine for inspecting a substrate on which solder is printed or a substrate on which components are mounted, and a reflow oven for heating a substrate on which the components are mounted to bond the components to the substrate.

[0013] The component mounter 10 includes, for example, a device for feeding components to be mounted on the substrate. A plurality of feeders 20 are detachably arranged in the component feeder. The feeder 20 is contained in the component AR0 used by the component mounter 10 in component supply. Furthermore, the component feeder includes at least one slot into which a plurality of feeders 20 can be inserted. The component feeder is arranged in two positions: a first position and a second position.

[0014] The feeder 20 is operatively installed in the first position. The operation of the feeder 20 installed in the first position is controlled by the component mounter 10 during substrate processing, and components are sequentially fed from a receiving section located at a predetermined position of the feeder 20. The second position is located below the first position and the supply of the feeder 20. That is, the second position temporarily holds the feeder 20 used for production and temporarily holds the feeder 20 used for production.

[0015] An exchange operation of the feeder 20 between the first position and the second position, as well as a refilling operation and a removal operation of the feeder 20 are performed using the exchange system 30 and the component moving device 40. As shown in Fig. 1, the exchange system 30 includes a first rail 31 and a second rail 32. The first rail 31 and the second rail 32 form a travel path of the component moving device 40. The first rail 31 and the second rail 32 are arranged along an arrangement direction of at least one (or four) component mounters 10 (the transport direction (X direction) of the substrate). The first rail 31 and the second rail 32 extend substantially over the entire range of the transport direction (X direction) of the substrate in the production system 1.

[0016] The component moving device 40 is arranged to move along the travel path formed by the first rail 31 and the second rail 32. The component moving device 40 receives power from a power transmission section through non-contact power supply, for example, via a power reception section arranged to oppose the power transmission section arranged on the first rail 31. The power received by the power reception section is used for moving the component moving device 40, a predetermined operation, or the like, via a power reception circuit. Note that the component moving device 40 detects, for example, a position (current position) on the travel path through a position detection device.The position detecting device can detect the position (current position) of the component moving device 40 on the travel path, for example, by optical position detection, position detection using electromagnetic induction, or the like.

[0017] Furthermore, the predetermined process described above includes an exchange process for exchanging a device detachably mounted in the substrate processing machine WM0, such as the component mounter 10, with the substrate processing machine WM0. In the embodiment, the component moving device 40 uses the feeder 20, which provides the components to be mounted on the substrate, as a device and performs the exchange process of the feeder 20 with the component mounter 10, which is the substrate processing machine WM0. Furthermore, the component moving device 40 can perform the exchange of the feeder 20 with the station group 50.

[0018] Specifically, the component moving device 40 performs the exchange operation of the feeder 20 between the first position and the second position of the component feeding device of the component mounter 10. Furthermore, the component moving device 40 transfers the component 20 from the station group 50 to the first position or the second position of the component feeding device and performs the replenishment operation of the component 20. Furthermore, the component moving device 40 transfers the feeder 20, which has become redundant in the component mounter 10, from the component feeding device to the station group 50 and performs the removal operation of the feeder 20.

[0019] Station group 50 is located on a substrate input side (on the left side of the drawing of Fig. 1) of the production plant 1. As described in the Fig. 1 and Fig. 2, the station group 50 is provided with at least one station 50s (two in the Fig. 1 and Fig. 2) capable of feeding the component AR0 for use in the substrate processing machine WM0, such as the feeder 20. The station 50s only needs to be capable of delivering the component AR0 and can take various forms. For example, the station 50s comprises several rollers and can feed the component AR0 from the carriage 60 and feed the component AR0 out to the carriage 60.

[0020] The Station 50s can also Fig. 3, which can accommodate the component AR0. In this case, too, the station 50s can introduce the accommodation compartment AC0 from the carriage 60 and feed the accommodation compartment AC0 out to the carriage 60 via a plurality of rollers. The accommodation compartment AC0 includes, for example, a plurality of slots, and a feeder 20 can be arranged in each slot. The feeder 20, which is installed in the slot of the accommodation compartment AC0 conveyed in the station 50s, is supplied with power from the station 50s via the accommodation compartment AC0 and is then in a state where it can communicate with the line control device LC0. As a result, the identification information of the slot of the accommodation compartment AC0 and the feeder 20 installed in the slot are associated with each other and stored in the line control device LC0.

[0021] The carriage 60 transports the component AR0 for use in the substrate processing machine WM0. The carriage 60 transports the component AR0 into or out of the station 50s. The transport of the component AR0 by the carriage 60 is not limited to the station 50s, and if possible, the component AR0 can also be conveyed directly into or out of the substrate processing machine WM0. The carriage 60 only needs to be able to transport the component AR0 and can take various forms. As shown in the Fig. 2 and Fig. 3, the carriage 60 comprises, for example, a carriage main body section 61, a loading platform 62 and several (e.g. four) wheels 63. The loading platform 62 is located in the upper area of the carriage main body section 61 and can be loaded with the component AR0. As shown in Fig. 3, the loading platform 62 can be loaded with a receiving housing AC0 that can accommodate the component AR0.

[0022] The loading platform 62 includes a plurality of rollers 62a and can transport the component AR0 to the station 50s and transport the component AR0 out of the station 50s. In addition, the loading platform 62 can transport the accommodation compartment AC0 to the station 50s and transport the accommodation compartment AC0 out of the station 50s. The loading platform 62 fixes the component AR0 or the accommodation compartment AC0 unless the component AR0 or the accommodation compartment AC0 is being transported into or out of the station 50s. The loading platform 62 releases the fixation of the component AR0 or the accommodation compartment AC0 when the component AR0 or the accommodation compartment AC0 is being transported into or out of the station 50s.

[0023] A plurality of (four) wheels 63 are arranged at the bottom of the cart main body portion 61, and the cart 60 travels by being towed by the towing device 70. Specifically, in a state where the towing device 70 is arranged below the cart main body portion 61, the towing device 70 is coupled to the cart main body portion 61 so that it can tow the cart 60. The towing device 70 only needs to be capable of automatic movement and is not limited to a specific type. The towing device 70 may use, for example, a known automated guided vehicle (AGV), an autonomous mobile robot (AMR), or the like.

[0024] The line control device LC0 is configured to enable the input and output of various data to and from each device constituting the production line 1 via a network. The line control device LC0 monitors the operating status of the production line 1 and controls the substrate processing machine WM0, such as the component mounter 10, the exchange system 30, the component moving device 40, and the station group 50. The line control device LC0 stores various data for controlling the substrate processing machine WM0, the exchange system 30, the component moving device 40, and the station group 50.

[0025] The production management device WC0 may have at least one (in Fig. 1 manage a production facility 1. The production management device WC0 is arranged to communicate with the line control device LC0 of the at least one production facility 1, and manages the production of substrate products by at least one production facility 1. The conveyance management device CC0 can control the carriage 60 and the towing device 70. The conveyance management device CC0 is arranged to communicate with the carriage 60, the towing device 70, the line control device LC0, and the production management device WC0, and based on the production status of the substrate products in the production facility 1, the conveyance management device CC0 causes the movement of the carriage 60 and the towing device 70 and causes the carriage 60 to perform the delivery of the component AR0.

[0026] For example, if the towing device 70 is an autonomous mobile robot, the towing device 70 may move while detecting the position of the towing device 70 itself in the production facility 1 using a known camera, a sensor, or the like. If the towing device 70 is an automatically guided vehicle, the towing device 70 may move, for example, through the guide section 85. The towing device 70 of the present embodiment is an automatically guided vehicle, and as shown in Fig. 1, the production plant 1 is provided with a guide section 85.

[0027] The guide section 85 is a member arranged along the travel path of the carriage 60 and the towing device 70 and guides the travel of the carriage 60 and the towing device 70. Specifically, the towing device 70, which tows the carriage 60, travels while detecting the guide section 85. The guide section 85 includes, for example, a guide element M0 that indicates the travel path of the carriage 60 and the towing device 70, and a display element S0 that serves as an indicator during travel. The guide element M0 and the display element S0 improve the travel accuracy of the carriage 60 and the towing device 70.

[0028] The guide element M0 and the indicator element S0 can take various forms. In the embodiment, the guide element M0 and the indicator element S0 are formed of magnetic tape. The towing device 70, which tows the carriage 60, can prevent the carriage 60 and the towing device 70 from deviating from the travel path to be traversed by traveling while simultaneously detecting the guide element M0. The towing device 70 can detect the traveling position of the carriage 60 and the towing device 70 by scanning the indicator element S0.

[0029] For example, the display element S0 includes a reference element indicating the reference position S10, a passage element indicating the passage position S20, and a target element indicating the target position S30. Since the station group 50 of the embodiment includes two stations 50, the passage element also includes a first passage element indicating the first passage position S21 and a second passage element indicating the second passage position S22. The target element includes a first target element indicating the first target position S31 and a second target element indicating the second target position S32.

[0030] For example, the towing device 70 towing the carriage 60 detects that the carriage 60 and the towing device 70 are traveling at the first passage position S21 by sensing the first passage element. For example, if the carriage 60 and / or the towing device 70 and the conveyance management device CC0 communicate with each other, and the conveyance management device CC0 can detect the traveling position of the carriage 60 and / or the towing device 70, the display element S0 can be omitted.

[0031] The towing device 70, which pulls the carriage 60, moves toward the destination station 50s along a route programmed in advance or a route instructed by the conveyor management device CC0. For example, consider the case where the station 50s is located on the left side of the Fig. 1, the target station is 50s, and the towing device 70 moves the carriage 60 from the reference position S10 to the first target position S31. In this case, when the towing device 70 towing the carriage 60 detects the first through element, the towing device 70 turns 90 degrees to the right and travels straight ahead. Then, the towing device 70 pulling the carriage 60 stops when the first target element is detected.

[0032] The same applies if the station 50s is on the right side of the Fig. 1, the target station 50s is the target station, and the towing device 70 moves the carriage 60 from the reference position S10 to the second target position S32. In this case, when the towing device 70 detects the second through-passage element, the towing device 70 towing the carriage 60 turns 90 degrees to the right and travels straight ahead. Then, the towing device 70 stops the carriage 60 when the second target element is detected. The towing device 70 towing the carriage 60 can detect the station 50s when the distance between the towing device 70 and the station 50s is equal to or shorter than a predetermined distance, and can stop even if the first target element or the second target element is not detected.

[0033] Upon arrival at the destination station 50s, the carriage 60 sends the component AR0 or the accommodation compartment AC0 to the station 50s, and the station 50s receives the component AR0 or the accommodation compartment AC0 from the carriage 60. Further, the station 50s may send the component AR0 or the accommodation compartment AC0 to the carriage 60, and the carriage 60 may receive the component AR0 or the accommodation compartment AC0 from the station 50s.

[0034] Furthermore, the carriage 60 can send the component AR0 or the accommodation compartment AC0 to the first station 50s, move to the second station 50s, and receive the component AR0 or the accommodation compartment AC0 from the second station 50s. Furthermore, the carriage 60 can receive the component AR0 or the accommodation compartment AC0 from the first station 50s, move to the second station 50s, and send the component AR0 or the accommodation compartment AC0 received from the first station 50s to the second station 50s. The component AR0 can be delivered in a state where it is housed in the accommodation compartment AC0, and it can be delivered in a state where it is not housed in the accommodation compartment AC0. 1-2. Configuration example for the positioning and coupling of carriage 60 and towing device 70

[0035] As in Fig. As shown in Figure 4, a coupling mechanism 60b is arranged between a bottom plate 64 at the lower part of the loading platform 62 and the top surface of the towing device 70. The coupling mechanism 60b is configured to couple the carriage main body portion 61 to the towing device 70, which has entered below the carriage main body portion 61, in order to tow the carriage main body portion 61. The coupling mechanism 60b includes a plurality of (e.g., three) coupling pins arranged on the top surface of the towing device 70, a feed-direction locking element 65 arranged on the bottom plate 64 of the loading platform 62, a pair of switching mechanisms 66, 66, and a pair of guide elements 67, 67. In Fig. 4, the base plate 64 is shown in a transparent view for the sake of simplicity.

[0036] As in Fig. As shown in Fig. 4, an advance-side coupling pin 71 is arranged at a position near the center in the width direction of the upper surface of the towing device 70 and on an advance-direction side. The advance-side coupling pin 71 is formed, for example, by attaching a cylindrical urethane rubber to the outer peripheral side of a metal round bar. Further, two retraction-side coupling pins 72, 72 are arranged at positions near the two end portions in the width direction of the upper surface of the towing device 70 and on the retraction-direction side. The retraction-side coupling pin 72 is made of the same material and has the same shape as the advance-side coupling pin 71. The retraction-side coupling pin 72 is fixed to the upper surface of the towing device 70 via a spacer 73 and is located at a higher position than the advance-side coupling pin 71.

[0037] An advancing-side edge portion and a retreating-side edge portion of the bottom plate 64 of the loading platform 62 are bent downward. The advancing-side locking member 65 is arranged at a position near the widthwise center of the lower surface of the bottom plate 64 and on the advancing-direction side. The locking member 65 has a crank shape in plan view and includes a receiving portion that opens in the retreating direction. The receiving portion of an advancing-side locking member 65 includes a narrowest portion at a predetermined height position and includes an inner wall surface with a conical shape that extends in the vertical direction. The opening width dimension of the narrowest portion of the advancing-side locking member 65 is set to substantially equal to the diameter of the advancing-side coupling pin 71.

[0038] When the towing device 70 retracts under the carriage main body portion 61, the advance-side coupling pin 71 enters the receiving portion of the advance-side locking member 65 and moves from the retreat direction side to the forward direction side of the towing device 70. The advance-side coupling pin 71 is inserted into the narrowest portion of the advance-side locking member 65 and substantially does not contact the inner wall surface except for the narrowest portion. Furthermore, when the advance-side coupling pin 71 is inserted into the narrowest portion, the urethane rubber on the outer peripheral side is easily deformed. Accordingly, the receiving portion of the advance-side locking member 65 locks the advance-side coupling pin 71 and restricts the movement in the width direction.Thereby, the position of the carriage main body portion 61 in the width direction with respect to the towing device 70 is determined.

[0039] Furthermore, the receiving portion of the advance-side locking member 65 allows the advance-side coupling pin 71 to tilt in the width direction and in the advance and retract directions (the direction perpendicular to the width direction in the horizontal plane, and similarly hereinafter). Therefore, the towing device 70 and the carriage 60 can move smoothly even when, for example, waves occur on the ground surface. The advance-side coupling pin 71 is relatively movable in the advance and retract directions within the receiving portion of the advance-side locking member 65.

[0040] A pair of guide members 67, 67 are arranged below the bottom plate 64. Each pair of guide members 67, 67 is formed in the shape of a rod or a plate. The pair of guide members 67, 67 are arranged to gradually approach the receiving portion of the advance-side locking member 65 from the retraction direction side of the loading platform 62 to the advance direction side. A pair of guide members 67, 67 guides the advance-side coupling pin 71 toward the receiving portion of the advance-side locking member 65 to eliminate misalignment between the carriage 60 and the towing device 70 when the towing device 70 passes under the carriage main body portion 61.

[0041] The bottom plate 64 includes a crank edge portion 64a and a pair of retraction-side edge portions 64b, 64b. The crank edge portion 64a is the edge portion on the retraction-side of the bottom plate 64, and the center portion of the crank edge portion 64a is cut out in the shape of a crank. A pair of edge portions 64b, 64b on the retraction-side are portions that are not cut out, and a pair of switching mechanisms 66, 66 are arranged. Each pair of switching mechanisms 66, 66 includes a mechanism main body 66a, a retraction-side locking member 66b, and an operation button 66c.

[0042] The mechanism main body 66a is fixed to the retraction-side edge portion 64b. The retraction-side locking member 66b is a plate-shaped member bent into a mountain shape. As indicated by the arrow A1 in Fig. As indicated in Figure 4, the retraction-side locking member 66b is supported by the mechanism main body 66a so as to be slidable in the width direction. In other words, the retraction-side locking member 66b is supported so as to be movable between a locking position in which the retraction-side locking member 66b protrudes from the mechanism main body 66a toward the center line and a non-locking position in which the retraction-side locking member 66b is housed in the mechanism main body 66a. In the initial state of the pair of switching mechanisms 66, 66, the retraction-side locking member 66b is in the non-locking position. The operation knob 66c is housed in the mechanism main body 66a. By turning the operating knob 66c, the retraction-side locking element 66b moves between the non-locking position and the locking position.

[0043] When the retraction-side locking member 66b is in the non-locking position, the retraction-side locking member 66b allows the passage of the retraction-side coupling pin 72 in the advance and retreat directions and allows the towing device 70 to enter and exit under the carriage main body portion 61. As shown in Fig. 4, when the towing device 70 enters below the carriage main body portion 61 and the advance-side coupling pin 71 is locked with the advance-side locking member 65, the pair of retreat-side coupling pins 72, 72 penetrate into the inside of the crank shape of the crank edge portion 64a and protrude to a position above the crank edge portion 64a.

[0044] When the worker rotates the operation knob 66c, the retraction-side locking member 66b slides from the non-locking position to the locking position and is positioned behind the retraction-side coupling pin 72. When the retraction-side locking member 66b is in the locking position, the retraction-side locking member 66b restricts the passage of the retraction-side coupling pin 72 in the retraction direction and can restrict the exit of the towing device 70 from below the carriage main body portion 61.

[0045] When the retraction-side locking member 66b is in the locking position, a gap corresponding to a clearance in the advance and retract directions is created between the retraction-side coupling pin 72 and the crank edge portion 64a, and between the retraction-side coupling pin 72 and the retraction-side locking member 66b. That is, the crank edge portion 64a and the retraction-side locking member 66b lock the retraction-side coupling pin 72 so that it is relatively movable in the advance and retract directions within a range of a predetermined clearance. Therefore, both the advance-side coupling pin 71 and the retraction-side coupling pin 72 are relatively movable in the advance and retract directions. Thus, the position of the carriage main body section 61 in the advance and retraction directions with respect to the towing device 70 is not fixed.

[0046] Furthermore, a gap corresponding to the widthwise clearance is formed between the retraction-side coupling pin 72 and the crank edge portion 64a. That is, the crank edge portion 64a functions as a locking member that locks the retraction-side coupling pin 72 so that it is relatively movable within the range of the widthwise clearance. This allows the retraction-side part of the carriage main body portion 61 to rotate in the widthwise direction around the advance-side coupling pin 71. In other words, the positional change of the carriage main body portion 61 with respect to the towing device 70 is possible.

[0047] Thereafter, the coupling between the carriage 60 and the towing device 70, which will be described later, is performed, and the coupling process of the carriage 60 and the towing device 70 ends. When the towing device 70 moves in the advance direction while pulling the carriage 60, the advance-side coupling pin 71 presses the advance-side locking member 65. When the towing device 70 moves in the retraction direction while towing the carriage 60, the retraction-side coupling pin 72 presses the retraction-side locking member 66b. 1-3. Configuration example of a component conveyor 80

[0048] As described above, positioning (first stage of positioning) is performed between the carriage 60 and the towing device 70. After that, the carriage 60 and the towing device 70 can perform mechanical positioning and coupling by the moving mechanism 100, which will be described later. However, electrical connection between the carriage 60 and the towing device 70 is required. If the worker performs the electrical connection, the worker's labor will increase compared to the case where the connection is automated. In addition, when the worker performs the electrical connection, there is a possibility of errors such as incorrect or poor connections. In addition, when the worker performs the coupling work between the carriage 60 and the towing device 70, there is a possibility that the worker only performs the coupling work and forgets the electrical connection work.

[0049] The production plant 1 is equipped with a component conveying device 80. The component conveying device 80 electrically connects the carriage 60 and the towing device 70 according to the positioning and coupling between the carriage 60 and the towing device 70. As shown in Fig. 5, the component conveying device 80 comprises the carriage 60, the towing device 70 and a connecting device 80c. Fig. The dashed line shown in Figure 5 schematically illustrates the positioning and coupling between the carriage 60 and the towing device 70.

[0050] The carriage 60 only needs to be able to transport the component AR0 to be used in the substrate processing machine WM0 and can take various forms. Likewise, the towing device 70 only needs to be able to tow the carriage 60 and can take various forms. The carriage 60 of the embodiment transports the feeder 20 or the accommodation compartment AC0 in which the feeder 20 is accommodated. Further, the carriage 60 includes, for example, a carriage that can transport a mask used in a printing machine that prints solder on a substrate. Further, the carriage 60 includes, for example, a carriage that can transport a component arranged on a tray, a wafer, or the like. The feeder 20, the mask, the tray component, and the wafer are included in the component AR0.

[0051] The connecting device 80c electrically connects the carriage 60 and the towing device 70 depending on the positioning and coupling between the carriage 60 and the towing device 70. The connecting device 80c only needs to establish the electrical connection described above and can take various forms. For example, a first one of the carriage 60 and the towing device 70 is referred to as the first device 81, and a second one of the carriage 60 and the towing device 70 is referred to as the second device 82.

[0052] In this case, the first device 81 may include a positioning portion 91 that positions the second device 82, and the second device 82 may include a positioned portion 92 that is positioned by the positioning portion 91 of the first device 81. Furthermore, the first device 81 or the second device 82 may include a movement mechanism 100 configured to move the positioned portion 92 along a contact surface 93 between the positioning portion 91 and the positioned portion 92 by causing relative movement between the positioning portion 91 and the positioned portion 92, thereby performing the positioning and coupling.

[0053] In this embodiment, the first device 81 is the towing device 70 and the second device 82 is the carriage 60. As shown in the Fig. 6, Fig. 7A and Fig. 7B, the positioned portion 92 arranged in the carriage 60 is a hole portion 92a formed in an outer plate (e.g., the one shown in Fig. 4) of the carriage 60 of the second device 82. The hole section 92a has, for example, a round shape or the shape of an elongated hole. As shown in the Fig. 8 and Fig. As shown in Figure 9, the positioning portion 91 disposed in the towing device 70 is a protrusion portion 91a that can be fitted into the circular hole portion 92a. The protrusion portion 91a is disposed on the base member 95 and includes, for example, a pointed end portion of a mountain-shaped round pin. The base member 95 is disposed at a portion on the side of the first device 81 opposite the outer plate of the second device 82.

[0054] The moving mechanism 100 of the embodiment is arranged in the towing device 70, which is the first device 81. Furthermore, the moving mechanism 100 is configured to move the protrusion portion 91a toward the hole portion 92a to fit the protrusion portion 91a into the hole portion 92a, thereby performing positioning and coupling between the carriage 60 and the towing device 70. For example, a known lifting and lowering mechanism, a sliding mechanism, or the like can be used as the moving mechanism 100. Fig. 10 shows an example of a state before the protrusion portion 91a is moved toward the hole portion 92a. The center position of the protrusion portion 91a and the center position of the hole portion 92a are slightly offset from each other due to the misalignment between the carriage 60 and the towing device 70.

[0055] The moving mechanism 100 is configured to lift the protrusion portion 91a and move the protrusion portion 91a toward the hole portion 92a. When the protrusion portion 91a fits into the hole portion 92a, relative movement occurs between the protrusion portion 91a and the hole portion 92a. Specifically, the hole portion 92a moves along the tip end portion of the protrusion portion 91a, which forms the contact surface 93 between the protrusion portion 91a and the hole portion 92a, and the carriage 60 moves together with the bottom plate 64. Fig. 11 shows an example of a state after the protrusion portion 91a is fitted into the hole portion 92a. When the protrusion portion 91a is fitted into the hole portion 92a, the center position of the protrusion portion 91a and the center position of the hole portion 92a are aligned with each other. Accordingly, the positioning and coupling between the carriage 60 and the towing device 70 are completed.

[0056] The connecting portion 80c includes a first connecting portion 80a disposed in the first device 81 and a second connecting portion 80b disposed in the second device 82. In this case, the moving mechanism 100 is configured to position and connect the first connecting portion 80a and the second connecting portion 80b through the relative movement between the positioning portion 91 and the positioned portion 92. As shown in Fig. 10, in a state before the protrusion portion 91a is moved toward the hole portion 92a, the center position of the first connecting portion 80a and the center position of the second connecting portion 80b are slightly offset from each other due to the misalignment between the carriage 60 and the towing device 70.

[0057] The moving mechanism 100 is configured to lift the first connecting portion 80a together with the protrusion portion 91a. As shown in Fig. As shown in Figure 11, the center position of the first connecting portion 80a and the center position of the second connecting portion 80b are aligned with each other by the above-described relative movement between the protrusion portion 91a and the hole portion 92a. The first connecting device 80a is lifted in this state, thereby connecting the first connecting device 80a and the second connecting device 80b so that their center positions are aligned with each other. The moving mechanism 100 is also configured to lift the first connecting device 80a after the above-described relative movement.

[0058] Furthermore, the moving mechanism 100 is also configured to move the base member 95, to which the protrusion portion 91a is attached, toward the hole portion 92a to fit the protrusion portion 91a into the hole portion 92a, thereby achieving positioning and coupling between the carriage 60 and the towing device 70. The moving mechanism 100 may also be disposed in the carriage 60, which is the second device 82. In this case, the moving mechanism 100 is configured to move the hole portion 92a toward the protrusion portion 91a or base member 95, to which the protrusion portion 91a is attached, to fit the protrusion portion 91a into the hole portion 92a, thereby achieving positioning and coupling between the carriage 60 and the towing device 70.For example, the moving mechanism 100 is configured to lower the bottom plate 64 of the carriage 60 on which the hole portion 92a is formed.

[0059] In this way, the moving mechanism 100 can be arranged in the first device 81 or the second device 82. Furthermore, the moving mechanism 100 is configured to move a first protrusion portion 91a or a base member 95 to which the protrusion portion 91a is attached and a hole portion 92a toward a second one thereof to fit the protrusion portion 91a into the hole portion 92a, thereby performing the positioning and coupling between the carriage 60 and the towing device 70. Furthermore, the moving mechanism 100 is configured to position and connect the first connecting device 80a and the second connecting device 80b through the relative movement between the protrusion portion 91a and the hole portion 92a.

[0060] In the embodiment, the hole portion 92a is formed in the bottom plate 64 of the carriage 60. However, the area in which the hole portion 92a is formed is not limited to the bottom plate 64. For example, the hole portion 92a may be formed in a pair of side plates 68, 68 provided at both end portions in the width direction of the carriage 60. Fig. 4. In this case, the projection portion 91a may be formed in a pair of side plates 74, 74 disposed at both end portions in the width direction of the towing device 70. The moving mechanism 100 may employ a sliding mechanism that is slidable in the width direction of the towing device 70.

[0061] An inclined surface 94 that guides the relative movement between the positioning portion 91 and the positioned portion 92 may be formed on at least one of the positioning portion 91 and the positioned portion 92. As shown in Fig. 7B and Fig. As shown in Figure 9, in the embodiment, the inclined surface 94 is formed in both the protrusion portion 91a, which constitutes the positioning portion 91, and the hole portion 92a, which constitutes the positioned portion 92. The inclination angle of the inclined surface 94 of the protrusion portion 91a and the inclination angle of the inclined surface 94 of the hole portion 92a are the same. As a result, the relative movement between the protrusion portion 91a and the hole portion 92a is smoother than in the case where the inclined surface 94 is not present.

[0062] As in the Fig. 12 and Fig. 13, the positioning portion 92 may be a recessed portion 92b disposed in the outer peripheral portion of the second device 82, and the positioning portion 91 may be a plate-shaped member 91b capable of surface contact with the recessed portion 92b. For example, the first device 81 is the towing device 70, and the second device 82 is the carriage 60. For example, the recessed portion 92b is disposed near the center portion in the advancing and retreating directions at both end portions in the width direction of the carriage 60. Similarly, a plate-shaped member 91b is disposed near the center portion in the advancing and retreating directions at both end portions in the width direction of the towing device 70. The plate-shaped member 91b is shaped to extend in the vertical direction (the direction perpendicular to the drawing of Fig. 13).

[0063] The previously described inclined surface 94 may be formed on at least one of the two elements, the plate-shaped element 91b and the recessed portion 92b. As shown in Fig. 13, the plate-shaped member 91b has an inclined surface 94 formed on the surface on the side of the first connecting device 80a. As shown in Fig. As shown in Figure 12, the recessed portion 92b has an inclined surface 94 formed on the surface of the second connecting device portion 80b. The moving mechanism 100 is arranged, for example, on the towing device 70. The moving mechanism 100 is configured to move the plate-shaped member 91b relative to the recessed portion 92b while bringing the plate-shaped member 91b and the recessed portion 92b into surface contact with each other, thereby performing positioning and coupling between the carriage 60 and the towing device 70. The moving mechanism 100 is configured, for example, to lift the plate-shaped member 91b and move the plate-shaped member 91b toward the recessed portion 92b.

[0064] When the plate-shaped member 91b is further lifted while in surface contact with the recessed portion 92b, relative movement occurs between the plate-shaped member 91b and the recessed portion 92b. Specifically, the recessed portion 92b moves along the plate-shaped member 91b, which forms the contact surface 93 between the plate-shaped member 91b and the recessed portion 92b, and the carriage 60 moves together with the recessed portion 92b. Accordingly, the positioning and coupling between the carriage 60 and the towing device 70 are completed. For example, the recessed portion 92b can be arranged at any outer peripheral portion of the carriage 60, such as a corner portion or a leg portion of the carriage 60, and the plate-shaped member 91b can be arranged at any position corresponding to the position of the recessed portion 92b.

[0065] Furthermore, the moving mechanism 100 is also configured to move the recessed portion 92b with respect to the plate-shaped member 91b while bringing the plate-shaped member 91b and the recessed portion 92b into surface contact with each other, thereby performing positioning and coupling between the carriage 60 and the towing device 70. In this way, the moving mechanism 100 is configured to move a first one of the plate-shaped member 91b and the recessed portion 92b with respect to a second one of them while bringing the plate-shaped member 91b and the recessed portion 92b into surface contact with each other, thereby performing positioning and coupling between the carriage 60 and the towing device 70.Also in the above configuration, the moving mechanism 100 is configured to position and connect the first connecting device 80a and the second connecting device 80b by the relative movement between the plate-shaped member 91b and the depressed portion 92b.

[0066] As in Fig. 6, the carriage 60, which represents the second device 82, includes a plurality of (e.g., four) hole portions 92a, which are positioning portions 92. A plurality of (four) hole portions 92a are evenly arranged around the second connecting device 80b. As shown in Fig. 8, the towing device 70, which is the first device 81, comprises a plurality of (e.g., four) protrusion portions 91a, which are positioning portions 91. A plurality of (four) protrusion portions 91a are evenly arranged around the first connecting device 80a. The Fig. 12 and Fig. The configuration shown in Fig. 13 differs from the configuration of the above-described embodiment in that two sets of positioning portions 91 and positioned portions 92 are arranged, but the arrangement of positioning portions 91 and positioned portions 92 can be described similarly.

[0067] In this way, the positioning portion 91 and the positioned portion 92 can be provided in multiple sets, and the multiple sets of the positioning portion 91 and the positioned portion 92 can be evenly arranged around the connecting device 80c. Accordingly, the relative movement between the positioning portion 91 and the positioned portion 92 can be generated at multiple locations around the connecting device 80c, and the positioning and connection between the first connecting device 80a and the second connecting device 80b become easy. Furthermore, the external force generated in the first connecting device 80a and the second connecting device 80b can be reduced.

[0068] In addition, when two sets of the positioning portion 91 and the positioned portion 92 are arranged, the rotational movement is more likely to occur during the relative movement between the positioning portion 91 and the positioned portion 92. Therefore, the positioning portion 91 and the positioned portion 92 can be arranged in three or more sets. It should be noted that the smaller the area of the contact surface 93 between the positioning portion 91 and the positioned portion 92, the more pronounced the above-described effect is. Therefore, a configuration with three or more sets of positioning portions 91 and positioned portions 92 can be applied to the case where the positioning portion 91 is a projection portion 91a and the positioned portion 92 is a hole portion 92a (which are shown in the Fig. 6 and Fig. 8 shown configuration).

[0069] In addition, a configuration in which the positioning portion 91 is a plate-shaped member 91b and the positioned portion 92 is a recessed portion 92b (shown in the Fig. 12 and Fig. 13), three or more sets of the plate-shaped member 91b and the depressed portion 92b may be included depending on the area of the contact surface 93. That is, the component conveying device 80 may include three or more sets of the plate-shaped member 91b and the depressed portion 92b if the area of the contact surface 93 is smaller than the predetermined area.

[0070] In the configuration in which the positioning portion 91 is the projection portion 91a and the positioned portion 92 is the hole portion 92a (shown in the Fig. 6 and Fig. 8), it is to be expected that due to variations in manufacturing, the outer dimensions of the projection portion 91a and the hole portion 92a may deviate from the expected dimensions, making installation difficult. Therefore, for example, a predetermined set (e.g., two sets) of projection portions 91a and hole portions 92a may be set to have the same outer dimensions as the design dimensions. For other predetermined sets (e.g., two sets) of projection portions 91a and hole portions 92a, the hole portions 92a may, for example, be formed as elongated hole portions, as shown in the Fig. 7A and Fig. 7B.

[0071] Similarly, in the configuration in which the positioning portion 91 is the plate-shaped member 91b and the positioned portion 92 is the recessed portion 92b (shown in the Fig. 12 and Fig. 13), it is expected that due to variations in manufacturing, the contact surface 93 between the plate-shaped member 91b and the depressed portion 92b may not necessarily become a parallel plane. Therefore, for example, a predetermined set (e.g., one set) of the plate-shaped member 91b and the depressed portion 92b may be set to have the same outer dimensions as the design dimensions. For other predetermined sets (e.g., one set) of the plate-shaped member 91b and the depressed portion 92b, the outer dimensions of the plate-shaped member 91b may be set smaller than the design dimensions. For other predetermined sets (e.g., one set) of the plate-shaped member 91b and the depressed portion 92b, the outer dimensions of the depressed portion 92b may also be set larger than the design dimensions.

[0072] As previously described, the moving mechanism 100 is configured to position and connect the first connecting portion 80a and the second connecting portion 80b through the relative movement between the positioning portion 91 and the positioning portion 92. However, there is a possibility that the center position of the first connecting device 80a does not completely coincide with the center position of the second connecting device 80b. Therefore, the connecting device 80c may be a floating connection. As shown in Fig. As shown in FIG. 14, in the floating connector, the first connecting portion 80a is fixed to the first jig 81 so as not to be relatively movable, and the second connecting portion 80b is fixed to the second jig 82 so as to be relatively movable with respect to the plane 80p perpendicular to a connection direction with the first connecting portion 80a. Accordingly, the connecting jig 80c can eliminate the misalignment between the first connecting jig 80a and the second connecting jig 80b.

[0073] In the present specification, an example is described in which the first device 81 is the towing device 70 and the second device 82 is the carriage 60, but the matters described in the present specification can be similarly applied to the case where the first device 81 is the carriage 60 and the second device 82 is the towing device 70. Furthermore, the matters described in the present specification can be appropriately selected and applied, and a combination of the selected forms can also be adopted. 1-4. Configuration example of the trolley 60

[0074] As previously described, the carriage 60 only needs to be capable of transporting the component AR0 to be used in the substrate processing machine WM0 and can take various forms. For example, the carriage 60 includes a delivery mechanism 60a, a coupling mechanism 60b, and a connecting device 80c. The delivery mechanism 60a is configured to deliver the component AR0 for use in the substrate processing machine WM0, which performs a predetermined substrate processing on a substrate. The delivery mechanism 60a corresponds to the loading platform 62 previously described.

[0075] The loading platform 62 is arranged at the upper part of the carriage main body section 61 and can be loaded with the component AR0. The loading platform 62 can also be loaded with a storage compartment AC0 that can accommodate the component AR0. The loading platform 62 includes a plurality of rollers 62a and can transport the component AR0 or the storage compartment AC0 to the station 50s and transport the component AR0 or the storage compartment AC0 out of the station 50s. The loading platform 62 can also transport the component AR0 or the storage compartment AC0 directly to the substrate processing machine WM0 and transport the component AR0 or the storage compartment AC0 directly out of the substrate processing machine WM0.

[0076] The coupling mechanism 60b is a mechanism configured to be mechanically coupled to the towing device 70. As shown in Fig. 4, the coupling mechanism 60b is arranged, for example, between the bottom plate 64 at the lower part of the loading platform 62 and the top surface of the towing device 70. As already described, the coupling mechanism 60b is configured to couple the carriage main body portion 61 to the towing device 70, which has entered below the carriage main body portion 61, in order to tow the carriage main body portion 61. The coupling mechanism 60b includes a plurality of (e.g., three) coupling pins arranged on the top surface of the towing device 70, and a feed-side locking member 65 arranged on the bottom plate 64 of the loading platform 62.

[0077] For example, a plurality of coupling pins includes an advance-side coupling pin 71 located on the advance direction side of the carriage 60 and the towing device 70, and two rearward-facing coupling pins 72 located on the retraction direction side of the carriage 60 and the towing device 70. The advance-side locking member 65 can lock the advance-side coupling pin 71 when the advance-side coupling pin 71 enters from the retraction direction side. Therefore, when the towing device 70 enters below the carriage main body portion 61, the towing device 70 can enter the advance direction side from the retraction direction side and is prevented from entering the retraction direction side from the advance-side.

[0078] As already described, the connecting device 80c is a mechanism configured to be electrically connected to the towing device 70. The connecting device 80c is electrically connected to the towing device 70 according to the positioning and coupling with the towing device 70. As shown in Fig. As shown in Figure 14, the connecting device 80c includes a power connection section 80c1 and a signal connection section 80c2. A power line capable of transmitting power to and from the towing device 70 is connected to the power connection section 80c1. As a result, for example, the drive power from the battery of the towing device 70 can be supplied to the cart 60, and the cart 60 does not need to be charged with the drive power battery. The cart 60 can actuate various mechanisms using the drive power supplied by the towing device 70. For example, the cart 60 can actuate the delivery mechanism 60a using the drive power supplied by the towing device 70.

[0079] A signal line capable of transmitting a control signal to and from the towing device 70 is connected to the signal connecting section 80c2. The signal connecting section 80c2 is electrically connected to the towing device 70 so that the worker can operate the towing device 70. For example, the carriage 60 and the towing device 70 each have an emergency stop button. When the signal connecting section 80c2 is electrically connected to the towing device 70, the stop operation of the emergency stop button of the towing device 70 is activated in accordance with the operation of the emergency stop button of the carriage 60. The previously described aspects of the component conveying device 80 can be similarly applied to the carriage 60. Furthermore, the above description of the carriage 60 can be similarly applied to the component conveying device 80. 1-5. Method for coupling the carriage 60 and the towing device 70

[0080] The method for coupling the carriage 60 and the towing device 70 is a method for coupling the carriage 60, which transports the component AR0 to be used in the substrate processing machine WM0, which performs a predetermined substrate processing on a substrate, and the towing device 70, which is capable of towing the carriage 60 and automatically moving along a travel path, and which comprises a first positioning step and a coupling and connecting step. The method for coupling the carriage 60 and the towing device 70 is carried out, for example, according to the method described in Fig. 15. In the first positioning step, the process shown in step SP1 is performed. In the coupling and connecting step, the process shown in step SP2 is performed.

[0081] In the first positioning step, a first positioning is performed with respect to the carriage 60 (step SP1). The first positioning step is performed, for example, by the previously described coupling mechanism 60b. Accordingly, rough positioning is performed between the carriage 60 and the towing device 70. The coupling and connecting step, after the first positioning step has been performed, actuates the moving mechanism 100, thereby performing mechanical positioning and coupling, and electrically connects the carriage 60 and the towing device 70 according to the positioning and coupling between the carriage 60 and the towing device 70 (step SP2). In other words, the coupling and connecting step corresponds to the control by the component conveying device 80.As already described, a slight offset between the first connecting device 80a and the second connecting device 80b can be eliminated by the floating connector.

[0082] In order for relative movement between the carriage 60 and the towing device 70 to occur, the wheel lock on the side of the second device 82 must be released. In this embodiment, the second device 82 is the carriage 60. Therefore, in the coupling and connecting step, the locking of several (e.g., four) wheels 63 of the carriage 60 is released. After the end of the coupling and connecting step, several (e.g., four) wheels 63 of the carriage 60 are locked. After the end of the coupling and connecting step, the carriage 60 and the towing device 70 are clamped and movable together. When the coupling between the carriage 60 and the towing device 70 is released, the clamping between the carriage 60 and the towing device 70 is released, and the carriage 60 and the towing device 70 are movable individually.

[0083] The previously described aspects of the component conveying device 80 and the carriage 60 can be similarly applied to the method for coupling the carriage 60 and the towing device 70. The above description of the method for coupling the carriage 60 and the towing device 70 can be similarly applied to the component conveying device 80 and the carriage 60. 2. Example of the effect of the embodiment

[0084] With the component conveying device 80 described above, it is possible to electrically connect the carriage 60 and the towing device 70 according to the positioning and coupling between the carriage 60 and the towing device 70. The above description of the component conveying device 80 can be similarly applied to the carriage 60 and a method for coupling the carriage 60 and the towing device 70. Reference character list

[0085] 60: Carriage, 60a: Delivery mechanism, 60b: Coupling mechanism, 70: Towing device, 80: Component conveying device, 80a: First connecting device, 80b: Second connecting device, 80c: Connecting device, 80c1: Power connecting portion, 80c2: Signal connecting portion, 80p: Plane, 81: First device, 82: Second device, 91: Positioning portion, 91a: Projection portion, 91b: Plate-shaped member, 92: Positioned portion, 92a: Hole portion, 92b: Depressed portion, 93: Contact surface, 94: Inclined surface, 95: Base member, 100: Moving mechanism, AR0: Component, WM0: Substrate processing machine. QUOTES CONTAINED IN THE DESCRIPTION

[0000] This list of documents submitted by the applicant was generated automatically and is included solely for the convenience of the reader. This list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions. Cited patent literature

[0000] WO 2021 / 144866

[0003] JP-A-2018-513817

[0003]

Claims

[1] A component conveying device comprising: a carriage configured to transport a component to be used in a substrate processing machine configured to perform a predetermined substrate processing on a substrate; a towing device configured to tow the car; and a connecting device configured to electrically connect the carriage and the towing device according to the positioning and coupling between the carriage and the towing device. [2] The component conveying device according to claim 1, wherein a first device, which is the carriage or the towing device, has a positioning section that positions a second device, which is the other device of the carriage or the towing device, the second device includes a positioned portion which is positioned by the positioning portion of the first device, the first device or the second device includes a movement mechanism configured to move the positioned portion along a contact surface between the positioning portion and the positioned portion by causing a relative movement between the positioning portion and the positioned portion, thereby performing the positioning and the coupling, the connecting device comprises a first connecting device arranged in the first device, and a second connecting device arranged in the second device, and the moving mechanism is configured to position and connect the first connecting device and the second connecting device through the relative movement between the positioning portion and the positioned portion. [3] The component conveying device according to claim 2, wherein an inclined surface is formed on the positioning section and / or the positioned section, which guides the relative movement between the positioning section and the positioned section. [4] The component conveying device according to claim 3, wherein the positioned portion is a hole portion arranged in an outer plate of the second device, the positioning portion is a projection portion that can fit into the hole portion, and the moving mechanism is configured to move a first one of the protrusion portion or a base member to which the protrusion portion is fixed and the hole portion to a second one thereof to fit the protrusion portion into the hole portion, thereby performing the positioning and the coupling. [5] The component conveying device according to claim 3, wherein the positioned portion is a recessed portion disposed in an outer peripheral portion of the second device, the positioning portion is a plate-shaped member capable of coming into surface contact with the recessed portion, and the moving mechanism is configured to move a first one of the plate-shaped member and the recessed portion with respect to a second one thereof while bringing the plate-shaped member and the recessed portion into surface contact with each other, thereby performing the positioning and the coupling. [6] The component conveying device according to claim 2, wherein the positioning section and the positioned section are arranged in a plurality of sets, and the plurality of sets of the positioning portion and the positioned portion are evenly arranged around the connecting device. [7] The component conveying device according to claim 6, wherein the positioning section and the positioned section are arranged in three or more sets. [8] The component conveying device according to claim 2, wherein the connecting portion is a floating connector in which the first connecting portion is fixed to the first device so as not to be relatively movable, and the second connecting portion is fixed to the second device so as to be relatively movable with respect to a plane perpendicular to a connecting direction with the first connecting portion. [9] A car comprising: a delivery mechanism configured to perform delivery of a component to be used in a substrate processing machine configured to perform a predetermined substrate processing on a substrate; a coupling mechanism configured to be mechanically coupled to a towing device; and a connecting device configured to be electrically connected to the towing device, wherein the connecting device is electrically connected to the towing device in connection with positioning and coupling. [10] The car according to claim 9, wherein the connecting device comprises a power connection section to which a power line is connected that can transmit power to and from the towing device, and a signal connection device to which a signal line is connected that can transmit a control signal to and from the towing device, and The signal connecting device is electrically connected to the towing device so that a worker can operate the towing device. [11] A method for coupling a carriage configured to carry a component to be used in a substrate processing machine configured to perform a predetermined substrate processing on a substrate and a towing device capable of towing the carriage and moving automatically along a travel path, the method comprising: a first positioning step for performing a first stage of positioning with respect to the carriage; and a coupling and connecting step in which, after performing the first positioning step, a moving mechanism is actuated, thereby performing mechanical positioning and coupling, and the carriage and the towing device are electrically connected according to the positioning and coupling between the carriage and the towing device.

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