Swivel actuator

Abstract

The present invention provides a rotary actuator 1 that has low rotor inertia, is capable of achieving high torque, prevents backlash, and prevents a reduction in stiffness. This rotary actuator 1 includes a linear motion / rotational conversion mechanism that drives and connects a rotary shaft 101 and a linear motion shaft 102 and converts linear motion into rotary motion or rotary motion into linear motion, wherein the rotary shaft 101 has a torque-generating device or the linear motion shaft 102 has a thrust-generating device 104; the linear motion / rotational conversion mechanism includes a connecting plate 103; a portion of the connecting plate 103 is connected and secured in a wound-up position on the rotary shaft 101; and another portion of the connecting plate 103 is connected and secured in a position along the linear motion shaft 102.

Description

TECHNICAL AREA

[0001] The present disclosure relates to a swivel actuator that swivels a mirror of a galvano-scanner. TECHNICAL BACKGROUND

[0002] A conventional laser processing machine is configured to perform processing by irradiating a workpiece with laser light. The laser processing machine includes, for example, a galvanic scanner mounted at the tip end of a multi-axis robot arm and configured to emit laser light.

[0003] The electroplating scanner comprises: an electroplating motor, which can be an example of a swivel actuator; and a plurality of mirrors rotatable around a rotating shaft of the electroplating motor. By using the electroplating motor to drive and rotate the plurality of mirrors, the electroplating scanner is configured to perform scanning by causing the mirrors to reflect laser light emitted from a laser light source.

[0004] Unlike, for example, servomotors of machine tools, swivel actuators such as the electroplating motor are characterized by the fact that they only perform swivel movements in a range of approximately ±20 degrees, instead of performing full circle rotations. List of references to the patent document

[0005] Patent document 1: Unexamined Japanese patent application, publication no. H8-152575 DISCLOSURE OF THE INVENTION Problems to be solved by the invention

[0006] Electroplating motors must exhibit high responsiveness. Accordingly, they require low rotor inertia, high torque, and high stiffness, i.e., a high resonant point. However, in conventional rotary motors, rotor inertia and torque are interdependent. Thus, reducing rotor inertia necessitates decreasing the rotor diameter. Consequently, the problem arises that there is a limit to achieving low rotor inertia while maintaining high torque.

[0007] One known configuration for solving the aforementioned problem of rotating motors involves using a linear motion / rotation conversion mechanism for an electroplated shaft. However, commonly used linear motion / rotation conversion mechanisms have several problems, such as the following: backlash can occur when a ball screw is used; and with a structure where a belt is tensioned over two or more pulleys, stiffness can be compromised by areas where the belt is in the air between the pulleys, and backlash can also occur.

[0008] One objective of the present disclosure is to provide a swivel actuator that achieves low rotor inertia and high torque while preventing backlash and impairment of stiffness. Means to solve the problems

[0009] One aspect of the present disclosure relates to a pivoting actuator configured to pivot a pivoted link, comprising: a rotary shaft; a linear motion shaft; and a linear motion / rotational conversion mechanism configured to drive and couple or connect the rotary shaft and the linear motion shaft together, and configured to convert linear motion to rotary motion or to convert rotary motion to linear motion. The rotary shaft includes a torque-generating device, or the linear motion shaft includes a thrust-generating device. The linear motion / rotational conversion mechanism includes a connecting or coupling plate. Part of the coupling plate is connected and secured in a wound-around position along the rotary shaft, whereas another part of the coupling plate is connected and secured in a position extending along the linear motion shaft. Effects of the invention

[0010] The present disclosure is able to provide the pivot actuator which is capable of achieving low rotor inertia and high torque while preventing the occurrence of play and preventing impairment of stiffness. BRIEF DESCRIPTION OF THE DRAWINGS Fig. Figure 1 is a perspective view schematically showing a galvano-scanner including swivel actuators and a laser light source according to a first embodiment; Fig. Figure 2 is a perspective view showing the swivel actuators and mirrors according to the first embodiment; Fig. Figure 3 is a perspective view to illustrate a configuration of a swivel actuator according to the first embodiment; Fig. Figure 4 is a perspective view showing a result of removing linear motion shafts from a swivel actuator according to the first embodiment; Fig. 5 is a drawing to illustrate the swivel actuator and a mirror according to the first embodiment when viewed in a direction orthogonal to an axial direction of a rotating shaft; Fig. Figure 6 is a cross-sectional view at line A in Fig. 4 when viewed in the axial direction of the rotating shaft; Fig. Figure 7 is a cross-sectional view at line B in Fig. 4 when viewed in the axial direction of the rotating shaft; Fig. Figure 8 is a drawing to illustrate a clockwise rotational movement of the rotating shaft in Fig. 6 when viewed in the axial direction of the rotating shaft; Fig. Figure 9 is a drawing to illustrate a counterclockwise rotational movement of the rotating shaft in Fig. 6 when viewed in the axial direction of the rotating shaft; Fig. Figure 10 is a drawing to illustrate a clockwise rotational movement of the rotating shaft in Fig. 7 when viewed in the axial direction of the rotating shaft; Fig. Figure 11 is a drawing to illustrate a counterclockwise rotational movement of the rotating shaft in Fig. 7 when viewed in the axial direction of the rotating shaft; and Fig. 12 is a drawing to illustrate a swivel actuator according to a second embodiment when viewed in a direction orthogonal to an axial direction of a rotating shaft. PREFERRED OPERATING MODE FOR REALIZING THE INVENTION

[0011] In the following, embodiments of the present disclosure are described in detail with reference to the drawings. In the description of a second embodiment and thereafter, some of the component elements that are the same as those in other embodiments are identified with the same reference numerals, and only those component elements, processes, and advantageous effects that differ from those in other embodiments are explained. Furthermore, although six coupling plates 103 are provided in the embodiments of the present disclosure, possible embodiments are not limited to this number. Furthermore, possible configurations of rotary shafts, linear motion shafts, coupling plates, and the like are not limited to the configurations of a rotary shaft 101, linear motion shafts 102, and the coupling plates 103.Furthermore, although the linear motion shafts 102 are structured with two linear motion shafts 102-1 and 102-2, possible embodiments are not limited to this example. For instance, the linear motion shafts 102 can be structured with one selected from the linear motion shafts 102-1 and 102-2. [First embodiment]

[0012] A swivel actuator of the present disclosure is a swivel actuator used in an industrial machine such as a machine tool or a robot, whose rotating shaft does not perform full circle rotations. In the present embodiment, the swivel actuator of the present disclosure is applied, as an example, to a galvanic motor 1, which must perform an operation to rotate to a specified angle of rotation in a given command within a very short time and to determine its position. The galvanic motor 1 structured with the swivel actuator according to the present embodiment can, for example, be a single-phase driven galvanic motor that scans with laser light.Furthermore, in contrast to conventional electroplating motors with a radial gap structure, which is typically used in electroplating motors, the electroplating motor 1 according to the present embodiment is structured with the rotating shaft 101, the linear motion shafts 102, the coupling plates 103, and a thrust generation device 104. Accordingly, the electroplating motor 1 according to the present embodiment is compact, yet capable of achieving high responsiveness, high torque, and low rotor inertia, while simultaneously preventing backlash and any impairment of stiffness.

[0013] First, a galvano-scanner is explained, to which the galvano-motor 1 is applied according to the present embodiment. Fig. Figure 1 is a perspective view that schematically shows a laser light source 11 and a galvano-scanner 10. Fig. Figure 2 is a perspective view showing electroplating motors 1 and mirror 12. As in Fig. Figure 1 shows that when laser processing is performed, the laser light source 11 and the electroplating scanner 10 are positioned above a table T on which a workpiece W is placed.

[0014] The laser light source 11 is structured with any number of different types of laser oscillators, including a laser medium, an optical resonator, an excitation source, and the like, and is configured to emit laser light in the direction of the electroplating scanner 10. The electroplating scanner 10 includes: the plurality of mirrors 12, 12, which sequentially reflect the laser light emitted by the laser light source 11; and the electroplating motors 1, 1, according to the present embodiment, which drive and rotate the plurality of mirrors 12, 12, respectively, along rotational axes Ra and Rb. The number, positioning, and the like of the mirrors 12 and the electroplating motors 1 are not specifically limited.

[0015] As in Fig. Figure 1 shows that the laser light emitted by the laser light source 11 is reflected successively by the two mirrors 12, 12 and subsequently reaches the workpiece W on the table T. When the two electroplating motors 1, 1 drive and rotate the two mirrors 12, 12 respectively, the angle of incidence of the laser light incident on each of the mirrors 12, 12 changes continuously. Consequently, it is possible to scan a top surface of the workpiece W with the laser light reaching the workpiece W along a prescribed scanning path.

[0016] Fig. Figure 3 is a perspective view to illustrate a configuration of a galvanomotor 1. Fig. Figure 5 is a drawing to illustrate the electroplating motor 1 and a mirror 12 when viewed in a direction orthogonal to an axial direction of the rotating shaft 101. Fig. Figure 6 is a cross-sectional view at line A in Fig. 4 when viewed in the axial direction of the rotating shaft 101. Fig. Figure 7 is a cross-sectional view at line B in Fig. 4 when viewed in the axial direction of the rotating shaft 101. Fig. Figure 8 is a drawing to illustrate a clockwise rotational movement of the rotating shaft 101 in Fig. 6 when viewed in the axial direction of the rotating shaft 101. Fig. Figure 9 is a drawing to illustrate a counterclockwise rotational movement of the rotating shaft 101 in Fig. 6 when viewed in the axial direction of the rotating shaft 101. Fig. Figure 10 is a drawing to illustrate a clockwise rotational movement of the rotating shaft 101 in Fig. 7 when viewed in the axial direction of the rotating shaft 101. Fig. Figure 11 is a drawing to illustrate a counterclockwise rotational movement of the rotating shaft in Fig. 7 when viewed in the axial direction of the rotating shaft 101.

[0017] As in Fig. As shown in Figures 3 to 5, the electroplating motor 1 includes the rotary shaft 101, the linear motion shafts 102, the coupling plates 103, the thrust generating device 104, and an encoder (not shown) which is provided and configured in one of these moving parts to control or regulate the operation of each of the moving parts, with the electroplating motor 1 being housed, for example, in a motor housing (not shown). The rotary shaft 101, the linear motion shafts 102, and the coupling plates 103 form a linear motion / rotational conversion mechanism in which the rotary shaft 101 and the linear motion shafts 102 are driven together and coupled to each other, so that linear motion is converted into rotary motion. The encoder (not shown) can be a linear encoder attached to a linear motion part that performs a linear motion, or a rotary encoder attached to the rotating shaft that performs a rotary motion.

[0018] The rotating shaft 101 has a circular column shape. A basal end portion of the rotating shaft 101 is rotatably guided and supported by a bearing or the like (not shown) such that it is rotatable while centered on an axial center of the rotating shaft 101. The mirror 12 is attached to a tip end portion of the rotating shaft 101. The mirror 12 has a positional relationship in which surfaces of the mirror 12 are parallel to the rotating shaft 101. A configuration is achieved in which the mirror 12 rotates with the rotation of the rotating shaft 101, and more precisely, the mirror 12 is pivoted by approximately 20 degrees clockwise or counterclockwise while centered on the axial center of the rotating shaft 101.In the present embodiment, since the electroplating motors 1 are applied to the electroplating scanner, the mirrors 12 are each configured to pivot approximately 20 degrees clockwise or counterclockwise while centered on the axial center of the rotating shaft 101. Furthermore, in industrial use, each of the electroplating motors is capable of rotating the rotating shaft 101 clockwise or counterclockwise by 180 degrees or less while centered on the axial center of the rotating shaft 101. In the present embodiment, each of the electroplating motors is capable of rotating the rotating shaft 101 clockwise or counterclockwise by 90 degrees or less while centered on the axial center of the rotating shaft 101.

[0019] The linear motion shafts 102 are structured with the two linear motion shafts, namely linear motion shaft 102-1 and linear motion shaft 102-2. If the in Fig. When the linear motion shaft 102-1 shown in the upper left is reversed, the linear motion shaft 102-1 and the linear motion shaft 102-2 are positioned so that they face each other, while the rotary shaft 101 is arranged between them. The linear motion shafts 102 are structured with plate-like links that exhibit such rigidity that bending does not easily occur. The rotary shaft 101 rests against one of the surfaces of each of the linear motion shafts 102 via the coupling plates 103 (for example, the one shown in Fig. 3 shown upper surface of each of the linear motion shafts 102-1 and 102-2). Furthermore, when guided linearly by a linear guide or the like (not shown), the linear motion shafts 102 are movable forwards or backwards in the direction orthogonal to the axial center of the rotating shaft 101 and parallel to one and the other surfaces of the linear motion shafts 102.

[0020] The linear motion shafts 102 feature the thrust generating device 104. The thrust generating device 104 is connected to each of the linear motion shafts 102-1 and 102-2. It is desirable that the thrust generating device 104 be capable of force control. The thrust generating device 104 is structured such that it includes a highly responsive solid-state actuator, such as a linear motor or a piezoelectric element, capable of causing the linear motion shafts 102 to move forward and backward while the linear motion shafts 102 are guided linearly by the linear guide (not shown). If a linear motor is used, a copper wire is usually used for the motor coil; however, to reduce inertia, it is also acceptable to use an aluminum wire.Furthermore, examples of linear guidance include roller guides, sliding guides, parallel spring guides, or static pneumatic guides. If it is desirable to reduce inertia to a minimum, pneumatic guidance is preferred. Additionally, a preload is applied to the linear motion shafts 102 by a preload application device (not shown). In this way, the linear motion shafts 102 are held in a state where they are in close contact with the rotary shaft 101 via the coupling plates 103.

[0021] Parts of the coupling plates 103 are connected to the rotating shaft 101 in a state wound around the rotating shaft 101 along its circumferential surface. As shown in Fig. 6, Fig. 8 and Fig. Figure 9 shows that an end part of each of the coupling plates 103-1 and 103-4 is fastened by a screw 106 in a lateral part of the circumferential surface of the rotating shaft 101 at a diameter position of the rotating shaft 101. The coupling plate 103-4 is connected along the circumferential surface of the rotating shaft 101 and extends from one end part to a close contact position (the lower end of the rotating shaft 101). Fig. 6), where the rotary shaft 101 and the linear motion shaft 102-2 are in close contact with each other, wound around it and is further connected and extends from this position in the direction orthogonal to the axial direction of the rotary shaft 101 along one of the surfaces of the linear motion shaft 102-2 (for example, the one in Fig. 6 shown upper surface of the linear motion shaft 102-2). The other end part of the coupling plate 103-4 is attached to one of the surfaces of the linear motion shaft 102-2 by a screw 106 at a predetermined distance so that it is parallel to the axial direction of the rotary shaft 101.

[0022] The coupling plate 103-1 is connected along the circumferential surface of the rotating shaft 101 and extends from one end part to a close contact position (the highest end of the rotating shaft 101 in Fig. 6), where the rotary shaft 101 and the linear motion shaft 102-1 are in close contact with each other, wound around it and is further connected and extends from this position in the direction orthogonal to the axial direction of the rotary shaft 101 along one of the surfaces of the linear motion shaft 102-1 (for example, the one in Fig. 6 shown lower surface of the linear motion shaft 102-1). The other end part of the coupling plate 103-1 is attached to one of the surfaces of the linear motion shaft 102-1 by a screw 106 at a predetermined distance so that it is parallel to the axial direction of the rotary shaft 101.

[0023] Each of the coupling plates 103 has a thickness of 50 µm or less and is capable of switching, during the rotation of the rotating shaft 101, between the state wound around the rotating shaft 101 along its circumferential surface and the state stretched along one of the surfaces of a linear motion shaft 102. Furthermore, each of the coupling plates 103 is structured using a material that, when stress is applied to the coupling plate 103, does not stretch or contract within a tolerance range while the rotating shaft 101 rotates integrally with the mirror 12. In other words, in the present embodiment, the coupling plates 103 are structured using a metal such as SUS steel. However, possible embodiments are not limited to metals such as SUS steel; substances with a large Young's modulus are preferred.For example, the coupling plates 103 can each be structured using a plate made of carbon fiber reinforced plastic (CFRP).

[0024] For a more detailed explanation, the majority of coupling plates 103 are provided such that they are connected and fastened to the rotary shaft 101 and the linear motion shafts 102 at multiple points. More precisely, as in Fig. 4 shown mainly on the top of the rotary shaft 101 three rectangular coupling plates 103, namely the coupling plate 103-1, a coupling plate 103-2 and a coupling plate 103-3, arranged and positioned in the aforementioned order such that they are adjacent to each other in the axial direction of the rotary shaft 101, while each is connected to the rotary shaft 101 and the linear motion shaft 102-1 (see Fig. 3) are attached. In addition, three rectangular coupling plates 103, namely coupling plate 103-4, coupling plate 103-5 and coupling plate 103-6, are arranged and positioned in the aforementioned order, primarily on the underside of the rotary shaft 101, such that they are adjacent to each other in the axial direction of the rotary shaft 101, while each is attached to the rotary shaft 101 and the linear motion shaft 102-2 (see Fig. 3) are attached. The width of the coupling plate 103-2 in the axial direction of the rotating shaft 101 is essentially equal to the sum of the widths of the coupling plate 103-1 and the coupling plate 103-3 in the same direction. The width of the coupling plate 103-5 in the axial direction of the rotating shaft 101 is essentially equal to the sum of the widths of the coupling plate 103-4 and the coupling plate 103-6 in the same direction.

[0025] When considering in the Fig. 6 shown direction (the direction from bottom left to top right in Fig. 4) The coupling plate 103-4 and the coupling plate 103-6 are along the right-hand part (in Fig. 4 and Fig. 6) are connected to the circumferential surface of the rotating shaft 101 while being wound counterclockwise around the rotating shaft 101. The parts of the coupling plate 103-4 and the coupling plate 103-6, apart from the parts that are connected while being wound around the circumferential surface of the rotating shaft 101, extend along the upper surfaces of the linear motion shafts 102 (see Figure 6). Fig. 3) further to the left side relative to the lowest end of the rotating shaft 101 in Fig. 4 and Fig. 6.

[0026] When considering in the Fig. 6 shown direction (the direction from bottom left to top right in Fig. 4) The coupling plate 103-1 and the coupling plate 103-3 are along the left-hand part (in Fig. 4 and Fig. 6 shown) the circumferential surface of the rotating shaft 101 while wound counterclockwise around the rotating shaft 101. The parts of the coupling plate 103-1 and the coupling plate 103-3, apart from the parts that are connected while wound around the circumferential surface of the rotating shaft 101, extend along the lower surfaces of the linear motion shafts 102 (see Fig. 3) further to the right side relative to the highest end of the rotating shaft 101 in Fig. 4 and Fig. 6.

[0027] When considering in the Fig. 7 shown direction (the direction from bottom left to top right in Fig. 4) The coupling plate 103-2 is located along the right-hand part (in Fig. 4 and Fig. 7) is connected to the circumferential surface of the rotating shaft 101 while it is wound clockwise around the rotating shaft 101. The portion of the coupling plate 103-2, apart from the portion that is connected while wound around the circumferential surface of the rotating shaft 101, extends along the lower surface of the linear motion shaft 102 (see Figure 7). Fig. 3) further to the left side relative to the highest end of the rotating shaft 101 in Fig. 4 and Fig. 7.

[0028] When considering in the Fig. 7 shown direction (the direction from bottom left to top right in Fig. 4) The coupling plate 103-5 is located along the left-hand part (in Fig. 4 and Fig. 7) is connected to the circumferential surface of the rotating shaft 101 while it is wound clockwise around the rotating shaft 101. The portion of the coupling plate 103-5, apart from the portion that is connected while wound around the circumferential surface of the rotating shaft 101, extends along the upper surface of the linear motion shaft 102 (see Figure 7). Fig. 3) further to the right side relative to the lowest end of the rotating shaft 101 in Fig. 4 and Fig. 7.

[0029] Since the coupling plate 103-1, the coupling plate 103-2, the coupling plate 103-3, the coupling plate 103-4, the coupling plate 103-5, and the coupling plate 103-6 are arranged in this manner, a configuration is realized in which, when any of the linear motion shafts 102 is moved by the thrust-generating device 104 as explained below, a tension on a coupling plate 103 cancels a moment that acts on the rotary shaft 101 in the direction parallel to the upper surface of the linear motion shaft 102. Furthermore, on a cross-sectional plane at line C in Fig. 4. Coupling plate 103-3 is present instead of coupling plate 103-1, whereas coupling plate 103-6 is present instead of coupling plate 103-4, which is located, among other places, in Fig. 6 on the cross-sectional plane at line A in Fig. 4 were shown.

[0030] It is desirable to reduce the radius of rotation of the connecting parts of the coupling plates 103, which are connected while wound around the rotating shaft 101. More precisely, torque T is expressed as shown below, where r denotes the radius of the rotating shaft 101, while F denotes the thrust of the thrust-generating device 104, which moves the linear motion shafts 102. T=F*r

[0031] Furthermore, inertia J is expressed as shown below, where M denotes the mass of the rotary shaft 101, the linear motion shafts 102, the coupling plates 103 and a movable part of the thrust generating device 104. J=M*r2

[0032] Accordingly, it is suggested to decrease M or r if it is desired to reduce the inertia J. If r is decreased, it is possible to ensure a sufficient torque T by setting the thrust F to a large value.

[0033] Next, operation at the time of pivoting the mirror 12 with the electroplating motor 1 is explained. With the thrust of the thrust-generating device 104, when the linear motion shaft 102-2 moves to the left, Fig. 8 and Fig. 10 is moved and simultaneously the linear motion shaft 102-1 moves to the right in Fig. 8 and Fig. 10 is moved, the parts of the coupling plate 103-4, the coupling plate 103-5 and the coupling plate 103-6 attached to the linear motion shaft 102-2 move integrally to the left with the linear motion shaft 102 in Fig. 8 and Fig. 10. Consequently, the coupling plate 103-4 and the coupling plate 103-6, which are located along the circumferential surface on the right side of the rotating shaft 101 in Fig. 8 are wrapped around, pulled to the left by force Fig. Drawn 8.

[0034] Simultaneously, the parts of the coupling plate 103-1, coupling plate 103-2 and coupling plate 103-3 attached to the linear motion shaft 102-1 move integrally to the right with the linear motion shaft 102-1. Fig. 8 and Fig. 10. Consequently, the coupling plate 103-1 and the coupling plate 103-3, which are located along the circumferential surface on the left side of the rotating shaft 101 in Fig. 8 are wrapped around, pulled to the right by force Fig. Drawn 8.

[0035] Consequently, as indicated by the arrows in Fig. 8 and Fig. 10 indicates that the rotating shaft 101 is caused to rotate integrally with the mirror 12 in a clockwise direction. The area along the circumferential surface on the right side of the rotating shaft 101 in Fig. Eight wrapped parts of coupling plate 103-4 and coupling plate 103-6 gradually move away from the circumferential surface of the rotating shaft 101, starting from their lower parts, so that they transition into the state extending along the upper surface of the linear motion shaft 102-2, and are thus brought into the state connected to the upper surface of the linear motion shaft 102. Furthermore, coupling plate 103-5, which extends along the circumferential surface on the left side of the rotating shaft 101, is Fig. 10 is wound around, starting from the lower part of it, gradually wound around the circumferential surface of the rotating shaft 101.

[0036] Furthermore, they move along the circumferential surface on the left side of the rotating shaft 101 in Fig. The eight wrapped parts of the coupling plate 103-1 and the coupling plate 103-3 gradually move away from the circumferential surface of the rotating shaft 101, starting from their upper parts, so that they transition into the state extending along the lower surface of the linear motion shaft 102-1, and are thus brought into the state connected to the lower surface of the linear motion shaft 102. In addition, the coupling plate 103-2, which extends along the circumferential surface on the right side of the rotating shaft 101, is also moved into the state connected to the lower surface of the linear motion shaft 102. Fig. 10 is wound around, starting from the upper part of it, gradually wound around the circumferential surface of the rotating shaft 101.

[0037] With the thrust of the thrust-generating device 104, when the linear motion shaft 102-2 moves to the right in Fig. 9 and Fig. 11 is moved and simultaneously the linear motion shaft 102-1 moves to the left in Fig. 9 and Fig. 11 is moved, the parts of the coupling plates 103-4 and 103-5 and the coupling plate 103-6 attached to the linear motion shaft 102-2 move integrally to the right with the linear motion shaft 102 in Fig. 9 and Fig. 11. Consequently, the coupling plate 103-5, which runs along the circumferential surface on the left side of the rotating shaft 101 in Fig. 11 is wrapped around, by pulling force to the right in Fig. 11 drawn.

[0038] Simultaneously, the parts of the coupling plate 103-1, coupling plate 103-2 and coupling plate 103-3 attached to the linear motion shaft 102-1 move integrally to the left with the linear motion shaft 102-1. Fig. 9 and Fig. 11. Consequently, the coupling plate 103-2, which runs along the circumferential surface on the right side of the rotating shaft 101 in Fig. 11 is wrapped around, by pulling force to the left in Fig. 11 drawn.

[0039] Consequently, as indicated by the arrows in Fig. 9 and Fig. 11 indicates that the rotating shaft 101 is caused to rotate integrally with the mirror 12 counterclockwise. The [unclear] along the circumferential surface on the left side of the rotating shaft 101 in Fig. The wrapped portion of coupling plate 103-5 gradually moves away from the circumferential surface of the rotating shaft 101, starting from its lower portion, so that it transitions into the state extending along the upper surface of the linear motion shaft 102-2, and is thus brought into the state connected to the upper surface of the linear motion shaft 102-2. Furthermore, the portion of coupling plate 103-2 wrapped around the circumferential surface on the right side of the rotating shaft 101 gradually moves away from the circumferential surface of the rotating shaft 101, starting from its upper portion, so that it transitions into the state extending along the lower surface of the linear motion shaft 102-1, and is thus brought into the state connected to the lower surface of the linear motion shaft 102-1. Additionally, coupling plate 103-4 and coupling plate 103-6, which are wrapped along the circumferential surface on the right side of the rotating shaft 101, are also moved away from the circumferential surface of the rotating shaft 101, starting from its upper portion, so that it transitions into the state extending along the lower surface of the linear motion shaft 102-1, and is thus brought into the state connected to the lower surface of the linear motion shaft 102-1. Fig. 9 are wound around, starting from the lower parts thereof, gradually wound around the circumferential surface of the rotating shaft 101. In addition, the coupling plate 103-1 and the coupling plate 103-3, which are located along the circumferential surface on the left side of the rotating shaft 101 in Fig. 9 are wound around, starting from the upper parts thereof, gradually wound around the circumferential surface of the rotating shaft 101.

[0040] The advantageous effects of the electroplating motor 1 according to the present embodiment can be summarized as follows: In the present embodiment, the electroplating motor 1 comprises: the rotary shaft 101, the linear motion shafts 102, and the linear motion / rotational conversion mechanism, which drives and couples the rotary shaft 101 and the linear motion shafts 102 together and converts the linear motion into rotary motion. The linear motion shafts 102 have the thrust-generating device. The linear motion / rotational conversion mechanism has the coupling plates 103. A portion of the coupling plates 103 is connected and fixed in the position wound around the rotary shaft 101. Another portion of the coupling plates 103 is connected and fixed in the position extending along the linear motion shafts 102.

[0041] As a result, it is possible to separate the thrust-generating device 104, which is a component that generates the thrust, from the rotary shaft 101. This makes it possible to reduce the radius of the rotary shaft 101. Consequently, it is possible to reduce its inertia. Furthermore, it is possible to increase the stiffness of the linear motion / rotation conversion mechanism by wrapping the coupling plates 103 around the left and right sides of the rotary shaft so that they are secured while maintaining close contact with the rotary shaft 101 and the linear motion shafts 102.Furthermore, to achieve high torque and low inertia when using a motor with a commonly used radial gap structure, the only way to increase the torque would be to make the motor's rotating shaft longer; however, in the pivoting actuator of the present disclosure, the thrust generating device 104 and the rotating shaft 101 are separate, so there is no need to make the rotating shaft longer to increase the torque, and the inertia does not increase either.

[0042] Furthermore, in the present embodiment, the coupling plates 103 are made of metal and have a thickness of 50 mm or less. This makes it possible to achieve both flexibility and strength in the coupling plates 103.

[0043] Furthermore, in the present embodiment, the coupling plates 103 are connected and fastened to the rotary shaft 101 and the linear motion shafts 102 at multiple points. The coupling plates 103 are connected while wound around the rotary shaft 101 by means of right-hand and left-hand windings. Consequently, it is possible to apply the tensile forces of the coupling plates 103 to the coupling plates regardless of whether the linear motion shaft 102 rotates clockwise or counterclockwise.

[0044] Furthermore, in the present embodiment, the coupling plates 103 are positioned such that the tension of the coupling plates 103 cancels out the moment acting on the rotating shaft 101. This configuration makes it possible to prevent bending of the rotating shaft 101. It also reduces any radial load that may act on the bearing that rotatably supports the rotating shaft 101.

[0045] Furthermore, in the present embodiment, the coupling plates 103 are each fastened to the rotary shaft 101 and the linear motion shafts 102 by means of the screw 106. This configuration makes it possible to prevent positional displacement of the coupling plates 103 relative to the linear motion shafts 102. It is therefore possible to increase the natural frequency of the linear motion / rotation conversion mechanism.

[0046] Furthermore, in the present embodiment, a preload is applied to the rotary shaft 101 and the linear motion shafts 102 such that they are brought into close contact with each other. This configuration makes it possible to increase the natural frequency of the linear motion / rotation conversion mechanism. In addition, in the present embodiment, the thrust generation device 104 incorporates a highly responsive solid-state actuator, such as a linear motor or a piezoelectric element. This configuration makes it possible to increase the natural frequency of the linear motion shafts 102, which serve as movable elements. [Second embodiment]

[0047] A galvano-motor 1A according to a second embodiment differs from the galvano-motor 1 according to the first embodiment in that it is not provided with the thrust generating device 104 and is provided with a torque generating device 104A. The other configurations are the same as those in the first embodiment.

[0048] The electroplating motor 1A according to the second embodiment is described with reference to Fig. 12 explained. Fig. Figure 12 is a drawing to illustrate a swivel actuator 1A when viewed in a direction orthogonal to an axial direction of a rotating shaft 101A.

[0049] As in Fig.Figure 12 shows that the linear motion shafts 102 (102-1 and 102-2) are not equipped with the thrust generating device 104. Furthermore, the torque generating device 104a, structured with a conventional motor, is coupled to an end part of the rotary shaft 101A. A configuration is realized in which the rotary shaft 101a rotates because it is driven by the torque generating device 104A, and consequently the linear motion shafts 102 (102-1 and 102-2) move forward and backward due to tensile forces of the coupling plates 103 (103-1, 103-2 and 103-3) and the coupling plates 103 (103-4, 103-5 and 103-6) not shown.The rotary shaft 101A, the linear motion shafts 102 (102-1 and 102-2), the coupling plates 103 (103-1, 103-2 and 103-3) and the coupling plates 103 (103-4, 103-5 and 103-6) not shown structure a linear motion / rotation conversion mechanism in which the rotary shaft 101A and the linear motion shafts 102 (102-1 and 102-2) are driven together and coupled to each other, so that rotary motion is converted into linear motion.

[0050] The present disclosure is not limited to the operating modes described above. Modifications and improvements within the scope necessary to solve the problem addressed in this disclosure are included herein.

[0051] Although the six coupling plates 103 are provided in the foregoing embodiments, possible embodiments are not limited to this quantity. Furthermore, possible configurations of the rotary shafts, linear motion shafts, coupling plates, and the like are not limited to the configurations of the rotary shaft 101, the linear motion shafts 102, the coupling plate 103, and the like. Moreover, although the linear motion shafts 102 are structured with the two linear motion shafts 102-1 and 102-2, possible embodiments are not limited to this example. For instance, the linear motion shafts 102 can be structured with a combination selected from the linear motion shafts 102-1 and 102-2. Reference symbol list 1, 1A Galvano motor 101, 101A Rotary shaft 102 Linear motion shaft 103 Coupling plate 104 Thrust generating device 104A Torque generating device QUOTES INCLUDED IN THE DESCRIPTION

[0000] This list of documents cited by the applicant was automatically generated and is included solely for the reader's convenience. The list is not part of the German patent or utility model application. The DPMA accepts no liability for any errors or omissions. Cited patent literature

[0000] JP 8-152575

[0005]

Claims

[1] Swivel actuator configured to swivel a swiveled link, comprising: a rotating shaft; a linear motion shaft; and a linear motion / rotation conversion mechanism configured to drive and couple or connect the rotary shaft and the linear motion shaft together, and configured to convert linear motion into rotary motion or rotary motion into linear motion, wherein the rotary shaft has a torque generating device or the linear motion shaft has a thrust generating device, the linear motion / rotation conversion mechanism has a connecting or coupling plate, and Part of the coupling plate is connected and fastened in a state wound around the rotating shaft, whereas another part of the coupling plate is connected and fastened in a state extending along the linear motion shaft. [2] Swivel actuator according to claim 1, wherein the coupling plate is made of metal and has a thickness of 50 or less. [3] Swivel actuator according to claim 1, wherein the coupling plate is connected and attached to the rotary shaft and the linear motion shaft at multiple points, and the coupling plate is connected while it is wound around the rotating shaft by a right-hand winding and a left-hand winding. [4] Swivel actuator according to claim 1, wherein the coupling plate is positioned in such a way that a tension on the coupling plate cancels out a moment acting on the rotating shaft. [5] Swivel actuator according to claim 1, wherein the coupling plate is attached to the rotary shaft and the linear motion shaft by a screw in each case. [6] Swivel actuator according to claim 1, wherein a preload is applied to the rotary shaft and the linear motion shaft such that the rotary shaft and the linear motion shaft are brought into close contact with each other. [7] Swivel actuator according to claim 1, wherein the thrust generating device comprises a highly responsive solid-state actuator such as a linear motor or a piezoelectric element. [8] Swivel actuator according to claim 1, wherein a mirror of a galvano-scanner is attached to the rotating shaft.

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