SEMICONDUCTOR DEVICE
DE112024005397T5Undetermined Publication Date: 2026-10-08ROHM CO LTD
Patent Information
- Application Number
- DE112024005397
- Authority / Receiving Office
- DE · DE
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-12-27
- Filing Date
- 2024-12-27
- Publication Date
- 2026-10-08
Abstract
A semiconductor device comprises a chip with a main surface; and a gate structure of a trench electrode type formed in the main surface, wherein the gate structure comprises: a trench formed in the main surface, an insulating film having a first film section covering a wall surface of an inner section of the trench, and a second film section covering a wall surface of an end section of the trench and having a thickness greater than the thickness of the first film section, and an embedded electrode embedded in the trench above the insulating film.
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Citation Information
Patent Citations
Semiconductor device
US20030227051A1
JP2023221770A