Holding device for holding multiple substrates for treatment, treatment system and treatment method

Description

[0001] The invention relates to a holding device for receiving several substrates which are to be treated in a treatment system provided for this purpose. The invention also relates to such a treatment system and a treatment method which use an embodiment of the holding device described below.

[0002] A treatment plant for substrates typically comprises a treatment chamber or a sequence of several treatment chambers in which the substrates, held by a suitable holding device, are transported and exposed to the action of at least one substrate treatment unit. The substrate treatment takes place under a special process atmosphere, often under vacuum with a controlled introduction of gas or gas mixture.

[0003] A "chamber" is generally defined as a space enclosed by chamber walls, separated from the surrounding space, and optionally sealed by vacuum technology. Depending on the scope of the treatments and the substrate size, a treatment system can have one or more treatment chambers. A treatment chamber can comprise a single treatment section or itself be subdivided into several functionally distinct sections.

[0004] A wide variety of substrates, often flat, used for example in the production of semiconductor devices, for architectural or photovoltaic applications, optical glasses, and others, undergo various treatments. Here, "treatment" refers to the well-known modifying, additive, and subtractive processes; that is, processes in which the substrate or layers present on the substrate are structurally or energetically altered, or material is deposited onto or removed from the substrate.

[0005] Besides substrate coating, for example using physical vacuum coating, with various layers and layer systems, plasma treatments or sputter etching are among the common substrate treatment methods. The treatment is regularly carried out in conjunction with further process steps, with high production volumes and high treatment efficiency being regularly required for industrial applications. Such treatment systems are known as continuous or cluster systems.

[0006] The substrates to be coated are held during treatment by holding devices that can accommodate one or more substrates for simultaneous treatment. These holding devices are designed so that the surface to be treated is either not covered or only minimally covered, and the substrates can be easily fed, processed, and removed after treatment, even automatically, without damaging the surface to be coated or the already coated surface. They also serve to transport the substrates within the treatment system.

[0007] Transport can be achieved through translational movement, rotational movement, or movement along another defined path. Depending on the type of movement, different forces can act on the substrates, which must be absorbed by the holding device to ensure precise and reproducible positioning of the substrates for treatment.

[0008] The holding devices often include so-called carriers, which can be removed from and added to the holding device and hold one or more substrates. The shape of the carriers is essentially adapted to the shape of the substrates. Furthermore, they are adapted for the handling operations to be performed, such as transferring the substrates between the magazine and the treatment system, aligning the substrate, and other measures known from treatment systems.

[0009] If a treatment system changes substrate types or sizes, a change in the carriers is necessary, which in turn requires a change or modification of the holding device. This entails extensive reconfiguration and system downtime. For example, US patent specification 4,817,559 and patent application US 20120 / 0186522 A1 describe ring segments with circular openings for receiving circular optical substrates. Each substrate is held in one of the openings by a clamp. The components for holding the substrates are adapted to the described type and geometry of the substrates. While these disadvantages can be reduced if a holding device is designed for different substrate types and / or sizes, the area available for simultaneous substrate processing is often reduced. The same applies to US 2013 / 74767 A1.Their holding device for the substrates is also designed for flat, rectangular substrates that also overlap.

[0010] Therefore, there is a need for holding devices that are adaptable to different substrate types and sizes, thereby allowing for improved utilization of the treatment area. At the same time, the holding device should be usable for the automated handling of the substrates in the treatment systems.

[0011] There is particular interest in a rotatable holding device, in which high rotational speeds and thus high forces and torques sometimes occur.

[0012] To solve the problem, a holding device according to claim 1, a treatment system according to claim 10, and a treatment method according to claim 12, which utilize the holding device, are proposed. The dependent claims relating to these claims describe advantageous embodiments of the holding device, the treatment system, and the treatment method.

[0013] The essential concept of the invention can be described as follows: by introducing standardizable components that hold the carriers, a standardizable interface is provided between an assembly primarily used for receiving and transmitting forces and an assembly primarily designed for the requirements of holding substrates of different designs. This allows the components of the holding device, and not just the carriers, to be handled automatically from the standardizable interface onwards.

[0014] The interface itself can be designed for optimal mounting of the components to be accommodated, as well as for the frequent loading and unloading of the mounting device with substrates. Loading and magazine systems can be used for loading the mounting device in a processing plant, which are independent of the carrier and substrate formats. An optimal mounting system thus includes both the connection surfaces and fasteners required for fixation and force transmission, as well as their automated use throughout an entire batch.

[0015] A substrate support that minimally covers the surfaces to be treated is only to be taken into account with the holding device according to the invention from the substrate support by the carrier.

[0016] The following describes the features used to implement the concept. A person skilled in the art will combine these features in various embodiments, insofar as this appears sensible and suitable for a given application.

[0017] The holding device comprises a flange to which one or more segments are arranged, the segments having carriers. The flange is designed as a circular plate to which radially arranged carriers are mounted. The segments are arranged on the flange by means of connecting surfaces whose size, position, and distribution are adapted to the segment to be held and the forces expected to act on the connecting surfaces. Such adaptation is achieved through design, testing, or computer-aided simulation.

[0018] The flange, as used here, refers to the part of the holding device that can be received by the transport device of a treatment system and used to transmit the forces of the transport device to the holding device. Ultimately, the holding device, through its other elements, serves to transmit the forces of the transport device to the substrates for their movement and positioning during the treatment process.

[0019] Depending on the type and size of the substrates, the design of the treatment system, and the movements to be performed, the flange can have various shapes. It can be axially symmetrical, rotationally symmetrical, or have other asymmetrical designs and may include additional components.

[0020] Depending on the type and location of the connecting surfaces, the segment(s) can be loosely connected to the flange or detachably fastened to the flange without damage. Accordingly, the connecting surfaces can be designed in various ways. For example, loose connection is possible using horizontal connecting surfaces formed on the flange or provided by suitable supports such as T-beams, I-beams, or other beam shapes. Detachable fastening is possible with suitable fasteners for these and other connecting surfaces.

[0021] The segments can be held and / or fastened to the flange by suitable retaining devices that only hold, hold and fasten simultaneously, or have separate holding and fastening means. Accordingly, the retaining devices can be designed on the flange and / or on the segments. The retaining devices are designed to allow the segments to be removed and attached using a handling system, which can optionally be remotely controlled. Such retaining devices can include, among other things, mechanical click systems, magnetic or electrically operated holders, or other configurations.

[0022] The segments comprise a segment support structure and at least one carrier, which is mounted directly or by means of other elements to the segment support structure. A segment support structure is defined as a frame, beam, or similar structure suitable for holding the carrier(s) equipped with substrates during processing and movement.

[0023] The other elements can be suitable retaining devices, sheets or other components that, for example, support the mounting of the carriers or the minimal overlapping mounting of the substrates.

[0024] The segments are detachably connected at the flange by means of the segment support structure. The retaining elements, or parts thereof, can be formed on the segment support structure for this purpose.

[0025] A carrier, for example a plate-shaped element, or several of them, is mounted on the segmented support structure. Its design for holding the substrates to be treated is adapted to their shape.

[0026] Depending on various parameters, such as the size and shape of a segment and / or the size and shape of a substrate, the carrier can also be multi-part.

[0027] In this configuration, a carrier component can be a holder, for example a holding frame or other, which is detachable from the carrier and improves the handling of, for example, small or thin or large quantities of substrates.

[0028] Optionally, a connection point analogous to that between the flange and the segment support can be formed between the segment support structure and the carrier, or between two carrier components. This allows for the removal of a substrate-holding carrier or carrier component using a handling system from the treatment device, as described previously. Such a connection point can be incorporated as an additional standardized interface. In this case, the handling of the substrates held by the carrier or carrier component is optimized and can be automated. Furthermore, even in such configurations, the advantage of easily adapting the holding device when changing the substrate design by exchanging the segments, as described previously, remains available.

[0029] The carrier can be loosely connected to the segment support structure or attached to it non-destructively using suitable additional retaining devices, including those that can be operated automatically. The connection between the carrier and the segment support structure depends, among other things, on the shape and size of the substrates, the forces occurring when the substrates move within the treatment system, and the location of carrier replacement—that is, whether the replacement takes place within the treatment system during operation or not. The carrier is designed to hold one or more substrates.

[0030] The design of the holding device, consisting of a flange, removable segments, and segmented support structures and detachable carriers, allows for the use of a single holding device for substrates of varying shape, thickness, and size. Different substrates with differing geometries can be held simultaneously in one device.

[0031] By means of the interchangeable, variably designed and optionally multi-part carriers, the carrier area can be optimally utilized for the intake of substrates and the substrate area that can be treated simultaneously can be increased compared to the state of the art.

[0032] The segment support structure, in conjunction with the aforementioned holding devices, forms the interface between the flange and the carrier. This interface can be standardized if the segments, while having different carriers, share uniform segment support structures and holding devices. Because the segments are removable, different segments equipped with suitable carriers can be used when changing substrates, without requiring a time-consuming reconfiguration of the holding device. The handling and magazine systems of the treatment plant remain usable for the modified segments. Loading and unloading the segments from a vacuum system is also possible in this way.

[0033] The same can also apply to the carrier or carrier component in conjunction with its holding means for the detachable mounting of the carrier or carrier component, if its connection point to the segment support structure or to the adjacent carrier component is designed analogously.

[0034] The removable segments and, where applicable, carriers or carrier components allow for the regular removal and replacement of those parts of the holding device that require increased maintenance due to the treatment, particularly the coating. Furthermore, a carrier or the segment support structure of at least one segment, or both components, are designed such that, when the carrier is held by the holding device, they at least partially cover the connection surfaces on the flange. This is facilitated by a design of the segment support structures and / or carriers that incorporates aperture sections. These can be suitable projections and recesses in the edge region of the segment, arranged to cover components of the holding device that are affected by the substrate treatment, i.e., to act as apertures. For example, the carrier can cover the holding and fastening elements and parts of the flange.Multiple coverage to form a labyrinth-like system of apertures is also possible, which can be used, for example, to shield against stray vapor.

[0035] A treatment system for substrates, comprising a holding device as described above, typically includes a treatment chamber with at least one treatment section, such as a coating section, or several such treatment chambers. Additional chambers and sections for pre- and / or post-treatment of the substrates, as well as for establishing the process conditions required for the treatment, are usually also necessary and depend on the type of treatment.

[0036] To allow the substrates to pass through one or more sections, the treatment plant also includes a substrate transport device, as described in the prior art section at the beginning. This device moves the previously described holding device with the substrates arranged on it in the manner required for the treatment. For the types of movement that may be considered, please refer to the prior art section.

[0037] A process for treating substrates that uses the treatment plant described above includes, in addition to the generic process steps such as the production and maintenance of the process atmosphere, preparation and / or pretreatment of the substrates, and others, the following process steps: First, the substrates to be treated are provided. As previously described for the holding device, these determine the design of the carriers and, if applicable, their attachment to the segment support structure, as well as the segment's mounting on the flange. Accordingly, segments of the previously described holding device are provided, which accommodate carriers suitable for holding the substrates during substrate transport and treatment. The substrates are arranged on the carriers using a suitable handling system, or optionally manually. The carriers loaded with the substrates are then mounted on the segment support structure. This does not necessarily require special fasteners. The only requirement is that the position of the carriers is defined and remains fixed during treatment.This can be achieved, for example, with guide rails, position pins, or similar simple mechanical aids, or by means of other supplementary components of the segments. The segment support structures and the carriers equipped with substrates are inserted into the treatment system and mounted on the holding device of the treatment system as described previously. The substrates held by the segments are treated in the treatment system. If necessary, they are moved within the system, optionally through the system, using the holding device and a suitable transport device, and subjected to various process steps one after the other. After completion of the treatment, the segments, or optionally just the carriers, are removed from the treatment system along with the treated substrates.

[0038] The sequence of the previously described process steps may differ depending on the design of the connection points between segment and flange, between carrier and segment support structure, or between the carrier components.

[0039] In one embodiment, the substrates can be introduced into the treatment plant when they are already arranged with the carriers on the segment support structure, so that a fully equipped segment is introduced into the treatment plant.

[0040] Alternatively, the substrates can be introduced into the treatment system while held by the carriers and the segmented support structures are already in place. In this case, the segmented support structures can be (automatically) exchanged for easy adaptation of the holding device to new substrate geometries, and / or a switch between the two substrate introduction variants can be performed.

[0041] The concept of the segmented support structure as a standardizable interface supports both variants, whereby a standardized, optionally automated interface can also be formed between the carrier and the segmented support structure.

[0042] In the aforementioned process configurations, magazines can be used for the substrates and / or for the carriers and / or for the loaded segments, which can hold a large number of the respective objects and be automatically loaded and unloaded.

[0043] For better understanding, the invention will be described below with reference to the embodiment of the holding device, which is designed as a rotationally symmetrical rotary plate. For processing the substrates held by the rotary plate, for example, for coating them, such rotary plates are continuously rotated at high speed to achieve a homogeneous coating. The flange is designed as a circular plate to which radially arranged supports, for example, T-beams, are mounted. These can project beyond the edge of the plate and accommodate segments in the form of circular ring segments. The segments can, for example, rest on the horizontally lying profile sections of the T-beams and be detachably fastened for fixation.

[0044] The features previously implemented in the various embodiments of the invention and the embodiment described below would be modified or combined by the person skilled in the art in other applications and further embodiments to the extent that it appears expedient and useful to him.

[0045] The accompanying drawings show in Fig. 1 the holding device according to the invention, Fig. 2 the flange of the holding device Fig. 1 , Fig. 3 an embodiment of a segment which is in a holding device according to Fig. 1 usable Fig. 4 the design of the edge areas of two adjacent segments as apertures, Fig. 5A bis Fig. 5C a segment in various stages of development and Fig. 6 a version of a treatment system which includes a holding device according to Fig. 1 includes.

[0046] The figures described below serve only to illustrate features of the invention. They make no claim to completeness or to scale.

[0047] The holding device designed as a turntable 1 in Fig. 1 The assembly comprises a flange 10 with a support plate 11, which in the exemplary embodiment is designed as a circular central plate. Twelve beams 13, extending radially outwards and projecting beyond the edge 12 of the support plate 11, are attached to the support plate 11. The beams 13 are, for example, designed as T-profile beams, the crossbeams 14 of which form the lower termination.

[0048] Between the supports 13 and directly adjacent to the edge 12 of the support plate 11, twelve identical, annular segment-shaped segments 20 are arranged. Each segment 20 has two circular openings 23 in its carrier 40, which are suitable for receiving circular substrates (not shown). The segments 20 rest on the crossbeam 14 of each support 13 at their two lateral edge regions 21. The supports 13 project beyond the edge 12 of the support plate 11 by such a length that they are flush with the segments 20. The components of the segments 20 and the supports in the lateral edge region 21 are in Fig. 4 presented in detail and described there.

[0049] Fig. 2 The carrier plate 11 with the supports 13 and the retaining elements 15 is shown without segments 20. Fig. 1 und Fig. 2 It can be seen that the carrier plate 11 adjacent to the inner edge region 22 of each segment 20 has a suitable holding means 15 which, in the "closed" state, holds the segment 20 in the radial position shown and can be opened remotely, or optionally closed remotely.

[0050] Fig. 3 shows an alternative version of a segment 20, which has the same dimensions, the same external shape and the same supports in the lateral edge area 21 as the one from Fig. 1 has and consequently, as an alternative to the latter, in the holding device of the Fig. 1 The segment 20 comprises a segment support structure 30, which in the exemplary embodiment is designed in the form of a segment frame and to which a plate-shaped element 43 is mounted, so that it covers the segment support structure 30 at least on one side. The plate-shaped element 43 forms the carrier 40.

[0051] The carrier 40 has a rectangular opening 23 in the center, which is subdivided into four carrier openings 42 by webs 41. Each carrier opening 42 is designed to receive a rectangular substrate (not shown). The segment 20 of Fig. 3 differs from those made of Fig. 1 The design is determined solely by the shape of the opening 23, so further reference is made to the explanations provided there. Instead of the square or round substrate shapes shown in the figures, any other geometries can also be arranged with the segments (20) in the holding device.

[0052] In Fig. 4 The two lateral edge regions 21 of two adjacent segments 20 are shown in section. Each segment 20 comprises a segment support structure 30. The lateral edge regions 21 of both segments 20 show the segment support structures 30, which have projections and recesses such that bearing edges 44 are formed for supporting the segment 20 on the crossbeam 14 of the beam 13. The projections and recesses are designed such that the space between the two segments 20 is meandering or labyrinthine, and the beam 13 is not visible from the underside 24 of the segments 20, which in this embodiment is the coating side (shown by arrows), and is thus protected from unwanted coating. The bearing edges 44, in conjunction with the crossbeam 14 of the associated beam, each form the retaining elements 15 for the segments 20.

[0053] The facing of the carrier 13 towards a coating can also be achieved in other ways and using other or supplementary components of the segments, for example by overlapping projections 26 of at least one lower plate-shaped element 43 and / or at least one segment support structure 30.

[0054] Fig. 5A shows a segmental support structure 30, as it is in Fig. 3 The segment support structure 30 has additional retaining elements at its lower and upper edge sections, each formed by a circular arc. These retaining elements serve to hold the carrier 40 on the segment support structure 30 and are to be designated as carrier retaining elements 31. The carrier retaining elements 31 are designed as horizontal surfaces with screw connectors 33. Other carrier retaining elements are possible as alternatives.

[0055] Fig. 5B The segmental support structure 30 shows the Fig. 5A , supplemented by a carrier 40, which is mounted on the screw connectors 33 and covers the underside of the segment support structure 30. The carrier 40 has a narrow flange 45 at the height of half the segment support structure 30. The flange 45 has the same shielding effect as the projection 26 in Fig. 4 .

[0056] The carrier 40 has two centrally located rectangular carrier openings 46, in which a pair of substrates 61 are arranged by means of retaining frames 46 ( Fig. 5C The segments 20 equipped in this way can be inserted into a treatment system to be treated from below, for example coated.

[0057] Fig. 6 shows an open treatment system 60, which includes a holding device 1 according to Fig. 1 used. For details of the holding device, please refer to the explanations regarding Fig. 1 bis Fig. 5C referred. The treatment plant 60 has a circular structure and has several stations 60' ... 60‴′ distributed around its circumference, which serve directly or indirectly for the treatment of substrates 61.

[0058] The substrates 61 are arranged in the segments 20 and are treated at at least one of the stations 60' ... 60‴′. It is evident that the treatment station 60 is closed during treatment by means of its cover 63.

[0059] The holding device 1 is equipped with segments 20. Magazines (not shown) are arranged in a loading station 62, in which segments 20 containing substrates 61 are stored. By means of a stepwise rotation of the holding device 1 by means of a suitable substrate transport device, which performs the rotation, the substrates 61 successively pass through the individual stations 60' ... 60‴′ including the treatment station(s), so that at the loading station 62 the segments 20 with already treated substrates 61 can be removed and segments 20 with untreated substrates 61 can be mounted in the holding device 1. Bezugszeichenliste

[0060] 1 Holding device, turntable 10 Flange 11 Support plate 12 Edge 13 Beam 14 Crossbeam 15 Holding element 20 Segment 21 Side edge area 22 Inner edge area 23 Opening 24 Underside 26 Projection 30 Segment support structure 31 Carrier holding element 33 Screw connector 40 Carrier 41 Web 42 Carrier opening 43 Plate-shaped element 44 Support edge 45 Edge 46 Holding frame 60 Treatment system 60' - 60‴′ stations 61 Substrate 62 Loading station 63 Cover

Claims

1. Holding device usable for holding a plurality of substrates in a substrate treatment plant, comprising the following components: - a flange (10), which is designed as a circular plate with supports (13) mounted radially on the plate, - at least one segment (20) which is detachably arranged on the flange (10) and removably arranged on the holding device; - wherein at least the supports (13) of the flange (10) have connecting surfaces for arranging the at least one segment (20) on the flange (10); - wherein the at least one segment (20) has a segment support structure (30), - whereby the detachable connection of the at least one segment to the flange is made by means of the segment support structure; - at least one carrier (40) for receiving one or more substrates (61), which is mounted on the segment support structure (30), - wherein a carrier (40) or the segment support structure (30) of the at least one segment (20) or both components are designed to at least partially cover the connecting surfaces on the flange (10) when the carrier (40) is held by the holding device (1).

2. Holding device according to claim 1, wherein the segment (20) is loosely connected to the flange (10) or is attached to the flange (10) in a non-destructively detachable manner.

3. Holding device according to one of the preceding claims, wherein the flange (10) or the at least one segment (20) or both components comprises holding means (15) for holding or for fastening or holding and fastening the segment (20) to the flange (10).

4. Holding device according to claim 3, wherein a carrier (40) or the segment support structure (30) of the at least one segment (20) or both components are designed to at least partially cover the holding means (15) when the carrier (40) is held by the holding device (1).

5. Holding device according to claim 3 or 4, wherein holding means (15) of the segment (20) or parts thereof are arranged on the segment support structure (30).

6. Holding device according to one of the preceding claims, wherein the at least one carrier (40) is loosely connected to the segment support structure (30) or is detachably attached to the segment support structure (30) in a non-destructive manner in such a way that it can be removed from the flange together with the substrate.

7. Holding device according to one of the preceding claims, wherein a carrier (40) or the segment support structure (30) of the at least one segment (20) or both components have aperture sections which are formed by projections and recesses in the edge region of the segment and are arranged in such a way that, when the carrier (40) is held by the holding device (1), they at least partially cover the connecting surfaces on the flange (10) or the holding means (15) or both.

8. Holding device according to one of the preceding claims, wherein the carrier (40) is of plate-shaped or multi-part design.

9. Holding device according to claim 8, wherein the segments (20) are designed as circular ring segments.

10. Treatment plant for the treatment of substrates (61), comprising the following components: - at least one treatment chamber with at least one treatment section; - a substrate transport device designed for moving substrates (61) in the treatment plant; - wherein the substrate transport device comprises a holding device (1) for holding a plurality of substrates (61) according to one of the preceding claims.

11. Treatment plant according to claim 10, wherein the treatment section is a coating section for depositing a surface layer on the substrates (61).

12. Method for treating substrates (61) in a treatment plant (60) according to claim 10 or 11, comprising the following method steps: - provision of substrates to be treated (61); - providing segments (20) of a holding device (1) according to any one of claims 1 to 9, which are designed to receive carriers (40) suitable for holding the substrates (61) during a substrate transport and treatment; - arrangement of the substrates (61) on the carriers (40) ; - assembly of the carriers (40) fitted with substrates (61) on the segment support structures (30); - introduction of the segment support structures (30) and the carriers (40) loaded with substrates (61) into the treatment plant (60); - detachable assembly of the segments (20) on the flange (10) by assembly of the segment support structures (30) on the connecting surfaces of the beams (13) of the flange (10) of the holding device (1) of the treatment system (60); - wherein the substrates are optionally introduced together with the carriers (40) already arranged on the segment support structure or with the carriers (40) after the segment support structures are already in the treatment plant; - treatment of the substrates (61); and - after completion of the treatment, removal of the segments (20), optionally only the carriers (40), with the treated substrates (61) from the treatment plant (60) .

13. Method according to claim 12, wherein at least the assembly of the segments (20) on the holding device (1) is carried out automatically.

14. Method according to any one of claims 12 and 13, wherein the segments (20) loaded with substrates (61) and / or the carriers (40) loaded with substrates (61) are provided in a magazine for introduction into the treatment plant (60) .