INTEGRATED CIRCUIT FOR MEASURING THE POLARIZATION OF LIGHT

Description

[0001] The present invention relates to an integrated circuit for measuring the polarization of light according to claim 1 and to an integrated circuit for measuring the polarization of light according to claim 2 and to an integrated circuit for measuring the polarization of light according to claim 3.

[0002] The known prior art (DE 102005031966 A1, EP 1902334 A1), from which the invention is based, relates to an integrated circuit for measuring the polarization of light according to claim 1.

[0003] EP 2 522 960 A1 discloses a device and a method for measuring the angle of rotation of two objects rotating relative to each other. US 2022 / 221311 A1 relates to an optical rotary position sensor with a rotating optical retarder. US 2016 / 282149 A1 describes another optical position sensor with multiple photoreceptors. US 6,275,291 B1 relates to a micropolarimeter and an ellipsometer for determining complete optical information of illuminated objects with a compact design.

[0004] The present invention relates to arrays of elements, particularly sensors, with reduced influence of undesirable variables such as spatially unevenly distributed signal strength or manufacturing gradients, as well as to methods for producing such arrays. These arrays are used, for example, in the field of polarization, color, and magnetic field measurement.

[0005] Polarization angle sensors have a major advantage over optical encoders because they are insensitive to mechanical tolerances and vibration due to the use of an unstructured polarizing filter as a rotary encoder. The basic measuring principle, based on the penalty law, can be demonstrated using a single polarization-sensitive sensor. It can only be applied in practice using at least two sensors, each responding to a different polarization direction. A particularly advantageous arrangement consists of four filters rotated by 45° each (DE 102005031966 A1, EP 1902334 A1). The advantage arises from the fact that the four signals form a differential quadrature signal. When the polarization plane of the incident light is rotated, sine and cosine signals are generated that can be evaluated independently of the brightness of the incident light.

[0006] However, this simple arrangement still has the disadvantage that it produces an erroneous signal in uneven illumination conditions, because the differently oriented sensor fields are then irradiated with different intensities. This effect cannot be easily distinguished from corresponding polarization information. Using surrounding brightness sensors, one could, for example, determine a linear brightness gradient, as well as its strength and direction, and take this into account in the signal evaluation. However, this is not possible with largely uneven illumination with nonlinear gradients, such as the illumination profile of an LED.

[0007] To reduce the error caused by brightness gradients, the desired sensor area can be divided into smaller sub-sensors and the different sub-sensors can be appropriately distributed. This is a common practice in electronics, for example, for matching differential amplifiers (cross-coupled pairs) or for arranging current sources in a DAC. These involve production-related gradients in component parameters or system-related gradients in temperature, voltages on conductor tracks, etc.

[0008] Similar, but not identical, rules apply to the distribution of the sub-sensors as to the placement of matching transistors, for example. When placing transistors of a differential amplifier or the current sources of a DAC, the influence of manufacturing processes, such as gradients across the wafer, must be minimized. These typically remain constant over the lifetime under constant operating conditions. It is also typically assumed that the circuit is small and that a weak gradient extends over a large area, so that usually only linear gradients are compensated. In particular, it is often not assumed that a local maximum with a variable position is reached on the circuit area to be compensated. However, this is frequently the case with sensors.

[0009] In the case of the polarization sensor, the primary concern is the influence of unknown brightness distributions across the sensor surface, a quantity that can change even during a single measurement. Especially with miniaturized setups, much larger changes can be expected in a small space, for example, when the light from an LED illuminates only slightly more than the sensor surface, the illumination is incorrectly aligned (offset), or design features of the light source (e.g., the central bond wire of an LED) or optics lead to locally limited brightness changes. Dust particles anywhere in the system can also cause similar errors.

[0010] Therefore, different criteria may be required to optimize the structure of a sensor or other elements in an array. For LED illumination, for example, the beam profile is of interest, as is the question of how much the sensor's illumination changes over time due to this LED, and how the sensor signals can be distributed as evenly as possible.

[0011] It is a challenge to improve the known state of the art.

[0012] The invention is based on the problem of designing and developing the known method for the iterative generation of a matrix in such a way that a further optimization is achieved with regard to the challenge mentioned.

[0013] The above problem is solved by the features of the characterising part of claim 1.

[0014] The fundamental idea is to arrange various basic elements of an arrangement, such as a sensor array, in such a way that their sensitivity to local disturbances, such as intensity fluctuations, is minimized. For this purpose, a method is also described that allows for the efficient creation of such arrangements.

[0015] For example, the sensor array of a polarization-based angle of rotation sensor can consist of N basic element types, e.g. N=1, 2, 3, 4, whose individual orientation of the polarization axis relative to a selected reference is approximately 0°, 45°, 90° and 135° in order to generate a differential quadrature signal. A similar configuration results for various magnetic sensors based on magnetoresistive effects, provided that these are 180° periodic, similar to polarization measurement. For basic elements that produce a 360° periodic signal, such as Hall sensors, the individual orientation would be selected to be 0°, 90°, 180° and 270°. With regard to the matrices shown here, elements 1, 3 and 2, 4 should preferably be oriented orthogonally to one another. In general, however, the assignment of the number to the selected orientation or sensor type is arbitrary.Different color filters can also be arranged according to the invention so that the color measurement is as insensitive as possible to the structure of the incident light. The concept can also be applied in the case of a Bayer pattern (BGGR), where the green filter is present twice and is therefore assigned two indices.

[0016] According to a teaching according to claim 1, which has independent significance, an integrated circuit for measuring the polarization of light is claimed, with polarization-sensitive sensors with different orientations of the polarization planes as basic elements in four different orientations, with sensor elements, each of which is arranged as a structural unit in cooperation with a polarization filter to form one of the polarization-sensitive sensors, wherein the polarization-sensitive filter of the polarization-sensitive sensor arranged as a structural unit has a targeted extension and orientation, wherein the polarization filter has grating structures produced by lithographic methods in at least one manufacturing plane, wherein the polarization-sensitive sensors with different orientations consist of a plurality of individual sensor elements arranged in a matrix, wherein the integrated circuit has devices configuredto make a statement about the polarization of the incident light from the signals of the polarization-sensitive sensors, whereby the basic elements are arranged with different orientations in an 8x8 matrix.

[0017] According to a teaching according to claim 2, which has independent significance, an integrated circuit for measuring the polarization of light is claimed, with polarization-sensitive sensors with different orientations of the polarization planes as basic elements in four different orientations, with sensor elements, each of which is arranged as a structural unit in cooperation with a polarization filter to form one of the polarization-sensitive sensors, wherein the polarization-sensitive filter of the polarization-sensitive sensor arranged as a structural unit has a targeted extension and orientation, wherein the polarization filter has grating structures produced by lithographic methods in at least one manufacturing plane, wherein the polarization-sensitive sensors with different orientations consist of a plurality of individual sensor elements arranged in a matrix, wherein the integrated circuit has devices configuredto make a statement about the polarization of the incident light from the signals of the polarization-sensitive sensors, whereby the basic elements are arranged with different orientations in a 16x16 matrix.

[0018] Reference may be made to all statements relating to the proposed integrated circuit according to the first teaching.

[0019] According to a teaching according to claim 3, which has independent significance, an integrated circuit for measuring the polarization of light is claimed, with polarization-sensitive sensors with different orientations of the polarization planes as basic elements in four different orientations, with sensor elements, each of which is arranged as a structural unit in cooperation with a polarization filter to form one of the polarization-sensitive sensors, wherein the polarization-sensitive filter of the polarization-sensitive sensor arranged as a structural unit has a targeted extension and orientation, wherein the polarization filter has grating structures produced by lithographic methods in at least one manufacturing plane, wherein the polarization-sensitive sensors with different orientations consist of a plurality of individual sensor elements arranged in a matrix, wherein the integrated circuit has devices configuredto make a statement about the polarization of the incident light from the signals of the polarization-sensitive sensors, whereby the basic elements are arranged with different orientations in a 32x32 matrix.

[0020] Reference may be made to all statements relating to the proposed integrated circuit according to the first teaching and the proposed integrated circuit according to the second teaching.

[0021] According to the preferred embodiment according to claim 4, it is provided that the polarization filter has grating structures produced by lithographic methods in at least one manufacturing level and / or wiring level, wherein opaque walls are present between the areas with grating structures, which prevent an influence on adjacent sensors in the event of oblique incidence of light, wherein the opaque walls are produced by vias or contacts.

[0022] In the following, the invention is explained in more detail with reference to a drawing which merely shows exemplary embodiments.

[0023] The embodiment shown in the figures and preferred in this respect relates to an integrated circuit for measuring the polarization of light with polarization-sensitive sensors with different orientations of the polarization planes as basic elements in four different orientations (1, 2, 3, 4), with sensor elements, each of which is arranged to cooperate with a polarization filter to form one of the polarization-sensitive sensors as a structural unit, wherein the polarization-sensitive filter of the polarization-sensitive sensor arranged as a structural unit has a targeted extension and orientation, wherein the polarization filter has grating structures produced by lithographic methods in at least one manufacturing plane, wherein the polarization-sensitive sensors of different orientations consist of a plurality of individual sensor elements arranged in a matrix, wherein the integrated circuit has devices configured toto make a statement about the polarization of the incident light from the signals of the polarization-sensitive sensors, wherein the basic elements are arranged with different orientations (1,2,3,4) in an 8x8 matrix, wherein the basic elements in the first row of the 8x8 matrix have the arrangement [1,2,3,4,2,1,4,3], the second row of the 8x8 matrix have the arrangement [4,3,2,1,3,4,1,2], the third row of the 8x8 matrix have the arrangement [3,4,1,2,4,3,2,1], the fourth row of the 8x8 matrix have the arrangement [2,1,4,3,1,2,3,4], the fifth row of the 8x8 matrix have the arrangement [4,3,2,1,3,4,1,2], the sixth row of the 8x8 matrix have the arrangement [1,2,3,4,2,1,4,3], the seventh row of the 8x8 matrix has the arrangement [2,1,4,3,1,2,3,4] and the eighth row of the 8x8 matrix has the arrangement [3,4,1,2,4,3,2,1].

[0024] The embodiment shown in the figures and preferred in this respect further relates to an integrated circuit for measuring the polarization of light with polarization-sensitive sensors with different orientations of the polarization planes as basic elements in four different orientations (1, 2, 3, 4), with sensor elements, each of which is arranged to cooperate with a polarization filter to form one of the polarization-sensitive sensors as a structural unit, wherein the polarization-sensitive filter of the polarization-sensitive sensor arranged as a structural unit has a targeted extension and orientation, wherein the polarization filter has grating structures produced by lithographic methods in at least one manufacturing plane, wherein the polarization-sensitive sensors of different orientations consist of a plurality of individual sensor elements arranged in a matrix, wherein the integrated circuit has devices configured toto make a statement about the polarization of the incident light from the signals of the polarization-sensitive sensors, wherein the basic elements are arranged with different orientations (1,2,3,4) in a 16x16 matrix, wherein a) the basic elements in the first row of the 16x16 matrix have the arrangement [1,2,4,3,2,1,3,4, 1,2,4,3,2,1,3,4], the second row of the 16x16 matrix has the arrangement [4,3,2,1,3,4,1,2, 4,3,2,1,3,4,1,2], the third row of the 16x16 matrix has the arrangement [3,4,1,2,4,3,2,1, 3,4,1,2,4,3,2,1], the fourth row of the 16x16 matrix has the arrangement [2,1,3,4,1,2,4,3, 2,1,3,4,1,2,4,3], the fifth row of the 16x16 matrix the arrangement [3,4,2,1,4,3,1,2, 3,4,2,1,4,3,1,2], the sixth row of the 16x16 matrix the arrangement [1,2,3,4,2,1,4,3, 1,2,3,4,2,1,4,3], the seventh row of the 16x16 matrix the arrangement [2,1,4,3,1,2,3,4, 2,1,4,3,1,2,3,4], the eighth row of the 16x16 matrix the arrangement [4,3,1,2,3,4,2,1, 4,3,1,2,3,4,2,1], the ninth row of the 16x16 matrix the arrangement [1,2,4,3,2,1,3,4, 1,2,4,3,2,1,3,4], the tenth row of the 16x16 matrix the arrangement [4,3,2,1,3,4,1,2, 4,3,2,1,3,4,1,2], the eleventh row of the 16x16 matrix the arrangement [3,4,1,2,4,3,2,1, 3,4,1,2,4,3,2,1], the twelfth row of the 16x16 matrix the arrangement [2,1,3,4,1,2,4,3, 2,1,3,4,1,2,4,3], the thirteenth row of the 16x16 matrix the arrangement [3,4,2,1,4,3,1,2, 3,4,2,1,4,3,1,2], the fourteenth row of the 16x16 matrix have the arrangement [1,2,3,4,2,1,4,3, 1,2,3,4,2,1,4,3], the fifteenth row of the 16x16 matrix has the arrangement [2,1,4,3,1,2,3,4, 2,1,4,3,1,2,3,4], the sixteenth row of the 16x16 matrix has the arrangement [4,3,1,2,3,4,2,1, 4,3,1,2,3,4,2,1], or b) the basic elements in the first row of the 16x16 matrix have the arrangement [1,2,3,4,2,3,4,1, 1,4,3,2,4,3,2,1], the second row of the 16x16 matrix has the arrangement [4,3,2,1,1,4,3,2, 2,3,4,1,1,2,3,4], the third row of the 16x16 matrix the arrangement [3,4,1,2,4,1,2,3, 3,2,1,4,2,1,4,3], the fourth row of the 16x16 matrix the arrangement [2,1,4,3,3,2,1,4,4,1,2,3,3,4,1,2], the fifth row of the 16x16 matrix the arrangement [4,1,2,3,3,4,1,2, 2,1,4,3,3,2,1,4], the sixth row of the 16x16 matrix the arrangement [3,2,1,4,2,1,4,3, 3,4,1,2,4,1,2,3], the seventh row of the 16x16 matrix the arrangement [2,3,4,1,1,2,3,4, 4,3,2,1,1,4,3,2], the eighth row of the 16x16 matrix the arrangement [1,4,3,2,4,3,2,1, 1,2,3,4,2,3,4,1], the ninth row of the 16x16 matrix the arrangement [1,4,3,2,4,3,2,1, 1,2,3,4,2,3,4,1], the tenth row of the 16x16 matrix the arrangement [2,3,4,1,1,2,3,4, 4,3,2,1,1,4,3,2], the eleventh row of the 16x16 matrix the arrangement [3,2,1,4,2,1,4,3, 3,4,1,2,4,1,2,3], the twelfth row of the 16x16 matrix the arrangement [4,1,2,3,3,4,1,2, 2,1,4,3,3,2,1,4], the thirteenth row of the 16x16 matrix the arrangement [2,1,4,3,3,2,1,4, 4,1,2,3,3,4,1,2], the fourteenth row of the 16x16 matrix the arrangement [3,4,1,2,4,1,2,3, 3,2,1,4,2,1,4,3], the fifteenth row of the 16x16 matrix the arrangement [4,3,2,1,1,4,3,2, 2,3,4,1,1,2,3,4],the sixteenth row of the 16x16 matrix has the arrangement [1,2,3,4,2,3,4,1, 1,4,3,2,4,3,2,1], or c) the basic elements in the first row of the 16x16 matrix have the arrangement [1,2,3,4,1,2,3,4, 1,2,3,4,1,2,3,4], the second row of the 16x16 matrix has the arrangement [4,3,2,1,4,3,2,1, 4,3,2,1,4,3,2,1], the third row of the 16x16 matrix has the arrangement [3,4,1,2,3,4,1,2, 3,4,1,2,3,4,1,2], the fourth row of the 16x16 matrix has the arrangement [2,1,4,3,2,1,4,3, 2,1,4,3,2,1,4,3], the fifth row of the 16x16 matrix the arrangement [1,2,3,4,1,2,3,4, 1,2,3,4,1,2,3,4], the sixth row of the 16x16 matrix the arrangement [4,3,2,1,4,3,2,1, 4,3,2,1,4,3,2,1], the seventh row of the 16x16 matrix the arrangement [3,4,1,2,3,4,1,2, 3,4,1,2,3,4,1,2], the eighth row of the 16x16 matrix the arrangement [2,1,4,3,2,1,4,3, 2,1,4,3,2,1,4,3], the ninth row of the 16x16 matrix the arrangement [1,2,3,4,1,2,3,4, 1,2,3,4,1,2,3,4], the tenth row of the 16x16 matrix the arrangement [4,3,2,1,4,3,2,1, 4,3,2,1,4,3,2,1],the eleventh row of the 16x16 matrix has the arrangement [3,4,1,2,3,4,1,2, 3,4,1,2,3,4,1,2], the twelfth row of the 16x16 matrix has the arrangement [2,1,4,3,2,1,4,3, 2,1,4,3,2,1,4,3], the thirteenth row of the 16x16 matrix has the arrangement [1,2,3,4,1,2,3,4, 1,2,3,4,1,2,3,4], the fourteenth row of the 16x16 matrix has the arrangement [4,3,2,1,4,3,2,1, 4,3,2,1,4,3,2,1], the fifteenth row of the 16x16 matrix has the arrangement [3,4,1,2,3,4,1,2, 3,4,1,2,3,4,1,2], the sixteenth row of the 16x16 matrix has the arrangement [2,1,4,3,2,1,4,3, 2,1,4,3,2,1,4,3], or d) the basic elements in the first row of the 16x16 matrix have the arrangement [1,2,3,4,2,1,4,3, 1,2,3,4,2,1,4,3], the second row of the 16x16 matrix has the arrangement [4,3,2,1,3,4,1,2, 4,3,2,1,3,4,1,2], the third row of the 16x16 matrix has the arrangement [3,4,1,2,4,3,2,1, 3,4,1,2,4,3,2,1], the fourth row of the 16x16 matrix has the arrangement [2,1,4,3,1,2,3,4, 2,1,4,3,1,2,3,4], the fifth row of the 16x16 matrix the arrangement [4,3,2,1,3,4,1,2, 4,3,2,1,3,4,1,2],the sixth row of the 16x16 matrix has the arrangement [1,2,3,4,2,1,4,3, 1,2,3,4,2,1,4,3], the seventh row of the 16x16 matrix has the arrangement [2,1,4,3,1,2,3,4, 2,1,4,3,1,2,3,4], the eighth row of the 16x16 matrix has the arrangement [3,4,1,2,4,3,2,1, 3,4,1,2,4,3,2,1], the ninth row of the 16x16 matrix has the arrangement [1,2,3,4,2,1,4,3, 1,2,3,4,2,1,4,3], the tenth row of the 16x16 matrix has the arrangement [4,3,2,1,3,4,1,2, 4,3,2,1,3,4,1,2], the eleventh row of the 16x16 matrix the arrangement [3,4,1,2,4,3,2,1, 3,4,1,2,4,3,2,1], the twelfth row of the 16x16 matrix the arrangement [2,1,4,3,1,2,3,4, 2,1,4,3,1,2,3,4], the thirteenth row of the 16x16 matrix the arrangement [4,3,2,1,3,4,1,2, 4,3,2,1,3,4,1,2], the fourteenth row of the 16x16 matrix the arrangement [1,2,3,4,2,1,4,3, 1,2,3,4,2,1,4,3], the fifteenth row of the 16x16 matrix the arrangement [2,1,4,3,1,2,3,4, 2,1,4,3,1,2,3,4], the sixteenth row of the 16x16 matrix has the arrangement [3,4,1,2,4,3,2,1, 3,4,1,2,4,3,2,1].

[0025] Reference may be made to all statements relating to the proposed integrated circuit according to the first teaching.

[0026] The embodiment shown in the figures and preferred in this respect also relates to an integrated circuit for measuring the polarization of light with polarization-sensitive sensors with different orientations of the polarization planes as basic elements in four different orientations (1, 2, 3, 4), with sensor elements, each of which is arranged to cooperate with a polarization filter to form one of the polarization-sensitive sensors as a structural unit, wherein the polarization-sensitive filter of the polarization-sensitive sensor arranged as a structural unit has a targeted extension and orientation, wherein the polarization filter has grating structures produced by lithographic methods in at least one manufacturing plane, wherein the polarization-sensitive sensors of different orientations consist of a plurality of individual sensor elements arranged in a matrix, wherein the integrated circuit has devices configured toto make a statement about the polarization of the incident light from the signals of the polarization-sensitive sensors, wherein the basic elements are arranged with different orientations (1,2,3,4) in a 32x32 matrix, wherein a) the basic elements in the first row have the arrangement [12341234 23412341 12341234 23412341], the second row of the 32x32 matrix has the arrangement [43214321 14321432 43214321 14321432], the third row of the 32x32 matrix has the arrangement [34123412 41234123 34123412 41234123], the fourth row of the 32x32 matrix has the arrangement [21432143 32143214 21432143 32143214], the fifth row of the 32x32 matrix the arrangement [12341234 23412341 12341234 23412341], the sixth row of the 32x32 matrix the arrangement [43214321 14321432 43214321 14321432], the seventh row of the 32x32 matrix the arrangement [34123412 41234123 34123412 41234123], the eighth row of the 32x32 matrix the arrangement [21432143 32143214 21432143 32143214],the ninth row of the 32x32 matrix the arrangement [41234123 34123412 41234123 34123412], the tenth row of the 32x32 matrix the arrangement [32143214 21432143 32143214 21432143], the eleventh row of the 32x32 matrix the arrangement [23412341 12341234 23412341 12341234], the twelfth row of the 32x32 matrix the arrangement [14321432 43214321 14321432 43214321], the thirteenth row of the 32x32 matrix the arrangement [41234123 34123412 41234123 34123412], the 14th row of the 32x32 matrix the arrangement [32143214 21432143 32143214 21432143], the 15th row of the 32x32 matrix the arrangement [23412341 12341234 23412341 12341234], the 16th row of the 32x32 matrix the arrangement [14321432 43214321 14321432 43214321], the 17th row of the 32x32 matrix the arrangement [12341234 23412341 12341234 23412341], the 18th row of the 32x32 matrix the arrangement [43214321 14321432 43214321 14321432], the 19th row of the 32x32 matrix the arrangement [34123412 41234123 34123412 41234123],the 20th row of the 32x32 matrix the arrangement [21432143 32143214 21432143 32143214], the 21st row of the 32x32 matrix the arrangement [12341234 23412341 12341234 23412341], the 22nd row of the 32x32 matrix the arrangement [43214321 14321432 43214321 14321432], the 23rd row of the 32x32 matrix the arrangement [34123412 41234123 34123412 41234123], the 24th row of the 32x32 matrix the arrangement [21432143 32143214 21432143 32143214], the 25th row of the 32x32 matrix the arrangement [41234123 34123412 41234123 34123412], the 26th row of the 32x32 matrix the arrangement [32143214 21432143 32143214 21432143], the 27th row of the 32x32 matrix the arrangement [23412341 12341234 23412341 12341234], the 28th row of the 32x32 matrix the arrangement [14321432 43214321 14321432 43214321], the 29th row of the 32x32 matrix the arrangement [41234123 34123412 41234123 34123412], the 30th row of the 32x32 matrix the arrangement [32143214 21432143 32143214 21432143],the 31st row of the 32x32 matrix has the arrangement [23412341 12341234 23412341 12341234], the 32nd row of the 32x32 matrix has the arrangement [14321432 43214321 14321432 43214321], or b) the basic elements in the first row of the 32x32 matrix have the arrangement [12342341 14324321 12342341 14324321], the second row of the 32x32 matrix has the arrangement [43211432 23411234 43211432 23411234], the third row of the 32x32 matrix has the arrangement [34124123 32142143 34124123 32142143], the fourth row of the 32x32 matrix the arrangement [21433214 41233412 21433214 41233412], the fifth row of the 32x32 matrix the arrangement [41233412 21433214 41233412 21433214], the sixth row of the 32x32 matrix the arrangement [32142143 34124123 32142143 34124123], the seventh row of the 32x32 matrix the arrangement [23411234 43211432 23411234 43211432], the eighth row of the 32x32 matrix the arrangement [14324321 12342341 14324321 12342341], the ninth row of the 32x32 matrix the arrangement [14324321 12342341 14324321 12342341],the tenth row of the 32x32 matrix the arrangement [23411234 43211432 23411234 43211432], the eleventh row of the 32x32 matrix the arrangement [32142143 34124123 32142143 34124123], the twelfth row of the 32x32 matrix the arrangement [41233412 21433214 41233412 21433214], the 13th row of the 32x32 matrix the arrangement [21433214 41233412 21433214 41233412], the 14th row of the 32x32 matrix the arrangement [34124123 32142143 34124123 32142143], the 15th row of the 32x32 matrix the arrangement [43211432 23411234 43211432 23411234], the 16th row of the 32x32 matrix the arrangement [12342341 14324321 12342341 14324321], the 17th row of the 32x32 matrix the arrangement [12342341 14324321 12342341 14324321], the 18th row of the 32x32 matrix the arrangement [43211432 23411234 43211432 23411234], the 19th row of the 32x32 matrix the arrangement [34124123 32142143 34124123 32142143], the 20th row of the 32x32 matrix the arrangement [21433214 41233412 21433214 41233412],the 21st row of the 32x32 matrix the arrangement [41233412 21433214 41233412 21433214], the 22nd row of the 32x32 matrix the arrangement [32142143 34124123 32142143 34124123], the 23rd row of the 32x32 matrix the arrangement [23411234 43211432 23411234 43211432], the 24th row of the 32x32 matrix the arrangement [14324321 12342341 14324321 12342341], the 25th row of the 32x32 matrix the arrangement [14324321 12342341 14324321 12342341], the 26th row of the 32x32 matrix the arrangement [23411234 43211432 23411234 43211432], the 27th row of the 32x32 matrix the arrangement [32142143 34124123 32142143 34124123], the 28th row of the 32x32 matrix the arrangement [41233412 21433214 41233412 21433214], the 29th row of the 32x32 matrix the arrangement [21433214 41233412 21433214 41233412], the 30th row of the 32x32 matrix the arrangement [34124123 32142143 34124123 32142143], the 31st row of the 32x32 matrix the arrangement [43211432 23411234 43211432 23411234],the 32nd row of the 32x32 matrix have the arrangement [12342341 14324321 12342341 14324321], or c) the basic elements in the first row of the 32x32 matrix have the arrangement [12341234 21432143 12341234 21432143], the second row of the 32x32 matrix have the arrangement [43214321 34123412 43214321 34123412], the third row of the 32x32 matrix have the arrangement [34123412 43214321 34123412 43214321], the fourth row of the 32x32 matrix have the arrangement [21432143 12341234 21432143 12341234], the fifth row of the 32x32 matrix the arrangement [12341234 21432143 12341234 21432143], the sixth row of the 32x32 matrix the arrangement [43214321 34123412 43214321 34123412], the seventh row of the 32x32 matrix the arrangement [34123412 43214321 34123412 43214321], the eighth row of the 32x32 matrix the arrangement [21432143 12341234 21432143 12341234], the ninth row of the 32x32 matrix the arrangement [43214321 34123412 43214321 34123412],the tenth row of the 32x32 matrix the arrangement [12341234 21432143 12341234 21432143], the eleventh row of the 32x32 matrix the arrangement [21432143 12341234 21432143 12341234], the twelfth row of the 32x32 matrix the arrangement [34123412 43214321 34123412 43214321], the 13th row of the 32x32 matrix the arrangement [43214321 34123412 43214321 34123412], the 14th row of the 32x32 matrix the arrangement [12341234 21432143 12341234 21432143], the 15th row of the 32x32 matrix the arrangement [21432143 12341234 21432143 12341234], the 16th row of the 32x32 matrix the arrangement [34123412 43214321 34123412 43214321], the 17th row of the 32x32 matrix the arrangement [12341234 21432143 12341234 21432143], the 18th row of the 32x32 matrix the arrangement [43214321 34123412 43214321 34123412], the 19th row of the 32x32 matrix the arrangement [34123412 43214321 34123412 43214321], the 20th row of the 32x32 matrix the arrangement [21432143 12341234 21432143 12341234],the 21st row of the 32x32 matrix the arrangement [12341234 21432143 12341234 21432143], the 22nd row of the 32x32 matrix the arrangement [43214321 34123412 43214321 34123412], the 23rd row of the 32x32 matrix the arrangement [34123412 43214321 34123412 43214321], the 24th row of the 32x32 matrix the arrangement [21432143 12341234 21432143 12341234], the 25th row of the 32x32 matrix the arrangement [43214321 34123412 43214321 34123412], the 26th row of the 32x32 matrix the arrangement [12341234 21432143 12341234 21432143], the 27th row of the 32x32 matrix the arrangement [21432143 12341234 21432143 12341234], the 28th row of the 32x32 matrix the arrangement [34123412 43214321 34123412 43214321], the 29th row of the 32x32 matrix the arrangement [43214321 34123412 43214321 34123412], the 30th row of the 32x32 matrix the arrangement [12341234 21432143 12341234 21432143], the 31st row of the 32x32 matrix the arrangement [21432143 12341234 21432143 12341234],the 32nd row of the 32x32 matrix have the arrangement [34123412 43214321 34123412 43214321], or d) the basic elements in the first row of the 32x32 matrix have the arrangement [12342341 12342341 12342341 12342341], the second row of the 32x32 matrix have the arrangement [43211432 43211432 43211432 43211432], the third row of the 32x32 matrix has the arrangement [34124123 34124123 34124123 34124123], the fourth row of the 32x32 matrix has the arrangement [21433214 21433214 21433214 21433214], the fifth row of the 32x32 matrix the arrangement [41233412 41233412 41233412 41233412], the sixth row of the 32x32 matrix the arrangement [32142143 32142143 32142143 32142143], the seventh row of the 32x32 matrix the arrangement [23411234 23411234 23411234 23411234], the eighth row of the 32x32 matrix the arrangement [14324321 14324321 14324321 14324321], the ninth row of the 32x32 matrix the arrangement [12342341 12342341 12342341 12342341],the tenth row of the 32x32 matrix the arrangement [43211432 43211432 43211432 43211432], the eleventh row of the 32x32 matrix the arrangement [34124123 34124123 34124123 34124123], the twelfth row of the 32x32 matrix the arrangement [21433214 21433214 21433214 21433214], the 13th row of the 32x32 matrix the arrangement [41233412 41233412 41233412 41233412], the 14th row of the 32x32 matrix the arrangement [32142143 32142143 32142143 32142143], the 15th row of the 32x32 matrix the arrangement [23411234 23411234 23411234 23411234], the 16th row of the 32x32 matrix the arrangement [14324321 14324321 14324321 14324321], the 17th row of the 32x32 matrix the arrangement [12342341 12342341 12342341 12342341], the 18th row of the 32x32 matrix the arrangement [43211432 43211432 43211432 43211432], the 19th row of the 32x32 matrix the arrangement [34124123 34124123 34124123 34124123], the 20th row of the 32x32 matrix the arrangement [21433214 21433214 21433214 21433214],the 21st row of the 32x32 matrix the arrangement [41233412 41233412 41233412 41233412], the 22nd row of the 32x32 matrix the arrangement [32142143 32142143 32142143 32142143], the 23rd row of the 32x32 matrix the arrangement [23411234 23411234 23411234 23411234], the 24th row of the 32x32 matrix the arrangement [14324321 14324321 14324321 14324321], the 25th row of the 32x32 matrix the arrangement [12342341 12342341 12342341 12342341], the 26th row of the 32x32 matrix the arrangement [43211432 43211432 43211432 43211432], the 27th row of the 32x32 matrix the arrangement [34124123 34124123 34124123 34124123], the 28th row of the 32x32 matrix the arrangement [21433214 21433214 21433214 21433214], the 29th row of the 32x32 matrix the arrangement [41233412 41233412 41233412 41233412], the 30th row of the 32x32 matrix the arrangement [32142143 32142143 32142143 32142143], the 31st row of the 32x32 matrix the arrangement [23411234 23411234 23411234 23411234],the 32nd row of the 32x32 matrix have the arrangement [14324321 14324321 14324321 14324321], or e) the basic elements in the first row of the 32x32 matrix have the arrangement [12342143 12342143 12342143 12342143], the second row of the 32x32 matrix have the arrangement [43213412 43213412 43213412 43213412], the third row of the 32x32 matrix have the arrangement [34124321 34124321 34124321 34124321], the fourth row of the 32x32 matrix have the arrangement [21431234 21431234 21431234 21431234], the fifth row of the 32x32 matrix the arrangement [43213412 43213412 43213412 43213412], the sixth row of the 32x32 matrix the arrangement [12342143 12342143 12342143 12342143], the seventh row of the 32x32 matrix the arrangement [21431234 21431234 21431234 21431234], the eighth row of the 32x32 matrix the arrangement [34124321 34124321 34124321 34124321], the ninth row of the 32x32 matrix the arrangement [12342143 12342143 12342143 12342143],the tenth row of the 32x32 matrix the arrangement [43213412 43213412 43213412 43213412], the eleventh row of the 32x32 matrix the arrangement [34124321 34124321 34124321 34124321], the twelfth row of the 32x32 matrix the arrangement [21431234 21431234 21431234 21431234], the 13th row of the 32x32 matrix the arrangement [43213412 43213412 43213412 43213412], the 14th row of the 32x32 matrix the arrangement [12342143 12342143 12342143 12342143], the 15th row of the 32x32 matrix the arrangement [21431234 21431234 21431234 21431234], the 16th row of the 32x32 matrix the arrangement [34124321 34124321 34124321 34124321], the 17th row of the 32x32 matrix the arrangement [12342143 12342143 12342143 12342143], the 18th row of the 32x32 matrix the arrangement [43213412 43213412 43213412 43213412], the 19th row of the 32x32 matrix the arrangement [34124321 34124321 34124321 34124321], the 20th row of the 32x32 matrix the arrangement [21431234 21431234 21431234 21431234],the 21st row of the 32x32 matrix the arrangement [43213412 43213412 43213412 43213412], the 22nd row of the 32x32 matrix the arrangement [12342143 12342143 12342143 12342143], the 23rd row of the 32x32 matrix the arrangement [21431234 21431234 21431234 21431234], the 24th row of the 32x32 matrix the arrangement [34124321 34124321 34124321 34124321], the 25th row of the 32x32 matrix the arrangement [12342143 12342143 12342143 12342143], the 26th row of the 32x32 matrix the arrangement [43213412 43213412 43213412 43213412], the 27th row of the 32x32 matrix the arrangement [34124321 34124321 34124321 34124321], the 28th row of the 32x32 matrix the arrangement [21431234 21431234 21431234 21431234], the 29th row of the 32x32 matrix the arrangement [43213412 43213412 43213412 43213412], the 30th row of the 32x32 matrix the arrangement [12342143 12342143 12342143 12342143], the 31st row of the 32x32 matrix the arrangement [21431234 21431234 21431234 21431234],the 32nd row of the 32x32 matrix has the arrangement [34124321 34124321 34124321 34124321].

[0027] Reference may be made to all statements relating to the proposed integrated circuit according to the first teaching and the proposed integrated circuit according to the second teaching.

[0028] Furthermore, it is preferably provided here that the polarization filter has grid structures produced by lithographic methods in at least one manufacturing level and / or wiring level, wherein opaque walls are present between the areas with grid structures, which prevent the influence of adjacent sensors in the event of oblique incidence of light, wherein the opaque walls are produced by vias or contacts.

[0029] The following explanations can be applied to arrangements with varying numbers of different basic elements, such as systems with two basic elements (differential sensor or transistors of a differential amplifier) or even more than four basic elements. Although the patterns generated in this way differ, the generation method remains the same. In the following, arrangements of four different basic elements are considered as examples, as these are of interest for numerous applications. In addition to polarization measurement with four quadrants to generate a differential quadrature signal, comparable arrangements with magnetoresistive sensors are conceivable. Color sensors with, for example, a Bayer matrix fall into this category.

[0030] An arrangement of four basic elements or individual sensors can be linear or in a 2x2 matrix. To minimize the effects of gradients, a compact arrangement is advantageous, so the 2x2 arrangement (basic matrix) is preferred. A larger arrangement of these basic elements can now easily be created by repeatedly arranging the same basic matrix (see Fig. 1 , which the Fig. 2 in EP 2522960 A1). This already has better properties than, for example, a single basic matrix with a larger total area, but exhibits systematic errors. In particular, the center of gravity of the individual basic elements differs from one another, so that a residual error remains in the event of uneven illumination of an optical sensor. Fig. 1 This is easy to see in the corners, as the elements in the top left and bottom right are identical, while the top right and bottom left have different elements.

[0031] Even linear shifts in fractions of the basic matrix cannot solve this problem, since it is ultimately just a superposition or shearing of this regular matrix with similar errors. This is Fig. 1 This is also easily recognizable, because the marked 4x1 basic matrix was combined into an 8x8 matrix using a 4-row identical copy and a column-wise copy with a 1 / 4 shift. The resulting matrix has different properties along its two diagonals.

[0032] An arrangement is therefore required which reduces such systematic errors. For this purpose, it is obviously advantageous to have as many basic elements as possible that are as small as possible. This initially gives rise to a problem with an extremely large number of possible solutions. If we assume that there are four basic elements arranged in a matrix with 32 x 32 = 1024 elements, this number is already 4 1024< . Of course, most of these possible arrangements are impractical. For example, to generate a differential quadrature signal it is obvious that all four basic elements occur with equal frequency. Likewise impractical solutions in which each of the basic elements is located predominantly in one corner of the array are. However, as already explained, the simple periodic arrangement of the basic elements also has disadvantages, such as a lack of mirror symmetry, rotational symmetry and, in particular, different centers of gravity of the basic elements.The optimization of such an array is therefore a complex problem, the solution of which with finite resources requires a systematic approach and a detailed investigation of the properties of all found candidates.

[0033] To do this, a basic matrix is first generated that contains all N basic elements. Starting from this basic matrix, successively more complex arrangements are generated, and optimal candidates are selected from these until a sufficient decomposition with sufficient accuracy is achieved compared to a predetermined test scenario.

[0034] In the case of a Gaussian brightness distribution which does not exceed a factor of 2 difference between maximum and minimum over the entire area, but which can otherwise occupy any position above the sensor, it follows that for an arrangement of 4 basic elements, an accuracy of a good 12 bits can be achieved with an arrangement of at least 16x16 basic elements, while for just under 16 bits an arrangement of at least 32x32 basic elements is required.

[0035] The simplest arrangement of four individual sensors, each providing two differential signal pairs, is a 2x2 matrix, where the sensor pairs (1, 3) and (2, 4), each forming a differential pair, are arranged so that they share a common center of gravity. In this case, radially symmetric illumination directed toward this center of gravity does not lead to brightness-related errors. The arrangement can therefore be described as 1 2 4 3 where all rotations and reflections of this matrix are equivalent.

[0036] A linear arrangement of these basic elements, which also has a common center of gravity, is (1 2 4 3) or (2 1 3 4), whereby rotation and reflection play no role here either. The 2x2 matrix arrangement is superior to the linear arrangement, however, because typical signal sources or light sources can best be described as point sources. In the case of a radial drop in signal intensity, which is typical for point sources, the outermost sensor pair in a linear arrangement is at a disadvantage. This disadvantage does not apply to the 2x2 matrix arrangement. Larger basic cells with empty cells or several individual elements of the same type can also be used, but this does not offer any advantages for the case described here.

[0037] These simple arrangements (basic matrices) have the disadvantage of not being able to compensate even linear gradients. To implement a differential amplifier with transistors A and B, the expert uses either arrangements ( A B B A ) or A B B A , in which the transistors are divided into smaller parts and arranged so that each element is affected more strongly and each less strongly. Assuming that the effect of parallel-connected elements can be described by a linear operation (sum signal), linear gradients are effectively compensated. However, we want to accomplish this here with, for example, four basic elements. The principle of matching for differential pairs is therefore not easy to transfer. In particular, copying the above-mentioned 2x2 basic matrix or unit cell EZ = 1 2 4 3 to a 4x4 matrix is not practical, since the common center of gravity is eliminated. Therefore, a mirroring or rotation of some basic matrices should also be performed to maintain the common center of gravity, as otherwise the tolerance against radially symmetric intensity profiles would be disturbed.

[0038] From this explanation it can already be seen that a further enlargement of the matrix, especially in binary steps (doubling the number of elements in each dimension) from the previously formed smaller units leads to good results, since in this way the existing tolerance against certain effects can be maintained relatively easily and extended by further advantages, since already existing symmetries are supplemented by additional, increasingly complex symmetries on different scales.

[0039] The repetition of submatrices formed in this way at different points in an overall matrix also contributes to making the overall matrix less sensitive to signal maxima at different points in the matrix, since for each submatrix there already exists a point that is insensitive to radially symmetric errors. In peripheral regions, all basic elements should be equally represented to compensate for linear gradients. For a certain number of basic elements, a type of ideal basic matrix with maximum symmetry results, from which larger matrices can also be generated by copying. In the case of the four basic elements that form two differential pairs, an 8x8 matrix is ​​such a basic arrangement. There can be various such basic arrangements that have very similar properties.

[0040] If special requirements are placed on the shape of the overall matrix, individual positions in the overall matrix can be marked as blocked, i.e. they remain unoccupied or the reserved areas are used for other purposes. In this way, for example, a light source (e.g. LED-on-chip) can be positioned in a free zone in the center of an optical sensor, so that the light source is exactly in the center of the sensor. This is suitable, for example, in conjunction with GaN-on-Si or with micro-transfer printing. To avoid disrupting the optimization process, at least partial areas the size of the basic matrix should be left out.

[0041] Only for very small matrices can distributions be meaningfully generated and analyzed using brute force, for example, by testing all possible meaningful permutations. This way, one can, for example, subsequently prove that there is no better submatrix than the previously optimized one, provided it is small enough (e.g., 4x4).

[0042] To create larger matrices, basic operations such as copying, rotating, and mirroring can be repeatedly applied to the base matrix or submatrix. By successively analyzing the newly created matrices, the best candidates are identified, and from these, a larger matrix is created if necessary. Using this approach, the optimization of matrices can be achieved with acceptable computing time, even with 32x32=1024 or more elements, although all possible permutations with 4^1024 are unmanageable. Especially for more complex forms of the overall matrix (e.g., with empty spaces in the center or corners), a procedure in which smaller matrices (the base matrix itself or composite matrices of lower order) are placed on top of the larger target matrix is ​​particularly useful, instead of successively creating a binary enlargement using the previously created matrix.When placing submatrices in a newly formed larger matrix, symmetries can be taken into account from the outset to reduce the number of virtual experiments. The subsequent analysis of each newly formed matrix will always eliminate arrangements with poor symmetry, as these inevitably lead to larger measurement errors under non-uniform illumination.

[0043] In order to analyze the suitability of a partial or complete matrix created according to this scheme, at least one realistic intensity profile (e.g. the beam profile of an LED) is determined and a virtual exposure experiment is carried out in which, for example, the position of the light source or its orientation relative to the sensor is changed. Certain specified limits must be observed or set, such as the degree of displacement and the degree of intensity change across the entire sensor array. For each possible lighting situation in the virtual experiment, the overall signal (e.g. the sum of the signals from all similar sensor fields) is determined and the relative deviation from each other is calculated. The worst value determined from this (the largest deviation) determines the maximum accuracy that the sensor can guarantee under the selected circumstances.Different matrices can be compared with each other, and the best ones can be used to generate successively larger matrices. This assumes that the errors of a poorly performing small matrix do not translate into an advantage for a larger matrix created from the resulting matrix.

[0044] For the determined summary intensities I 1 to I 4 of the distributed basic elements 1..4, a usable error signal results, for example, from determining (max(I 1 , .., I 4 ) - min(I 1 , .., I 4 )) / average(I 1 , .., I 4 ), which is 0 in the ideal case and positive in the case of an error. This relative error determined in this way can already be used as a first approximation for estimating, for example, the angular accuracy of a polarization angle sensor. A value of 1% corresponds roughly to 7 bits or just under 2°.

[0045] Instead of the virtual exposure experiment, other equivalent experiments can of course be conducted in the case of magnetic sensors or, for example, transistor arrays. For example, a heat distribution or a manufacturing-related gradient in production parameters could be used instead of the assumed exposure. This does not change the systematic approach, but assuming different profiles may result in different optimal matrices than those for the assumed LED illumination.

[0046] In general, there is a trend that a larger number of individual elements on the same area leads to a significantly smaller error. Quadrupling the number on the same area resulted in an accuracy gain of almost 2.7 bits in the cases investigated. However, it must be taken into account that the elements must be insulated and wired from one another, so that, while maintaining a minimum size for the individual elements, an increase in their number can ultimately also be accompanied by an increase in the total area. In this case, it must also be clarified whether a larger overall matrix is not exposed to greater gradients than a smaller matrix, so that computational gains from optimization may not be practically realizable. For example, given a small distance between the light source and the sensor with a predetermined beam profile of the LED, it is clear that a sensor area that is too large cannot be fully illuminated.In this case, the criterion previously selected during optimization (e.g. factor 2 brightness difference) could not be met in the application.

[0047] The synthesis of suitable submatrices can be carried out systematically. Suitable array structures initially result when individual square elements are arranged in an array with as many symmetries as possible. It is therefore advisable to combine point, axial, mirror, and rotational symmetries wherever possible. This can lead to problems at certain points, such as the center. Therefore, it may be appropriate to ignore individual positions in the array or to fill them with other functions. This applies not only to the center but also to the corners of a square matrix. In the case of off-center illumination, the opposite corners would exhibit a maximally deviating light intensity and can therefore contribute significantly to measurement errors.While the basic unit of the sensor (the unit cell EZ) consisting of four individual sensors can best be formed by a square matrix, a larger array can be more closely aligned to a circular shape, meaning the corners can remain unused or be filled by other functions. This works particularly well with high-order arrays.

[0048] The construction of successively larger matrices from a given basic matrix or unit cell can be accomplished using simple basic operations. These include vertical and horizontal reflection, diagonal reflection across both diagonals, and 90° rotation of the elements (transposition).

[0049] From a basic matrix M = a 11 a 12 a 21 a 22 By successively applying modification operators, various variants of the basic matrix can be obtained, from which larger matrices can be formed using extension operators. Suitable modification operators for a unit cell of 4 elements are, for example: Mirroring on the horizontal (up-dn-flip): getFlippedUpDown M = a 21 a 22 a 11 a 12 Mirroring on the vertical (left-right-flip): getFlippedLeftRight M = a 12 a 11 a 22 a 21 Diagonal flip: getFlippedDiag M = a 22 a 21 a 12 a 11 Right turn: turnMatrixRight M = a 21 a 11 a 22 a 12 (first row becomes the last column, second row becomes the second to last column, and so on until the last row becomes the first column).

[0050] For example, from an initial matrix EZ with n*n elements, a new matrix M with 2n*2n elements can be easily created by applying expansion operators. The expansion operators fill the new matrix with variants of the initial matrix (M1..M4) using the modification operators. Some examples of expansion operators are listed below: M = OP EZ = M 1 M 2 M 3 M 4 .

[0051] In the first step, the initial matrix has the dimension of the basic matrix (e.g., 2x2 for 4 basic elements). In subsequent steps, the best of the determined new matrices is used as the new initial matrix, so that, for example, in 4 runs, one can arrive at a matrix with 32x32 basic elements. with the unit cell or basic matrix EZ and the matrices M1-M4 modified from the unit cell by basic operators (OP). Useful operators include, for example, Expansion operator OP1: {M1=EZ, M2=vertically mirrored EZ, M3=horizontally mirrored EZ, M4=diagonally mirrored EZ} Expansion operator OP2: {M1=EZ, M2=EZ, M3=EZ, M4=EZ} Expansion operator OP3: (Rotation by 90°, continuously clockwise or continuously counterclockwise) {M1=EZ, M2=rotated M1, M4 = rotated M2, M3=rotated M4} Expansion operator OP4: {M1=EZ, M2=diagonally mirrored EZ, M3=diagonally mirrored EZ, M4=EZ}

[0052] Since it is not obvious which operators lead to the best result at which point, systematic generation and analysis is required. This leads to a still large number of experiments (several tens of thousands of variants and subsequent virtual exposure experiments to determine an optimal 32x32 matrix), which, however, can be processed in a reasonable amount of time on standard computers.

[0053] It should be noted that matrices generated in different ways (using different operators) can yield equivalent results, even if they appear different at first glance. This is because, in principle, sensor arrays of the same type can be interchanged; in particular, the basic elements belonging to a differential pair can be swapped with each other. Cross-swapping the basic elements of an I and a Q signal, however, is not practical. Furthermore, the copies created by rotation are equivalent to the original. Shift operations, at least by multiples of the basic cell, are usually harmless.

[0054] In principle, the procedure can be further generalized, i.e., applied to non-square matrices or the expansion can be performed in larger and non-binary steps. However, the variant presented here with square matrices and binary expansion is particularly easy to implement.

[0055] Also the Fig. 1 The 8x8 matrix shown in (state of the art) can be generated from a smaller base matrix in the manner described here. Obviously, a 4x4 matrix is the size from which larger matrices can be generated by simple copying (OP2). However, this 4x4 matrix cannot be formed from identical 2x2 matrices, since any 2x2 matrices in Fig. 1not contain all four basic elements. This contradicts the principle that all elements should be as close to one another as possible. However, it would be conceivable, and also within the scope of this invention, to generate an 8x8 or larger matrix from the same 4x4 basic matrix using suitable operators. Thus, using OP1, for example, one would obtain a more advantageous 8x8 matrix, for which mirror symmetry exists, at least on a larger scale, and consequently the centers of gravity of the individual elements coincide again.

Claims

1. Integrated circuit for measuring the polarization of light - having polarization-sensitive sensors with different polarization plane alignments as basic elements in four different alignments (1,2,3,4), - having sensory elements, each arranged so as to interact with a polarization filter to form one of the polarization-sensitive sensors as a structural unit, - wherein the polarization-sensitive filter of the polarization-sensitive sensor arranged as a structural unit has a specific extension and orientation, - wherein the polarization filter has lattice structures produced by lithographic methods in at least one production plane, - wherein the polarization-sensitive sensors of different alignment consist of a plurality of individual sensor elements arranged in a matrix, - wherein the integrated circuit contains devices configured to make a statement about the polarization of the incident light from the signals of the polarization-sensitive sensors, - wherein the basic elements with different alignments (1,2,3,4) are arranged in an 8x8 matrix, - wherein the basic elements in the first line of the 8x8 matrix have the arrangement [1,2,3,4,2,1,4,3], in the second line of the 8x8 matrix have the arrangement [4,3,2,1,3,4,1,2], in the third line of the 8x8 matrix have the arrangement [3,4,1,2,4,3,2,1], in the fourth line of the 8x8 matrix have the arrangement [2,1,4,3,1,2,3,4], in the fifth line of the 8x8 matrix have the arrangement [4,3,2,1,3,4,1,2], in the sixth line of the 8x8 matrix have the arrangement [1,2,3,4,2,1,4,3], in the seventh line of the 8x8 matrix have the arrangement [2,1,4,3,1,2,3,4], and in the eighth line of the 8x8 matrix have the arrangement [3,4,1,2,4,3,2,1].

2. Integrated circuit for measuring the polarization of light - having polarization-sensitive sensors with different polarization plane alignments as basic elements in four different alignments (1,2,3,4), - having sensory elements, each arranged so as to interact with a polarization filter to form one of the polarization-sensitive sensors as a structural unit, - wherein the polarization-sensitive filter of the polarization-sensitive sensor arranged as a structural unit has a specific extension and orientation, - wherein the polarization filter has lattice structures produced by lithographic methods in at least one production plane, - wherein the polarization-sensitive sensors of different alignment consist of a plurality of individual sensor elements arranged in a matrix, - wherein the integrated circuit contains devices configured to make a statement about the polarization of the incident light from the signals of the polarization-sensitive sensors, - wherein the basic elements with different alignments (1,2,3,4) are arranged in a 16x16 matrix, - wherein a) the basic elements in the first line of the 16x16 matrix have the arrangement [1,2,4,3,2,1,3,4, 1,2,4,3,2,1,3,4], in the second line of the 16x16 matrix have the arrangement [4,3,2,1,3,4,1,2, 4,3,2,1,3,4,1,2], in the third line of the 16x16 matrix have the arrangement [3,4,1,2,4,3,2,1, 3,4,1,2,4,3,2,1], in the fourth line of the 16x16 matrix have the arrangement [2,1,3,4,1,2,4,3, 2,1,3,4,1,2,4,3], in the fifth line of the 16x16 matrix have the arrangement [3,4,2,1,4,3,1,2, 3,4,2,1,4,3,1,2], in the sixth line of the 16x16 matrix have the arrangement [1,2,3,4,2,1,4,3, 1,2,3,4,2,1,4,3], in the seventh line of the 16x16 matrix have the arrangement [2,1,4,3,1,2,3,4, 2,1,4,3,1,2,3,4], in the eighth line of the 16x16 matrix have the arrangement [4,3,1,2,3,4,2,1, 4,3,1,2,3,4,2,1], in the ninth line of the 16x16 matrix have the arrangement [1,2,4,3,2,1,3,4, 1,2,4,3,2,1,3,4], in the tenth line of the 16x16 matrix have the arrangement [4,3,2,1,3,4,1,2, 4,3,2,1,3,4,1,2], in the eleventh line of the 16x16 matrix have the arrangement [3,4,1,2,4,3,2,1, 3,4,1,2,4,3,2,1], in the twelfth line of the 16x16 matrix have the arrangement [2,1,3,4,1,2,4,3, 2,1,3,4,1,2,4,3], in the thirteenth line of the 16x16 matrix have the arrangement [3,4,2,1,4,3,1,2, 3,4,2,1,4,3,1,2], in the fourteenth line of the 16x16 matrix have the arrangement [1,2,3,4,2,1,4,3, 1,2,3,4,2,1,4,3], in the fifteenth line of the 16x16 matrix have the arrangement [2,1,4,3,1,2,3,4, 2,1,4,3,1,2,3,4], in the sixteenth line of the 16x16 matrix have the arrangement [4,3,1,2,3,4,2,1, 4,3,1,2,3,4,2,1], or b) the basic elements in the first line of the 16x16 matrix have the arrangement [1,2,3,4,2,3,4,1, 1,4,3,2,4,3,2,1], in the second line of the 16x16 matrix have the arrangement [4,3,2,1,1,4,3,2, 2,3,4,1,1,2,3,4], in the third line of the 16x16 matrix have the arrangement [3,4,1,2,4,1,2,3, 3,2,1,4,2,1,4,3], in the fourth line of the 16x16 matrix have the arrangement [2,1,4,3,3,2,1,4, 4,1,2,3,3,4,1,2], in the fifth line of the 16x16 matrix have the arrangement [4,1,2,3,3,4,1,2, 2,1,4,3,3,2,1,4], in the sixth line of the 16x16 matrix have the arrangement [3,2,1,4,2,1,4,3, 3,4,1,2,4,1,2,3], in the seventh line of the 16x16 matrix have the arrangement [2,3,4,1,1,2,3,4, 4,3,2,1,1,4,3,2], in the eighth line of the 16x16 matrix have the arrangement [1,4,3,2,4,3,2,1, 1,2,3,4,2,3,4,1], in the ninth line of the 16x16 matrix have the arrangement [1,4,3,2,4,3,2,1, 1,2,3,4,2,3,4,1], in the tenth line of the 16x16 matrix have the arrangement [2,3,4,1,1,2,3,4, 4,3,2,1,1,4,3,2], in the eleventh line of the 16x16 matrix have the arrangement [3,2,1,4,2,1,4,3, 3,4,1,2,4,1,2,3], in the twelfth line of the 16x16 matrix have the arrangement [4,1,2,3,3,4,1,2, 2,1,4,3,3,2,1,4], in the thirteenth line of the 16x16 matrix have the arrangement [2,1,4,3,3,2,1,4, 4,1,2,3,3,4,1,2], in the fourteenth line of the 16x16 matrix have the arrangement [3,4,1,2,4,1,2,3, 3,2,1,4,2,1,4,3], in the fifteenth line of the 16x16 matrix have the arrangement [4,3,2,1,1,4,3,2, 2,3,4,1,1,2,3,4], in the sixteenth line of the 16x16 matrix have the arrangement [1,2,3,4,2,3,4,1, 1,4,3,2,4,3,2,1], or c) the basic elements in the first line of the 16x16 matrix have the arrangement [1,2,3,4,1,2,3,4, 1,2,3,4,1,2,3,4], in the second line of the 16x16 matrix have the arrangement [4,3,2,1,4,3,2,1, 4,3,2,1,4,3,2,1], in the third line of the 16x16 matrix have the arrangement [3,4,1,2,3,4,1,2, 3,4,1,2,3,4,1,2], in the fourth line of the 16x16 matrix have the arrangement [2,1,4,3,2,1,4,3, 2,1,4,3,2,1,4,3], in the fifth line of the 16x16 matrix have the arrangement [1,2,3,4,1,2,3,4, 1,2,3,4,1,2,3,4], in the sixth line of the 16x16 matrix have the arrangement [4,3,2,1,4,3,2,1, 4,3,2,1,4,3,2,1], in the seventh line of the 16x16 matrix have the arrangement [3,4,1,2,3,4,1,2, 3,4,1,2,3,4,1,2], in the eighth line of the 16x16 matrix have the arrangement [2,1,4,3,2,1,4,3, 2,1,4,3,2,1,4,3], in the ninth line of the 16x16 matrix have the arrangement [1,2,3,4,1,2,3,4, 1,2,3,4,1,2,3,4], in the tenth line of the 16x16 matrix have the arrangement [4,3,2,1,4,3,2,1, 4,3,2,1,4,3,2,1], in the eleventh line of the 16x16 matrix have the arrangement [3,4,1,2,3,4,1,2, 3,4,1,2,3,4,1,2], in the twelfth line of the 16x16 matrix have the arrangement [2,1,4,3,2,1,4,3, 2,1,4,3,2,1,4,3], in the thirteenth line of the 16x16 matrix have the arrangement [1,2,3,4,1,2,3,4, 1,2,3,4,1,2,3,4], in the fourteenth line of the 16x16 matrix have the arrangement [4,3,2,1,4,3,2,1, 4,3,2,1,4,3,2,1], in the fifteenth line of the 16x16 matrix have the arrangement [3,4,1,2,3,4,1,2, 3,4,1,2,3,4,1,2], in the sixteenth line of the 16x16 matrix have the arrangement [2,1,4,3,2,1,4,3, 2,1,4,3,2,1,4,3], or d) the basic elements in the first line of the 16x16 matrix have the arrangement [1,2,3,4,2,1,4,3, 1,2,3,4,2,1,4,3], in the second line of the 16x16 matrix have the arrangement [4,3,2,1,3,4,1,2, 4,3,2,1,3,4,1,2], in the third line of the 16x16 matrix have the arrangement [3,4,1,2,4,3,2,1, 3,4,1,2,4,3,2,1], in the fourth line of the 16x16 matrix have the arrangement [2,1,4,3,1,2,3,4, 2,1,4,3,1,2,3,4], in the fifth line of the 16x16 matrix have the arrangement [4,3,2,1,3,4,1,2, 4,3,2,1,3,4,1,2], in the sixth line of the 16x16 matrix have the arrangement [1,2,3,4,2,1,4,3, 1,2,3,4,2,1,4,3], in the seventh line of the 16x16 matrix have the arrangement [2,1,4,3,1,2,3,4, 2,1,4,3,1,2,3,4], in the eighth line of the 16x16 matrix have the arrangement [3,4,1,2,4,3,2,1, 3,4,1,2,4,3,2,1], in the ninth line of the 16x16 matrix have the arrangement [1,2,3,4,2,1,4,3, 1,2,3,4,2,1,4,3], in the tenth line of the 16x16 matrix have the arrangement [4,3,2,1,3,4,1,2, 4,3,2,1,3,4,1,2], in the eleventh line of the 16x16 matrix have the arrangement [3,4,1,2,4,3,2,1, 3,4,1,2,4,3,2,1], in the twelfth line of the 16x16 matrix have the arrangement [2,1,4,3,1,2,3,4, 2,1,4,3,1,2,3,4], in the thirteenth line of the 16x16 matrix have the arrangement [4,3,2,1,3,4,1,2, 4,3,2,1,3,4,1,2], in the fourteenth line of the 16x16 matrix have the arrangement [1,2,3,4,2,1,4,3, 1,2,3,4,2,1,4,3], in the fifteenth line of the 16x16 matrix have the arrangement [2,1,4,3,1,2,3,4, 2,1,4,3,1,2,3,4], in the sixteenth line of the 16x16 matrix have the arrangement [3,4,1,2,4,3,2,1, 3,4,1,2,4,3,2,1].

3. Integrated circuit for measuring the polarization of light - having polarization-sensitive sensors with different polarization plane alignments as basic elements in four different alignments (1,2,3,4), - having sensory elements, each arranged so as to interact with a polarization filter to form one of the polarization-sensitive sensors as a structural unit, - wherein the polarization-sensitive filter of the polarization-sensitive sensor arranged as a structural unit has a specific extension and orientation, - wherein the polarization filter has lattice structures produced by lithographic methods in at least one production plane, - wherein the polarization-sensitive sensors of different alignment consist of a plurality of individual sensor elements arranged in a matrix, - wherein the integrated circuit contains devices configured to make a statement about the polarization of the incident light from the signals of the polarization-sensitive sensors, - wherein the basic elements with different alignments (1,2,3,4) are arranged in a 32x32 matrix, - wherein a) the basic elements in the first line have the arrangement [12341234 23412341 12341234 23412341], in the second line of the 32x32 matrix have the arrangement [43214321 14321432 43214321 14321432], in the third line of the 32x32 matrix have the arrangement [34123412 41234123 34123412 41234123], in the fourth line of the 32x32 matrix have the arrangement [21432143 32143214 21432143 32143214], in the fifth line of the 32x32 matrix have the arrangement [12341234 23412341 12341234 23412341], in the sixth line of the 32x32 matrix have the arrangement [43214321 14321432 43214321 14321432], in the seventh line of the 32x32 matrix have the arrangement [34123412 41234123 34123412 41234123], in the eighth line of the 32x32 matrix have the arrangement [21432143 32143214 21432143 32143214], in the ninth line of the 32x32 matrix have the arrangement [41234123 34123412 41234123 34123412], in the tenth line of the 32x32 matrix have the arrangement [32143214 21432143 32143214 21432143], in the eleventh line of the 32x32 matrix have the arrangement [23412341 12341234 23412341 12341234], in the twelfth line of the 32x32 matrix have the arrangement [14321432 43214321 14321432 43214321], in the 13th line of the 32x32 matrix have the arrangement [41234123 34123412 41234123 34123412], in the 14th line of the 32x32 matrix have the arrangement [32143214 21432143 32143214 21432143], in the 15th line of the 32x32 matrix have the arrangement [23412341 12341234 23412341 12341234], in the 16th line of the 32x32 matrix have the arrangement [14321432 43214321 14321432 43214321], in the 17th line of the 32x32 matrix have the arrangement [12341234 23412341 12341234 23412341], in the 18th line of the 32x32 matrix have the arrangement [43214321 14321432 43214321 14321432], in the 19th line of the 32x32 matrix have the arrangement [34123412 41234123 34123412 41234123], in the 20th line of the 32x32 matrix have the arrangement [21432143 32143214 21432143 32143214], in the 21st line of the 32x32 matrix have the arrangement [12341234 23412341 12341234 23412341], in the 22nd line of the 32x32 matrix have the arrangement [43214321 14321432 43214321 14321432], in the 23rd line of the 32x32 matrix have the arrangement [34123412 41234123 34123412 41234123], in the 24th line of the 32x32 matrix have the arrangement [21432143 32143214 21432143 32143214], in the 25th line of the 32x32 matrix have the arrangement [41234123 34123412 41234123 34123412], in the 26th line of the 32x32 matrix have the arrangement [32143214 21432143 32143214 21432143], in the 27th line of the 32x32 matrix have the arrangement [23412341 12341234 23412341 12341234], in the 28th line of the 32x32 matrix have the arrangement [14321432 43214321 14321432 43214321], in the 29th line of the 32x32 matrix have the arrangement [41234123 34123412 41234123 34123412], in the 30th line of the 32x32 matrix have the arrangement [32143214 21432143 32143214 21432143], in the 31st line of the 32x32 matrix have the arrangement [23412341 12341234 23412341 12341234], in the 32nd line of the 32x32 matrix have the arrangement [14321432 43214321 14321432 43214321], or b) the basic elements in the first line of the 32x32 matrix have the arrangement [12342341 14324321 12342341 14324321], in the second line of the 32x32 matrix have the arrangement [43211432 23411234 43211432 23411234], in the third line of the 32x32 matrix have the arrangement [34124123 32142143 34124123 32142143], in the fourth line of the 32x32 matrix have the arrangement [21433214 41233412 21433214 41233412], in the fifth line of the 32x32 matrix have the arrangement [41233412 21433214 41233412 21433214], in the sixth line of the 32x32 matrix have the arrangement [32142143 34124123 32142143 34124123], in the seventh line of the 32x32 matrix have the arrangement [23411234 43211432 23411234 43211432], in the eighth line of the 32x32 matrix have the arrangement [14324321 12342341 14324321 12342341], in the ninth line of the 32x32 matrix have the arrangement [14324321 12342341 14324321 12342341], in the tenth line of the 32x32 matrix have the arrangement [23411234 43211432 23411234 43211432], in the eleventh line of the 32x32 matrix have the arrangement [32142143 34124123 32142143 34124123], in the twelfth line of the 32x32 matrix have the arrangement [41233412 21433214 41233412 21433214], in the 13th line of the 32x32 matrix have the arrangement [21433214 41233412 21433214 41233412], in the 14th line of the 32x32 matrix have the arrangement [34124123 32142143 34124123 32142143], in the 15th line of the 32x32 matrix have the arrangement [43211432 23411234 43211432 23411234], in the 16th line of the 32x32 matrix have the arrangement [12342341 14324321 12342341 14324321], in the 17th line of the 32x32 matrix have the arrangement [12342341 14324321 12342341 14324321], in the 18th line of the 32x32 matrix have the arrangement [43211432 23411234 43211432 23411234], in the 19th line of the 32x32 matrix have the arrangement [34124123 32142143 34124123 32142143], in the 20th line of the 32x32 matrix have the arrangement [21433214 41233412 21433214 41233412], in the 21st line of the 32x32 matrix have the arrangement [41233412 21433214 41233412 21433214], in the 22nd line of the 32x32 matrix have the arrangement [32142143 34124123 32142143 34124123], in the 23rd line of the 32x32 matrix have the arrangement [23411234 43211432 23411234 43211432], in the 24th line of the 32x32 matrix have the arrangement [14324321 12342341 14324321 12342341], in the 25th line of the 32x32 matrix have the arrangement [14324321 12342341 14324321 12342341], in the 26th line of the 32x32 matrix have the arrangement [23411234 43211432 23411234 43211432], in the 27th line of the 32x32 matrix have the arrangement [32142143 34124123 32142143 34124123], in the 28th line of the 32x32 matrix have the arrangement [41233412 21433214 41233412 21433214], in the 29th line of the 32x32 matrix have the arrangement [21433214 41233412 21433214 41233412], in the 30th line of the 32x32 matrix have the arrangement [34124123 32142143 34124123 32142143], in the 31st line of the 32x32 matrix have the arrangement [43211432 23411234 43211432 23411234], in the 32nd line of the 32x32 matrix have the arrangement [12342341 14324321 12342341 14324321], or c) the basic elements in the first line of the 32x32 matrix have the arrangement [12341234 21432143 12341234 21432143], in the second line of the 32x32 matrix have the arrangement [43214321 34123412 43214321 34123412], in the third line of the 32x32 matrix have the arrangement [34123412 43214321 34123412 43214321], in the fourth line of the 32x32 matrix have the arrangement [21432143 12341234 21432143 12341234], in the fifth line of the 32x32 matrix have the arrangement [12341234 21432143 12341234 21432143], in the sixth line of the 32x32 matrix have the arrangement [43214321 34123412 43214321 34123412], in the seventh line of the 32x32 matrix have the arrangement [34123412 43214321 34123412 43214321], in the eighth line of the 32x32 matrix have the arrangement [21432143 12341234 21432143 12341234], in the ninth line of the 32x32 matrix have the arrangement [43214321 34123412 43214321 34123412], in the tenth line of the 32x32 matrix have the arrangement [12341234 21432143 12341234 21432143], in the eleventh line of the 32x32 matrix have the arrangement [21432143 12341234 21432143 12341234], in the twelfth line of the 32x32 matrix have the arrangement [34123412 43214321 34123412 43214321], in the 13th line of the 32x32 matrix have the arrangement [43214321 34123412 43214321 34123412], in the 14th line of the 32x32 matrix have the arrangement [12341234 21432143 12341234 21432143], in the 15th line of the 32x32 matrix have the arrangement [21432143 12341234 21432143 12341234], in the 16th line of the 32x32 matrix have the arrangement [34123412 43214321 34123412 43214321], in the 17th line of the 32x32 matrix have the arrangement [12341234 21432143 12341234 21432143], in the 18th line of the 32x32 matrix have the arrangement [43214321 34123412 43214321 34123412], in the 19th line of the 32x32 matrix have the arrangement [34123412 43214321 34123412 43214321], in the 20th line of the 32x32 matrix have the arrangement [21432143 12341234 21432143 12341234], in the 21st line of the 32x32 matrix have the arrangement [12341234 21432143 12341234 21432143], in the 22nd line of the 32x32 matrix have the arrangement [43214321 34123412 43214321 34123412], in the 23rd line of the 32x32 matrix have the arrangement [34123412 43214321 34123412 43214321], in the 24th line of the 32x32 matrix have the arrangement [21432143 12341234 21432143 12341234], in the 25th line of the 32x32 matrix have the arrangement [43214321 34123412 43214321 34123412], in the 26th line of the 32x32 matrix have the arrangement [12341234 21432143 12341234 21432143], in the 27th line of the 32x32 matrix have the arrangement [21432143 12341234 21432143 12341234], in the 28th line of the 32x32 matrix have the arrangement [34123412 43214321 34123412 43214321], in the 29th line of the 32x32 matrix have the arrangement [43214321 34123412 43214321 34123412], in the 30th line of the 32x32 matrix have the arrangement [12341234 21432143 12341234 21432143], in the 31st line of the 32x32 matrix have the arrangement [21432143 12341234 21432143 12341234], in the 32nd line of the 32x32 matrix have the arrangement [34123412 43214321 34123412 43214321], or d) the basic elements in the first line of the 32x32 matrix have the arrangement [12342341 12342341 12342341 12342341], in the second line of the 32x32 matrix have the arrangement [43211432 43211432 43211432 43211432], in the third line of the 32x32 matrix have the arrangement [34124123 34124123 34124123 34124123], in the fourth line of the 32x32 matrix have the arrangement [21433214 21433214 21433214 21433214], in the fifth line of the 32x32 matrix have the arrangement [41233412 41233412 41233412 41233412], in the sixth line of the 32x32 matrix have the arrangement [32142143 32142143 32142143 32142143], in the seventh line of the 32x32 matrix have the arrangement [23411234 23411234 23411234 23411234], in the eighth line of the 32x32 matrix have the arrangement [14324321 14324321 14324321 14324321], in the ninth line of the 32x32 matrix have the arrangement [12342341 12342341 12342341 12342341], in the tenth line of the 32x32 matrix have the arrangement [43211432 43211432 43211432 43211432], in the eleventh line of the 32x32 matrix have the arrangement [34124123 34124123 34124123 34124123], in the twelfth line of the 32x32 matrix have the arrangement [21433214 21433214 21433214 21433214], in the 13th line of the 32x32 matrix have the arrangement [41233412 41233412 41233412 41233412], in the 14th line of the 32x32 matrix have the arrangement [32142143 32142143 32142143 32142143], in the 15th line of the 32x32 matrix have the arrangement [23411234 23411234 23411234 23411234], in the 16th line of the 32x32 matrix have the arrangement [14324321 14324321 14324321 14324321], in the 17th line of the 32x32 matrix have the arrangement [12342341 12342341 12342341 12342341], in the 18th line of the 32x32 matrix have the arrangement [43211432 43211432 43211432 43211432], in the 19th line of the 32x32 matrix have the arrangement [34124123 34124123 34124123 34124123], in the 20th line of the 32x32 matrix have the arrangement [21433214 21433214 21433214 21433214], in the 21st line of the 32x32 matrix have the arrangement [41233412 41233412 41233412 41233412], in the 22nd line of the 32x32 matrix have the arrangement [32142143 32142143 32142143 32142143], in the 23rd line of the 32x32 matrix have the arrangement [23411234 23411234 23411234 23411234], in the 24th line of the 32x32 matrix have the arrangement [14324321 14324321 14324321 14324321], in the 25th line of the 32x32 matrix have the arrangement [12342341 12342341 12342341 12342341], in the 26th line of the 32x32 matrix have the arrangement [43211432 43211432 43211432 43211432], in the 27th line of the 32x32 matrix have the arrangement [34124123 34124123 34124123 34124123], in the 28th line of the 32x32 matrix have the arrangement [21433214 21433214 21433214 21433214], in the 29th line of the 32x32 matrix have the arrangement [41233412 41233412 41233412 41233412], in the 30th line of the 32x32 matrix have the arrangement [32142143 32142143 32142143 32142143], in the 31st line of the 32x32 matrix have the arrangement [23411234 23411234 23411234 23411234], in the 32nd line of the 32x32 matrix have the arrangement [14324321 14324321 14324321 14324321], or e) the basic elements in the first line of the 32x32 matrix are in the arrangement [12342143 12342143 12342143 12342143], in the second line of the 32x32 matrix have the arrangement [43213412 43213412 43213412 43213412], in the third line of the 32x32 matrix have the arrangement [34124321 34124321 34124321 34124321], in the fourth line of the 32x32 matrix have the arrangement [21431234 21431234 21431234 21431234], in the fifth line of the 32x32 matrix have the arrangement [43213412 43213412 43213412 43213412], in the sixth line of the 32x32 matrix have the arrangement [12342143 12342143 12342143 12342143], in the seventh line of the 32x32 matrix have the arrangement [21431234 21431234 21431234 21431234], in the eighth line of the 32x32 matrix have the arrangement [34124321 34124321 34124321 34124321], in the ninth line of the 32x32 matrix have the arrangement [12342143 12342143 12342143 12342143], in the tenth line of the 32x32 matrix have the arrangement [43213412 43213412 43213412 43213412], in the eleventh line of the 32x32 matrix have the arrangement [34124321 34124321 34124321 34124321], in the twelfth line of the 32x32 matrix have the arrangement [21431234 21431234 21431234 21431234], in the 13th line of the 32x32 matrix have the arrangement [43213412 43213412 43213412 43213412], in the 14th line of the 32x32 matrix have the arrangement [12342143 12342143 12342143 12342143], in the 15th line of the 32x32 matrix have the arrangement [21431234 21431234 21431234 21431234], in the 16th line of the 32x32 matrix have the arrangement [34124321 34124321 34124321 34124321], in the 17th line of the 32x32 matrix have the arrangement [12342143 12342143 12342143 12342143], in the 18th line of the 32x32 matrix have the arrangement [43213412 43213412 43213412 43213412], in the 19th line of the 32x32 matrix have the arrangement [34124321 34124321 34124321 34124321], in the 20th line of the 32x32 matrix have the arrangement [21431234 21431234 21431234 21431234], in the 21st line of the 32x32 matrix have the arrangement [43213412 43213412 43213412 43213412], in the 22nd line of the 32x32 matrix have the arrangement [12342143 12342143 12342143 12342143], in the 23rd line of the 32x32 matrix have the arrangement [21431234 21431234 21431234 21431234], in the 24th line of the 32x32 matrix have the arrangement [34124321 34124321 34124321 34124321], in the 25th line of the 32x32 matrix have the arrangement [12342143 12342143 12342143 12342143], in the 26th line of the 32x32 matrix have the arrangement [43213412 43213412 43213412 43213412], in the 27th line of the 32x32 matrix have the arrangement [34124321 34124321 34124321 34124321], in the 28th line of the 32x32 matrix have the arrangement [21431234 21431234 21431234 21431234], in the 29th line of the 32x32 matrix have the arrangement [43213412 43213412 43213412 43213412], in the 30th line of the 32x32 matrix have the arrangement [12342143 12342143 12342143 12342143], in the 31st line of the 32x32 matrix have the arrangement [21431234 21431234 21431234 21431234], in the 32nd line of the 32x32 matrix have the arrangement [34124321 34124321 34124321 34124321].

4. Integrated circuit for measuring the polarization of light according to any one of Claims 1 to 3, - wherein the polarization filter has lattice structures produced by lithographic methods in at least one production plane and / or wiring plane, - wherein, between the regions with lattice structures, there are opaque walls which prevent interference with adjacent sensors in the event of oblique light incidence, - wherein the opaque walls are made by means of vias or contacts.