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121 results about "Metallic grating" patented technology

Embedded grating structure-based narrow-band near-infrared thermo-electronic photoelectric detector

The invention belongs to the technical field of photoelectric sensing and provides an embedded grating structure-based narrow-band near-infrared thermo-electronic photoelectric detector. The inventionaims to solve the problem of the low responsivity of a photoelectric detector in the prior art. The embedded grating structure-based narrow-band near-infrared thermo-electronic photoelectric detectorcomprises a silicon substrate and a metal grating, a titanium film is arranged between the metal grating and the silicon substrate so as to serve as an adhesive layer; the metal grating is connectedto a top conductive electrode; and a bottom conductive electrode is arranged on a silicon back surface. The metal grating is embedded into the silicon substrate, so that the light absorption efficiency of metal and the generation rate of hot electrons are improved, and the thermalization loss of the hot electrons is reduced; a Schottky interface on the side surface of the grating is additionally adopted, so that the collection efficiency of the hot electrons transferred into silicon is improved, and therefore, the responsivity of the photoelectric detector is improved; and the response wavelength of the detector can be changed by adjusting the period of the metal grating, so that the wavelength-adjustable near-infrared photoelectric detector is achieved.
Owner:SUZHOU UNIV

Blue light band asymmetric metamaterial polarization modulator and manufacturing method thereof

ActiveCN111596399AAchieving Polarization ConversionRealize two-way asymmetric transmissionPolarising elementsEvaporation (deposition)Refractive index
The invention discloses a blue light band asymmetric metamaterial polarization modulator. A second metal grating layer is prepared on the top surface of a silicon-based layer through an electron beamevaporation deposition method and an electron beam etching process; a second low-refractive-index dielectric material layer is prepared on the top surface of the second metal grating layer through anelectron beam evaporation deposition method; a graphical high-refractive-index dielectric material polarization conversion layer is prepared on the top surface of the second low-refractive-index dielectric material layer through an electron beam evaporation deposition method and an electron beam etching process; a first low-refractive-index dielectric material layer is formed on the top surface ofthe patterned high-refractive-index dielectric material polarization conversion layer through an electron beam evaporation deposition method, and a first metal grating layer is formed on the top surface of the first low-refractive-index dielectric material layer through the electron beam evaporation deposition method and an electron beam etching process; according to the invention, the problems of low transmissivity and low polarization conversion rate can be solved, and the device can also realize a bidirectional asymmetric transmission function.
Owner:WUHAN UNIV OF TECH
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