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Optical coupling unit of quantum well long-wave infrared detector grating waveguide micro-cavity

A long-wave infrared and grating waveguide technology is applied in the field of quantum well long-wave infrared detectors, which can solve the problems of low quantum efficiency of quantum well infrared detectors, and achieve the effects of improving photoelectric efficiency, increasing electric field strength, and improving absorption efficiency.

Inactive Publication Date: 2011-07-27
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI +2
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  • Abstract
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Problems solved by technology

[0003] The purpose of the present invention is to provide a quantum well long-wave infrared detector optical coupling unit based on the near-field effect, to solve the problem that the quantum efficiency of the quantum well infrared detector is too low

Method used

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  • Optical coupling unit of quantum well long-wave infrared detector grating waveguide micro-cavity
  • Optical coupling unit of quantum well long-wave infrared detector grating waveguide micro-cavity
  • Optical coupling unit of quantum well long-wave infrared detector grating waveguide micro-cavity

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Embodiment 1

[0018] Embodiment 1: The design of the optical coupling unit of the multi-quantum well long-wave infrared detector whose working wavelength is λ=14.5 μm, as shown in the accompanying drawing (1).

[0019] 1. Calculate the refractive index of each layer of the entire dielectric layer according to reference [1] (the dielectric layer is all media between the metal grating and the metal back reflection layer):

[0020] n ( λ ) = A 0 [ f ( x ) + f ( x s 0 ) 2 ( E 0 ...

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Abstract

The invention discloses an optical coupling unit of a quantum well long-wave infrared detector grating waveguide micro-cavity, structurally characterized by adopting an interlayer structure of a metal back reflection layer, a dielectric layer and a metal grating. The optical coupling structure has the advantages that (1) the coupling efficiency of incoming light is improved by adopting a metal array structure; (2) the electric field intensity of a quantum well is greatly improved by limiting an optical field to propagate in a mini space between the metal grating layer and the metal back reflection layer; (3) a vertical electric field component has favorable evenness in a longitudinal direction by adopting a similar microstrip antenna structure; (4) the metal structure is not only an optical coupling unit, but also is used an upper electrode or a lower electrode; and (5) the optical coupling unit is easy to manufacture and suitable for manufacturing photosensor elements with large area arrays.

Description

technical field [0001] The invention relates to a quantum well long-wave infrared detector, in particular to an optical coupling unit of a quantum well long-wave infrared detector grating waveguide microcavity. Background technique [0002] With the development and maturity of microelectronic technology and technology, quantum well infrared detectors are getting more and more attention. Due to the good uniformity of III-V semiconductor materials, mature device manufacturing technology, radiation resistance, and low cost, quantum well infrared detectors based on GaAs / AlGaAs are currently in the third generation with large area arrays and multi-color features. Infrared focal plane technology will have important applications. In terms of long-wave detection, quantum well infrared detectors are one of the strong competitors of traditional mercury cadmium telluride infrared detectors, and are generally favored. However, according to the dipole transition rule of quantum mechani...

Claims

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Application Information

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IPC IPC(8): H01L31/101H01L31/0216H01L31/0224H01L31/18
CPCY02P70/50
Inventor 俞立明王健陆卫王旺平李宁李志锋陈效双王少伟陈平平李天信张波
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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