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156results about How to "Increase modulation bandwidth" patented technology

Thin Layer Photonic Integrated Circuit Based Optical Signal Manipulators

Integrated optical intensity or phase modulators capable of very low modulation voltage, broad modulation bandwidth, low optical power loss for device insertion, and very small device size are of interest. Such modulators can be of electro-optic or electro-absorption type made of an appropriate electro-optic or electro-absorption material in particular or referred to as an active material in general. An efficient optical waveguide structure for achieving high overlapping between the optical beam mode and the active electro-active region leads to reduced modulation voltage. In an embodiment, ultra-low modulation voltage, high-frequency response, and very compact device size are enabled by a semiconductor modulator device structure, together with an active semiconductor material that is an electro-optic or electro-absorption material, that are appropriately doped with carriers to substantially lower the modulator voltage and still maintain the high frequency response. In another embodiment, an efficient optical coupling structure further enables low optical loss. Various embodiments combined enable the modulator to reach lower voltage, higher frequency, low optical loss, and more compact size than previously possible in the prior arts.
Owner:HO SENG TIONG

Optical digital external modulator

An optical digital external modulator having a cascaded arrangement of interferometers is provided. The optical modulator includes an electrode structure for applying an electric field to each interferometer in the cascade and biasing circuitry coupled to the electrode structure for biasing each interferometer at a predetermined bias point. In particular, each predetermined bias point is selected to be above quadrature and for providing improved transmission performance of digital data signals. Preferably, the modulator has a reflective design that helps to increase the modulation bandwidth, lower the drive voltage, and reduce size.
Owner:JDS UNIPHASE CORP

Laser diode and method of manufacture

VCSEL diode comprises a bottom electrode (10), conducting substrate material (11), a bottom mirror (12) formed by a multilayer distributed Bragg reflector (DBR) of certain conductivity and reflectivity RA, and an active region (13) comprising a plurality of layers some of which are quantum wells. It also comprises a top mirror (14) formed by a multilayer distributed Bragg reflector (DBR) with reflectivity RB<RA and conductivity of a second type. There are a number of layers (15, 18) which through a process of selective oxidation (exposure to a high temperature wet atmosphere) may be selectively converted to oxide layers, therefore producing well defined internal oxide apertures within the top mirror. There is a high-conductivity semiconductor top contact layer (17), a top electrode layer (19) with a centrally located aperture from which light is emitted, and a trench (16) which defines a mesa type VCSEL. The VCSEL comprises at least one oxide suppression layer in the top mirror whose function it is to suppress high order transverse optical modes.
Owner:FIRECOMMS

Semiconductor injection locked lasers and method

In one aspect, the invention relates to a semiconductor laser. The laser includes a substrate and an elongate unitary laser structure disposed on the substrate. In turn, the elongate unitary laser structure includes a first laser section, a second laser section, and a plurality of shared layers. The first and second laser sections are capable of lasing independently of each other. The shared layers form both the first laser section and the second laser section. The first laser section is adapted for injection locking the second laser section.
Owner:ARCHCOM TECH

Spatial terahertz wave phase modulator based on high electron mobility transistor

A spatial terahertz wave phase modulator based on the high electron mobility transistor is provided. The phase modulator combines the quick-response high electron mobility transistor with a novel metamaterial resonant structure, so as to rapidly modulate terahertz wave phases in a free space. The phase modulator includes a semiconductor substrate, an HEMT epitaxial layer, a periodical metamaterial resonant structure and a muff-coupling circuit. A concentration of 2-dimensional electron gas in the HEMT epitaxial layer is controlled through loading voltage signals, so as to change an electromagnetic resonation mode of the metamaterial resonant structure, thereby achieving phase modulation of terahertz waves. The phase modulator has a phase modulation depth of over 90 degrees within a large bandwidth, and a maximum phase modulation depth is about 140 degrees. Furthermore, the phase modulator is simple in structure, easy to machine, high in modulation speed, convenient to use, and easy to package.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Light-emitting device having injection-lockable semiconductor ring laser monolithically integrated with master laser

ActiveUS20100034223A1Easy to use in practiceSuppress any optical feedbackLaser detailsLaser optical resonator constructionInjection lockedSemiconductor ring laser
A semiconductor ring laser (SRL) section is monolithically integrated with a DFB or DBR master laser section on a semiconductor substrate of a light-emitting device to provide an injection locking mode of operation that can result in low-cost ultrafast (over 100 GHz) functional chip that will be easy to use in practice.
Owner:STC UNM

Optical A/D converter based on asymmetric Mach-Zehnder modulator

The invention is an optical A / D converter based on nonsymmetrical Mach-Zehnder modulator, belonging to the optical A / D converter technical field, characterized in that: it uses nonsymmetrical M-Z modulator to modulate electric signal to synchronous multi-wavelength input pulse, and selects proper length difference of two arms DeltaL and N wavelengths, able to make offset of DC biasing point between every two adjacent wavelengths at the outgoing end bepi / N, and the modulated multi-wavelength optical pulse is divided into N synchronous optical pulses by wavelength division multiplexer, and after determined by photoelectric detector and comparer, it can obtain N digital signal outputs. And the invention can implement very large modulated bandwidth and accurately control the offset of DC biasing point of two adjacent channels, implementing higher-digit A / D conversion and easy to implement.
Owner:TSINGHUA UNIV

Active area of laser unit, semiconductor laser unit and manufacturing method of laser unit

The invention discloses an active area of a laser unit. The active area comprises a multiple-quantum well structure, wherein a potential well layer in the multiple-quantum well structure is made from InGaAsP, and a barrier layer in the multiple-quantum well structure is made from InGaAlAs; a cycle of the multiple-quantum well structure is K, and K ranges from 3 to 20. Furthermore, the invention discloses a semiconductor laser unit and a manufacturing method of the laser unit, wherein the semiconductor laser unit comprises the active area. The semiconductor laser unit provided by the invention has a lower threshold current and higher characteristic temperature, to realize no-refrigeration work; the laser unit has relatively high differential gain, and can provide a laser output in a Tencent Messenger (TM) mode; the laser unit has a relatively high conduction band order, so as to simultaneously restrict injected carriers effectively and distribute the carriers among wells uniformly and enhance the modulation characteristic of the laser unit.
Owner:苏州市吴中中科育成科技发展有限公司

Light emitting diode and data transmission and reception apparatus

A light emitting diode, including a semiconductor epitaxial structure, a first electrode and a second electrode is provided. The semiconductor epitaxial structure includes a plurality stacked light-emitting layers, and each of the light-emitting layers respectively emits different range of wavelength of light. The first electrode is electrically connected to the semiconductor epitaxial structure. The second electrode is electrically connected to the semiconductor epitaxial structure. Furthermore, a data transmission and reception apparatus is provided.
Owner:SOUTHERN TAIWAN UNIVERSITY OF TECHNOLOGY

Probe actuation

A method of driving a probe of a scanning probe microscope. The intensities of first and second radiation beams are modulated; and the beams are directed simultaneously onto the probe whereby each beam heats the probe and causes the probe to deform, typically by the photothermal effect. The optical system is arranged to direct the centres of the beams onto different locations on the probe. This enables the location of each beam to be chosen to optimise its effect. A lens receives the first and second beams and focuses them onto the probe. A beam combiner is arranged to receive and combine the beams and direct the combined beams towards the probe.
Owner:INFINITESIMA

High-speed VCSEL laser epitaxial structure and preparation method therefor

The invention provides a high-speed VCSEL laser epitaxial structure. The laser epitaxial structure comprises a GaAs substrate; a GaAs buffer layer, an N type doped DBR, an active layer, an oxidization limiting layer, a P type doped DBR and an ohmic contact layer are deposited on the GaAs substrate by adopting MOCVD in sequence; and the oxidization limiting layer is formed by multiple Al<1-x>Ga<x>As epitaxial layers with freely adjustable Ga components, wherein X is the Ga element component. According to the laser epitaxial structure, the multiple layers of Al<1-x>Ga<x>As with certain thickness and jumping components are adopted to form the oxidization limiting layer; and the front-end shape of the oxidization limiting layer can be changed by adjusting the components in each layer of Al<1-x>Ga<x>As, so that a lens structure can be formed at the front end of the oxidization limiting layer, and photon scattering loss can be lowered, thereby improving the modulation bandwidth of the VCSEL. The laser epitaxial structure has the following advantages: 1) by adjusting the ratio of Ga in the oxidization limiting layer, the oxidization rate of the oxidization limiting layer is lowered, the oxidization can be controlled easily, and the product yield of the VCSEL chip is improved; and 2) the oxidization limiting layer is high in thickness and low in intrinsic stray capacitance.
Owner:全磊光电股份有限公司

Flip-chip structure micro-size photonic crystal LED array chip and preparation method thereof

The invention discloses a flip-chip structure micro-size photonic crystal LED array chip and a preparation method thereof. The LED array chip of the invention has four light emitting units connected in parallel, the metal connecting line of the positive electrode and the semiconductor material are separated by a dielectric insulation layer, and the negative electrode is directly covered on the upper surface of the semiconductor material. The active region of the light-emitting unit has a photonic crystal with periodic distribution, and the depth of the photonic crystal exceeds the depth of theactive layer. Except electrode pad, DBR is distributed on the whole chip surface. Metal electrodes form metal mirrors. The preparation method of the invention adopts the scheme that an ohmic contactlayer and an electrode are firstly prepared and then a photonic crystal is etched without planarizing and the like traditional process flow; Using thick strip dielectric insulating layer to insulate the electrode from semiconductor material and thin dielectric mask layer and adhesive mask layer to etch together is conducive to the deposition of DBR and the rapid escape of photon mode. The processflow of the invention is simple and reliable.
Owner:SOUTH CHINA UNIV OF TECH

Method and apparatus for characterization and compensation of optical impairments in InP-based optical transmitter

A method and apparatus for characterizing and compensating optical impairments in an optical transmitter includes operating an optical transmitter comprising a first and second parent MZ, each comprising a plurality of child MZ modulators that are biased at respective initial operating points. An electro-optic RF transfer function is generated for each of the plurality of child MZ modulators. Curve fitting parameters are determined for each of the plurality of electro-optic RF transfer functions and operating points of each child MZ modulator are determined using the curve fitting parameters. An IQ power imbalance is determined using the curve fitting parameters. Initial RF drive power levels are determined that compensate for the determined IQ power imbalance. The XY power imbalance is determined for initial RF drive power levels using the curve fitting parameters. The operating RF drive powers are determined that at least partially compensate for the first and second IQ power imbalances and for the XY power imbalance for the optical transmitter.
Owner:II VI DELAWARE INC

Semiconductor laser-pumped kerr lens mode-locked titanium sapphire laser

The invention discloses a semiconductor laser-pumped kerr lens mode-locked titanium sapphire laser, which comprises first semiconductor lasers, a resonant cavity, an interferometer and a feedback regulation unit, wherein the first semiconductor lasers are used for emitting continuous laser light of blue and green bands to pump titanium sapphire crystal in the resonant cavity; the resonant cavity is used for carrying out oscillating and mode locking on the laser light of near-infrared bands to output femtosecond pulse laser light; the interferometer is used for driving the femtosecond pulse laser light to generate a beat note signal to obtain a carrier-envelope offset frequency; and the feedback regulation unit is used for regulating front and back positions and gradients of end mirrors ofthe resonant cavity and the power of the laser light output by the semiconductor lasers, thereby keeping the stability of a repetition frequency and the carrier-envelope offset frequency. An ultrashort laser light pulse with stable repetition frequency and carrier-envelope offset frequency can be output, and the semiconductor lasers are directly adopted as pumping sources, so that the cost of thelasers is greatly reduced, and the volume of the whole lasers is further reduced.
Owner:HUAZHONG UNIV OF SCI & TECH

Active and passive composite laser holographic radar

An active and passive composite laser holographic radar consists of a laser, a phase modulator, a beam splitter, an RF signal generator, a laser amplifier, a transmitting telescope, a local oscillatorretarder, a receiving telescope, a 2 x 2 180-degree spatial optical bridge, an A-channel CCD detector, a B-channel CCD detector, a control computer and image processing, thereby finally obtaining a target image of high sensitivity and high contrast. The active and passive composite laser holographic radar can realize passive, incoherent and coherent target imaging through active and passive composite applications, and has the capability of working all-weather, simple structure, and the effect of suppressing background light interference, which effectively improves imaging sensitivity, and isparticularly suitable for detecting dark targets at a long distance.
Owner:SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI

Wireless optical communication system based on tunable VCSEL (vertical cavity surface emitting laser)

The embodiment of the invention discloses a wireless optical communication system based on a tunable VCSEL (vertical cavity surface emitting laser), and the system comprises a signal transmitting endand a signal receiving end. The signal transmitting end comprises a tunable VCSEL array and a first optical module, and is set to control the tunable VCSEL array to emit a corresponding laser signal according to an externally inputted electric communication signal, concentrates the laser signal through the first optical module as an optical communication signal and outputs the optical communication signal output to a free space, wherein the optical communication signal includes light of multiple wavelengths. The signal receiving end includes a second optical module, a photoelectric detector and a signal output module, is set to acquire the optical communication signal in the free space through the second optical module, transmits the optical communication signal to the photoelectric detector, converts the optical signal into a current signal through the photoelectric detector, performs the amplification, shaping and filtering of the current signal through a signal output module and then outputs the current signal. According to the technical scheme of the embodiment of the invention, the system can improve the rate and channel capacity of optical communication.
Owner:TSINGHUA BERKELEY SHENZHEN INST

Linear frequency modulation single frequency pulse optical fiber laser device

The invention discloses a linear frequency modulation single frequency pulse optical fiber laser device. The laser device comprises a narrow linewidth seed source, a radio-frequency signal source, an electro-optic modulator driver, a double-parallel phase modulator, an optical fiber beam splitter, an acoustic-optic modulator driver, an acoustic-optic modulator and an optical fiber amplifier. According to the laser device, broadband linear frequency modulation is conducted through the 2*2 MZI structure double-parallel phase modulator, pulse chopping is conducted through the acoustic-optic modulator, and high peak value power output is achieved through the optical fiber amplifier. The laser device has the advantages of being high in peak value power, large in modulation bandwidth, high in modulation speed, high in modulation linearity, simple in structure, capable of achieving the all-fiber laser, safe to human eyes, capable of achieving linear polarization output and capable of satisfying the application requirements of a remote high resolution distance measurement and velocity measurement laser radar for the laser source and can be applied to such fields as remote coherent distance measurement, synthetic aperture / retro-synthetic aperture laser radars and space situation awareness.
Owner:CHENGDU UNIV OF INFORMATION TECH

Differential drive semiconductor optical modulator

A differential drive semiconductor optical modulator includes: a differential driver circuit having output pads which can output a pair of differential signals; a transmission-line substrate having transmission lines connected to the output pads and ground lines; and semiconductor modulators mounted on the transmission-line substrate, arranged in series along a common optical axis; terminal resistors connected to terminal ends of the transmission lines and inductances interposed between the semiconductor modulators and the terminal resistors, on the transmission-line substrate, producing an appropriate optical modulation waveform with a high extinction ratio and enhanced modulation bandwidth.
Owner:MITSUBISHI ELECTRIC CORP

High-speed modulator

PendingCN112904599AReduce half wave voltageLong Phase Shift Waveguide LengthNon-linear opticsPhase shiftedCoplanar waveguide
The present invention discloses a high-speed modulator which comprises an optical waveguide structure and a traveling wave electrode structure, the optical waveguide structure comprises a first optical waveguide arm and a second optical waveguide arm, a traveling wave electrode comprises a grounding electrode and a signal line, and the signal line applies electric fields or voltages in opposite directions to the first optical waveguide arm and the second optical waveguide arm. The first optical waveguide arm and the second optical waveguide arm are both of a folding structure, and the signal line is folded along with the first optical waveguide arm and the second optical waveguide arm, so that an electric field or voltage applied to the first optical waveguide arm and the second optical waveguide arm is kept unchanged. Or the electric field or the voltage applied to the first optical waveguide arm and the second optical waveguide arm is synchronously changed. Compared with the prior art, the device has the advantages that the folding structure of the optical waveguide is matched with the ground-signal-ground coplanar waveguide traveling wave electrode structure, modulation addition of light in different sections of the waveguide is achieved, the longer phase shift waveguide length can be achieved within the limited device length, and meanwhile it can be ensured that the bandwidth meets the application requirement.
Owner:HUAZHONG UNIV OF SCI & TECH

Broadband efficient GaN-based LED chip based on surface plasma effect and preparation method thereof

The invention discloses a broadband efficient GaN-based LED chip based on surface plasma effect and a preparation method thereof. The broadband efficient GaN-based LED chip is an inversion structure, and successively comprises a substrate, a buffer layer, an unintentional doping GaN layer, a n-GaN layer, a quantum well layer, an electronic barrier layer, a p-GaN layer, a metal reflector layer, a passivation layer, a p-electrode layer, a n-electrode layer, a p-electrode hole and a n-electrode hole from bottom to top. The bottom face, connected with the surface of the p-GaN layer, of the metal reflector layer is provided with a micron-nano compound metal structure. The micron metal structure comprises alternately installed bulge part and groove part. The bulge part is extended to the adjacent place of the quantum well, and the efficient SP-MQW coupling is realized. The p-GaN surface is covered by the groove part, so the p-GaN layer has enough thickness for injecting the hole. The nano-metal structure is distributed on the division surface of the micron-metal structure and the p-GaN.
Owner:SOUTH CHINA UNIV OF TECH

Electro-optical modulating method and device for transmission light based on tri-step electro-optical materials

A device for carrying out electro optical modulation on transmission light based on third order electro optical material consists of coupled prism, metal top electrode, third order organic polymer guide wave layer, modulator formed by isolation layer and metal bottom electrode, and input matching circuit .It is featured as exerting a larger DC bias voltage and a smaller modulation input signal simultaneously on third order organic polymer guide wave layer through input matching circuit to change refractivity of said guide wave layer and so as to change reflectivity at operation angle for realizing modulation on intensity reflection light .
Owner:SHANGHAI JIAO TONG UNIV

Silicon-based lithium niobate film electro-optic modulator array and integration method thereof

Integration method of a large-scale silicon-based lithium niobate film electro-optic modulator array. By using the method, the difficulty of a fabrication process of a lithium niobate crystal layer is reduced, requirements on precision of bonding lithium niobate and silicon is reduced, and fabrication and bonding of the large-scale array lithium niobate crystal layer can be completed at one time, so that production efficiency of the silicon-based lithium niobate film electro-optic modulator array is greatly improved; through design and optimization of the structure of the silicon crystal layers, light can be naturally alternated and mutually transmitted in silicon waveguides and lithium niobate waveguides, and a high-performance electro-optic modulation effect of the lithium niobate film is achieved.
Owner:SHANGHAI JIAO TONG UNIV

Segmented modulation structure, laser and manufacturing method thereof

The invention provides a segmented modulation structure, a laser and a manufacturing method thereof, and relates to the technical field of semiconductors and communication. The segmented modulation structure comprises an epitaxial substrate and a segmented P-face electrode manufactured on the epitaxial substrate. The segmented P-face electrode comprises a first electrode and a second electrode which are arranged at an interval, and an area between the first electrode and the epitaxial substrate is a DC modulation area; the first electrode is used for the input of a constant direct current, andan area between the second electrode and the epitaxial substrate is an AC modulation area; and the second electrode is used for the input of a signal AC modulation current. Thus, the volume of the ACmodulation cavity can be reduced, the modulation bandwidth is improved, and high-speed modulation is realized so as to be suitable for high-speed transmission. Meanwhile, the difference between a 0 signal current and a 1 signal current of the modulation region is reduced, and the chirp of the optical frequency can be reduced, so that the dispersion of an optical signal in an optical fiber transmission process is smaller, the requirement of long-distance communication can be met, the process is simple, and the manufacturing yield is high.
Owner:XIAMEN SANAN INTEGRATED CIRCUIT

Lithium niobite membrane QPSK light modulator and manufacturing method thereof

The invention discloses a lithium niobite membrane QPSK light modulator and a manufacturing method thereof. The light modulator includes a quartz base wafer, lithium niobite membrane, an optical waveguide, a metal membrane electrode and a metallically-packed pipe shell. The method has the following advantages that 1, the length of the crooked waveguide and a traveling wave electrode is shortened,a direct current offset compensation electrode is removed, and the miniaturization of the lithium niobite QPSK light modulator is achieved; 2, a quartz material with a low dielectric constant is adopted as the base wafer of a lithium niobite single crystal membrane, great matching of the microwave refractive index and the optical wave refractive index is achieved, and the modulation bandwidth of the lithium niobite QPSK light modulator is increased; 3, since the direct current offset compensation electrode is removed, the signal processing complexity of the lithium niobite QPSK light modulatoris lowered; 4, the utilization rate of a lithium niobite membrane wafer is increased, and the manufacturing cost of the lithium niobite QPSK light modulator is reduced.
Owner:天津领芯科技发展有限公司

Silicon/PLZT hybrid waveguide-based Mach-Zehnder electro-optical modulator

The invention discloses a loading strip-structure silicon / PLZT hybrid waveguide-based Mach-Zehnder electro-optical modulator. The silicon / PLZT hybrid waveguide-based Mach-Zehnder electro-optical modulator comprises a waveguide, an MMI-based Mach-Zehnder interference structure and a coplanar waveguide electrode structure, wherein the waveguide comprises a silicon core layer, a ferroelectric thin film lower coating layer and a silicon dioxide upper coating layer, and the coplanar waveguide electrode structure is designed in order to achieve high-speed electro-optical modulation. The modulator sequentially comprises a coplanar waveguide electrode, the silicon dioxide upper coating layer, a silicon waveguide layer, a PLZT lower coating layer and an NST substrate from top to bottom, wherein thecoplanar electrode can be used for loading a radio frequency signal and loading the radio frequency signal to an optical wave to achieve electro-optical modulation. By the silicon / PLZT hybrid waveguide-based Mach-Zehnder electro-optical modulator, high modulation depth, low transmission loss and high modulation bandwidth can be achieved, and the silicon / PLZT hybrid waveguide-based Mach-Zehnder electro-optical modulator can be applied to an integrated high-speed microwave optical network.
Owner:SOUTHEAST UNIV

Data processing method for THz-grade large-bandwidth laser synthetic aperture radar imaging system

The invention discloses a data processing method for a THz-grade large-bandwidth laser synthetic aperture radar imaging system, which is composed of a linear tuning semiconductor, a 99:1 optical fiber coupler, a 90:10 optical fiber coupler, an emission collimating lens, a polarized beam splitter, a lambda / 4 wave plate, a target displacement platform, a receiving collimating mirror, four 50:50 optical fiber couplers, two balancing detectors, a reference time delay optical fiber, a molecular wavelength reference device, an optical power meter, a data acquisition module and a data processing program module. The laser synthetic aperture radar imaging system disclosed by the invention is based on a large-range linear tuning laser pulse signal; and a target two-dimensional image is calculated according to the homodyne coherent detection technology, the balance detection technology, the synthetic aperture technology and the final special data processing procedure. The system has the advantages of short laser signal wavelength, large bandwidth, high imaging resolution, all-weather characteristic, high stability, simple structure, high detection sensitivity and long acting distance, and most of the system is based on the optical fiber device.
Owner:SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI

Terahertz wave modulating device with light control flat panel silicon photonic crystal and method thereof

The invention discloses a terahertz wave modulating device with light control flat panel silicon photonic crystal and a method thereof. The terahertz wave modulating device comprises a silicon chip, air holes, a modulated semiconductor laser, a terahertz wave source, an input end of a linear defect area, an output end of the linear defect area, and the linear defect area; the middle of the silicon chip is provided with the linear defect area; the silicon chip on two sides of the linear defect area is provided with the air holes; the silicon chip, the air holes and the linear defect area form the flat panel silicon photonic crystal; the modulated semiconductor laser is arranged above the linear defect area; and terahertz waves emitted by the terahertz wave source are input from the input end of the linear defect area, pass through the linear defect area, and are output from the output end of the linear defect area. The edge of a forbidden band of the flat panel silicon photonic crystal modulates the terahertz waves to realize load signals onto the terahertz waves. The terahertz wave modulating device has the advantages of low transmission loss, large modulation bandwidth, quick modulation speed, high extinction ratio, small size, compact structure, and convenient integration, and meets the communication requirement of the terahertz waves.
Owner:CHINA JILIANG UNIV

Single-mode high-speed modulation Fabry-Perot semiconductor laser based on coupled cavity

The invention discloses a single-mode high-speed modulation Fabry-Perot semiconductor laser based on a coupled cavity, and the laser comprises a tube core which is in a stacked structure and comprises a lower electrode; a lower contact layer which is disposed on the lower electrode; and an N-type substrate which is disposed on the lower contact layer. The N-type substrate is divided into two parts: a Fabry-Perot type miniature cavity and an echo-wall type miniature cavity. The Fabry-Perot type miniature cavity is disposed on the N-type substrate, wherein one end of the Fabry-Perot type miniature cavity is aligned with one end of the N-type substrate. The echo-wall type miniature cavity is disposed on the N-type substrate, and is located at the other end of the Fabry-Perot type miniature cavity. The Fabry-Perot type miniature cavity and the echo-wall type miniature cavity have the same stacked structure. According to the invention, the high-power Fabry-Perot type miniature cavity and the single-mode high-speed modulation echo-wall type miniature cavity are combined together, and the mode coupling between the two cavities is adjusted so as to adjust the equivalent reflectivity of the Fabry-Perot type miniature cavity, thereby achieving high-power, single-mode lasing and better high-speed modulation characteristics.
Owner:INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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