Silicon/PLZT hybrid waveguide-based Mach-Zehnder electro-optical modulator
An electro-optical modulator and hybrid wave technology, applied in instruments, optics, nonlinear optics, etc., can solve the problems of high modulation efficiency, large transmission loss, low transmission loss, etc., and achieve low half-wave voltage and fast response speed. , the effect of large half-wave bandwidth
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[0025] Embodiments of the present invention will be described below in conjunction with the accompanying drawings.
[0026] like figure 1 The present invention designs a MZI electro-optic modulator based on a silicon / PLZT hybrid waveguide, and its waveguide structure is composed of a silicon core layer, a PLZT lower cladding layer, and a silicon dioxide upper cladding layer. The refractive index of silicon is 3.42, and that of PLZT is 2.43. The size of the silicon core layer calculated by the planar waveguide theory is 800nm long and 220nm high. The single-mode waveguide can ensure that only one mode is passed on in the waveguide, and the transmission loss and dispersion are small. figure 2 It can be seen from the light field energy distribution diagram that most of the light energy is bound in the silicon core layer. Because the lower cladding is the electro-optic material PLZT, which has spontaneous planning, it has a relatively obvious electro-optic effect. Under the a...
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