Silicon/PLZT hybrid waveguide-based Mach-Zehnder electro-optical modulator

An electro-optical modulator and hybrid wave technology, applied in instruments, optics, nonlinear optics, etc., can solve the problems of high modulation efficiency, large transmission loss, low transmission loss, etc., and achieve low half-wave voltage and fast response speed. , the effect of large half-wave bandwidth

Inactive Publication Date: 2019-10-08
SOUTHEAST UNIV
View PDF8 Cites 7 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to propose a Mach-Zehnder electro-optic modulation based on a silicon / PLZT hybrid waveguide to solve the problem of the small optical coefficient of silicon waveguide and the large transmission loss caused by PLZT etching, so as to solve the problem of existing optical modulators. Unable to guarantee high modulation efficiency and low transmission loss

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Silicon/PLZT hybrid waveguide-based Mach-Zehnder electro-optical modulator
  • Silicon/PLZT hybrid waveguide-based Mach-Zehnder electro-optical modulator
  • Silicon/PLZT hybrid waveguide-based Mach-Zehnder electro-optical modulator

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0025] Embodiments of the present invention will be described below in conjunction with the accompanying drawings.

[0026] like figure 1 The present invention designs a MZI electro-optic modulator based on a silicon / PLZT hybrid waveguide, and its waveguide structure is composed of a silicon core layer, a PLZT lower cladding layer, and a silicon dioxide upper cladding layer. The refractive index of silicon is 3.42, and that of PLZT is 2.43. The size of the silicon core layer calculated by the planar waveguide theory is 800nm ​​long and 220nm high. The single-mode waveguide can ensure that only one mode is passed on in the waveguide, and the transmission loss and dispersion are small. figure 2 It can be seen from the light field energy distribution diagram that most of the light energy is bound in the silicon core layer. Because the lower cladding is the electro-optic material PLZT, which has spontaneous planning, it has a relatively obvious electro-optic effect. Under the a...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
widthaaaaaaaaaa
refractive indexaaaaaaaaaa
Login to view more

Abstract

The invention discloses a loading strip-structure silicon/PLZT hybrid waveguide-based Mach-Zehnder electro-optical modulator. The silicon/PLZT hybrid waveguide-based Mach-Zehnder electro-optical modulator comprises a waveguide, an MMI-based Mach-Zehnder interference structure and a coplanar waveguide electrode structure, wherein the waveguide comprises a silicon core layer, a ferroelectric thin film lower coating layer and a silicon dioxide upper coating layer, and the coplanar waveguide electrode structure is designed in order to achieve high-speed electro-optical modulation. The modulator sequentially comprises a coplanar waveguide electrode, the silicon dioxide upper coating layer, a silicon waveguide layer, a PLZT lower coating layer and an NST substrate from top to bottom, wherein thecoplanar electrode can be used for loading a radio frequency signal and loading the radio frequency signal to an optical wave to achieve electro-optical modulation. By the silicon/PLZT hybrid waveguide-based Mach-Zehnder electro-optical modulator, high modulation depth, low transmission loss and high modulation bandwidth can be achieved, and the silicon/PLZT hybrid waveguide-based Mach-Zehnder electro-optical modulator can be applied to an integrated high-speed microwave optical network.

Description

technical field [0001] The invention relates to a Mach-Zehnder electro-optic modulation technology based on a silicon / PLZT hybrid waveguide, and belongs to the technical field of electro-optic modulators for novel electro-optic materials. [0002] technical background [0003] Optical modulators are key to high-speed, short-distance optical communications. At present, optical modulators are developing towards higher speed, wider bandwidth, smaller device size and integration. Traditional modulators can no longer keep up with the development of optical fiber communication. Research to develop new modulators is imminent. [0004] Silicon waveguides have the advantage of being compatible with complementary metal-oxide-semiconductor (CMOS) processes, making them promising for high-speed and low-cost optical devices. Typical silicon optical modulator structures include Mach-Zehnder interferometer (MZI), micro-ring resonator (WRR), etc. MZI is widely used in SOI (Silicon on Insul...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/035G02F1/21
CPCG02F1/035G02F1/21G02F1/212
Inventor 胡国华田东晓恽斌峰张若虎崔一平
Owner SOUTHEAST UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap