The invention relates to the technical field of integrated modulators, in particular to a single-mode
laser based on heterogeneous integration and a manufacturing method thereof.The single-mode
laser based on heterogeneous integration comprises a thin-film
lithium niobate layer, a narrow-band Bragg
grating, a
broadband Bragg
grating and a
waveguide structure are arranged on the thin-film
lithium niobate layer, the 3dB bandwidth of the narrow-band Bragg
grating is smaller than 1 nm, and the bandwidth of the
broadband Bragg grating is smaller than 1 nm. The
reflectivity is greater than 50%, the 3dB reflection bandwidth of the
broadband Bragg grating is greater than 40nm, and the
reflectivity is greater than 95%; and the III-V group
semiconductor material layer is provided with a P
contact layer, a
quantum well layer, a P-InP
waveguide structure, an N-InP
waveguide structure, a P
electrode and an N
electrode. The manufacturing method of the single-mode
laser based on heterogeneous integration comprises the following steps: forming a broadband Bragg grating, a
narrowband Bragg grating and a waveguide structure on a thin-film
lithium niobate layer; and manufacturing a P
contact layer, a
quantum well layer, a P-InP waveguide structure, an N-InP waveguide structure, a P
electrode and an N electrode on the III-V group
semiconductor material layer. According to the invention, the problem of low integration level caused by a
hybrid integration mode is solved.