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Single-mode laser based on high-order surface gratings

A technology of surface gratings and lasers, applied in lasers, laser components, semiconductor lasers, etc., can solve problems such as unfavorable practical applications and complex electrical control systems of lasers, and achieve precise control, good single-mode characteristics, and simplified process flow Effect

Active Publication Date: 2016-08-03
HUAZHONG UNIV OF SCI & TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this multi-electrode structure complicates the electrical control system of the laser, which is not conducive to its practical application

Method used

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  • Single-mode laser based on high-order surface gratings
  • Single-mode laser based on high-order surface gratings
  • Single-mode laser based on high-order surface gratings

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Embodiment Construction

[0032] Such as figure 1 As shown, the single-mode laser based on the high-order surface grating of the present invention is a ridge waveguide structure, and the horizontal direction includes an electrode contact layer 1, a cover layer 2, an etching stop layer 3, an upper optical confinement layer 4, and a quantum well layer. 5. The lower optical confinement layer 6 and the substrate 7, wherein the upper optical confinement layer 4, the quantum well layer 5 and the lower optical confinement layer 6 constitute a waveguide core layer. A high-order Bragg grating 8 with a narrow groove width is etched on the surface of the ridge region near the output end of the laser, and the end face is coated with an anti-reflection film 9 ; the other end face of the laser is etched deeply to form 10 .

[0033] The grating is a Bragg reflection grating, and its period Λ is calculated according to the following formula:

[0034] Λ = m ...

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Abstract

The invention discloses a single-mode laser based on high-order surface gratings. The laser is of a ridge waveguide structure, and comprises a covering layer, a core layer and a substrate in a transverse direction. Narrow-groove-width high-order Bragg gratings are etched on a front segment ridge waveguide surface close to the output end of the laser, the etching depth of the group of gratings does not penetrate through the core layer, and optical feedback of the laser at the output end is provided; and a rear segment ridge waveguide of the other end of the laser does not contain gratings, an end face of the end is a deeply-etched interface, and optical feedback of the laser at the end is provided. The single-mode laser does not need secondary epitaxial growth of a material, and the manufacturing process is simple and convenient, thereby reducing the manufacturing cost of a device, and improving the reliability of the device; through introduction of the narrow-groove-width high-order surface gratings, radiation loss of the gratings is reduced, and laser performance is improved; and the laser rear end face formed by a deep etching method is easy to accurately position, the problem that the cavity length is indeterminate which is generated due to cleavage of an end face is avoided, and the laser is guaranteed to have good single-mode characteristics.

Description

technical field [0001] The invention relates to the technical field of semiconductor lasers, in particular to a single-mode laser based on high-order surface gratings. Background technique [0002] Single-mode semiconductor lasers are widely used in the fields of optical communication and optical detection. The traditional single-mode semiconductor laser is a distributed feedback (Distributed Feedback, DFB) laser (Bissessur, H, Starck, C, Emery, J.-Y, et al. Verynarrow-linewidth (70kHz) 1.55μmstrainedMQWDFBlasers [J]. Electronics Letters, 1992, 28 ( 11): 998-999.). Such lasers usually use a first-order Bragg (Bragg) grating to provide feedback. In order to reduce the difficulty of grating fabrication, these gratings are usually etched in the optical confinement layer very close to the active layer of the laser and buried by regrowth, so the fabrication process usually includes one or more material regrowth processes. This material regrowth process usually complicates the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S5/125
CPCH01S5/125
Inventor 陆巧银孙伟国伟华
Owner HUAZHONG UNIV OF SCI & TECH
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