The invention relates to a
nitrogen-containing polar blue-violet LED
chip with a polarization-induced p-type
doping layer and a preparation method, and belongs to the technical field of semiconductorlight emitting devices. The
nitrogen-containing polar blue-violet LED
chip is composed of a (0001) surface
sapphire substrate, a low-temperature GaN buffer layer, a
nitrogen-containing polar GaN template layer, an n-GaN
electron injecting layer, a multi-
quantum well
active layer and a polarization-induced p-type
doping hole injecting layer, the nitrogen-containing polar GaN template layer is inside provided with a SiNx
mask layer, the polarization-induced p-type
doping hole injecting layer is provided with a p
electrode, and the n-GaN
electron injecting layer has a bare bench, and an n
electrode is arranged on the bare bench. According to the invention, the beveled
sapphire substrate is improved, and the
crystal quality and the surface evenness of an epitaxial
wafer are improved; the SiNxmask layer is inserted into the nitrogen-containing polar GaN template layer in an in-situ manner,
dislocation is effectively blocked, the concentration of
unintentional doping is reduced, and the internal
quantum efficiency is improved; Mg-doped AlGaN of which the Al component is linearly increased is employed to make the polarization-induced p-type doping hole injecting layer, the hole concentration is increased, the
electron injecting efficiency is improved.