Broadband efficient GaN-based LED chip based on surface plasma effect and preparation method thereof

A surface plasmon and LED chip technology, applied in semiconductor devices, electrical components, nanotechnology, etc., can solve problems such as reducing composite life, and achieve the effects of improving current density, reducing loss, and improving modulation bandwidth
CN106784221AActive Publication Date: 2017-05-31SOUTH CHINA UNIV OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SOUTH CHINA UNIV OF TECH
Publication Date
2017-05-31

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Abstract

The invention discloses a broadband efficient GaN-based LED chip based on surface plasma effect and a preparation method thereof. The broadband efficient GaN-based LED chip is an inversion structure, and successively comprises a substrate, a buffer layer, an unintentional doping GaN layer, a n-GaN layer, a quantum well layer, an electronic barrier layer, a p-GaN layer, a metal reflector layer, a passivation layer, a p-electrode layer, a n-electrode layer, a p-electrode hole and a n-electrode hole from bottom to top. The bottom face, connected with the surface of the p-GaN layer, of the metal reflector layer is provided with a micron-nano compound metal structure. The micron metal structure comprises alternately installed bulge part and groove part. The bulge part is extended to the adjacent place of the quantum well, and the efficient SP-MQW coupling is realized. The p-GaN surface is covered by the groove part, so the p-GaN layer has enough thickness for injecting the hole. The nano-metal structure is distributed on the division surface of the micron-metal structure and the p-GaN.
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Description

technical field

[0001] The invention relates to the field of GaN-based LED chips for visible light communication, in particular to a wide-band and high-efficiency GaN-based LED chip based on the surface plasmon effect and a preparation method thereof. Background technique

[0002] Visible light communication uses high-speed blinking LEDs as a signal source. When the flickering frequency of the LED exceeds the response limit of the human eye, the signal source can be used as a light source in lighting, display, backlight and other fields at the same time. With the wide application of LEDs in the above fields, LED chips with high luminous efficiency and high modulation bandwidth, which have both the functions of light source and signal source, have become a research hotspot.

[0003] The modulation bandwidth of the LED chip is mainly affected by the recombination lifetime of minority carriers in the active region and the RC bandwidth, where R and C are the equivalent resistan...

Claims

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