The invention discloses an electro-
optical modulator and a preparation method thereof, and belongs to the technical field of modulators, and the electro-
optical modulator comprises a substrate, a
waveguide structure, an aluminum
oxide protection layer, a multi-layer
capacitor structure, a first
electrode and a second
electrode. The
waveguide structure is arranged on the substrate, and the multi-layer
capacitor structure is arranged above the
waveguide structure from bottom to top; each layer of
capacitor structure comprises two pieces of
graphene and a
dielectric layer, the two pieces of
graphene are located on the upper surface and the lower surface of the
dielectric layer respectively, and the two pieces of
graphene are connected through a first
electrode and a second electrode respectively, so that a parallel connection structure of the multiple
layers of capacitor structures is achieved, and the larger the number of
layers of the capacitor structures is, the larger the
light modulation depth is. According to the electro-
optical modulator, the modulation depth can be remarkably improved, optical modulation can be better achieved, high-performance indexes such as modulation depth, high speed,
broadband and low
power consumption are better considered, the electro-optical modulator can be applied to the fields of
optical communication, ultrafast
laser and optical
information processing, and the application range is wider.