Absorption-type optical modulator structure based on ITO material

An optical modulator and absorption type technology, applied in the field of optoelectronics, to achieve the effects of reducing device size, simple waveguide structure design, and simple manufacturing process

Inactive Publication Date: 2016-06-15
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] Just as in the above-mentioned existing optical modulators, there are difficult problems that need to be compromised in the design of optical modulation depth, insertion loss, device size, etc., which is a technical problem that those skilled in the art need to solve urgently

Method used

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  • Absorption-type optical modulator structure based on ITO material
  • Absorption-type optical modulator structure based on ITO material
  • Absorption-type optical modulator structure based on ITO material

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Embodiment

[0032] The schematic diagram of the three-dimensional structure of the absorbing optical modulator based on the ITO material in this embodiment is as follows figure 1 As shown; the light wave with a wavelength of 1.55 μm is used, the first optical waveguide layer, the first optical waveguide layer has a trapezoidal structure, the ITO layer, HfO 2 The isolation layer and the second optical waveguide layer sequentially cover the first optical waveguide layer. The material of the base layer is SiO 2 , the materials of the first optical waveguide layer and the second optical waveguide layer are both Si, the length of the lower base of the trapezoidal structure of the first optical waveguide layer is 0.3 μm, the length of the upper base is 0.2 μm, and the height is 0.17 μm; The surface has a rectangular structure with a height of 0.17 μm and a width of 0.3 μm, HfO 2 The thickness of the isolation layer was 5 nm.

[0033] figure 1 It is a schematic diagram of a three-dimensional...

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Abstract

The invention discloses an absorption-type optical modulator structure based on an ITO material. The absorption-type optical modulator structure based on the ITO material is high in modulation depth, high in extinction ratio, small in size, low in insertion loss, low in power consumption and high in velocity. The absorption-type optical modulator structure comprises a base layer (1), a first optical wave guide layer (2) which is of a trapezoid structure is arranged on the base layer (1), and an ITO layer (4), a HfO2 isolation layer (5) and a second optical wave guide layer (3) are sequentially arranged on the first optical wave guide layer (2); the absorption-type optical modulator structure based on the ITO material is used for a photon integration and optical fiber communication system.

Description

technical field [0001] The invention belongs to the field of optoelectronic technology and relates to a light modulator, in particular to an absorption type light modulator structure based on ITO material. Background technique [0002] The optical modulator is a module that transfers electrical signals to optical signals and sends them into optical fibers for transmission. It is one of the key components in optical fiber communication systems. It has a wide range of applications in the fields of short pulse generation, signal demultiplexing, data encoding, optical interconnection, wavelength switching, optical add-drop multiplexing, etc. It is one of the core devices of future high-speed optical communication systems and has extremely broad applications. space. In recent years, with the explosive growth of data communication services, people's demand for bandwidth is getting higher and higher, which makes the miniaturization, integration, low power consumption, and high-spe...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/01
CPCG02F1/0115
Inventor 刘永夏瑞杰叶胜威袁飞陆荣国张雅丽
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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