Manufacture method of bi-distributed feedback laser double-amplifier based on gamma waveguide

Abstract

The invention discloses a manufacture method of a bi-distributed feedback laser double-amplifier based on gamma waveguide, comprising the steps of manufacturing an InP buffer layer, a lower waveguide layer, a multiple quantum well active area, an upper waveguide layer and a grating layer on an N-type indium phosphide substrate in extension and in sequence; manufacturing a passive waveguide area and an active waveguide area on the other side; manufacturing a grating; manufacturing a grating cover layer, a light limitation layer and an electric contact layer on the active waveguide area and on the passive waveguide area in extension and in sequence; etching a gamma-type ridge waveguide downward on the electric contact layer; growing a silicon dioxide insulation layer on the top of the grating and on the surface of the gamma-type ridge waveguide; etching the silicon dioxide insulation layer on the surface of the gamma-type ridge waveguide; manufacturing a first electric isolation groove between the two arms of the gamma-type ridge waveguide on the active waveguide area, and manufacturing a second electric isolation groove between the DFB area and the SOA area on the active waveguide area; manufacturing P electrodes on the two sides of the first electric isolation groove and on the two sides of the second electric isolation groove; reducing the thickness of the N-type indium phosphide substrate; and manufacturing an N-side electrode below the N-type indium phosphide substrate after reducing the thickness to complete the manufacture of the amplifier.

Description

technical field

[0001] The invention relates to the field of optoelectronic devices, in particular to a method for manufacturing a Y-waveguide-based double-distributed feedback laser + a double amplifier. Background technique

[0002] The basic components of a multi-segment self-pulsating laser are two distributed feedback lasers, which are tuned by current or using gratings with different Bragg wavelengths. The emission wavelengths of the two lasers have a shift of about several nanometers. When the laser light emitted by the self-pulsation laser is irradiated on the detector, a self-pulsation signal with a frequency equal to the difference between the emission frequencies of the two distributed feedback lasers will be generated. Compared with other forms of laser-based clock recovery devices, multi-segment self-pulsating lasers have the advantage of compact structure, and at the same time, their self-pulsation frequency can be flexibly adjusted in a wide range by injection...

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