Blue light band asymmetric metamaterial polarization modulator and manufacturing method thereof

An asymmetric and metamaterial technology, applied in polarizing elements, optics, instruments, etc., can solve the problems of large metal absorption, low transmittance, and unstable properties, and achieve the effect of improving polarization conversion efficiency

Active Publication Date: 2020-08-28
WUHAN UNIV OF TECH
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Problems solved by technology

[0007] The purpose of the present invention is to address the above technical problems, to provide a blue light band asymmetric metamaterial polarization modulator and its manufacturing method, the present invention can solve the problem of small transmit

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  • Blue light band asymmetric metamaterial polarization modulator and manufacturing method thereof
  • Blue light band asymmetric metamaterial polarization modulator and manufacturing method thereof
  • Blue light band asymmetric metamaterial polarization modulator and manufacturing method thereof

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Embodiment Construction

[0022] Below in conjunction with accompanying drawing and embodiment the present invention is described in further detail:

[0023] In the metasurface polarization modulator of the present invention, it is the patterned high refractive index dielectric material polarization conversion layer 3 with anisotropic structure, the first metal grating layer 1 and the second metal grating layer 5 that really play a role in polarization conversion In addition to the function of analyzing the polarization, it forms an F-P-like cavity with the patterned high-refractive index dielectric material polarization conversion layer 3, and the layers are not simply linearly superimposed, and their effects There will be coupling between them; although the thickness of the first low-refractive index dielectric material layer 2 and the second low-refractive index dielectric material layer 4 is sub-wavelength, the multiple reflections of electromagnetic waves on the metamaterial interface will introduc...

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Abstract

The invention discloses a blue light band asymmetric metamaterial polarization modulator. A second metal grating layer is prepared on the top surface of a silicon-based layer through an electron beamevaporation deposition method and an electron beam etching process; a second low-refractive-index dielectric material layer is prepared on the top surface of the second metal grating layer through anelectron beam evaporation deposition method; a graphical high-refractive-index dielectric material polarization conversion layer is prepared on the top surface of the second low-refractive-index dielectric material layer through an electron beam evaporation deposition method and an electron beam etching process; a first low-refractive-index dielectric material layer is formed on the top surface ofthe patterned high-refractive-index dielectric material polarization conversion layer through an electron beam evaporation deposition method, and a first metal grating layer is formed on the top surface of the first low-refractive-index dielectric material layer through the electron beam evaporation deposition method and an electron beam etching process; according to the invention, the problems of low transmissivity and low polarization conversion rate can be solved, and the device can also realize a bidirectional asymmetric transmission function.

Description

technical field [0001] The invention belongs to the technical field of micro-nano optics application, and in particular relates to a blue-ray band asymmetric metamaterial polarization regulator and a manufacturing method thereof. [0002] technical background [0003] Polarization state is one of the important characteristic parameters of electromagnetic waves. As early as 1808, Marius discovered the polarization of light in experiments. Polarization is one of the important characteristic parameters of transverse electromagnetic waves. The regulation of the polarization state of electromagnetic waves has positive and potential significance in many fields such as polarization imaging detection, quantum communication, and biomolecular detection. Polarization control is achieved by means of metamaterials, among which anisotropic metamaterials or chiral structures without mirror symmetry have excellent performance and application prospects. For example, the selection of the pol...

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Application Information

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IPC IPC(8): G02B5/30G02B27/28
CPCG02B5/30G02B27/286
Inventor 杜庆国陈志伟李政颖任芳芳
Owner WUHAN UNIV OF TECH
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