Blue light band asymmetric metamaterial polarization modulator and manufacturing method thereof

Abstract

The invention discloses a blue light band asymmetric metamaterial polarization modulator, the top surface of the silicon base layer is prepared by electron beam evaporation deposition and electron beam etching process to prepare the second metal grating layer, the top surface of the second metal grating layer The second low refractive index dielectric material layer is prepared by electron beam evaporation deposition, and the patterned high refractive index dielectric material is prepared by electron beam evaporation deposition and electron beam etching process on the top surface of the second low refractive index dielectric material layer. Material polarization conversion layer, the top surface of the patterned high refractive index dielectric material polarization conversion layer is prepared by an electron beam evaporation deposition method to prepare the first low refractive index dielectric material layer, and the top surface of the first low refractive index dielectric material layer is passed The first metal grating layer is prepared by an electron beam evaporation deposition method and an electron beam etching process; the invention can solve the problems of low transmittance and low polarization conversion rate, and at the same time, the device can also realize the function of bidirectional asymmetric transmission.

Description

technical field [0001] The invention belongs to the technical field of micro-nano optics application, and in particular relates to a blue-ray band asymmetric metamaterial polarization regulator and a manufacturing method thereof. [0002] technical background [0003] Polarization state is one of the important characteristic parameters of electromagnetic waves. As early as 1808, Marius discovered the polarization of light in experiments. Polarization is one of the important characteristic parameters of transverse electromagnetic waves. The regulation of the polarization state of electromagnetic waves has positive and potential significance in many fields such as polarization imaging detection, quantum communication, and biomolecular detection. Polarization control is achieved by means of metamaterials, among which anisotropic metamaterials or chiral structures without mirror symmetry have excellent performance and application prospects. For example, the selection of the pol...

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to address the above technical problems, to provide a blue light band asymmetric metamaterial polarization modulator and its manufacturing method, the present invention can solve the problem of small transmittance (in the blue light band, the absorption of metal is relatively large, and the property is unstable), The problem of low polarization conversion rate, at the same time, the device can also realize the function of bidirectional asymmetric transmission

Images