Scanning electron microscope and image processing methods
Patent Information
- Application Number
- DE602019064197
- Authority / Receiving Office
- DE · DE
- Patent Type
- Patents
- Current Assignee / Owner
- Priority Date
- 2018-11-15
- Filing Date
- 2019-11-15
- Publication Date
- 2025-01-01
- Estimated Expiration
- 2039-11-15
AI Technical Summary
Scanning electron microscopes with optical imaging capabilities face challenges in maintaining marker visibility across varying magnifications, making it difficult to accurately determine imaging and analysis positions on optical images.
The implementation of an image processing method and GUI interface that ensures markers for imaging and analysis positions remain constant in size and color across changes in magnification, using a scanning electron microscope with an optical imaging device, electron source, detectors, and a processor to display these markers on an optical image of the sample.
Enables clear visualization and tracking of imaging and analysis positions regardless of magnification, facilitating precise operations and data interpretation in scanning electron microscopy.